Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Rotary CVD Process for Surface Treatment of Powders

분말소재의 표면처리를 위한 회전형 CVD 공정

  • Jong-Hwan Lee (Interdisciplinary Program in Advanced Functional Materials and Devices Development, Kangwon National University) ;
  • Goo-Hwan Jeong (Interdisciplinary Program in Advanced Functional Materials and Devices Development, Kangwon National University)
  • 이종환 (강원대학교 대학원 고기능 소재 및 소자 협동과정) ;
  • 정구환 (강원대학교 대학원 고기능 소재 및 소자 협동과정)
  • Received : 2023.12.08
  • Accepted : 2023.12.19
  • Published : 2023.12.31
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Abstract

This paper reviews the potentials of a rotary chemical vapor deposition (RCVD) process for nanomaterial synthesis and coating on powder-based materials. The rotary reactor offers a significant improvement over traditional CVD methods having horizontal and fixed reaction chambers. The RCVD system yields enhanced productivity and surface coating uniformity of nanoparticles applied in various purposes, such as efficient heat dissipation, surface hardness enhancement, and enhanced energy storage performances. The effectiveness of the RCVD system would open up new possibilities in various applications because uniform coating on powder-based materials with massive productivity is inevitable to develop multi-functional materials with high reliability.

Keywords

References

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