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Fabrication of Uncooled Pyroelectric Infrared Detector using Surface M Micromachining Technology (표면 마이크로 가공기술을 이용한 비냉각 초전형 적외선 검출소자 제작)

  • 장철영;고성용;이석헌;김동진;김진섭;이재신;이정희;한석룡;이용현
    • Proceedings of the IEEK Conference
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    • 2000.06b
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    • pp.115-118
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    • 2000
  • Uncooled pyroelectric infrared detectors based on BST(B $a_{-x}$S $r_{x}$Ti $O_3$) thin films have been fabricated by RF magnetron sputtering and surface Micromachining technology. The detectors form BST thin film ferroelectric capacitors grown by RF magnetron sputtering on N/O/N(S $i_3$ $N_4$/ $SiO_2$/S $i_3$ $N_4$) membrane. The sputtered BST thin film exhibits highly c-axis oriented crystal structure that no poling treatment for sensing applications is required. This is an essential factor to increase the yield for realization of an infrared image sensor. surface-Micromachining technology is used to lower the thermal mass of the detector by giving maximum sensor efficiency Gold-black is evaporated on top of the sensing elements used the thermal evaporator. fabricated uncooled pyroelectric infrared detectors is highly output voltage at the low temperature(1$^{\circ}C$).).).

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XPS를 이용한 Cu/Polyimide와 Cu/TiN 계에 대한 연구

  • 이연승
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.169-169
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    • 2000
  • 최근 반도체 소자의 초고집적화 현상에 따라 기존의 Al-base 합금에 대한 한계에 달하면서 그에 대한 대체 물질로 Cu가 관심을 모으게 되었고 그럼으로써 Cu metallization을 위한 많은 연구가 진행되어 왔다. Cu는 Al-base 합금계보다 비저항이 낮고, 녹는점이 높으며, 또한 electromigration 특성이 뛰어난 것으로 알려져 있다. 공학적인 면에서 이미 이들 계에 대한 adhesion 및 전기적 특성에 대한 많은 연구가 있어왔지만, 이들 특성 변화에 대한 물리적 의미를 제공할 만한 기초 자료들이 부족한 상태이다. 본 연구에서는 부도체인 polyimide 박막과 diffusion barrier인 TiN 박막위에서의 Cu 박막성장에 따르는 interface chemical reaction의 변화를 XPS를 이용하여 관찰함으로서 이들 계에 있어서의 adhesion과의 관계를 조사하였다. 그리고 XPS를 이용한 modified surface accumulation method를 적용시켜 TiN diffusion barrier를 통한 Cu의 grain boundary diffusion 상수들을 측정하였다. Cu/TiN system의 경우에는 interface chemical reaction이 일어나지 않았지만 Cu/polymide system에 있어서는 boundary diffusivity는 특히 40$0^{\circ}C$에서 $650^{\circ}C$ 영역에서, Db=60$\times$10-11exp[-0.29/(kBT)]cm2/sec 이었다.

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On Reliability and Comparison of $J_{Rice}$-Resistance considering Optimal Strength Ratio and $J_{\delta}$-Resistance Curves converted from CTOD using Appropriate Strength chosen according to Strain Hardening Level (강도비를 적용한 Rice-저항곡선과 변형경화를 고려한 $J_{\delta}$-저항곡선과의 비교)

  • 장석기
    • Journal of Advanced Marine Engineering and Technology
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    • v.26 no.1
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    • pp.59-67
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    • 2002
  • The comparison of $J_{Rice}$-resistance considering a few strength ratio in Rice J-integral formula and $J_{\delta}$-resistance curves converted from experimental CTOD using appropriate strength chosen according to strain hardening level, n=10.6 (A533B steel) and n=8.1 (BS4360 steel) is carried out. The optimal dimensionless strength ratio like the factor of revision, (see full text)reflecting strain hardening level in Rice\`s experimental formula is found out and the reliability of appropriate reference strength chosen according to strain hardening level in different materials is investigated through doing that CTOD is transformed from $J_{\delta}$-integral using relationship between J-integral and CTOD. The results are as follows; 1) The optimal factor of revision is when m equals to 3 in (see full text) for Rice's and the above optimal factor of revision multiplies by coefficient, η in Rice's experimental formula instead of n=2, 2) and the pertinent reference strength for high strain hardening material like BS4360 steel is ultimate strength, $\sigma_{u}$ and for material like A533B steel is ultimate-flow strength, $\sigma_{u-f}$. The incompatible of the behavior of both experimental J-resistance curves using Rice's formula and CTOD-resistance curves for A533B and BS4360 steel by Gordon, et al., could be corrected using the optimal factor of revision in Rice\`s and the pertinent reference strength in J=$m_{j}$${\times}$$\sigma_{i}$${\times}$CTOD.

An experimental study on the characteristics of the swirl ratio distribution with an intake port geometry (흡기포트 형상에 따른 선회비 분포특성에 관한 실험적 연구)

  • Lee, Ji-Geun;Ju, Bong-Cheol;No, Byeong-Jun;Gang, Sin-Jae
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.21 no.6
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    • pp.725-734
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    • 1997
  • The effect of helical intake port geometry on in-cylinder swirl flow characteristics was studied. Two helical intake ports were selected to change swirl ratio, mean flow coefficient with the variation of valve lifts, valve eccentricity ratios and axial distance. The measurements were made by using an impulse swirl meter. The port B modified to increase the swirl ratio( $R_{s}$) had the tendency of the increased non-dimensional rig swirl ( $N_{r}$) distribution in comparison with that of the port A. And the $N_{r}$ distribution was remarkably improved at low valve lifts. The modification of the geometry to increase the swirl ratio ( $R_{s}$) in helical intake port resulted in the decrease of the mean flow coefficient ( $C_{f(mean)}$) regardless of valve eccentricity ratio ( $N_{y}$). And also non-dimensional rig swirl ( $N_{r}$) in the high valve lift affected the calculation of swirl ratio considerably.onsiderably.

Combustion Characteristics of Pinus rigida Plates Painted with Alkylenediaminoalkyl-Bis-Phosphonic Acid (Mn+) (알킬렌디아미노알킬-비스-포스폰산 금속염으로 처리된 리기다 소나무 시험편의 연소특성)

  • Jin, Eui;Chung, Yeong-Jin
    • Fire Science and Engineering
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    • v.27 no.6
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    • pp.70-76
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    • 2013
  • Four kinds of new piperazinomethyl-bis-phosphonic acid $M^{n+}$ ($PIPEABPM^{n+}$) were synthesized and their combustive properties of Pinus rigida plates treated with $PIPEABPM^{n+}$ were tested. Pinus rigida specimens were painted in three times with 15 wt% $PIPEABPM^{n+}$solutions at the room temperature. After drying specimen treated with chemicals, com-bustive properties were examined by the cone calorimeter (ISO 5660-1). As a result, the combustion-retardation proper-ties were increased by due to the treated $PIPEABPM^{n+}$ solutions in the virgin pinus rigida. Especially, the specimens treated with $PIPEABPM^{n+}$ showed both the lower peak heat release rate ($HRR_{peak}$) (162.02~145.36) s and total heat release rate (THRR) (73.0~67.4) $MJ/m^2$ than those of virgin piperazinomethyl-bis-phosphonic acid (PIPEABP)-plate. Compared with virgin PIPEABP-plate, the specimens treated with the $PIPEABPM^{n+}$ showed low combustive properties. However the specimens treated with $PIPEABPM^{n+}$ showed both the shorter time to ignition (TTI) (67~23) s and the time to flameout (Tf) (472~433) s than those of virgin PIPEABP-plate by increasing the thermal conductivity.

Combustive Properties of Pinus rigida Plates Painted with Alkylenediaminoalkyl-Bis-Phosphonic Acid Salts (Mn+) (알킬렌디아미노알킬-비스-포스폰산 금속염으로 처리된 리기다 소나무판의 연소성질)

  • Park, Myung-Ho;Chung, Yeong-Jin
    • Fire Science and Engineering
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    • v.28 no.6
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    • pp.28-34
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    • 2014
  • Two kinds of new piperazinomethyl-bis-phosphonic acid $M^{n+}$ ($PIPEABPM^{n+}$) were synthesized and their combustive properties of Pinus rigida plates treated with $PIPEABPM^{n+}$ were tested in comparison with the previously synthesized chemicals. Pinus rigida specimens were painted in three times with 15 wt% $PIPEABPM^{n+}$ solutions at the room temperature. After drying specimen treated with chemicals, combustive properties were examined by the cone calorimeter (ISO 5660-1). As a result, the combustion-retardation properties were partially increased by due to the treated $PIPEABPM^{n+}$ solutions in the virgin Pinus rigida. Especially, the specimens treated with $PIPEABPM^{n+}$ showed both the lower peak heat release rate ($HRR_{peak}$) (173.48~145.36) s and total heat release rate (THRR) (73.0~55.2) $MJ/m^2$ than those of virgin piperazinomethyl-bis-phosphonic acid (PIPEABP)-plate. Compared with virgin PIPEABP-plate, the specimens treated with the $PIPEABPM^{n+}$ showed low combustive properties. However the specimens treated with $PIPEABPM^{n+}$ showed both the shorter time to ignition (TTI) (58~18) s and the time to flameout (Tf) (564~456) s than those of virgin PIPEABP-plate by increasing the thermal conductivity.

Electric Characteristics and Modeling of Asymmetric n-MOSFETs for Improving Packing Density (집적도 향상을 위한 비대칭 n-MOSFET의 전기적 특성 및 모델링)

  • Gong, Dong-Uk;Lee, Jae-Seong;Nam, Gi-Hong;Lee, Yong-Hyeon
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.7
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    • pp.464-472
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    • 2001
  • Asymmetric n-MOSFET's for improving packing density have been fabricated with 0.35 ${\mu}{\textrm}{m}$ CMOS process. Electrical characteristics of asymmetric n-MOSFET show a lower saturation drain current and a higher linear resistance compared to those of symmetric devices. Substrate current of asymmetric MOSFET is lower than that of symmetric devices. Asymmetric n-MOSFET's have been modeled using a parasitic resistance associated with abnormally structured drain or source and a conventional n-MOSFET model. MEDICI simulation has been done for accuracy of this modeling. Simulated values of reverse as we11 as forward saturation drain current show good agreement with measured values for asymmetric device.

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Surface Crack Behavior and the Fatigue Life Prediction of Notched Specimens (표면균열의 거동과 피로수명예측에 관한 연구)

  • 서창민;이정주;정은화;박희범
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.12 no.5
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    • pp.1097-1103
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    • 1988
  • This paper deals with surface crack behavior and the fatigue life prediction of notched specimens using the relation between surface crack length, a, and the cycle ratio, $N/N_{f}$. From the $a-N\;/\;N_{f}$ curves, UC(the upper limit curve), LC(the lower limit curve) and MC(the middle limit curve) were assumed and utilized to predict the fatigue life and crack growth rate. The data computed from the three assumed curves were compared with the experimental data. It has been found that in the stable crack growth region ($N/N_{f}=0.3-0.8$) fatigue life can be predicted within 20% errors. Using the characteristics of $a-N\;/\;N_{f}$ curve, it is possible to predict the $da/dN-K_{max}$ curve, the $da/dN-{\Delta}K_{{\varepsilon}_t}$ curve, and the $S-N_{f}$ curve.

A Harmonic Analysis Technique of Nonlinear Circuit Using Duffing's Equation (Duffing방정식을 이용한 비선형회로의 고조파해석 기법)

  • 신중린;황현준;조기선
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.12 no.4
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    • pp.62-69
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    • 1998
  • The harmonics caused b th nonlinear operation of transmission equipments are not identified yet and have been seldom studied. Sources of harmonics in nonlinear circuit, especially caused by the nonlinear operation of transmission equipments, can be approximately modeled with Duffing's Equation which is often referred in nonlinear mechanical oscillation problem. In this study, a new analytic technique is proposed for the analysis of harmonics n nonlinear circuits using Duffing's Equation and compared with some conventional methods. Finally some case studies were performed to evaluate the performance of proposed method and conventional methods.

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Assessment of Characteristics and Field Applicability with TPA By-Product as Alternative External Carbon Source (대체 외부탄소원으로서의 TPA 생산부산물 특성 및 현장적용성 평가)

  • Jung, In-Chul;Jun, Sung-Gyu;Sung, Nak-Chang
    • Journal of Korean Society of Environmental Engineers
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    • v.28 no.5
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    • pp.480-486
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    • 2006
  • On account of exchanging main process from chemical precipitation for MLE(Modified Ludzark-Ettinger), an external carbon source was required for supplementation of carbon source shortage that was needed biological denitrification in the S sewage treatment plant(S-STP). In this study, NUR(nitrate uptake rate), OUR(oxygen uptake rate) test and a field application test was conducted for the applicability assessment of Terephtalic acid(TPA) by-product contained about 4.7% acetate as alternative external carbon source. As the results, TPA by-product shows more rapid acclimation than methanol, 8.24 mg ${NO_3}^--N/g$ VSS/hr specific denitrification rate, 3.70 g $COD_{Cr}/g\;NO_3$ C/N ratio and 99.4% readily biodegradable COD contents. In the results of field application, the nutrient removal efficiency was high and effluent T-N concentration is 8.2 mg/L. It is concluded that TPA by-product is the proper alternative external carbon source.