• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.38-44
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• 2005

Pyrolyzed polyimide is explored in terms of MEMS material. This paper describes chemical, electrical, mechanical properties of pyrolyzed polyimide (PIX-1400) thin film as MEMS material. When polyimide thin film was pyrolyzed at $800^{\circ}C$ for 60 minutes in $N_{2}$ ambient, the residual ratio of pyrolyzed film thickness measured with a surface profiler is about 49 %, and the resistivity is about $2.17{\times}10^{-2}\;{Omega}cm$. From the result of the load-deflection test, the estimated Young's modulus and initial average stress of pyrolyzed polyimide are 67 GPa and 30 MPa, respectively. As one demonstration of MEMS structures of pyrolyzed polyimide, the fabrication method of the microbridge structure is proposed for a micro heater and a resonator.

• 한국전기전자재료학회논문지
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• 제24권5호
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• pp.370-373
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• 2011

We investigated the effects of low temperature ($500^{\circ}C$) $O_2$ annealing on the characteristics of hafnium silicate ($HfSi_xO_y$) films deposited on a Si substrate by atomic layer deposition (ALD). We found that the post deposition annealing under oxidizing ambient causes the oxidation of residual Hf metal components, resulting in the improvement of electrical characteristics such as flat band voltage shift (${\Delta}V_{fb}$) by hysteresis without oxide capacitance reduction. We suggest that post deposition annealing under oxidizing ambient is necessary to improve the electrical characteristics of $HfSi_xO_y$ films deposited by ALD.

• 에너지공학
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• 제17권2호
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• pp.107-115
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• 2008

신에너지원으로 주목받고 있는 중질 잔사유를 기존 중유화력의 대체 연료로 사용하는 경우에 대하여 상용 해석코드로 플랜트의 에너지 및 물질 수지, 플랜트의 성능을 분석하였다. 국내 A 중유 화력발전소에 대한 플랜트 성능분석 모델을 구축하였으며 플랜트의 성능 및 효율 등에 대한 시뮬레이션 결과를 설계 및 실제 운전 데이터와 비교하여 그 건전성을 확인하였다. 중질 잔사유 적용에 대한 시뮬레이션 결과 출력은 315 MW로서 중유 적용시의 300 MW 보다 높게 나타났으며 플랜트 효율은 약간 감소함을 알 수 있었다. 외기온도 및 냉각수 온도, 배가스 순환량, 출력에 따른 열소비율의 민감도 분석으로부터 중질 잔사유 연소시의 최적 운전을 위한 기본 자료를 얻을 수 있었다.

• 한국전기전자재료학회논문지
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• 제29권10호
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• pp.625-629
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• 2016

Electrical and optical properties of the AC voltage driven organic light-emitting diodes were investigated by measuring the electroluminescence of the device. Device structure of ITO(170 nm)/TPD(40 nm)/Alq3(60 nm)/LiF(0.5 nm)/Al(100 nm) was manufactured using a thermal evaporation. Sinusoidal and square-type AC voltage was applied to the device using a function generator. Amplitude of the applied voltage was 9.0 V, and a frequency was varied from 50 Hz to 50 kHz. Electroluminescence out of the device was measured in a Si photodetector simultaneously with the applied voltage together. An intensity and a delayed residual luminescence from the device were depended on the frequency of the sinusoidal voltage. It is thought to be due to a contribution of the capacitive nature in the equivalent circuit of the device. An electron mobility was estimated using a time constant obtained from the luminescence of the device driven by the square-type AC voltage.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2003년도 춘계학술대회 논문집
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• pp.274-278
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• 2003

In recent, an application of high energy density beam we/ding is increasing to obtain the high quality in weldments. Laser welding, especially, has been recognized as an useful method and its beam power has also increased according to the development of relevant technology. However, welding method in the fields of power plant is conservative because their structures have required to endure high temperature and pressure. So, authors conduct the numerical simulation in order to consider the possibility of laser welding on the material of the pressure vessels ($2\frac{1}{4}Cr-1Mo$ steel). As a result of this study, we can confirm the advantages of laser welding and obtain useful information for the experiments of weldability.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• 한국정밀공학회지
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• 제19권2호
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• pp.65-71
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• 2002

Turbine blade is subject to cyclic bending force by steam pressure. Stress analysis by fractography is already established technology as means far seeking cause of fracture and has been widely employed. In the X-ray frctography, plastic deformation and residual stress near the fracture surface can be determined and information of internal structure of material can be obtained. Therefore, to find a fracture mechanism of torsion-mounted blade in nuclear power plant, based on the information from the fracture surface obtained by fatigue test, the correlation of X-ray parameter and fracture mechanics parameter was determined and then the stress intensity factor to actual broken turbine blade was predicted.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.778-783
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• 2001

Turbine blade is subject to cyclic bending force by steam pressure. Stress analysis by fractography is already established technology as means for seeking cause of fracture and has been widely employed. In the X-ray fractography, plastic deformation and residual stress near the fracture surface can by determined and information of internal structure of material can be obtained. Therefore, to find a fracture mechanism of torsion-mounted blade in nuclear power plant, based on the information from the fracture surface obtained by fatigue test, the correlation of X-ray parameter and fracture mechanics parameter was determined and then the load applied to actual broken turbine blade was predicted.

• 한국기계가공학회지
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• 제7권1호
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• pp.62-66
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• 2008

Machine parts subjected to fluctuating or cyclic loads induce repeated stresses that often result in failure by fatigue. In such cases, the fatigue failures unfortunately sometimes occur. These may arise from a lack of knowledge with regard to the design, fabrication and operation of the machines or structures. The failure analysis provides valuable information regarding the prevention of similar failures. Furthermore, this information will be useful to improve or to develop new products. Failure stress analysis is classified into X-ray fractography. X-ray fractography has the limited applications because of material crystal size, difficult measurement method, electrolytic polishing precision, and long test time. Therefore, this study proposed the new method to improve the measurement precision of plastic zone depth and test time using TRIZ.

• Journal of Magnetics
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• 제18권3호
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• pp.326-330
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• 2013

Magnetic treatment of surface vessels and submarines (Deperm) is required to camouflage them against magnetic detection from enemy marine force. So far, deperm has been accomplished by applying an alternating magnetic field of which amplitude decreases linearly. However, the reduction of the residual flux density in the direction of magnetic field is not linear in the case of the linear protocol, since the ferromagnetic material used to construct a surface vessel, mainly Fe-C, shows a nonlinear behavior in an alternating magnetic field. This is one of main reasons to make an ordinary deperm protocol inefficient. In this paper, we propose the exponential deperming protocol and compare the exponential protocol to conventional linear protocol within the framework of deperm performance. We found out that step number could be reduced in the exponential protocol compare with in the linear protocol, because the larger numbers of deperm steps are dedicated in the irreversible domain process region on the magnetic hysteresis.