• 제목/요약/키워드: Roughness profile

검색결과 287건 처리시간 0.031초

Study on sputtering yield of tungsten with different particle sizes: Surface roughness dependence

  • Kwon, Tae Hyun;Park, Sangjune;Ha, Jeong Min;Youn, Young-Sang
    • Nuclear Engineering and Technology
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    • 제53권6호
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    • pp.1939-1941
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    • 2021
  • The sputtering yield of tungsten pellets composed of different particle sizes of <1, 12, 44-74, and 149-297 ㎛ was systematically investigated by bombardment with Ar+ ions accelerated at 2.0 keV in an ultra-high vacuum chamber. We found that the tungsten sample fabricated from larger particles had a higher surface roughness, based on the surface profile results. Using the data of the surface roughness for the four types of tungsten pellets, we confirmed that the sputtering yield for a tungsten pellet with the highest surface roughness was 7 times lower than that of the lowest surface roughness. This could be due to the redeposition of sputtered tungsten particles onto neighboring asperities.

연마성능 제어를 위한 연마패드표면 해석과 개선 (Polishing Pad Analysis and Improvement to Control Performance)

  • 박재홍;키노시타마사하루;요시다 코이치;박기현;정해도
    • 한국전기전자재료학회논문지
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    • 제20권10호
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    • pp.839-845
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    • 2007
  • In this paper, a polishing pad has been analyzed in detail, to understand surface phenomena of polishing process. The polishing pad plays a key role in polishing process and is one of the important layer in polishing process, because it is a reaction layer of polishing[1]. Pad surface physical property is also ruled by pad profile. The profile and roughness of pad is controlled by different types of conditioning tool. Conditioning tool add mechanical force to pad, and make some roughness and profile. Formed pad surface will affect on polishing performance such as RR (Removal Rate) and uniformity in CMP Pad surface condition is changed by conditioning tool and dummy run and is stable at final. And this research, we want to reduce break-in and dummy polishing process by analysis of pad surface and artificial machining to make stable pad surface. The surface treatment or machining enables to control the surface of polishing pad. Therefore, this research intends to verify the effect of the buffing process on pad surface through analysis of the removal rate, friction force and temperature. In this research, urethane polishing pad which is named IC pad(Nitta-Haas Inc.) and has micro pore structure, is studied because, this type of pad is most conventional type.

단기관측에 의한 월령 연안지역 풍력에너지 잠재량 평가 (Assessment of Wind Energy Potentiality in Wolryong using Short-term Observation)

  • 정태윤;임희창
    • 신재생에너지
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    • 제5권4호
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    • pp.11-18
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    • 2009
  • Wind energy resources are recently considered as an important power generation alternative in the future. The fact that the investment of wind turbine installation continues to increase has motivated a need to develop more widely applicable methodologies for evaluating the actual benefits of adding wind turbines to conventional generating systems. This study is aiming to estimate the future wind resources with various estimation methods. The wind power is calculated at the hub height 75m of 800KW and 1,500KW wind turbines in Wolryong site, Jeju island, South Korea. Three equations - logarithmic, profile, and power law methods are applied for the accurate prediction of wind profile. In addition, yearly wind power can be calculated by using Weibull & Rayleigh distribution. It is found that predicted wind speed is highly affected by friction velocity, atmospheric stability, and averaged roughness length. It is concluded that Rayleigh distribution provides greater power generation than the Weibull distribution, especially for low wind-speed condition.

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수정 분할자법을 이용한 절리 거칠기 계수(JRC)의 정량화 (Estimation of Joint Roughness Coefficient(JRC) using Modified Divider Method)

  • 장현식;장보안;김열
    • 지질공학
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    • 제15권3호
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    • pp.269-280
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    • 2005
  • Barton and Choubey(1977)가 제안한 표준 거 칠기 단면을 0.1mm 간격으로 수치화한 후 수정 분할자법을 이용하여 분할자 길이에 따른 단면의 길이를 측정하였다. 분할자 길이에 따른 단면의 길이를 log-log 그래프에 도시 한 후 직선회기 분석 을 통하여 표준 거 칠기 단면의 프랙탈 차원과 절편을 구하고, JRC와의 관계를 분석하였다. 정확한 프랙탈 차원을 계산할 수 있는 분할자의 길이 범위인 교차거리는 $0.3\sim2.4mm$ 내외이며, JRC는 프랙탈 차원보다는 절편과 더 높은 상관도를 보였다. 그러나 프랙탈 차원과 절편을 곱하였을 때 가장 좋은 상관도를 보였으며, 위의 결과를 이용하여 프랙탈 차원과 절편을 이 용한 새로운 IRC 추정식 을 도출하였다. 23개의 자연 암석 절리의 단면을 수치화하여 $Z_2$ 파라미터를 이용한 Tse and Cruden (1979) 식과 새로운 JRC 관계식으로 각 단면의 JRC를 계산하고 이를 비교하였다. 비교 결과 두 관계식으로 추정된 JRC는 매우 유사하여, 본 연구에 서 도출된 새로운 관계식은 IRC를 추정하는데 매우 유용할 것으로 판단된다.

원통 축 방향의 표면거칠기 측정을 위한 시료의 자세 보정 (Orientation Correction of a Cylinder for Surface-Profile Measurement)

  • 조남규
    • 한국생산제조학회지
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    • 제5권4호
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    • pp.108-120
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    • 1996
  • A new technique and theory are proposed which correct orientation of a cylinder to perform a reliable measurement of the surface profile. We analyze characteristics of machined surfaces, e.g., ground, lapped and turned surfaces. Based upon the results. the optimum correction technique is derived by the statistical method. To verify the techinques, measurements are carried out by using the contact stylus profilometer on a controllable table. The measurement shows that surface information of cylinders can be acquired with high accuracy.

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표면 거칠기를 고려한 볼 조인트 접촉의 미세 탄성유체윤활 해석 (Micro-EHL Analysis of a Ball Joint Contact with Surface Roughness)

  • 김태종
    • Tribology and Lubricants
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    • 제19권3호
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    • pp.123-132
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    • 2003
  • The effect of surface texture on elastohydrodynamic lubrication (EHL) point contact of a ball Joint mechanism in small reciprocating compressors is studied numerically by using multigrid method. Pressure and film thickness profiles have been calculated for surface roughness with waviness of different orientations and transverse ridge and dent at minimum and maximum Hoes M parameter conditions. The influence of the amplitude and the wavelength of the surface roughness was also studied. Results show that the oblique waviness with orientation angle of 30$^{\circ}$generates the smallest minimum film thickness as compared with those of longitudinal, transverse, and other oblique roughness. The influence of transverse waviness on the minimum film thickness is smaller than for the longitudinal waviness case.

표면 거칠기 정도가 접촉면 전단력에 미치는 영향 (The Influence of Surface Roughness on Interface Strength)

  • 이석원
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 1999년도 가을 학술발표회 논문집
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    • pp.255-262
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    • 1999
  • This paper summarizes the results of a study which uses the recently developed Optical Profile Microscopy technique (Dove and Frost, 1996) as the basis for investigating the role of geomembrane surface roughness on the shear strength of goomembrane/geotextile interfaces. The results show that interface friction can be quantitatively related to the surface roughness of the geomembrane. The peak and residual interface strengths increase dramatically through the use of textured geomembranes as opposed to smooth geomembranes. For the smooth geomembranes, the sliding of the geotextile is the main shear mechanism. For the textured geomembranes, the peak interface strength is mainly mobilized through the micro-texture of the geomembrane, however, the residual interface strength is primarily attributed to macro scale surface roughness which pulls out and breaks the filaments from the geotextile. The results of this study can be extended to the other interfaces such as joints in rock mass, and also can be used to provide a quantitative framework that can lead to a significantly improved basis for the selection and design of geotextiles and geomembranes in direct contact.

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Determination of Equivalent Roughness for Estimating Flow Resistance in Stabled Gravel-Bed River: I. Theory and Development of the Model

  • Park, Sang-Woo;Lee, Sin-Jae;Jang, Suk-Hwan
    • 한국환경과학회지
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    • 제17권11호
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    • pp.1203-1210
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    • 2008
  • Flow resistance in a natural stream is caused by complex factors, such as the grains on the bed, vegetation, and bed-form, reach profile. Flow resistance in a generally stable gravel bed stream is due to protrudent grains from bed. Therefore, the flow resistance can be calculated by equivalent roughness in gravel bed stream, but estimation of equivalent roughness is difficult because nonuniform size and irregular arrangement of distributed grain on natural stream bed. In previous study, equivalent roughness is empirically estimated using characteristic grain size. However, application of empirical equation have uncertainty in stream that stream bed characteristic differs. In this study, we developed a model using an analytical method considering grain diameter distribution characteristics of grains on the bed and also taking into account flow resistance acting on each grain. Also, the model consider the protrusion height of grain.

냉간압연 가공시 압연유와 조도변화에 관한 연구 (A Study on Coolant and Roughness Variation in the Cold Rolling)

  • 전언찬;김순경
    • 대한기계학회논문집
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    • 제19권5호
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    • pp.1149-1157
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    • 1995
  • The research for variation of coolant film thickness and separating force has been investigated following the examination for friction profile of work roll and roughness change of strip surface in rolling mill producting actual commercial products. The obtained results are as follows ; (1) Coolant film thickness in cold rolling has been increased relative to the circumferential velocity of work roll, and formation of coolant films has decreased with the smaller diameter of work roll. (2) Separating force is related to the formation of coolant film, and large separating force is needed to the formation of coolant film but it is constant after formation of appropriate film. (3) Wear and roughness alleviation of work roll is larger in bottom-roll than in top-roll on cold surface is larger in the direction of width than in roll direction, and changes of roughness and strip surface hardness rarely occurred after 3 passes.