• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1187-1194
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• 2003

A BCl$_3$/Ne plasma chemistry was used to etch Ga-based (GaAs, AIGaAs, GaSb) and In-based (InGaP, InP, InAs and InGaAsP) compound semiconductors in a Planar Inductively Coupled Plasma (ICP) reactor. The addition of the Ne instead of Ar can minimize electrical and optical damage during dry etching of III-V semiconductors due to its light mass compared to that of Ar All of the materials exhibited a maximum etch rate at BCl$_3$ to Ne ratios of 0.25-0.5. Under all conditions, the Ga-based materials etched at significantly higher rates than the In-based materials, due to relatively high volatilities of their trichloride etch products (boiling point CaCl$_3$ : 201 $^{\circ}C$, AsCl$_3$ : 130 $^{\circ}C$, PCl$_3$: 76 $^{\circ}C$) compared to InCl$_3$ (boiling point : 600 $^{\circ}C$). We obtained low root-mean-square(RMS) roughness of the etched sulfate of both AIGaAs and GaAs, which is quite comparable to the unetched control samples. Excellent etch anisotropy ( > 85$^{\circ}$) of the GaAs and AIGaAs in our PICP BCl$_3$/Ne etching relies on some degree of sidewall passivation by redeposition of etch products and photoresist from the mask. However, the surfaces of In-based materials are somewhat degraded during the BCl$_3$/Ne etching due to the low volatility of InCl$_{x}$./.

• Journal of the Ergonomics Society of Korea
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• v.30 no.5
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• pp.671-681
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• 2011

Objective: The purpose of this study is to compare the workload level at each lower limbs posture and suggest the ergonomic workstation guideline for working period by evaluating the imbalanced lower limbs postures from the physiological and psychophysical points of view. Background: Many workers like welders are working in various imbalanced lower limbs postures either due to the narrow working conditions or other environmental conditions. Method: Ten male subjects participated in this experiment. Subjects were asked to maintain 3 different lower limbs postures(standing, squatting and bending) with 3 different working conditions(balanced floor with no scaffold, imbalanced floor with 10cm height of scaffold, and imbalanced floor with 20cm height of scaffold). EMG data for the 4 muscle groups(Retus Femoris, Vastus Lateralis, Tibialis Anterior, Gastrocnemius) from each lower limbs posture were collected for 20 seconds every 2 minutes during the 8 minutes sustaining task. Subjects were also asked to report their discomfort ratings of body parts such as waist, upper legs, lower legs, and ankle. Results: The ANOVA results showed that the EMG root mean square(RMS) values and the discomfort ratings(CR-10 Rating Scale) were significantly affected by lower limbs postures and working time(p<0.05). The correlation was analyzed between the EMG data and the discomfort ratings. Also, prediction models for the discomfort rating for each posture were developed using physical condition, working time, and scaffold height. Conclusion: We strongly recommend that one should not work more than 6 minutes in a standing or squatting postures and should not work more than 4 minutes in a bending posture. Application: The results of this study could be used to design and assess working environments and methods. Furthermore, these results could be used to suggest ergonomic guidelines for the lower limbs postures such as squatting and bending in the working fields in order to prevent fatigue and pain in the lower limbs body.

• Physical Therapy Korea
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• v.18 no.1
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• pp.37-46
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• 2011

The purpose of this study was to investigate intra-rater reliability and determine the validity of electromyography (EMG) measurements to represent muscle activity and ultrasonography (US) to represent muscle thickness during manual muscle testing (MMT) to external abdominal oblique (EO) and lumbar multifidus (MF). Twenty healthy subjects were recruited for this study and asked to perform MMT at differing levels. The subjects' muscle activity using EMG was measured by a ratio to maximum voluntary contraction (MVC) and root mean square (RMS) methods. The subjects' muscle thickness using US was measured by raw muscle thickness and change ratio of thickness to maximum (MVC) or resting condition. In three trials, measurements were performed on each subject by one examiner. The intra-rater reliability of measurements of EMG and US to EO and MF was calculated using intra-class coefficients. The intra-rater reliability of all measurements was excellent (ICC=.75~.98) in EMG and US. The conduct validity was calculated by one-way ANOVA with repeated measurements to compare whether the EMG and US measurements were different between MMT at different levels. There was only a significant difference between all grades at %MVC thickness measurement of US. These results suggest that a %MVC thickness measurement of US was a more sensitive and discriminate in all manual muscle testing grades. This information will be useful for the selection of US measurement and analysis methods in clinics.

• Smart Structures and Systems
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• v.25 no.1
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• pp.65-80
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• 2020

In order to protect a structure over its full life cycle, a novel tuned mass damper (TMD), the so-called semi-active eddy current pendulum tuned mass damper (SAEC-PTMD), which can retune its frequency and damping ratio in real-time, is proposed in this study. The structural instantaneous frequency is identified through a Hilbert-Huang transformation (HHT), and the SAEC-PTMD pendulum is adjusted through an HHT-based control algorithm. The eddy current damping parameters are discussed, and the relationship between effective damping coefficients and air gaps is fitted through a polynomial function. The semi-active eddy current damping can be adjusted in real-time by adjusting the air gap based on the linear-quadratic-Gaussian (LQG)-based control algorithm. To verify the vibration control effect of the SAEC-PTMD, an idealized linear primary structure equipped with an SAEC-PTMD excited by harmonic excitations and near-fault pulse-like earthquake excitations is proposed as one of the two case studies. Under strong earthquakes, structures may go into the nonlinear state, while the Bouc-Wen model has a wild application in simulating the hysteretic characteristic. Therefore, in the other case study, a nonlinear primary structure based on the Bouc-Wen model is proposed. An optimal passive TMD is used for comparison and the detuning effect, which results from the cumulative damage to primary structures, is considered. The maximum and root-mean-square (RMS) values of structural acceleration and displacement time history response, structural acceleration, and displacement response spectra are used as evaluation indices. Power analyses for one earthquake excitation are presented as an example to further study the energy dissipation effect of an SAECPTMD. The results indicate that an SAEC-PTMD performs better than an optimized passive TMD, both before and after damage occurs to the primary structure.

• The Journal of Korean Academy of Orthopedic Manual Physical Therapy
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• v.16 no.1
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• pp.26-36
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• 2010

Purpose: The study compared the muscle activity and ratio of upper trapezius (UT) to lower trapezius (LT) activity between acute and chronic whiplash-associated disorder (WAD) patients. Methods: Twelve healthy (male: 7), 14 acute WAD (male: 7), and 11 chronic WAD (male: 3) volunteers participated in this study. Electromyography using a surface EMG recorded the activity of the upper trapezius and lower trapezius of both shoulders (dominant and non-dominant) during $120^{\circ}$ elevation when standing and shoulder depression when sitting. The testing order was selected randomly. Subjects were asked to maintain each experimental position for 5 seconds at end range. EMG activity was normalized using the maximal voluntary isometric contraction (MVIC) elicited using a manual muscle-testing technique. One-way repeated measures analysis of variance (ANOVA) was used to compare the average root mean square (RMS) value of EMG activity for each condition. Results: The EMG activity of the dominant UT for chronic WAD subjects was significantly higher than for acute WAD subjects during $120^{\circ}$ elevation (p<.05). The EMG activity of the dominant LT for acute WAD subjects was significantly lower than for the control group (p<.05) during $120^{\circ}$ elevation. The EMG activity of the dominant LT for WAD patients was significantly lower than for the control group during shoulder depression (p<.05), and the chronic WAD patients scored significantly the lowest (p<.01). The dominant UT/LT for chronic WAD patients was significantly higher than the ratio for acute WAD subjects during shoulder depression (p<.05); this result was higher than for the control group (p<.01). The non-dominant UT/LT (ratio) for chronic WAD patients was significantly higher than the ratio for acute WAD subjects during shoulder depression (p<.05). Conclusion: The UT for chronic WAD subjects was hyperactive when compared to the acute WAD subjects, and the was hypoactive for both acute and chronic patients, therefore intra-trapezius imbalance was more prevalent during shoulder depression.

• Journal of the Korean Vacuum Society
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• v.21 no.4
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• pp.193-198
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• 2012

In this study, we have fabricated the polymer insulator and diamond-like carbon (DLC) thin films by using plasma enhanced chemical vapor deposition methods. we fabricated the DLC films with various thicknesses as the passivation layer on plasma polymer and investigated the structural, physical, and electrical properties of DLC/plasma polymer films. The plasma polymer synthesized in this work had the low leakage current and low dielectric constant. The values of hardness and elastic modulus in DLC/plasma polymer films are increased, and the value of rms surface roughness is decreased, and contact angle value is increased with increasing DLC film thickness. In the electrical properties of DLC/plasma polymer, the value of the dielectric constant is increased, however the leakage current property of the DLC/plasma polymer is improved than that of plasma polymer film with increasing DLC film thickness.

• Physical Therapy Korea
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• v.13 no.1
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• pp.54-60
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• 2006

This study aimed to compare movement patterns of shoulder joints between the right and left symmetry in stroke patients and control subjects. This study proposes use of the voluntary response index (VRI) calculated from quantitative analysis of surface electromyographic (sEMG) and motion data recorded during voluntary movement as a feeding task. The VRI is comprised of two numeric values, one derived from the total muscle activity recorded for the voluntary motor task (magnitude), and the other from the sEMG distribution across the recorded muscles with the similarity index (SI). Five stroke patients and five age-matched healthy controls were recruited. Feeding motion was performed using the provided spoon five times with rests taken on a chair in between tasks. EMG data were digitized and analyzed on the basis of the root mean square (RMS) envelope of activity. The average amplitude of responses was calculated. Responsiveness and clinically meaningful levels of discrimination between stroke patients and control for EMG magnitude and SI were determined. The similarity index of the results from two successive examinations of both sides apart for stroke patients and control subjects were .86 and .95 in motion analysis and .84 and .99 in electromyographic analysis. The SI of sEMG data and motion data was significantly correlated in stroke patients. The data suggest that SI is a sensitive program for comparing and analyzing the symmetry of muscle activity and motion in both sides. This analysis method has a clinical value in grading muscular activity and movement impairment after brain injury.

• Journal of The Korean Astronomical Society
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• v.50 no.1
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• pp.7-20
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• 2017

We carry out the study of $850{\mu}m$ sources in a part of the XMM-LSS field. The $850{\mu}m$ imaging data were obtained by the SCUBA-2 on the James Clerk Maxwell Telescope (JCMT) for three days in July 2015 with an integration time of 6.1 hours, covering a circular area with a radius of 15'. We choose the central area up to a radius of 9'.15 for the study, where the noise distribution is relatively uniform. The root mean square (rms) noise at the center is 2.7 mJy. We identify 17 sources with S/N > 3.5. Differential number count is estimated in flux range between 3.5 and 9.0 mJy after applying various corrections derived by imaging simulations, which is consistent with previous studies. For detailed study on the individual sources, we select three sources with more reliable measurements (S/N > 4.5), and construct their spectral energy distributions (SEDs) from optical to far-infrared band. Redshift distribution of the sources ranges from 0.36 to 3.28, and their physical parameters are extracted using MAGPHYS model, which yield infrared luminosity $L_{IR}=10^{11.3}-10^{13.4}L_{\odot}$, star formation rate $SFR=10^{1.3}-10^{3.2}M_{\odot}yr^{-1}$ and dust temperature $T_D=30-53K$. We investigate the correlation between $L_{IR}$ and $T_D$, which appears to be consistent with previous studies.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.31 no.6
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• pp.357-361
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• 2018

We demonstrated a crack-free ${\alpha}-Ga_2O_3$ on sapphire substrate by horizontal halide vapor phase epitaxy (HVPE). Oxygen-and gallium chloride-synthesized Ga metal and HCl were used as the precursors, and $N_2$ was used as the carrier gas. The HCl flow and growth temperature were controlled in the ranges of 10~30 sccm and $450{\sim}490^{\circ}C$, respectively. The surface of ${\alpha}-Ga_2O_3$ template grown at $470^{\circ}C$ was flat and the root-mean-square (RMS) roughness was ~2 nm. The full width at half maximum (FWHM) values for the symmetric-plane diffractions, were as small as 50 arcsec and those for the asymmetric-plane diffractions were as high as 1,800 arcsec. The crystal quality of ${\alpha}-Ga_2O_3$ on sapphire can be controlled by varying the HCl flow rate and growth temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.315-320
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• 2020

Methylammonium lead iodide (MAPbI₃) thin films were grown at low temperatures on glass substrates via 3-zone chemical vapor deposition. Lead iodide (PbI₂) and lead bis (dipivaloylmethanate) [Pb(dpm)₂] precursors were used as lead sources. Due to the high sublimation temperature (~400℃) of the PbI₂ precursor, a low substrate temperature could not be constantly maintained. Therefore, MAPbI₃ thin films degraded into the PbI₂ phase. In contrast, for the Pb(dpm)₂ precursor, a substrate temperature of ~120℃ was maintained because the sublimation temperature of Pb(dpm)₂ is as low as 130℃ at a high vapor pressure. As a result, high-quality MAPbI₃ thin films were successfully grown on glass substrates using Pb(dpm)₂. The rms (root-mean-square) roughness of MAPbI₃ thin films formed from Pb(dpm)₂ was as low as ~19.2 nm, while it was ~22.7 nm for those formed using PbI₂. The grain size of the films formed from Pb(dpm)₂ was as large as approximately 350 nm.