• Journal of Sensor Science and Technology
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• v.12 no.6
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• pp.241-248
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• 2003

An electrochemical humidity sensor was fabricated with poly(1,5-diaminonaphthalene) film coated on a gap of two splitted gold electrodes, which were made by vacuum deposition. Response currents according to humidity were measured by the potential sweep method and chronoamperometry. The stability of the polymer film was improved by double step chronoamperometry using the applied voltage of ${\pm}0.5$ Vdc. The response time determined by the pulse technique was about ${\sim}50$ msec and the relative standard deviation of current response was within ${\pm}5.0%$. The response current of the film was intrinsically humidity dependent. The film exhibited a non-linear but reproducible response in ordinary range of relative humidity. The linear equations were $I(nA)=0.28{\times}%RH-1.01$ between 10 to 70 %RH and $I(nA)=6.05{\times}%RH-403.21$ between 70 to 90 %RH.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 1996.06c
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• pp.1126-1135
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• 1996

This study was conducted to select the sensors for measuring temperature, relative humidity, and air velocity among the major environmental factors affecting the pig productivity as a part of the study for the optimum production system model development of pig-housing. The study results are summarized as the follows : Two sensors , HMP233L and HANI, were tested for measuring temperature and relative humidity , Test results were analyzed by the statistical methods. And the sensor, HMP233L was selected as a proper sensor for temperature sand relative humidity measurement . An air velocity sensor was tested. Test results showed that its accuracy was low and incongruent for the air velocity measurement when it was lower than 4m/s.

• Nuclear Engineering and Technology
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• v.52 no.8
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• pp.1689-1696
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• 2020

In this study, we developed a fiber-optic humidity sensor (FOHS) system for the monitoring and detection of coolant leakage in nuclear power plants. The FOHS system includes an FOHS, a spectrometer, a halogen white-light source, and a Y-coupler. The FOHS is composed of a humidity-sensing material, a metal tube, a multi-mode plastic optical fiber, and a subminiature version A (SMA) fiber-optic connector. The humidity-sensing material is synthesized from a mixture of polyvinylidene fluoride (PVDF) in dimethyl sulfoxide (DMSO) and hydroxyethyl cellulose (HEC) in distilled water. We measured the optical intensity of the light signals reflected from the FOHS placed inside the humidity chamber with relative humidity (RH) variation from 40 to 95%. We found that the optical intensity of the sensing probe increased linearly with the RH. The reversibility and reproducibility of the FOHS were also evaluated.

• Journal of the Microelectronics and Packaging Society
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• v.11 no.1
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• pp.49-57
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• 2004

The modified polyionene polyelectrolyte inks were newly prepared and applied to the humidity-sensitive membrane of humidity sensor. The films were fabricated on the alumina substrate with comb-type gold electrode using a ink-jet printing technique. The copolymers of methyl methacrylate, acrylic acid, 2-hydroxyethyl methacrylate and [(2-methacryloyloxy)ethyl]trimethylammonium chloride were also prepared for the humidity-sensing material. which was fabricated by dip-coating method. Electrical measurements under various relative humidity were performed. The humidity-sensitive characteristics of sensors obtained by ink-jet printing technique were compared with that of dip-coating method. Humidity sensors showed a decrease in resistance as an increase of relative humidity and their resistance characteristics are in a close agreement each other.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.1
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• pp.93-99
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• 1996

The formation properties and oxidation mechanism of electrochemically oxidized porous silicon(OPS) films have been studied. To examine the humidity-sensitive properties of OPS films, surface-type and bulk-type humidity sensors were fabricated. The oxidized thickness of porous silicon layer(PSL) increases with the charge supplied during electrochemical humidity sensor shows high sensitivity at high relative humidity in low temperature. The sensitivity and linearity can be improved by optimizing a porosity of PSL. (author). refs., figs.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.77-86
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• 1998

A two-chip humidity sensor system has been developed which consists of a capacitive sense element die and a CMOS interface chip. The sense element was fabricated using thin polyimide films on (100) silicon substrate and showed excellent linearity(0.72%FS), low hysteresis (<3%) and low temperature coefficient(-0.0285 ~-0.0542pF/K) over a wide range of relative humidity and temperature. The capacitance-relative humidity characteristic exhibited a drift of 2~3% after 9 weeks of exposure to 4$0^{\circ}C$/90%RH. The signal-conditioning circuitry was fabricated using an 1.2- ${\mu}{\textrm}{m}$, one poly double metal CMOS process. The measured output voltage of the sensor system was directly proportional to relative humidity and showed good agreement with theory.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1311-1313
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• 1997

We describe the working principle, the design, and the characteristics of two-chip integrated humidity sensor. The sensing element was manufactured using polyimide. The interface circuits were developed based on a charge redistribution between capacitors. The sensor and signal conditioning chips were packaged together in the same package. The sensor showed excellent linearity over a wide range of relative humidity.

• Journal of Sensor Science and Technology
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• v.14 no.6
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• pp.395-401
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• 2005

A highly stable quartz crystal microbalance (QCM) that showed a stability of frequencies and exhibited a very low noise level has been developed. The long-term drift was <0.05 Hz/h over a period of 10 h, and the short-term rms (root mean square) noise was <0.015 Hz. Our QCM sensor was used as a humidity sensor employing a poly(methyl methacrylate) (PMMA) polymer film as a hygroscopic layer, which showed good characteristics in the relative humidity (RH) range of $2{\sim}90%$ RH. Comparing the characteristics of the QCM sensor with those of other types of humidity sensors employing PMMA film as a hygroscopic layer, and with other QCM sensors employing other hygroscopic layers is represented.

• Proceedings of the KSR Conference
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• 2008.11b
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• pp.1065-1068
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• 2008

Concrete is still one most common construction materials even in railway structures. As structures become massive and mega-sized, the importance of early age concrete quality control becomes more significant. Among various factors, relative humidity and temperature are the primary factors governing the early age quality. Temperature raise due to cement hydration causes stress, which can develop to cracking with internal and/or external restraints. Exposure conditions including ambient temperature, humidity and wind also significantly affect the cracking behavior of early age concrete. Among many of studies on the early age concrete behavior, investigation on the variation of temperature and relative humidity internal of concrete is not common. That is in part because the difficulties in measuring the relative humidity and temperature inside the concrete. This study used a digital sensor with an appropriate logger to measure internal temperature and relative humidity. This direct measuring method is expected to provide more reliable and comprehensive data acquisition on the early age behavior of concrete.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.6
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• pp.594-597
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• 2023

We have proposed and demonstrated a fiber optic RH (relative humidity) sensor based on fiber Bragg grating covered with a polyimide film. As the polyimide film absolves the moisture in the air, its volume expands. As a result, the grating period of the FBG (fiber Bragg grating) covered with a polyimide film becomes wide and the Bragg wavelength is shifted. The sensor is implemented by fixing a 30 ㎛ thickness polyimide film on the surface of an optical fiber grating using an adhesive, and the characteristics of the device according to humidity are analyzed. The fabricated FBG RH sensor showed a high sensitivity of 0.0186 nm/RH% and a wide measurement range from 30% to 90%. The influence of environmental temperature on the characteristics of the RH sensor was also measured and analyzed. The feasibility of commercialization is presented.