• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.239-240
• /
• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Journal of the Korean Society of Food Culture
• /
• v.28 no.5
• /
• pp.547-552
• /
• 2013

This study compared the nutrient intake of obese versus non-obese non-insulin dependent diabetes mellitus (NIDDM) patients for Diabetes Medical Nutrition Therapy. The study was conducted at medical hospitals in Gyeonggi and Seoul from April 2009 to November 2009. Fifty-six adult male NIDDM patients were enrolled and divided into two groups: 36 into an obese group (BMI ${\geq}25$) and 20 into a non-obese group (BMI<25). To conduct this study, anthropometric measurements, and daily nutrient intake of obese and non-obese NIDDM patients were measured. Daily nutrient intake was estimated by 24hr-recall and analyzed by the CAN program. In the results, anthropometric measurements of the two groups showed significant differences in weight and BMI (p<0.001). Daily nutrient intake of the two groups showed no significant differences, except for vitamin E intake (p<0.05). The total energy intake of the non-obese and obese groups were $2,669.9{\pm}964$ kcal and $2,555.4{\pm}803$ kcal, respectively, which were both above 113% of the recommended Dietary Reference Intakes for Korean (KDRIs). Cholesterol and sodium intake were $378.1{\pm}215.6$ mg and $6,478.9{\pm}2755.1$ mg, respectively for the non-obese group. Cholesterol and sodium intake were $308.1{\pm}155.6$ mg and $6,306.8{\pm}2788.9$ mg, respectively, for the obese group. Both groups were above 150% of the recommended levels set by the Korean Diabetes Association (KDA). However, their antioxidant nutrient intake was appropriate. Meanwhile, their fiber intake was $10.7{\pm}5.1$ g and $9.8{\pm}5.2$ g, respectively, which was lower than 40% of the recommended intake set by the KDA. The results show that the nutritional education for obese and non-obese NIDDM male patients must aim to reduce total energy, cholesterol, and sodium intake, while increasing fiber intake. In addition, the factors related to a patient's glycosylated hemoglobin, serum lipids, blood pressure, and weight change must be calibrated for the appropriate energy, fat, cholesterol, sodium, and dietary fiber intake.

• Journal of Energy Engineering
• /
• v.26 no.3
• /
• pp.131-136
• /
• 2017

Automobile engine oil is the most important lubricant for operating as the engine is started. Recently, manufacturers of the automotive industry and lubricants are considerably improving the quality of oil with additive to extend change cycle period. Most customers are recommended genuine oil among different types from shop expert. Through this report we suggest another reference point for consumer to pick highly efficient lubricant. This report is investigated oil compounds to compare with 6 different automotive considering actual running condition for 7 months. we conducted experiment from physical and chemical perspectives. In the field, through various experiments oil compounds between mineral oil and synthetic oil are largely distinguished in oxidation, viscosity, fluid and TBN. These are influenced by engine part wear as piston, bearing etc. Comparing various investigation with different oil the performance of synthetic oil is shown better condition in flash point, oxidation stability and also found less in change pollutant iron, Al compounds. Additives of oil show clear difference Ca level in detergent-dispersant both mineral oil and synthetic oil. And Zn in extreme pressure additives and P in Lubricity improver make no difference to both.

• Journal of Radiation Protection and Research
• /
• v.31 no.1
• /
• pp.37-46
• /
• 2006

For the first step to develop a reference disposal container of spent fuel to be used in a deep geological repository, this paper examined safe dimensions of the disposal container on the points of nuclear criticality and radiation safety and mechanical structural safety and provided basic information for dimensioning the container and configuration of the container components, and establishing the favorable and safe disposal conditions. When the safety factor for stress due to the external loads (hydrostatic and swelling pressure) is taken as 2.0, the safe diameter of the filler material to provide enough container strength under the assumed external loads is found to be 112cm with 13cm spacing between inner baskets in PWR container. Also the thickness of the thinner section between the fuel basket and the surface of the cast insert is determined to be 150 mm. Regarding these dimensions of the container, the PWR fuel container is sketched to accommodate 4 square assemblies or 297 CANDU fuel 297 bundles (33 circle tubes x 9 stacks). However the top and bottom parts need to be checked again through the detail radiation shielding analysis with respects to the emplacement position and handling processes of the disposal container.

• 보존과학연구
• /
• s.36
• /
• pp.74-85
• /
• 2015

An ox bone object was excavated from the wetland at the excavation site in Bogam-ri tumulus, Naju. It was only able to identify the full image of the shape. Bogam were deteriorated and cracked due to the soil pressure and the repeated cycle of freezing and melting. They were also fragmented in pieces and powdered. In situ, bones were dewatered, consolidated and wrapped together with surrounding soils not to lose the fragmented bone pieces. Unpacking was carried out in the conservation lab and the treatment was processed. Soils on the reverse were removed and then the surface was consolidated and reinforced. Then, soils on the excavated side was cleaned and the surface was consolidated. The object was placed in the produced storing box. When the ox bone object was excavated, it did not have its head and was in the shape of tieing all its legs up. This shows that the animal had been tied up during a ritual and then buried. During the treatment, the importance of the burial purpose and maintaining the shape at the time of excavation was considered. Therefore, the shape of the object at the time of excavation was maintained rather than dismantling all these fragile bones and finding the shape of an ox. This conservation of ox bone object shows that conservation treatment methods have to be vary depending on characters and conditions of objects. In addition, it is expecting that this writing could be the reference to bone and horn objects excavated in the future for the whole process from the excavation to the conservation treatment.

• Journal of the Korean Institute of Gas
• /
• v.15 no.2
• /
• pp.9-14
• /
• 2011

A set of test was conducted on a SA-372 steel for CNG storage tank to study the effect of hydrogen embrittlement. Tensile tests were carried out several conditions such as CNG, HCNG and H2 gas environment including air and Ar under the 35 MPa. Also, the test speed was set at 4*10^-4/s and 4*10^-5/s respectively. To maintain the high pressure for environmental gas during test process, we chose MTS which was installed autoclave. Test results showed that tensile stress, elongation rate and cross sectional contraction under Ar and CNG charging condition were similar to that of reference of air. And there was little bit change with test speed variations. However, hydrogen added conditions such as HCNG and H2 were revealed noticeable change in elongation rate and cross sectional contraction. Tensile stress was still uniform for all conditions. From the results, the effect of hydrogen embrittlement was confirmed on the hydrogen enriched conditions. Also its effect was showed more strong with much hydrogen concentration and slower test speed.

• Proceedings of the Korean Institute of Building Construction Conference
• /
• 2007.11a
• /
• pp.11-14
• /
• 2007

Noise level and Airflow amount of a kitchen hood are affected by the conditions of airflow path. Thus this study is expected to be used as a basic reference in designing airflow path of apartment housing throughout analysing changes in noise level and airflow amount from the various conditions of airflow path. Noise level generated by the kitchen hood is estimated in a kitchen and a living room of two constructed apartment houses, and an experiment is conducted in an half anechoic chamber to analyze noise level and airflow amount by the different length, diameter and number of windings of a round shaped soft duct which is connected to the kitchen hood. The measured results in apartment houses show that the noise level in both apartments exceeds the NC standard greatly in living spaces. In apartment A, a regular apartment house, the noise level was $NC-65{\sim}75$, $NC-45{\sim}60$ and NC-70, NC-45 in the kitchen and living room with an operation of kitchen hood in 1 and 3 stages. In apartment B, an apartment complex, the noise level was NC-55 and NC-60 in the kitchen and living room with an operation of kitchen hood in 3 stages. In particular, there was an increase of noise level at 125Hz-band resulted from an amplification of sound, which requires adequate measures in noise reduction. The results measured in Half anechoic chamber show 99% of airflow amount increase with the modification of a duct' s diameter from ${\Phi}$ 100mm to ${\Phi}$ 125mm, 37% of airflow amount increase with the modification of a duct' s diameter from ${\Phi}$ 125mm to ${\Phi}$ 150mm, and 173% of airflow amount increase with the modification of a duct' s diameter from ${\Phi}$ l00mm to ${\Phi}$ 150mm. The noise level was lower than the level measured in apartment housing about 20 in NC-value and 11.4 in dB(A)-value, which was interpreted as the effect of the load by the pressure condition at the rear end of the duct. Also, an amplification of sound in 125Hz-band influenced NC-value considerably, therefore effective measure is needed.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.15 no.10
• /
• pp.6388-6398
• /
• 2014

To understand size fractioned chlorophyll a and material cycle characteristics in Jeju marine ranching area (JMRA), 4 times of survey were conducted from April to November 2008. Picoplankton on the surface in JMRA was on average, $0.30{\mu}g/L$(annual mean(M):17.3%) in the $0.03{\sim}0.84{\mu}g/L$ range, accounting for 17.3%. Nannoplankton and picoplankton was on average, $1.35{\mu}g/L$(M:78.0%) in the $0.22{\sim}3.93{\mu}g/L$ range, and $1.73{\mu}g/L$(M:4.7%) in the nd ~ 0.24 range, respectively. The 10m layer was similar to the surface. The measured values changed according to the measurement times but the nanoplankton composition ratio was higher throughout the year. In addition, the size fractioned chlorophyll a distribution in JMRA was similar to that of tropical sea area affected by the Monsoon rather than South Korean offshore coast geographically adjacent to the East China Sea and Japan coastal waters affected by the Kuroshio/Tsushima warm currents. That is, the material cycle of JMRA consists of a microbial food web rather than traditional food chain at a lower trophic levels. Primary production is deemed to have a higher possibility of being adjusted by top-down dynamics, such as micro-zooplankton grazing pressure rather than nutrients supply.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.173-173
• /
• 2010

Recently, a patterned sapphire substrate (PSS) has been intensively used as one of the effective ways to reduce the dislocation density for the III-nitride epitaxial layers aiming for the application of high-performance, especially high-brightness, light-emitting diodes (LEDs). In this paper, we analyze the growth kinetics of the atoms and crystalline quality for the undopped-GaN depending on the facets of the pattern fabricated on a sapphire substrate. The effects of the PSS on the device characteristics of InGaN/GaN LEDs were also investigated. Several GaN samples were grown on the PSS under the different growth conditions. And the undoped-GaN layer was grown on a planar sapphire substrate as a reference. For the (002) plane of the undoped-GaN layer, as an example, the line-width broadening of the x-ray diffraction (XRD) spectrum on a planar sapphire substrate is 216.0 arcsec which is significantly narrower than that of 277.2 arcsec for the PSS. However, the line-width broadening for the (102) plane on the planar sapphire substrate (363.6 arcsec) is larger than that for the PSS (309.6 arcsec). Even though the growth parameters such as growth temperature, growth time, and pressure were systematically changed, this kind of trend in the line-width broadening of XRD spectrum was similar. The emission wavelength of the undoped-GaN layer on the PSS was red-shifted by 5.7 nm from that of the conventional LEDs (364.1 nm) under the same growth conditions. In addition, the intensity for the GaN layer on the PSS was three times larger than that of the planar case. The spatial variation in the emission wavelength of the undoped-GaN layer on the PSS was statistically ${\pm}0.5\;nm$ obtained from the photoluminescence mapping results throughout the whole wafer. These results will be discussed in terms of the mixed dislocation depending on the facets and the period of the patterns.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.18 no.6
• /
• pp.736-741
• /
• 2017

This paper examines the design for improving the wiper system of rotorcraft. During rotorcraft operation, the wiping performance and excessive clearance can decrease. The wiper system consists of a wiper arm assembly, motor, convertor and flex drive. If there is a problem with the wiper system, the operation ability decreases because the operation is restricted in a rainy environment. There are two main causes of the problem of the wiper system: the lifting forces acting on the wiper arm in aircraft flight and the excessive gap of the components. To remedy these two problems, the wiper arm was improved. The improvements included increased contact pressure on the wiper arm (spring tension), improved gear clearance, and material and shape changes. Durability test, aircraft ground test and flight test were carried out to verify the improved shape, and it was confirmed that the wiping performance and clearance problems were solved. Currently, the rotorcraft is operated without problem by applying the improved shape, and this design improvement process will be a useful reference for future rotorcraft development.