• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.134-134
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• 2011

High-k dielectric materials such as $HfO_2$, $ZrO_2$ and $Al_2O_3$ increase gate capacitance and reduce gate leakage current in MOSFET structures. This behavior suggests that high-k materials will be promise candidates to substitute as a tunnel barrier. Furthermore, stack structure of low-k and high-k tunnel barrier named variable oxide thickness (VARIOT) is more efficient.[1] In this study, we fabricated the $WSi_2$ nanocrystals nonvolatile memory device with $SiO_2/HfO_2/Al_2O_3$ tunnel layer. The $WSi_2$ nano-floating gate capacitors were fabricated on p-type Si (100) wafers. After wafer cleaning, the phosphorus in-situ doped poly-Si layer with a thickness of 100 nm was deposited on isolated active region to confine source and drain. Then, on the gate region defined by using reactive ion etching, the barrier engineered multi-stack tunnel layers of $SiO_2/HfO_2/Al_2O_3$ (2 nm/1 nm/3 nm) were deposited the gate region on Si substrate by using atomic layer deposition. To fabricate $WSi_2$ nanocrystals, the ultrathin $WSi_2$ film with a thickness of 3-4 nm was deposited on the multi-stack tunnel layer by using direct current magnetron sputtering system [2]. Subsequently, the first post annealing process was carried out at $900^{\circ}C$ for 1 min by using rapid thermal annealing system in nitrogen gas ambient. The 15-nm-thick $SiO_2$ control layer was deposited by using ultra-high vacuum magnetron sputtering. For $SiO_2$ layer density, the second post annealing process was carried out at $900^{\circ}C$ for 30 seconds by using rapid thermal annealing system in nitrogen gas ambient. The aluminum gate electrodes of 200-nm thickness were formed by thermal evaporation. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer with HP 41501A pulse generator, an Agillent 81104A 80MHz pulse/pattern generator and an Agillent E5250A low leakage switch mainframe. We will discuss the electrical properties for application next generation non-volatile memory device.

• 센서학회지
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• 제11권3호
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• pp.163-170
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• 2002

본 논문에서는 양극반응과 복합 산화법($H_2O/O_2$ 분위기에서 $500^{\circ}C$, 1시간 열산화와 $1050^{\circ}C$, 2분간 RTO(Rapid Thermal Oxidation) 공정)을 이용한 두꺼운 OPSL(Oxidized Porous Silicon Layer)을 형성하여 이를 마이크로머시닝 기술을 이용함으로써 $10\;{\mu}m$ 두께의 OPS(Oxidized Porous Silicon) 에어 브리지를 제조하고, 그 위에 전송선로를 형성하여 그 RF 특성을 조사하였다. OPS 에어 브리지 위에 형성된 CPW(Coplanar Waveguide)의 손실이 OPSL 위에 형성된 전송선의 삽입손실보다 약 2dB 정도 적은 것을 보여주었으며, 반사손실은 OPSL 위에 형성된 전송선의 반사손실보다 적으며 약 -20 dB를 넘지 않고 있다. 본 연구에서 개발한 산화된 다공질 실리콘 멤브레인 및 에어 브리지 구조는 CMOS 공정 후에 사용 가능하며, 초고주파 회로 설계시 편리성과 유용성을 제시하고 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.130.2-130.2
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• 2013

Today, chemical vapor deposition (CVD) of hydrocarbon gases has been demonstrated as an attractive method to synthesize large-area graphene layers. However, special care should be taken to precisely control the resulting graphene layers in CVD due to its sensitivity to various process parameters. Therefore, a facile synthesis to grow graphene layers with high controllability will have great advantages for scalable practical applications. In order to simplify and create efficiency in graphene synthesis, the graphene growth by thermal annealing process has been discussed by several groups. However, the study on growth mechanism and the detailed structural and optoelectronic properties in the resulting graphene films have not been reported yet, which will be of particular interest to explore for the practical application of graphene. In this study, we report the growth of few-layer, large-area graphene films using rapid thermal annealing (RTA) without the use of intentional carbon-containing precursor. The instability of nickel films in air facilitates the spontaneous formation of ultrathin (<2~3 nm) carbon- and oxygen-containing compounds on a nickel surface and high-temperature annealing of the nickel samples results in the formation of few-layer graphene films with high crystallinity. From annealing temperature and ambient studies during RTA, it was found that the evaporation of oxygen atoms from the surface is the dominant factor affecting the formation of graphene films. The thickness of the graphene layers is strongly dependent on the RTA temperature and time and the resulting films have a limited thickness less than 2 nm even for an extended RTA time. The transferred films have a low sheet resistance of ~380 ${\Omega}/sq$, with ~93% optical transparency. This simple and potentially inexpensive method of synthesizing novel 2-dimensional carbon films offers a wide choice of graphene films for various potential applications.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제16권4호
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• pp.254-261
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• 2016

The present research paper is devoted to solving an urgent problem, i.e., the energy saving and energy efficiency of buildings. A rapid settlement method and experimental control of the energy conservation based on the specific characteristics of the thermal energy consumption for the heating and ventilation of the buildings, and as well as the rapid development of wireless sensor networks, can be used in a variety of monitoring parameters in our daily lives. Today's world has become quite advanced with smart appliances and devices such as laptops, tablets, TVs, and smartphones with various functions, and their use has increased significantly in our day-to-day lives. In this case, the most important role is played by a wireless sensor network with its development and use in heterogeneous areas and in several different contexts. The fields of home automation, process management, and health management systems make extensive use of wireless sensor networks. In this paper, we explore the main factors of the microclimate in an indoor environment. We control the temperature humidity, and other factors remotely using sensors and Internet-of-Things technologies.

• 전기학회논문지
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• 제58권6호
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• pp.1100-1104
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• 2009

As national power consumption every year increases, the power plant which is in the process of planning tries to establish high-capacity generator. The power system tends to become a large size. With the progress of electronic components, the control systems of the generator have been digitalized and rapid-response control system is possible. However, the minute frequency vibration of grid occurred with the effect of rapid-response control system. To solve these problem, PPS(Power System Stability) has been introduced since 2004, and it has being installed and applied to the thermal and nuclear power plant which are high-capacity, over 800MVA. However the minute frequency vibration is gradually changed to the bigger frequency vibration by fast-action control system, and this regional frequency fluctuation might be diffused wide area. Therefore, it is applied to the hydro generator which is small with fast-action governor system, and it is necessary to control the minute frequency vibration to prevent to diffuse. In this paper, the effect will be proved by establishing PSS on the Hydro-Generator which has both digital excitation and governor system for the first time in Korea.

• 소성∙가공
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• 제16권4호
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• pp.282-287
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• 2007

Hot embossing, one of Nanoimprint Lithography(NIL) techniques, has been getting attention as an alternative candidate of next generation patterning technologies by the advantages of simplicity and low cost compared to conventional photolithographies. A typical hot embossing usually, however, takes more than ten minutes for one cycle of the process because of a long thermal cycling. Over the last few years a number of studies have been made to reduce the cycle time for hot embossing or similar patterning processes. The target of this research is to develop an induction heating apparatus for heating a metallic micro patterning mold at very high speed with the large-area uniformity of temperature distribution. It was found that a 0.5 mm-thick nickel mold can be heated from $25^{\circ}C\;to\;150^{\circ}C$ within 1.5 seconds with the temperature variation of ${\pm}5^{\circ}C$ in 4-inch diameter area, using the induction heating apparatus.

• Current Optics and Photonics
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• 제7권4호
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• pp.435-442
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• 2023

These days, the size of a reflective telescope has been increasing for astronomical observation. An additional optical system usually assists a large ground telescope for image analysis or the compensation of air turbulence. To guide collimated light to the external optical system through a designated path, a coudé mirror is usually adopted. Including a collimator, a coudé mirror of a ground telescope is affected by gravity, depending on the telescope's pointing direction. The mirror surface is deformed by the weight of the mirror itself and its mount, which deteriorates the optical performance. In this research, we propose an optimization method for the coudé mirror assembly for a 1-m class ground telescope that minimizes the gravitational surface error (SFE). Here the mirror support positions and the sizes of the mount structure are optimized using finite element analysis and the response surface optimization method in both the horizontal and vertical directions, considering the telescope's altitude angle. Throughout the whole design process, the coefficients of the Zernike polynomials are calculated and their amplitude changes are monitored to determine the optimal design parameters. At the same time, the design budgets for the thermal SFE and the mass and size of the mount are reflected in the study.

• 상하수도학회지
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• 제31권3호
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• pp.229-236
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• 2017

In this study, a direct contact membrane module was manufactured to be used in a pilot scale membrane distillation process to treat $3m^3/day$ of the digestate produced from anaerobic digestion of livestock manure. In order to investigate the performance of the membrane module, permeate flux was measured with and without spacer inside the module under various condition of temperature difference and cross flow velocity (CFV) through the membrane surfaces. Flux recovery rate after chemical cleaning was also investigated by applying three different cleaning methods. Additionally, thermal energy consumption was theoretically simulated based on actual pilot plant operation conditions. As results, we observed flux of the module with spacer was almost similar to the theoretically predicted value because the installation of spacer reduced the channeling effect inside the module. Under the same operating condition, the permeate flux also increased with increasing temperature difference and CFV. As a result of chemical in-line cleaning using NaOCl and citric acid for the fouled membranes, the recovery rate was 83.7% compared to the initial flux when NaOCl was used alone, and 87% recovery rate was observed when only citric acid was used. However, in the case of using only citric acid, the permeate flux was decreased at a rapid rate. It seemed that a cleaning by NaOCl was more effective to recover the flux of membrane contaminated by the organic matter as compared to a cleaning by citric acid. The total heat energy consumption increased with increasing CFV and temperature difference across the membrane. Thus, further studies should be intensively conducted to obtain a high permeate flux while keeping the energy consumption to a minimum for a practical application of membrane distillation process to treat wastewater.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.50-50
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• 2009

In this paper, the plasma doping is performed on p-type wafers using $PH_3$ gas(10 %) diluted with He gas(90 %). The wafer is placed in the plasma generated with 200 W and a negative DC bias (1 kV) is applied to the substrate for 60 sec under no substrate heating. the flow rate of the diluted $PH_3$ gas and the process pressure are 100 sccm and 10 mTorr, respectively. In order to diffuse and activate the dopant, annealing process such as rapid thermal annealing (RTA) is performed. RTA process is performed either in $N_2$, $O_2$ or $O_2+N_2$ ambient at $900{\sim}950^{\circ}C$ for 10 sec. The sheet resistance is measured using four point probe. The shallow n+/p doping profiles are investigated using secondary ion mass spectromtry (SIMS). The analysis of crystalline defect is also done using transmission electron microscopy (TEM) and double crystal X-ray diffraction (DXRD).

• 마이크로전자및패키징학회지
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• 제7권2호
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• pp.1-6
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• 2000

X-선 노광용 마스크의 재료로서 SiC와 Ta박막을 각각 ECR플라즈마 CVD, 스퍼터링 장비를 이용하여 증착한 뒤 잔류응력, 미세구조, 표면상태, 그리고 화학적 결합상태 등을 조사하였고, ECR etching system을 이용하여 Ta박막 미세 식각 특성을 연구하였다. SiC박막은 $N_2$분위기에서 RTA를 통하여 X-선 투과막 물질로서 필요한 적절한 인장응력을 변화 시킬 수 있었고, 공정 압력을 조절하여 증착한 Ta박막은 높은 밀도와 우수한 표면 평활도를 가지고 시간과 온도에 따른 응력의 안정성이 좋은 X-선 흡수체를 증착할 수 있었다. 또한 Cl 플라즈마는 흡수체 물질 Ta에 대해 좋은 식각특성을 보였고, two-step 식각을 통해 microloading effect를 억제함으로써 0.2 $\mu\textrm{m}$이하의 미세패턴을 식각해 낼 수 있었다.