• Journal of the Korean Society for Precision Engineering
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• v.32 no.2
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• pp.127-133
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• 2015

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Those are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions for rotary units such as a spindle and rotary table are suggested. To estimate the error motions of the rotary unit, waviness of bearings and external force model were used as input data. The estimation model considers geometric relationship and force equilibrium of the five degree of the freedom motions.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.1
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• pp.132-136
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• 2008

Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.

• Journal of the Semiconductor & Display Technology
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• v.6 no.4
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• pp.23-27
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• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.33-34
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.32 no.2
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• pp.135-140
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• 2015

It is an important thing for a designer to simulate and predict the performance of a spindle and a rotary table. In addition to the general performance such as static stiffness, the error motion performance information is beneficial to the designer in many cases. However for an aerostatic bearing the fluid film physical status should be calculated in order to simulate those performances and the calculation time is another obstacle for a simple performance simulation. In this paper the investigation on experiment and simulation is performed in order to find a more effective simulation method for the rotational error motion.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.259-264
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• 2011

Authors are carrying out a national project which develops an accuracy simulation technology of mechanical machines to predict the stiffness and accuracy of machine components or entire machine in the design stage. Analysis methods in this technology are generalized to achieve the wide applicability and to be utilized as a web based platform type. In this paper, outline of the project such as concept, aim and configuration is introduced. Contents of the research are also introduced, which are composed of four main research fields; structural dynamics, linear motion analysis, rotary motion analysis and control and vibration analysis. Finally, a future plan is presented which is made up with three stages for the advance toward an ultimate manufacturing tools.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.11
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• pp.98-105
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• 2010

In this paper, double ball-bar is used to estimate the geometric errors of a rotary table, which includes one-axial motion, two-radial motions and two-tilt motions, except the angular positioning error. To simplify the measurement procedures, three measurement steps have been designed and developed. At each measurement step, one end of the double ball-bar is fixed at the nose of spindle and the other end is located on the rotary table. And specific circular test path is planned to keep the distance between two balls as constant at ideal case. The relationship including the geometric errors of a rotary table and the measured distance between two balls which is distorted by the geometric errors is defined by using ball-bar equation. Each geometric error is modeled as $4^{th}$ order polynomial considering $C^1$-continuity. Finally the coefficients of polynomial are calculated by least-square method. Simulation is done to check the validation of the suggested method considering set-up errors and measurement noise. Suggested method is applied to estimate geometric errors of a rotary table of a 5-axis machine tool.

• Proceedings of the KSME Conference
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• 2001.11a
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• pp.507-514
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• 2001

Direct drive servovalve(DDV) is a kind of one-stage valve since the rotary motion of DC motor is directly transferred to the linear motion of valve spool through the link. Since the structure of DDV is simple, it is less expensive, more reliable and offers reduced internal leakage and reduced sensitivity to fluid contamination. However, the flow force effect on the spool motion is significant such that it induces large steady-state error in a step response. If the proportional control gain is increased to reduce the steady-state error, the system becomes unstable. In order to satisfy the system design requirements, the classical controller is designed using the analytical Bode method.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1590-1595
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• 2003

Direct drive servovalve(DDV) is a kind of one-stage valve since the rotary motion of DC motor is directly transferred to the linear motion of valve spool through the link. Since the structure of DDV is simple, it is less expensive, more reliable and offers reduced internal leakage and reduced sensitivity to fluid contamination. However, the flow force effect on the spool motion is significant such that it induces large steady-state error in a step response. If the proportional control gain is increased to reduce the steady-state error, the system becomes unstable. In order to satisfy the system design requirements, the lead-lag controller is designed using the complex method that is one kind of constrained direct search method.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.4
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• pp.754-763
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• 2002

Direct drive servovalve(DDV) is a kind of one-stage valve since the rotary motion of DC motor is directly transferred to the linear motion of valve spool through the link. Since the structure of DDV is simple, it is less expensive, more reliable and offers reduced internal leakage and reduced sensitivity to fluid contamination. However, the flow force effect on the spool motion is significant such that it induces large steady-state error in a step response. If the proportional control gain is increased to reduce the steady-state error, the system becomes unstable. In order to satisfy the system design requirements, the classical controller is designed using the analytical Bode method.