• 제목/요약/키워드: Rotary chemical vapor deposition

검색결과 1건 처리시간 0.019초

분말소재의 표면처리를 위한 회전형 CVD 공정 (Rotary CVD Process for Surface Treatment of Powders)

  • 이종환;정구환
    • 한국표면공학회지
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    • 제56권6호
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    • pp.341-352
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    • 2023
  • This paper reviews the potentials of a rotary chemical vapor deposition (RCVD) process for nanomaterial synthesis and coating on powder-based materials. The rotary reactor offers a significant improvement over traditional CVD methods having horizontal and fixed reaction chambers. The RCVD system yields enhanced productivity and surface coating uniformity of nanoparticles applied in various purposes, such as efficient heat dissipation, surface hardness enhancement, and enhanced energy storage performances. The effectiveness of the RCVD system would open up new possibilities in various applications because uniform coating on powder-based materials with massive productivity is inevitable to develop multi-functional materials with high reliability.