• 대한기계학회논문집B
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• 제40권10호
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• pp.629-636
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• 2016

미세 회로 기판 제조에 적용되는 습식공정 중 도금조에서 미세 기판의 정밀한 가공을 위해 산성용액 반응조 내부의 유동특성을 관찰하는 것이 중요하다. 하지만, 상용 유속계 중 내산성을 갖춘 센서가 거의 없어 측정이 매우 어렵다. 본 연구에서는 내산성을 갖는 압저항 센서에 신호처리 기술을 적용하여 유속을 측정할 수 있는 센서를 개발하였다. 상용유속계 수준의 유속데이터 획득을 위해서는 높은 임피던스를 갖는 압저항 센서에 증폭회로 및 저역통과필터를 부착하였으며, 이 때 사용되는 신호처리회로의 출력과 상용유속계의 출력이 일치되도록 하는 신호처리회로의 선정을 위해 Butterworth, Bessel, Chebyshev 필터 회로를 제작하여 유속 측정을 통해 출력을 상용유속계의 출력과 비교한 결과 0.0128 %, 0.0023 %, 5.06 %의 MSE를 확인할 수 있었다. 인가 유속을 변경하면서 내산성 센서의 측정 가능 영역을 확인해 본 결과, 저속 저압 구간에서는 신호와 노이즈 구분이 어려워 신호 처리 알고리즘을 적용해도 원하는 결과를 얻지 못하였고, 2~6 m/s에서 2.7 % 미만의 오차를 갖는 신뢰성 있는 측정이 가능하였다.

• 한국운동역학회지
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• 제26권3호
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• pp.285-292
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• 2016

Objective: This study collected data on muscle fatigue and ground reaction force during walking to provide a basis for development of custom-fitted outdoor walking shoes. The study analyzed an upright body exercise program using spine stabilization technique to determine the effect on foot plantar pressure in archers, demonstrate the effectiveness of upright body exercise, and develop a new, effective, and efficient training program. Method: A 12-week upright body exercise program was evaluated for the effect on plantar pressure in archers. Ten prize-winning archers (3 men, 7 women) in B metropolitan city, each with ${\geq}10years$ of experience, were given an explanation of the content and purpose of the program, and provided informed consent. Upright body exercise was performed 3 times a week for 12 weeks. A resistive pressure sensor was used to measure foot plantar pressure distribution and analyze quantitative information on variation in postural stability and weight shifting in dynamic balance during shooting, as well as plantar pressure in static balance with the eyes open and closed. Results: There were no significant differences in foot plantar pressure before and after participation in the exercise program. There was no statistically significant difference in foot plantar pressure in static balance with the eyes open or closed, or in foot plantar pressure in dynamic balance during shooting. Conclusion: An upright body exercise program had positive effects on foot plantar pressure in static and dynamic balance in archers by reducing body sway and physical imbalance during shooting and with eyes closed. This program is expected to help archers improve their posture and psychological state, and thereby improve performance.

• 한국운동역학회지
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• 제28권1호
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• pp.9-18
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• 2018

Objective: This study aimed to analyze how the upright body type exercise program affected body balance and record of archers. This study aimed to prove the effectiveness of upright body type exercise, on this basis, in enhancing the performance of archery players. Method: A total of 14 archers (7 men and 7 women) in B Metropolitan City who had ${\geq}4years$ of career in archery and were given explanation of its contents and purpose before giving spontaneous consent to the experiment were enrolled in the study. The upright body type exercise program was implemented thrice a week for 12 weeks, with higher exercise intensity with time. A resistive pressure sensor, Gaitview AFA-50, was used to measure the foot plantar pressure distribution and analyze quantitative information concerning variation in posture stability and weight shift in dynamic balance of foot plantar pressure in shooting and static balance of plantar pressure with the eyes open and closed and the change in archery record accompanying the change in body balance. Results: As for the differences in foot plantar pressure between before and after participation in the upright body type exercise program, there was no significant difference in static balance of foot plantar pressure with the eyes open, and there was statistically significant difference at the ${\alpha}=.05$ significance level in static balance of foot plantar pressure with the eyes closed or in dynamic balance of foot plantar pressure in shooting. There was statistically significant difference at the ${\alpha}=.05$ significance level in archery record. Conclusion: The upright body type exercise program had positive effects on static and dynamic balance of foot plantar pressure by allowing archers to experience less body sway and physical imbalance in shooting with closed eyes and positive effects on archery record. Thus, the program is expected to help archers correct their posture and perform better.

• 한국표면공학회지
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• 제37권2호
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• pp.71-75
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• 2004

The technology of $C_{60}$ fullerite films preparation by means of gas-phase deposition and structure of fullerite films are described. A three-channel flow plant was used to obtain fullerite films. The films were deposited in the flow of inert gas under reduced pressure onto a cooled silicon or sapphire substrate placed inside the reaction chamber of the plant. The plant allows one to obtain the films of pure fullerenes and to synthesise the films from fullerene compounds and doped fullerenes. The structure of two types of films were investigated by FE-SEM and SEM techniques: pure fullerite films onto silicon and sapphire substrates as well as compound films were studied by FE-SEM technique. All samples have shown columnar structure with high level of porosity. The synthesis of films composed of fullerene and its compounds for use in electronics is demonstrated to be promising. For example, experiments confirm the possibility to use fullerite films in sensor electronics to produce humidity and thermal sensors. It is also possible to use the sensitivity of these films to isotropic pressure. The experiments with $C_{60}$-Cu-J films have shown quite strong dependence of their resistance on pressure of different sort of medium-gas that could be used in gas-sensitive sensors. The structure and preparation technology of resistive sensor based on fullerite films are described.bed.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권6호
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• pp.733-740
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• 2014

A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.