• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.38-39
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• 2005

We have investigated the effect of the pad surface characteristics such as roughness, groove density and wear of pad on within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). We found that WIWNU increases as pad surface roughness($R_{pk}$; Reduced peak height) increases in an early stage of polishing. But after polishing time goes to a certain extent, WIWNU decreases as uniformity of pad surface roughness. Also, groove of pad has effect on relative pad stiffness although original mechanical properties of pad are unchanged by grooving. WIWNU decreases as relative pad stiffness decreases. In addition, conditioning process causes non-uniform wear of pad during in CMP. The profile of pad wear has a significant effect on WIWNU.

• 반도체디스플레이기술학회지
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• 제12권4호
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• pp.9-13
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• 2013

Lapping is a very complicated and random process resulting from the variation of abrasive grains in its sizes and shapes and from the numerous factors having an effect on the process quality. This paper presents a study of a $2^4$ full factorial experimental design and analysis to optimize surface quality in lapping operation. The optimization of the factors to obtain minimum surface roughness was carried out by incorporating effect plots, main effect plots, interaction plots, analysis of variance(ANOVA), surface plots, and contour plots. The statistical design experiments, designed to reduce the total number of experiments required, indicated that, within the selected conditions, all the parameters influenced at a significance level of 5%. In addition, some of the possible interactions between these parameters also influenced the lapping process, especially those that were of third order. A regression model was suggested and fitted the experimental data very well.

• 소성∙가공
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• 제26권2호
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• pp.108-114
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• 2017

Titanium based implants are known to improve their osseointegration by controlling surface roughness from nanometers to micrometers. Implants continuously and/or repeatedly receive irregular loads in the human body, and require a deeper understanding of the tensile and fatigue properties that can determine the fracture characteristics of the materials. In this study, the plastic deformation behavior which depends on the surface geometry of the materials during tensile tests was analyzed using the finite element method. As a result, the tensile properties were greatly decreased with increasing the sharpness of the surface. On the other hand, the average roughness had no significant effect on tensile properties. This investigation shed a light on developing titanium implants with improved osseointegration by surface treatments.

• 대한기계학회논문집B
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• 제24권1호
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• pp.143-151
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• 2000

In order to clarify the effect of tube orientation on pool boiling heat transfer, the experiments were carried out for the saturated pool boiling of water at atmospheric pressure. Through the tests a series of data sets for heat flux versus wall superheat has been obtained using various combinations of tube diameters (D=9.7 $\~$25.4mm)， surface roughness ($\varepsilon$=15.1$\~$60.9nm)， and tube orientations (horizontal and vertical). ηei experimental results show that the slope of heat flux versus wall superheat becomes smaller than that of the horizontal tube as the surface roughness decreases from $\varepsilon$=60.9 to $\varepsilon$=15.1nm. Such that， two curves for the horizontal and vertical tubes cross each other in accordance with surface roughness and the crossing point can be suggested as q" = ‘-4.768+1.334$\varepsilon$+0.055${\varepsilon}^2$.

• 한국정밀공학회지
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• 제21권8호
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• pp.27-33
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• 2004

The ultra-precision cutting is a key technique for the manufacture of optical components such as aluminium mirrors, electroless nickel mirror, plastic mirror in a variety of advanced science and technology applications. The paper presents experimental results of ultra-precision diamond fuming of electroless nickel materials. In general, the cutting condition such as feed rate and depth of rut, have effect on the surface roughness in ultra-precision diamond turning. To obtain an optimal cutting condition, we studied the effect of the cutting speed. the tool length, the tool nose radius, the feed rate and depth of cut on the surface roughness. So, the relationship of the surface roughness and cutting condition has been clarified. From the experimental results, the machined surface roughnesses were obtained less than 1nm rms.

• 한국기계가공학회지
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• 제10권3호
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• pp.87-93
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• 2011

CNC lathe machining has been widely used for parts machining of vehicles, aircraft, ships, electronics, etc. because cost savings for shortening processing time and increasing productivity are great. In this study, the purpose is to investigate the effect of cooling methods such as oil mist, water-soluble cutting oils on the workpiece surface roughness with the cutting speed, cutting depth, tool nose radius and feed rate of CNC lathe machine as a parameter in the cutting process of the aluminum alloy 2024 which is used a lot recently on aircraft parts. It is found that oil mist is coolant and water-soluble cooled by cutting the experimental conditions, cutting speed and cutting depth without effecting the surface roughness value was constant.

• Interaction and multiscale mechanics
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• 제3권4호
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• pp.299-308
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• 2010

The indirect approach for measuring the bridge frequencies from the dynamic responses of a passing vehicle is a highly potential method. In this study, the effect of road surface roughness on such an approach is studied through finite element simulations. A two-dimensional mathematical model with the vehicle simulated as a moving sprung mass and the bridge as a simply-supported beam is adopted. The dynamic responses of the passing vehicle are solved by the finite element method along with the Newmark ${\beta}$ method. Through the numerical examples studied, it is shown that the presence of surface roughness may have negative consequence on the extraction of bridge frequencies from the test vehicle. However, such a shortcoming can be overcome either by introducing multiple moving vehicles on the bridge, besides the test vehicle, or by raising the moving speed of the accompanying vehicles.

• 대한기계학회논문집A
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• 제29권4호
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• pp.614-623
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• 2005

This study aims to perform the characteristic evaluation of surface grinding for the STD11 material with experimental and analytic techniques based on the response surface model. The grinding force acting on the workpiece and the ground surface roughness were measured according to the change of grain size, table speed and depth of cut. The effect of spark-out on the grinding force and the surface roughness was also characterized. The frictional coefficient between workpiece and grinding wheel could be determined by the analysis of spark-out effect. From the experimental data, the second-order response surface models were developed to predict the grinding force and the surface roughness. Validation of the developed model was examined.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.45-48
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• 2001

SL(Stereolithogrphy) part is made by piling up thin layers which causes the stair stepping effect at the surface of SL parts. This effect causes excessive surface roughness and requires additional postprocess finishing such as abrasive basting which is detrimental to part geometry and time consuming. Hence paraffin coating and grinding postprocess is proposed to raise the surface quality of SL part. The paraffin which has suitable properties for the proposed postprocess is coated all over the part surface. By grinding the thin layer of coated on the SL part only, the surface roughness can be improved without any damage on the part. From the experimental result, It is verified as very practical for die casting with silicon rubber mold.

• 산업기술연구
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• 제12권
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• pp.15-23
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• 1992

This research is to investigate the effect of base roughness of footing on characteristics of load-settlement curve. Parametric experiments of small scaled model test were performed with changing the properties of base roughness of model footing; Gluing the vinyl, aluminum, sand paper, sand beneath the model footing surface. The width of model footing and relative density of soil foundation were also changed to investigate their effects on settlement characteristics of footing. The ultimate bearing capacity as well as the initial slope of load-settlement curve obtained from test results were compared with those from limit equilibrium methods proposed by Terzaghi, Hansen and Meyerhof. From test results, it was confirmed that the base roughness affected the failure mechanisms of showing different shapes of slip lines formed beneath the footing.