• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.275-277
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• 2004

This paper presents design and fabrication of micromachined accelerometer using $100{\mu}m$ thick SiOG substrate. The proposed accelerometer has a resonant frequency, 6kHz. To reduce the off-axis sensitivity of the accelerometer, the mode characteristic of the accelerometer is investigated using ANSYs modal analysis. Because the accelerometer is fabricated using an SiOG substrate, it is expected to be integrated as one-chip IMU sensor with a gyroscope using an SiOG substrate.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.529-536
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• 2001

We investigate a surface-micromachined capacitive accelerometer with the grid-type electrodes surrounded by a perforated proof-mass frame. An electromechanical analysis of the microaccelerometer has been performed to obtain analytical formulae for natural frequency and output sensitivity response estimation. A set of prototype devices has been designed and fabricated based on a 4-mask surface-micromachining process. The resonant frequency of 5.8$\pm$0.17kHz and the detection sensitivity of 0.28$\pm$0.03mV/g have been measured from the fabricated devices. The parasitic capacitance of the detection circuit with a charge amplifier has been measured as 3.34$\pm$1.16pF. From the uncertainty analysis, we find that the major uncertainty in the natural frequency of the accelerometer comes from the micromachining error in the beam width patterning process. The major source of the sensitivity uncertainty includes uncertainty of the parasitic capacitance, the inter-electrode gap and the resonant frequency, contributing to the overall sensitivity uncertainty in the portions of 75%, 14% and 11%, respectively.

• International Journal of Control, Automation, and Systems
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• v.6 no.6
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• pp.873-883
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• 2008

This paper presents a parametric study on the controller design scheme for a gyro-accelerometer to have robust performance under some parameter variations. In particular, an integral and derivative based controller design method is suggested to achieve the desired performances of stability margin, bandwidth, and uniformity of scale for both gyroscopes and accelerometers with uncertainties of quality factor and resonant frequency. The simulation result shows that the control loop based on the suggested method gives satisfactory performance robustness under parameter variations, demonstrating the usefulness of the proposed design scheme.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.4 s.121
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• pp.350-355
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• 2007

Accelerometer mounting fixtures were prepared with the different materials(Ti and SUS). The dynamic characteristics of the mounting fixture were analyzed by finite element method(FEM), and the mode shape of each order and the displacement response for modelling the mounting fixture were analyzed by ANSYS, then resonant frequencies of the mounting fixtures with Ti and SUS were 22.700 and 23.390 kHz, respectively. The dynamic characteristics of the mounting fixture with the different positions were obtained by using laser interferometer. The response of the accelerometer was nearly a constant from 40 Hz to 500 Hz, but the change of the acceleration was increased with an increase of the frequency above 500 Hz.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.7
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• pp.30-36
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• 1997

Bump bonded piezoesistive silicon accelerometer was fabricated by the porous silicon micromachining and th eprocess technique of integrated circuit. The output voltage of the accelerometer fabricated on (111)-oreiented Si substrates with n/n$^{+}$n triple layers showed good linear characteristic of less than 1%. The measured sensitivity and the resonant frequency was about 743 .mu.V/g and 2.04 kHz, respectively. And the transverse sensitivity of 5.2% was measured from the accelerometer. Also, to investigate an influence on the output characteristics of the sensor due to bump bonding, the values of the piezoresistors were measured through thermal-cycling test in the temperature variation form -50 to 120.deg. C. Then, there was 0.014% resistance changes about 3.61 k.ohm., so sthe output charcteristics of the sensor was less affected by bump bonding.g.

• Journal of the Korean Society of Mechanical Technology
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• v.13 no.4
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• pp.93-99
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• 2011

This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

• Geomechanics and Engineering
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• v.28 no.1
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• pp.25-33
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• 2022

The energy transferred on drill rods by dynamic impact mainly determines the penetration depth for in-situ tests. In this study, the dynamic response and transferred energy of drill rods are determined from the frequency of the stress waves. AW-type drill rods of lengths 1 to 3 m are prepared, and strain gauges and an accelerometer are installed at the head and tip of the connected rods. The drill rods are hung on strings, allowing free vibration, and then impacted by a pendulum hammer with fixed potential energy. Increasing the rod length L increases the wave roundtrip time (2L/c, where c is the wave velocity), and hence the transferred energy at the rod head. At the rod tip, the first velocity peak is higher than the first force peak because a large and tensile stress wave is reflected, and the transferred energy converges to zero. The resonant frequency increases with rod length in the waveforms measured by the strain gauges, and fluctuates in the waveforms measured by the accelerometer. In addition, the dynamic response and transferred energy are perturbed when the cutoff frequency is lower than 2 kHz. This study implies that the resonant frequency should be considered for the interpretation of transferred energy on drill rods.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.33-39
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• 1998

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.

• The Journal of the Acoustical Society of Korea
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• v.20 no.5
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• pp.14-20
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• 2001

The mass-spring system with four arms for the force-balance servo accelerometer was designed and fabricated. The response characteristics of a mass-spring system was calculated with the change of arms thickness and seismic mass by the finite element method (FEM). Furthermore, the response characteristics of accelerometer was measured using the change of interference pattern and response voltage value by Michelson interferometer. The response characteristics with changing length and thickness of arm was changed drastically, and changing seismic mass was minor effect for the response characteristics of mass-spring system. The measured resonant frequencies have good agreement with that of numerical analysis within 5％ range.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.6
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• pp.517-525
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• 2011

Differential Vibrating Accelerometer(DVA) is a small and accurate resonant device to sense the change in natural frequency in presence of acceleration input. Both mathematical modeling for the electromechanical dynamics and experimental investigation on the structural characteristics are necessary for effective designs of precision controller and high Q-factor structure. In this paper, electromechanical modeling of the resonator of DVA, electrode module, and pre-amplifier is presented. The presented method is experimentally verified by measuring the resonance frequency, effective mass, effective stiffness and Q-factor. The direct comparison of the calculated displacement and the actual pre-amplifier of DVA also indicates the effectiveness of this study.