• Title/Summary/Keyword: Reflow Process

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Design and fabrication of wafer scale microlens array for image sensor using UV-imprinting (UV 임프린팅을 이용한 이미지 센서용 웨이퍼 스케일 마이크로렌즈 어레이 설계 및 제작)

  • Kim, Ho-Kwan;Kim, Seok-Min;Lim, Ji-Seok;Kang, Shin-Ill
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.100-103
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    • 2007
  • A microlens array has been required to improve light conversion efficiency in image sensors. A microlens array can be usually fabricated by photoresist reflow, hot-embossing, micro injection molding, and UV-imprinting. Among these processes, a UV-imprinting, which is operated at room temperature with relatively low applied pressure, can be a desirable process to integrate microlens array on image sensors, because this process provides the components with low thermal expansion, enhanced stability, and low birefringence, furthermore, it is more suitable for mass production of high quality microlens array. In this study, to analyze the optical properties of the wafer scale microlens array integrated image sensor, another wafer scale simulated image sensor chip array was designed and fabricated. An aspherical square microlens was designed and integrated on a simulated image sensor chip array using a UV-imprinting process. Finally, the optical performances were measured and analyzed.

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Interfacial and Mechanical Properties of Sn-57Bi-1Ag Solder Joint with Various Conditions of a Laser Bonding Process (다양한 레이저 접합 공정 조건에 따른 Sn-57Bi-1Ag 솔더 접합부의 계면 및 기계적 특성)

  • Ahn, Byeongjin;Cheon, Gyeong-Yeong;Kim, Jahyeon;Kim, Jungsoo;Kim, Min-Su;Yoo, Sehoon;Park, Young-Bae;Ko, Yong-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.2
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    • pp.65-70
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    • 2021
  • In this study, interfacial properties and mechanical properties of joints were reported after Cu pads finished with organic solderability preservative (OSP) on flame retardant-4 (FR-4) printed circuit board (PCB) and electronic components were joined with a Sn-57Bi-1Ag solder paste by using a laser bonding process. The laser bonding process was performed under various bonding conditions with changing a laser power and a bonding time and effects of bonding conditions on interfacial and mechanical properties of joints were analyzed. In order to apply for industry, properties of bonding joints using a reflow bonding process which are widely used were compared. When the laser bonding process were performed, we observed that Cu6Sn5 intermetallic compounds (IMCs) were fully formed at the interface although the bonding times were very short about 2 and 3 s. Furthermore, void formations of the joints by using the laser bonding process were suppressed at the joints with comparing to the reflow bonding process and shear strengths of bonding joints were higher than that by using the reflow bonding process. Therefore, in spite of a very short bonding time, it is expected that joints will be stably formed and have a high mechanical strength by using the laser bonding process.

Characteristics of Joint Between Ag-Pd Thick Film Conductor and Solder Bump and Interfacial Reaction (Ag-Pd 후막도체와 솔더범프 사이의 접합특성 및 계면반응)

  • 김경섭;한완옥;이종남;양택진
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.1
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    • pp.1-6
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    • 2004
  • The requirements for harsh environment electronic controllers in automotive applications have been steadily becoming more and more stringent. Electronic substrate technologists have been responding to this challenge effectively in an effort to meet the performance, reliability and cost requirements. An effect of the plasma cleaning at the ECM(Engine Control Module) alumina substrate and the intermetallic compound layer between Sn-37wt%Pb solder and pad joints after reflow soldering has been studied. Organic residual carbon layer was removed by the substrate plasma cleaning. So the interfacial adhesive strength was enhanced. As a result of AFM measurement, conductor pad roughness were increased from 304 nm to 330 nm. $Cu_6/Sn_5$ formed during initial reflow process at the interface between TiWN/Cu pad and solder grew by the succeeding reflow process, so the grains became coarse. A cellular-shaped $Ag_3Sn$ was observed at the interface between Ag-Pd conductor pad and solder. The diameters of the $Ag_3Sn$ grains ranged from about 0.1∼0.6 $\mu\textrm{m}$. And a needle-shaped was also observed at the inside of the solder.

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Back Light Unit using a Micro-lens Fabricated by the Modified LIGA Process (LIGA 방식을 적용시킨 Microlens 적용 Back Light Unit 개발)

  • Park, Jung-Ho;Sung, Ki-Sung;Yun, Suk-Joo;Ha, Soo-Yong;Lee, Kyu-Hyun;Hwang, Chul-Jin;Jeon, Suk-Hee
    • Proceedings of the Optical Society of Korea Conference
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    • 2004.07a
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    • pp.70-71
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    • 2004
  • Back light unit(BLU) using a microlens fabricated by the modified LIGA process for the liquid crystal display(LCD) is proposed, and some experimental results are presented. To realize the back light unit using microlens pattern, LIGA and reflow process are used.

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A Study on the Palladium Alloy Membrane for Hydrogen Separation (수소 정제용 팔라듐 합금 분리막 연구)

  • Woo, Byung-Il;Kim, Dong-Won
    • Journal of the Korean institute of surface engineering
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    • v.42 no.5
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    • pp.232-239
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    • 2009
  • This study presented the effect of membrane thickness on hydrogen permeability. Microvoids on the surface of the membrane should not exist for the exact values of hydrogen permeability. Pd-Cu-Ni hydrogen alloy membranes were fabricated by Ni powder sintering, substrate plasma pretreatment, sputtering and Cu reflow process. And this leaded to void-free surface and dense film of Pd-Cu-Ni hydrogen alloy membrane. Hydrogen permeation test showed that hydrogen permeability increased from 2.7 to $15.2ml/cm^2{\cdot}min{\cdot}atm^{0.5}$ as membrane thickness decreased from 12 to $4{\mu}m$. This represented the similar trend as a hydrogen permeability of pure palladium membrane based on solution-diffusion mechanism.

Implementation of a through-silicon microlens array using glass reflow (유리 리플로를 이용한 실리콘-관통형 마이크로렌즈 어레이의 구현)

  • Yoo, Seung-Hyun;Ha, Joon-Geun;Jin, Joo-Young;Ji, Chang-Hyeon;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1682-1683
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    • 2011
  • Through-silicon microlens array has been implemented using glass thermal reflow process. Design, numerical analysis, fabrication, and measurement results are discussed. Microlenses with six different volumetric dimensions were successfully fabricated and characterized. Radius of curvature of each microlenses were measured with less than 1% deviation compared to calculated value. Measured average roughness of the microlens surface was 16.5 nm.

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Intermetallic Compound Formation Behavior and Bump Shear strength at Sn-In Eutectic Solder/UBM Interface

  • Choi Jae-Hoon;Jun Sung-Woo;Jung Boo-Yang;Oh Tae-Sun;Kim Young-Ho
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2003.11a
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    • pp.99-102
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    • 2003
  • Reactions between 48Sn-52In solder and under bump metallurgies(UBM) such as 100nm $Ti/8{\mu}m$ Cu and 300nm Al/400nm Ni(V)/400nm Cu have been investigated, and the shear strength of 48Sn-52In solder bumps on each UBM has been evaluated. While intermetallic compounds with two different morphologies were continuously thickened on Ti/Cu with repeating the reflow process, the intermetallics on Al/Ni(V)/Cu spalled into the solder with increasing the number of reflow times. The solder bumps on Ti/Cu exhibited higher shear strength than those on Al/Ni(V)/Cu.

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A Study on the Thermal Oxidation and Wettability of Lead-free Solders of Sn-Ag-Cu and Sn-Ag-Cu-In

  • Lee, Hyunbok;Cho, Sang Wan
    • Applied Science and Convergence Technology
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    • v.23 no.6
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    • pp.345-350
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    • 2014
  • The surface oxidation mechanism of lead-free solder alloys has been investigated with multiple reflow using X-ray photoelectron spectroscopy. It was found that the solder surface of Sn-Ag-Cu-In solder alloy is surrounded by a thin $InO_x$ layer after reflow process; this coating protects the metallic surface from thermal oxidation. Based on this result, we have performed a wetting balance test at various temperatures. The Sn-Ag-Cu-In solder alloy shows characteristics of both thermal oxidation and wetting balance better than those of Sn-Ag-Cu solder alloy. Therefore, Sn-Ag-Cu-In solder alloy is a good candidate to solve the two problems of easy oxidation and low wettability, which are the most critical problems of Pb-free solders.

Development of Copper Cored Solder Ball(CCSB) by Sn-Ag-Cu Alloy Plating Process

  • Lee, Deok-Haeng;Jeong, Un-Seok;Kim, Jong-Uk;Kim, Pan-Su
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.11a
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    • pp.284-284
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    • 2015
  • 반도체 Ball Grid Array(BGA)에 사용되던 종래의 Solder Ball은 Sn96.3 Ag3.0 Cu0.7의 용융솔더를 이용하여 제작하고 있다. 이는 SMT Reflow공정에서 BGA Ball의 퍼짐현상으로 인해 원래의 Ball Height에 영향을 미쳐 접합불량의 원인이 되고 있다. 이러한 문제를 해결하기 위해 Copper Core Ball위에 SnAgCu 삼원합금도금공정을 이용해 문제점을 해결하고자 했으며, 본 실험을 통해 구현한 CCSB를 이용해 SMT Reflow를 진행한 결과 종래의 BGA Ball보다 우수한 효과를 확인할 수 있었다.

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Surface characteristics on the optical pattern die of light guiding plate by machining types (가공방법에 따른 소형 도광판용 광학패턴 금형의 표면특성연구)

  • Do, Young-Soo;Kim, Jong-Sun;Go, Young-Bae;Kim, Jong Duck;Yoon, Kyung-Hwan;Hwang, Chul-Jin
    • Design & Manufacturing
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    • v.2 no.4
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    • pp.1-4
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    • 2008
  • Micro pattern is applied to the light guiding plate(LGP) to enhance the uniformity of the brightness of the LCD. The micro cones are molded in intaglio on the surface of the LGP. The surface roughness of each cone was 40nm and 38nm in negative and positive die for laser ablation. In chemical etching, the surface roughness was 25nm, 24nm in negative and positive. And the surface roughness of negative and positive dies were 4nm and 5nm for LIGA-reflow process.

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