• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1187-1194
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• 2003

A BCl$_3$/Ne plasma chemistry was used to etch Ga-based (GaAs, AIGaAs, GaSb) and In-based (InGaP, InP, InAs and InGaAsP) compound semiconductors in a Planar Inductively Coupled Plasma (ICP) reactor. The addition of the Ne instead of Ar can minimize electrical and optical damage during dry etching of III-V semiconductors due to its light mass compared to that of Ar All of the materials exhibited a maximum etch rate at BCl$_3$ to Ne ratios of 0.25-0.5. Under all conditions, the Ga-based materials etched at significantly higher rates than the In-based materials, due to relatively high volatilities of their trichloride etch products (boiling point CaCl$_3$ : 201 $^{\circ}C$, AsCl$_3$ : 130 $^{\circ}C$, PCl$_3$: 76 $^{\circ}C$) compared to InCl$_3$ (boiling point : 600 $^{\circ}C$). We obtained low root-mean-square(RMS) roughness of the etched sulfate of both AIGaAs and GaAs, which is quite comparable to the unetched control samples. Excellent etch anisotropy ( > 85$^{\circ}$) of the GaAs and AIGaAs in our PICP BCl$_3$/Ne etching relies on some degree of sidewall passivation by redeposition of etch products and photoresist from the mask. However, the surfaces of In-based materials are somewhat degraded during the BCl$_3$/Ne etching due to the low volatility of InCl$_{x}$./.

• Nuclear Engineering and Technology
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• v.36 no.4
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• pp.346-356
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• 2004

14 Pressurized Water Reactors (PWR) in Korea use a remote monitoring system (RMS), which have been used in Korea since 1998. A Memorandum of Understanding on Remote Monitoring, based on Enhanced Cooperation on PWRs, was signed at the 10th Safeguards Review Meeting in October 2001 between the International Atomic Energy Agency (IAEA) and Ministry Of Science and Technology (MOST). Thereafter, all PWR power plants applied for remote monitoring systems. However, the existing method is high cost (involving expensive telephone costs). So, it was eventually applied to an Internet system for Remote Monitoring. According to the Internet-based Virtual Private Network (VPN) applied to Remote Monitoring, the Korea Atomic Energy Research Institute (KAERI) came to an agreement with the IAEA, using a Member State Support Program (MSSP). Phase I is a Lab test. Phase II is to apply it to a target power plant. Phase III is to apply it to all the power plants. This paper reports on the penetration testing of Phase I. Phase I involved both domestic testing and international testing. The target of the testing consisted of a Surveillance Digital Integrated System (SDIS) Server, IAEA Server and TCNC (Technology Center for Nuclear Control) Server. In each system, Virtual Private Network (VPN) system hardware was installed. The penetration of the three systems and the three VPNs was tested. The domestic test involved two hacking scenarios: hacking from the outside and hacking from the inside. The international test involved one scenario from the outside. The results of tests demonstrated that the VPN hardware provided a good defense against hacking. We verified that there was no invasion of the system (SDIS Server and VPN; TCNC Server and VPN; and IAEA Server and VPN) via penetration testing.

• Proceedings of the Korean Nuclear Society Conference
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• 1999.05a
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• pp.104-104
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• 1999

The local heat transfer coefficient is experimentally investigated for the reflux condensation in a countercurrent flow between the steam-air mixture and the condensate. A single vertical tube has a geometry which is a length of 2.4m, inner diameter of 16.56mm and outer diameter of 19.05mm and is made of stainless steel. Air is used as a noncondensible gas. The secondary side is installed in the form of coolant block around vertical tube and the heat by primary condensation is transferred to the coolant water. The local temperatures are measured at 15 locations in the vertical direction and each location has 3 measurement points in the radial direction, which are installed at the tube center, at the outer wall and at the coolant side. In three different pressures, the 27 sets of data are obtained in the range of inlet steam flow rate 1.348 -3.282kg/hr, of inlet air mass fraction 11.8 -55.0%. The local heat transfer coefficient increases as the increase of inlet steam flow rate and decreases as the decrease of inlet air mass fraction. As an increase of the system pressure, the active condensing region is contracted and the heat transfer capability in this region is magnified. The empirical correlation is developed represented with the 165 sets of local heat transfer data. As a result, the Jacob number and film Reynolds number are dominant parameters to govern the local heat transfer coefficient. The rms error is 17. 7% between the results by the experiment and by the correlation.

• Journal of the Speleological Society of Korea
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• no.76
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• pp.37-42
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• 2006

The Dielectric Barrier Discharge (DBD) is a nonequilibrium gas discharge that is generated in the space between two electrodes, which are separated by an insulating dielectric layer. The dielectric layer can be put on either of the two electrodes or be inserted in the space between two electrodes. If an AC or pulse high voltage is applied to the electrodes that is operated at applied frequency from 50Hz to several MHz and applied voltages from a few to a few tens of kilovolts rms, the breakdown can occur in working gas, resulting in large numbers of micro-discharges across the gap, the gas discharge is the so called DBD. Compared with most other means for nonequilibrium discharges, the main advantage of the DBD is that active species for chemical reaction can be produced at low temperature and atmospheric pressure without the vacuum set up, it also presents many unique physical and chemical process including light, heat, sound and electricity. This has led to a number of important applications such as ozone synthesizing, UV lamp house, CO2 lasers, et al. In recent years, due to its potential applications in plasma chemistry, semiconductor etching, pollution control, nanometer material and large area flat plasma display panels, DBD has received intensive attention from many researchers and is becoming a hot topic in the field of non-thermal plasma.

• 한국지구물리탐사학회:학술대회논문집
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• 2008.10a
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• pp.47-50
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• 2008

Streamer resistivity surveys in shallow marine environments were carried out to analyze sediment characteristics at the bottom of reservoir. Because the resistivity values of reservoir water are very low and those of sediment are relatively high, apparent resistivity values increase with depth. And it is necessary to eliminate the apparent resistivity data decreased highly when the number of separation increases. According to the repeated data processing, we proposed the resistivity ratio of upper-to-lower layer is $0.6{\sim}0.8$ because the RMS error of inversion leads to the minimum in these range. As a result of the inversion for two- and three-layer model, the inversion including water depth is proved to be more effective than conventional method.

• Proceedings of the KSR Conference
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• 2008.06a
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• pp.489-494
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• 2008

The measurement of magnetic field is performed about DC and AC magnetic field in electric railway line. The test point is cap, on the converter/inverter box, on the traction motor and on the SIV, the height of measurement is bottom and 60 cm height. In case of AC magnetic field, the selected specific frequency is measured on the converter/inverter box. The AC magnetic field is checked and analysis through BNC output, DAQ cad and notebook PC.

• Bulletin of the Korean Chemical Society
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• v.31 no.11
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• pp.3333-3340
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• 2010

A three dimensional pharmacophore model was generated for the molecules which are responsible for anti-inflammatory activities targeting Interleukin-2 inducible tyrosine kinase (Itk). 16 structurally diverse molecules were selected as training set to generate the hypotheses using Discovery Studio v2.1. The best hypothesis, Hypo1, comprises two hydrogen bond acceptor (HBA), one hydrophobic aromatic (HA), one ring aromatic (RA) and shows high cost difference (63.71), high correlation coefficient (0.97) as well as low RMS deviation (0.81). Hypo1 has been further validated toward a test set, decoy set and Fischer's randomization method. Furthermore, Hypo1 was used to screen NCI and Maybridge databases. Finally, 2 hit molecules were identified as potential leads against Itk, which may be useful for future drug development.

• Current Optics and Photonics
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• v.1 no.4
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• pp.364-371
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• 2017

Compared to one made of glass, an aluminum mirror features light weight, compact design, low cost, and quick manufacturing. Reflective mirrors and supporting structures can be made from the same material, to improve the athermal performance of the system. With the rapid development of ultraprecise machining technologies, the field of applications for aluminum mirrors has been developed rapidly. However, most of them are rotationally symmetric in shape, and are used for infrared applications. In this paper, the design and manufacture of an off-axis aluminum mirror used for a three-mirror-anastigmat (TMA) optical system at visible wavelengths is presented. An optimized, lightweight design provides a weight reduction of more than 40%, while the surface deformation caused by earth's gravity can meet the required tolerance. The two pieces of an off-axis mirror can be diamond-turned simultaneously in one setup. The centrifugal deformation of the off-axis mirror during single-point diamond turning (SPDT) is simulated through the finite-element method (FEM). The techniques used to overcome centrifugal deformation are thoroughly described in this paper, and the surface error is reduced to about 1% of the original value. After post-polishing, the form error is $1/30{\lambda}$ RMS and the surface roughness is better than 5 nm Ra, which can meet the requirements for visible-light imaging.

• Proceedings of the Korea Crystallographic Association Conference
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• 2003.05a
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• pp.8-8
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• 2003

Electron-phonon interaction plays a significant role in forming of colossal magnetoresistance effect (CMR). Polaron formation was observed by neutron diffraction and by extended X-ray absorption fine structure (EXAFS) analysis. Local probe as given by the EXAFS is a useful method to study the polaronic charge and its dependence on temperature and ions size. Here we present the EXAFS study of polaronic charge in La/sub 0.7/Ca/sub 0.3-X/Ba/sub X/MnO₃ compositions. The single phase La/sub 0.7/Ca/sub 0.3-X/Ba/sub X/MnO₃ manganites (x=0; 0.03; 0.06, ..., 0.3) were prepared by ceramic technology [1]. The Curie temperature was determined by extrapolation of the temperature dependence of the magnetization (down to zero magnetization). EXAFS experiments were carried out at the 7C EC beam line of the Pohang Light Source (PLS) in Korea. The atomic pair distribution functions (PDF) were obtained by re-regularization method [2] from filtered spectra. The PDF for the x=0.3 sample showed a single peak function and for x=0.0, 0.03, 0.06, 0.09, 0.12 compositions were asymmetric in agreement with a small Jahn-Teller elongation of two (short and long) bonds of the MnO/sub 6/ octahedron. Dispersion, σ/sub Min-O//sup 2/, and asymmetry, σ/sub Min-O//sup 3/, of the Mn-O bond distances varied significantly with x and showed a maximums at x=0.09. The maximum of σ/sub Min-O//sup 2/ is caused by increase of dynamic rms displacements of the Mn-O distances near the T/sub C/. The observed x dependence of σ/sub Min-O//sup 3/ reflects the reduction of charge carriers mobility at approaching to T/sub C/ from low as well as high temperatures.

• Korean Journal of Materials Research
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• v.13 no.4
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• pp.266-270
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• 2003

We studied BCl$_3$ dry etching of GaAs in a planar inductively coupled plasma system. The investigated process parameters were planar ICP source power, chamber pressure, RIE chuck power and gas flow rate. The ICP source power was varied from 0 to 500 W. Chamber pressure, RIE chuck power and gas flow rate were controlled from 5 to 15 mTorr, 0 to 150 W and 10 to 40 sccm, respectively. We found that a process condition at 20 sccm $BCl_3$ 300 W ICP, 100 W RIE and 7.5 mTorr chamber pressure gave an excellent etch result. The etched GaAs feature depicted extremely smooth surface (RMS roughness < 1 nm), vertical sidewall, relatively fast etch rate (> $3000\AA$/min) and good selectivity to a photoresist (> 3 : 1). XPS study indicated a very clean surface of the material after dry etching of GaAs. We also noticed that our planar ICP source was successfully ignited both with and without RIE chuck power, which was generally not the case with a typical cylindrical ICP source, where assistance of RIE chuck power was required for turning on a plasma and maintaining it. It demonstrated that the planar ICP source could be a very versatile tool for advanced dry etching of damage-sensitive compound semiconductors.