• Journal of Electrochemical Science and Technology
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• 제10권3호
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• pp.271-275
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• 2019

Anodic $TiO_2$ nanotubes were simultaneously grown and doped with $RuO_2$ by single-step anodization in a negatively-charged $RuO_4{^-}$ precursor. Subsequently, a high positive voltage was imposed on the nanotubes in an $F^-$-based electrolyte (a process referred to as potential shock), which led to the formation of a through-hole $RuO_2$-doped $TiO_2$ nanotube membrane without significant loss of the $RuO_2$ catalyst. XPS results confirmed that the doped Ru metal was converted into $RuO_2$ as the potential shock voltage increased. Further increases in the potential shock voltage led to the formation of $RuO_x/Ru$ in the $TiO_2$ nanotubes. All of our results clearly showed that a through-hole catalyst-doped $TiO_2$ nanotube membrane can be produced by a sequence consisting of single-step anodization and the potential shock process.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.863-865
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• 2001

In this study, RuO$_2$thin films were etched in inductively coupled $O_2$plasma. Etching characteristics of RuO$_2$thin films including etch rate and selectivity were evaluated as a function of rf power in $O_2$plasma and gas mixing ratio in $O_2$/Ar plasma. In $O_2$ plasma, the etch rate of RuO$_2$thin film increases as rf power increases. In $O_2$/Ar plasma, the etch rate of RuO$_2$thin film increases up to 10% Ar, but decrease with furthermore increasing Ar mixing ratio. The enhanced etch rate can be obtained with increasing rf power and small addition of Ar gas.

• 분석과학
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• 제26권1호
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• pp.42-50
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• 2013

이 논문은 센서 및 연료전지에 사용할 수 있는 $Pt-Ru@TiO_2-H$ 나노구조체촉매의 제조 및 전기화학적 촉매의 특성에 대한 것이다. 이 $Pt-Ru@TiO_2-H$ 나노구조체촉매는 주형제인 폴리스틸렌볼(PSB)을 제조하고, 이 주형제의 표면에 졸-겔 반응을 통해 $TiO_2$를 코팅한 후, $Pt^{4+}$와 $Ru^{3+}$의 환원에 의해 제조하였다. 제조된, $Pt-Ru@TiO_2-H$ 나노구조체촉매는 전자투과현미경(TEM), X-선 회절(XRD)와 원소분석에 의해 특성평가 하였고, $Pt-Ru@TiO_2-H$의 전기화학적 촉매특성은 에탄올, 메탄올, 도파민, 아스크로브 산, 프로말린과 글루코오즈의 산화-환원 능력에 의해 평가 하였다. 이 $Pt-Ru@TiO_2-H$ 나노구조체촉매는 바이오분자에 대해 전기화학적촉매 특성을 나타내어, 연료전지 전극 또는 비효소바이오센서에 사용 될 것으로 기대된다.

• 한국재료학회지
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• 제21권8호
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• pp.419-424
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• 2011

Pt nanoparticle catalysts incorporated on $RuO_2$ nanowire support were successfully synthesized and their electrochemical properties, such as methanol electro-oxidation and electrochemically active surface (EAS) area, were demonstrated for direct methanol fuel cells (DMFCs). After fabricating $RuO_2$ nanowire support via an electrospinning method, two different types of incorporated Pt nanoparticle electrocatalysts were prepared using a precipitation method via the reaction with $NaBH_4$ as a reducing agent. One electrocatalyst was 20 wt% Pt/$RuO_2$, and the other was 40 wt% Pt/$RuO_2$. The structural and electrochemical properties of the Pt nanoparticle electrocatalysts incorporated on electrospun $RuO_2$ nanowire support were investigated using a bright field transmission electron microscopy (bright field TEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and cyclic voltammetry. The bright field TEM, XRD, and XPS results indicate that Pt nanoparticle electrocatalysts with sizes of approximately 2-4 nm were well incorporated on the electrospun $RuO_2$ nanowire support with a diameter of approximately 50 nm. The cyclic voltammetry results showed that the Pt nanoparticle catalysts incorporated on the electrospun $RuO_2$ nanowire support give superior catalytic activity in the methanol electro-oxidation and a higher electrochemically active surface (EAS) area when compared with the electrospun Pt nanowire electrocatalysts without the $RuO_2$ nanowire support. Therefore, the Pt nanoparticle catalysts incorporated on the electrospun $RuO_2$ nanowire support could be a promising electrode for direct methanol fuel cells (DMFCs).

• Corrosion Science and Technology
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• 제2권5호
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• pp.238-242
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• 2003

The characteristics of Ru etching using $O_2/Cl_2$ plasmas were investigated by employing inductively coupled plasma (ICP) etcher. The changes of Ru etch rate, Ru to $SiO_2$ etch selectivity and Ru electrode etching slope with the gas flow ratio, bias power, total gas flow rate, and source power were scrutinized. A high etching slope (${\sim}86^{\circ}$) and a smooth surface after etching was attained using $O_2/Cl_2$ inductively coupled plasma.

• The Korean Journal of Ceramics
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• 제2권1호
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• pp.33-38
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• 1996

In thick film resistors, the characteristics of the frit and the reaction between glass frit and conductor material play an important role for their electrical properties. In this study, various glass frits in the system of $60RO{\cdot}20SiO_2$ $15B_2O_3{\cdot}5Al_2O_3$(RO=PbO, ZnO, CdO; mole%) were mixed with $RuO_2$ and coated on 96% alumina substrate. Only the glass frit containing PbO was reacted with $RuO_2$in$RuO_{2+}$-thick film resistor and produced the new crystalline phase of $Pb_2Ru_2O_{65}$. Their electrical resistivities strongly depend on the amount of $Pb_2Ru_2O_{65}$ crystalline phase obtained, which varied with firing temperature. The sheet resistivities of these resistors were varied from $10^3\; to\; 10^6\;{\Omega}/{\Box}$ depending on heat treatment, and the absolute value of TCR was decreased as the heat treatment temperature increaed. However, $RuO_2$ did not reacted with the glass frits containing ZnO nor CdO, and the resulting showed very high sheet resistivities.

• 한국세라믹학회지
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• 제34권10호
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• pp.1021-1026
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• 1997

RuO2 thin film has reasonably good conductivity and stiffness and it is thought to substitute for the cantilever beam made up of Pt and Si3N4 double layers in microactuators. Therefore, anisotopic Si etching was performed using RuO2 thin film as a mask layer in 25 wt. % TMAH water solution. In the etching temperature ranging from 6$0^{\circ}C$ to 75$^{\circ}C$, the etch rates of all the crystallographic directions increased linearly as the etching temperature increased. The etch rate ratio(selectivity) of [111]/[100] which varied from 0.08 to 0.14, was not sensitive to temperature. The activation energies for [110] direction, [100] direction and [111] direction were 0.50, 0.66 and 1.04eV, respectively. RuO2 cantilever beam with a clean surface was formed at the etching temperatures of 6$0^{\circ}C$ and $65^{\circ}C$. But the damages due to formation of pin holes on RuO2 surface were observed beyond 7$0^{\circ}C$. The tensile stress of RuO2 thin films caused the cantilever bending upward. As a result, it was demonstrated that the formation of conducting oxide RuO2 cantilever beam which can replace the role of an electrode and supporting layer could be possible by TMAH solution.

• 공업화학
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• 제31권1호
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• pp.108-114
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• 2020

본 연구에서는, Ru[1]/TiO₂ 촉매 제조 시 소성/환원 조건에 따른 NH₃-SCO (selective catalytic oxidation) 효율을 비교하였다. Ru[1]/TiO₂ red는 Ru[1]/TiO₂ cal에 비하여 NH₃ 전환율 및 NH₃의 N₂ 전환율이 우수하였다. Ru[1]/TiO₂ 촉매의 물리·화학적 특성은 BET, XRD, TEM, XPS, H₂-TPR 분석에 의해 확인되었으며, 활성금속의 분산도와 표면 흡착 산소종(O_β)의 비율에 영향을 미치는 것으로 나타났다.

• 공업화학
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• 제5권5호
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• pp.808-818
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• 1994

Ru/${\gamma}$-$Al_2O_3$와 Ru/$CeO_2$-${\gamma}$-$Al_2O_3$를 사용하여 Ru담지 촉매의 반응성과 열적노화현상에 미치는 Ce의 영향을 연구하였다. $^{129}Xe$-NMR과 수소흡착법을 사용하여 촉매특성을 검토하였으며, 모사 자동차 배기가스를 사용하여 과농, 양론 및 희박조건에서의 CO, HC 및 $NO_x$ 전환율을 측정하였다. 새촉매와 노화촉매 모두 Ru/$CeO_2$-${\gamma}$-$Al_2O_3$가 Ru/${\gamma}$-$Al_2O_3$보다 세 가지 오염물질에 대한 전환율이 높았다. $^{129}Xe$-NMR과 수소흡착에 의하면 Ce을 첨가하여도 열적노화현상을 억제할 수 없었다. 그러나 673K에서 열적노화시킨 경우 Ru/${\gamma}$-$Al_2O_3$의 반응성은 새촉매보다 작았으나 Ru/$CeO_2$-${\gamma}$-$Al_2O_3$의 반응성은 오히려 컸다. 이것은 열적 노화과정에서 Ru/Ce 사이의 계면에 아마도 새로운 활성점이 만들어지기 때문이 아닌가 사료된다. 또한, Ru금속에 미치는 Ce같은 양이온 효과를 좀더 정량적으로 구하기 위하여 Ca, Ba, La, Y, Ce 등의 양이온을 교환한 Y-제올라이트에 Ru을 담지시킨 모델 촉매의 열적노화 정도를 $^{129}Xe$-NMR과 EXAFS로 연구한 결과 이들 양이온이 Ru의 열적 노화성에 거의 영향을 미치지 못하는 것을 관찰하였다.

• 한국수소및신에너지학회논문집
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• 제21권5호
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• pp.390-397
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• 2010

0.5wt% Ru/$\alpha-Al_2O_3$ catalysts are prepared by deposition-precipitation method for the preferential CO oxidation In order to investigate the effect of pH on the Ru dispersion and particle size, the pH of precursor solution is adjusted to between 5.5 and 9.5. 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared at the pH of 6.5 has high Ru dispersion of 17.9% and small particle size of 7.7nm. In addition, 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared at the pH 6.5 is easily reduced at low temperatures below $150^{\circ}C$ due to high dispersion of $RuO_2$ particle and shows high CO conversion over 90% in the wide temperature range between $100^{\circ}C$ and $160^{\circ}C$. Moreover, the deposition-precipitation is a feasible method to improve the Ru dispersion as compared to the impregnation method. The 0.5wt% Ru/$\alpha-Al_2O_3$ catalyst prepared by deposition-precipitation exhibits higher CO conversion than 0.5wt% Ru/$\alpha-Al_2O_3$ catalysts prepared by impregnation due to higher metal dispersion and better reducibility at low temperature.