• 제목/요약/키워드: Run to Run Control

검색결과 912건 처리시간 0.028초

Adaptive DeadBand를 애용한 반도체공정 제어 (Research for Adaptive DeadBand Control in Semiconductor Manufacturing)

  • 김준석;고효헌;김성식
    • 대한안전경영과학회지
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    • 제7권5호
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    • pp.255-273
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    • 2005
  • Overlay parameter control of the semiconductor photolithography process is researched in this paper. Overlay parameters denote the error in superposing the current pattern to the pattern previously created. The reduction of the overlay deviation is one of the key factors in improving the quality of the semiconductor products. The semiconductor process is affected by numerous environment and equipment factors. Through process condition prediction and control, the overlay inaccuracy can be reduced. Generally, three types of process condition change exist; uncontrollable white noise, slowly changing drift, and abrupt condition shift. To effectively control the aforementioned process changes, control scheme using adaptive deadband is proposed. The suggested approach and existing control method are cross evaluated through simulation.

Tool-Setup Monitoring of High Speed Precision Machining Tool

  • Park, Kyoung-Taik;Shin, Young-Jae;Kang, Byung-Soo
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2004년도 ICCAS
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    • pp.956-959
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    • 2004
  • Recently the monitoring system of tool setting in high speed precision machining center is required for manufacturing products that have highly complex and small shape, high precision and high function. It is very important to reduce time to setup tool in order to improve the machining precision and the productivity and to protect the breakage of cutting tool as the shape of product is smaller and more complex. Generally, the combination of errors that geometrical clamping error of fixing tool at the spindle of machining tool and the asynchronized error of driving mechanism causes that the run-out of tool reaches to 3$^{\sim}$20 times of the thickness of cutting chip. And also the run-out is occurred by the misalignment between axis of tool shank and axis of spindle and spindle bearing in high speed rotation. Generally, high speed machining is considered when the rotating speed is more than 8,000 rpm. At that time, the life time of tool is reduced to about 50% and the roughness of machining surface is worse as the run-out is increased to 10 micron. The life time of tool could be increased by making monitoring of tool-setup easy, quick and precise in high speed machining tool. This means the consumption of tool is much more reduced. And also it reduces the manufacturing cost and increases the productivity by reducing the tool-setup time of operator. In this study, in order to establish the concept of tool-setup monitoring the measuring method of the geometrical error of tool system is studied when the spindle is stopped. And also the measuring method of run-out, dynamic error of tool system, is studied when the spindle is rotated in 8,000${\sim}$60,000 rpm. The dynamic phenomena of tool-setup are analyzed by implementing the monitoring system of rotating tool system and the non-contact measuring system of micro displacement in high speed.

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툴 체인지 방식 멀티 노즐 3D프린터의 설계 및 제작 (Design and Fabrication of Tool Change Multi-nozzle FDM 3D Printer)

  • 석익현;박종규
    • 한국기계가공학회지
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    • 제20권2호
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    • pp.38-44
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    • 2021
  • To cater to the transition from single-color to multicolor/multi-material printing, this paper proposes a cartridge-replacing type multi-nozzle Fused Depositon Modeling(FDM) three-dimensional (3D) printer. In the test printing run, tool change failure/wobble/layer shift occurred. It was confirmed that improper support was the cause of this tool change failure. As a solution, spline and electromagnetic cartridges were designed. Wobble was caused by machine vibration and the motor stepping out. To minimize wobble, an additional Z-axis was installed, and the four-point bed leveling method was used instead of the three-point bed leveling method. The occurrence of layer shift was ascribed to the eccentricity of the Z-axis lead screw. Therefore, slit coupler was replaced with an Oldham type. In addition to the mechanical supplementation, the control environment was integrated to prevent accidents and signal errors due to wire connections. Before the final test printing run, a rectifier circuit was added to the motor to secure precise control stability. The final test printing run confirmed that the wobble/layer shift phenomenon was minimized, and the maximum error between layers was reduced to 0.05.

비정규 모집단에 대한 일변량 및 다변량 누적합 관리도의 성능 분석 (Effects of Non-normality on the Performance of Univariate and Multivariate CUSUM Control Charts)

  • 장영순
    • 품질경영학회지
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    • 제34권4호
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    • pp.102-109
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    • 2006
  • This paper investigates the effects of non-normality on the performance of univariate and multivariate cumulative sum(CUSUM) control charts for monitoring the process mean. In-control and out-of-control average run lengths of the charts are examined for the univariate/multivariate lognormal and t distributions. The effects of the reference value and the correlation coefficient under the non-normal distributions are also studied. Simulation results show that the CUSUM charts with small reference values are robust to non-normality but those with moderate or large reference values are sensitive to non-normal data especially to process data from skewed distributions. The performance of the chart to detect mean shift of a process is not invariant to the direction of the shift for skewed distributions.

한국형 고속전철의 추진 및 제어 시스템 설계에 관한 연구 (A Study On Design of propulsion and control system for Korean High Speed Train)

  • 이원기;박광복
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2000년도 춘계학술대회 논문집
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    • pp.576-588
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    • 2000
  • The study was carried out about the design of the propulsion and the control systems for Korean High Speed Train. The propulsion system was studied to run the maximum operating speed of 350km/h, The capacity of the main equipment is decided for the train to run tile maximum operating speed of 350km/h with the configuration of 2 power cars, 4 motorized trailers and 14 intermediate trailers. The control system was studied to two parts the supply and the control of high and low voltages used at train, The performance study of control system would be continued to update through system analysis according to propulsion system developing.

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비선형 견실 확정제어를 이용한 하드디스크 드라이브의 트랙추종제 (Track-Following Control of a Hard Disk Drive Actuator Using Nonlinear Robust Deterministic Control)

  • 위병열;강철구
    • 제어로봇시스템학회논문지
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    • 제6권10호
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    • pp.881-887
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    • 2000
  • There are significant nonlinearities and uncertainties in hard disk drive actuators. In particular, pivot bearing nonlinearity and repeatable run-out make track-following control difficult as track density increases. In this paper, we design a robust track-following controller using a robust deterministic control scheme in which the pivot bearing nonlinearity and repeatable run-out are considered as uncertainties. Simulation study is conducted to evaluate the control performance of the proposed control scheme.

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위상제어와 주기 제어를 이용한 단상유도기의 속도 제어 (Speed control of single-phase induction motor using phase control and integral cycle control)

  • 김철진;이관용;조영래;최철용;백수현
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 추계학술대회 논문집 전기기기 및 에너지변환시스템부문
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    • pp.190-192
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    • 2003
  • Single phase induction motor is used widely in various electronic appliances by advantage that is simple structure and a low-cost. As high starting torque characteristic is mostly used capacitor run single phase induction motor. In this paper, it is applied that speed controller of Capacitor run single phase induction motor of digital way used general microprocessor, and phase control method used average voltage. Torque get non-linearity to domain of low speed. Unstable domain of low speed is applied of integral cycle control. so it is wide that Speed control domain. Also, PID controller is used to improve characteristic of fast response. The validity of proposed method is verified from simulation and experiment result

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The Effect of Estimated Control Limits

  • JaiWook Baik;TaiYon Won
    • Communications for Statistical Applications and Methods
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    • 제5권3호
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    • pp.645-657
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    • 1998
  • During the start-up of a process or in a job-shop environment conventional use of control charts may lead to erroneous results due to the limited number of subgroups used for the construction of control limits. This article considers the effect of using estimated control limits based on a limited number of subgroups. Especially we investigate the performance of $\overline{X}$ and R control charts when the data are independent, and X control chart when the data are serially correlated in terms of average run length(ARL) and standard deviation run length(SDRL) using simulation. It is found that the ARL and SDRL get larger as the number of subgroups used for the construction of the chart becomes smaller.

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A Control Chart for Gamma Distribution using Multiple Dependent State Sampling

  • Aslam, Muhammad;Arif, Osama-H.;Jun, Chi-Hyuck
    • Industrial Engineering and Management Systems
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    • 제16권1호
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    • pp.109-117
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    • 2017
  • In this article, a control chart based on multiple dependent (or deferred) state sampling for the gamma distributed quality characteristic is proposed using the gamma to normal transformation. The proposed control chart has two pairs of control limits, which can be determined by considering the in-control average run length (ARL). The shift in the scale parameter of a gamma distribution is considered and the out-of-control ARL is evaluated. The performance of the proposed chart has been shown for different levels of the parameters of the proposed control chart. It is also shown that the proposed chart is better than the Shewhart chart in terms of ARLs. A case study with a real data has been included for the practical usage of the proposed scheme.

Relative performance of group CUSUM charts

  • Choi, Sungwoon;Lee, Sanghoon
    • 한국경영과학회:학술대회논문집
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    • 대한산업공학회/한국경영과학회 1996년도 춘계공동학술대회논문집; 공군사관학교, 청주; 26-27 Apr. 1996
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    • pp.11-14
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    • 1996
  • Performance of the group cumulative sum(CUSUM) control scheme using multiple univariate CUSUM charts is more sensitive to the change of quality control(QC) characteristics than the control chart scheme based on the Hotelling statistics. We examine three group charts for multivariate normal data sets simulated with various correlation structures and shift directions in the mean vector. These group schemes apply the orginal measurement vectors, the scaled residual vectors from the regression of each variable on all others and the principal component vectors respectively to calculating the CUSUM statistics. They are also compared to the multivariate QC charts based on the Hotelling statistic by estimating average run lengths, coefficients of variation of run length and ranks in signaling order. On the basis of simulation results, we suggest a control chart scheme appropriate for specific quality control environment.

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