• 제목/요약/키워드: Roughness pattern

검색결과 203건 처리시간 0.037초

PZT 박막의 CMP 공정중 표면 조성 거동 (Behavior of Surface Compositions in CMP Process for PZT Thin Fims)

  • 고필주;김남훈;이우선
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1448-1449
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    • 2006
  • Pb(Zr,Ti)$O_3$ is one of the most attractive ferroelectric materials for realizing the FeRAM due to its higher remanant polarization and the ability to withstand higher coercive fields. Generally, the ferroelectric materials were patterned by a plasma etching process for high-density FeRAM. The applicable possibility of CMP process to pattern Pb(Zr,Ti)$O_3$ instead of plasma etching process was investigated in our previous study for improvement of an angled sidewall which prevents the densification of ferroelectric memory and is apt to receive the plasma damage. Our previous study showed that good removal rate with the excellent surface roughness compared to plasma etching process were obtained by CMP process for the patterning of Pb(Zr,Ti)$O_3$. The suitable selectivity to TEOS without any damage to the structural property of Pb(Zr,Ti)$O_3$ was also guaranteed. In this study, the removal mechanism of $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ coated by sol-gel method was investigated. Surface analysis of polished specimens at the best and worst conditions was carried out by XPS.

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Indigo Dyeing of Mongolian Cashmere Fiber

  • Narantuya, Lkhagva;Ahn, Cheunsoon
    • 한국의류학회지
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    • 제40권6호
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    • pp.979-993
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    • 2016
  • Mongolian cashmere sliver, yarn, and fabric were dyed and bleached with a solution of ascorbic acid and iron sulfate at $70^{\circ}C$, and then dyed using natural indigo powder at the dyeing temperature of $25^{\circ}C$ to $90^{\circ}C$ for 15-90 minutes using the IR dyeing machine. K/S values of bleached samples decreased significantly when dyed above $70^{\circ}C$ dyeing temperature for a longer dyeing time. Bleached cashmere fabric showed a greater loss of tensile strength than unbleached cashmere fabric, even when the samples were dyed at $40^{\circ}C$. With a higher dyeing temperature, yarns lost fullness, became thinner, and the pores between the yarns were enlarged. The x-ray diffraction pattern exhibited a prominent increase in crystallinity and the protein assay indicated a loss of protein in the bleached sample dyed at $90^{\circ}C$. Thinning of scales, fractured or raised tip of scales, and roughness on the entire surface of the fiber were also observed. The results indicate that bleaching and high temperature dyeing cause a serious damage to cashmere fibers. In addition, bleaching and high temperature dyeing cause significant fiber damage. Natural indigo dyeing using low temperature dyeing is recommended to produce blue color cashmere.

표면 평탄도가 소프트리소법에 의한 미세 패턴 형성에 미치는 영향 (Effect of Surface Roughness on the Formation of Micro-Patterns by Soft Lithography)

  • 김경호;최균;한윤수
    • 한국전기전자재료학회논문지
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    • 제27권12호
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    • pp.871-876
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    • 2014
  • Efficiency of crystalline Si solar cell can be maximized as minimizing optical loss through antireflection texturing with inverted pyramids. Even if cost-competitive, soft lithography can be employed instead of photolithography for the purpose, some limitations still remain to apply the soft lithography directly to as-received solar grade wafer with a bunch of micro trenches on surface. Therefore, it is needed to develop a low-cost, effective planarization process and evaluate its output to be applicable to patterning process with PDMS stamp. In this study new surface planarization process is proposed and the change of micro scale trenches on the surface as a function of etching time is observed. Also, the effect of trenches on pattern quality by soft lithography is investigated using FEM structural analysis. In conclusion it is clear that the geometry and shape of trenches would be basic considerations for soft lithography application to low quality wafer.

CFD Simulation of NACA 2412 airfoil with new cavity shapes

  • Merryisha, Samuel;Rajendran, Parvathy;Khan, Sher Afghan
    • Advances in aircraft and spacecraft science
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    • 제9권2호
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    • pp.131-148
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    • 2022
  • The paper presents the surface-modified NACA 2412 airfoil performance with variable cavity characteristics such as size, shape and orientation, by numerically investigated with the pre-validation study. The study attempts to improve the airfoil aerodynamic performance at 30 m/s with a variable angle of attack (AOA) ranging from 0° to 20° under Reynolds number (Re) 4.4×105. Through passive surface control techniques, a boundary layer control strategy has been enhanced to improve flow performance. An intense background survey has been carried out over the modifier orientation, shape, and numbers to differentiate the sub-critical and post-critical flow regimes. The wall-bounded flows along with its governing equations are investigated using Reynolds Average Navier Strokes (RANS) solver coupled with one-equational transport Spalart Allmaras model. It was observed that the aerodynamic efficiency of cavity airfoil had been improved by enhancing maximum lift to drag ratio ((l/d) max) with delayed flow separation by keeping the flow attached beyond 0.25C even at a higher angle of attack. Detailed investigation on the cavity distribution pattern reveals that cavity depth and width are essential in degrading the early flow separation characteristics. In this study, overall general performance comparison, all the cavity airfoil models have delayed stalling compared to the original airfoil.

나노스케일 워터젯 가공에 대한 분자시뮬레이션 연구 (Molecular Simulation of Nano-Scale Waterjet Machining)

  • 이상훈;김현준;김태욱
    • Tribology and Lubricants
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    • 제39권5호
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    • pp.216-219
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    • 2023
  • This study employs molecular dynamics simulations to investigate the material behavior of workpieces in waterjet machining processes. To gain fundamental insights into waterjet machining, simulations were conducted using pure water, excluding abrasive particles. The simulation model comprised thousands of water molecules interacting with a single crystal metal workpiece. Water molecule clusters were imparted with various velocities to initiate collisions with the metal workpiece. The material behavior of the metal surface was analyzed with respect to the applied velocity conditions, considering the intricate interplay between water molecules and the workpiece at the atomic scale. The results demonstrated that the machining of the metal workpiece occurred only when water molecules were endowed with velocities above a certain threshold. In cases where energy was insufficient, the metal workpiece exhibited a slight increase in surface roughness due to mild plastic deformation, without undergoing substantial material removal. When machining occurred, the ejection of material revealed a 3-fold symmetric pattern, confirming that material removal in waterjet machining of the metal workpiece is primarily driven by plastic deformation-induced material ejection. This research provides crucial insights into the mechanisms underlying waterjet machining and enhances our understanding of material behavior during the process. The findings can be valuable in optimizing waterjet machining techniques.

마식에 의한 기반암면의 표면 변화에 대한 실험 연구 (3 Dimensional Changes of Bedrock Surface with Physical Modelling of Abrasion)

  • 김종연
    • 대한지리학회지
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    • 제42권4호
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    • pp.506-525
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    • 2007
  • 기반암 하상의 침식현상은 지형발달의 1차적인 통제 요소이다. 그러나 기반암 침식과정에 대한 연구는 오랜 시간 동안 지체되어 왔다. 이러한 지체는 실험하도에서의 결과를 기반암 하천에 적용시키는데 있어서의 스케일링 문제 등에 기인한다. 기반암 하상에 대한 침식 통제 변수에 대한 조사의 일환으로 마식과정에 대한 물리적 실험에서의 기반암면의 변화 과정이 연구되었다. 18개의 기반암 시료들이 다양한 퇴적물 양과 퇴적물 입자 크기에 의해서 마식되었다. 3차원적인 기반암면의 변화는 고해상도 3차원 스캐너를 이용하여 기록되었다. 기반암 시료의 표면 변화를 파악하기 위하여 다양한 방식을 사용하였으나, 거칠기의 변화와 기반암면의 전반적인 변화를 단일한 방식으로 나타낼 수 있는 방식은 파악되지 않았다. 음영기복도와 기복도에 의하면 마식은 횡단면 곡선상의 중심부와 종단면 곡선상의 상부와 하부 말단에서 시작되어 성장하는 것이 일반적인 경향으로 나타났다. 표면의 전반적인 형상에 있어서는 앞서 지적한 마식의 공간적 분포의 영향으로 종단면에 있어서는 평탄화가 나타났다. 횡단면의 경우 기울기가 증가하는 것이 우세하였다. 표면의 거칠기 정도는 일반적인 경향을 발견하기 어려웠으며, 일반적으로 추정되어진 마식에 따른 거칠기 감소가 나타나지는 않았으며, 암석에 따라서 서로 다른 결과가 나타났다. 주사전자현미경(SEM)을 이용한 분석에 의하면 기반암의 일반적인 특성보다는 조암 광물의 미세구조(microstructure)가 마식의 공간적인 유형과 거칠기 변화에 큰 영향을 미치는 것으로 나타났다.

질소이온 빔 보조 마그네트론 스퍼터로 증착 된 AlN 박막의 물성연구 (A Study on the Properties of AlN Films Deposited with Nitrogen Ion Beam Assisted RF Magnetron Sputtering)

  • 허성보;이학민;정철우;최대한;이병훈;김민규;유용주;김대일
    • 열처리공학회지
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    • 제24권2호
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    • pp.77-81
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    • 2011
  • Aluminum nitride (AlN) thin films were prepared by using nitrogen ion beam assisted reactive radio frequency (RF) magnetron sputtering on the glass substrates without intentional substrate heating. After deposition, the effect of nitrogen ion beam energy on the structural and optical properties of AlN films were investigated by x-ray diffraction (XRD), atomic force microscope (AFM) and UV-Vis. spectrophotometer, respectively. AlN films deposited with $N^+$ ion irradiation at 100 eV show the higher (002) peak intensity in XRD pattern than other films. It means that $N^+$ ion energy of 100 eV is the favorable condition for low temperature crystallization. AFM images also show that surface average roughness is increased from 1.5 to 9.6 nm with $N^+$ ion energy in this study. In an optical observation, AlN films which deposited by $N^+$ ion beam energy of 100 eV show the higher transmittance than that of the films prepared with the other $N^+$ ion beam conditions.

인쇄회로기판의 패턴 검사용 조명장치 설계 (Design of a lighting system for PCB visual pattern inspection)

  • 나현찬;노병옥;유영기;조형석
    • 대한기계학회논문집A
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    • 제21권1호
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    • pp.1-11
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    • 1997
  • Austomated visual inspection(AVI) capability has become an important key component in the automated manufacturing system. In such a visual inspection system an intensity(or color) image of a scene is quickly affected by optical property of objects, condition and roughness of surface, lens and filters, image sensor property and lighting system. In particular, the lighting system disign is the most important factor, since it affects overall performance of the visual system. For fast and cheap automated visual inspection system it is important to obtain the good image quality which results from careful attention to the design of the lighting system. In this paper, the lighting subsystem of AVI system is analysed for the inspection of printed circuit board(PCB) patterns. The spectral reflectance of materials, which are composed of PCB, is measured for choosing the light source. The reflection property is theoretically obtained by a reflection model and also obtained by experiments which measure intensity with varying the viewing direction of image sensor and the lighting direction of illuminator. The illumination uniformity of a ring-type illuminator. The lighting system is designed based upon the experimental results and theoretial analysis.

잉크젯 프린팅 공정을 이용한 3D Integration 집적 기술의 무소결 고충진 유전체막 제조 (Inkjet Printing Process to Fabricate Non-sintered Low Loss Density for 3D Integration Technology)

  • Jang, Hun-Woo;Kim, Ji-Hoon;Koo, Eun-Hae;Kim, Hyo-Tae;Yoon, Young-Joon;Hwang, Hae-Jin;Kim, Jong-Hee
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.192-192
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    • 2009
  • We have successfully demonstrated the inkjet printing process to fabricate $Al_2O_3$ thick films without a high temperature sintering process. A single solvent system had a coffee ring pattern after printing of $Al_2O_3$ dot, line and area. In order to fabricate the smooth surface of $Al_2O_3$ thick film, we have introduced a co-solvent system which has nano-sized $Al_2O_3$ powders in the mixture of Ethylene glycol monomethyl ester and Di propylene glycol methyl ether. This co-solvent system approached a uniform and dense deposition of $Al_2O_3$ powders on the substrate. The packing density of inkjet-printed $Al_2O_3$ films is more than 70% which is very high compared to the value obtained from the films synthesized by other conventional methods such as casting processes. The characterization of the inkjet-printed $Al_2O_3$ films has been implemented to investigate its thickness and roughness. Also the dielectric loss of the films has been measured to understand the feasibility of its application to 3D integration package substrate.

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SAR/VIR FCC에서 삼각 트레이닝 도구에 의한 분류정확도 분포추세 평가: 태국의 송클라 호수 유역을 사례로 (Evaluating Distribution Trends of Classification Accuracy by Triangular Training Operator in SAR/VIR FCC : A Case Study of Songkhla Lake Basin in Thailand)

  • Jung Sup Um
    • 대한지리학회지
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    • 제38권3호
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    • pp.375-388
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    • 2003
  • SAR와 VIR 영상을 디지털 환경에서 통합하여 상승효과를 도출하려는 응용은 아직까지도 탐색적인 연구수준에 머물러 있다. 본 연구는 SAR와 VIR을 통합한 영상에서 삼각 트레이닝 도구가 개별 클라스의 분류 정확도의 분포추세에 미치는 영향을 평가하는 데 주안점을 두고 있다. SAR 데이터와 VIR 데이터가 단일 시너지 영상을 제작하기 위해 통합되었다. 분류정확도의 향상과정이 SAR, VIR, SAR/VIR 통합영상에서 단계적으로 확실하게 도출되었다. 아울러 개별 클라스의 분류정확도가 FCC에 의거한 트레이닝 샘플의 신호(signature)값과 밀접한 상관성을 가지고 분포되는 것이 확인되었다. 한 예로 FCC에서 SAR 영상 신호(signature)의 기여 때문에 구름으로 덮힌 지역과 굴곡을 지닌 지상물체가 (VIR에서는 사실상 분류가 불가능하였던) 상당한 공간 정확도를 가지고 분류되었다. 본 연구가 SAR/VIR을 통합한 응용분야에서 분류정확도의 분포추세에 대한 정량화되고 객관적인 근거가 부재하여 직면하였던 한계를 극복할 수 있는 계기가 되어 향후 SAT/VIR 원격탐사에서 개별 클라스에 대해 확보할 수 있는 분류 정확도에 대한 중요한 참고자료가 될 수 있을 것으로 사료된다.