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New Ruthenium Complexes for Semiconductor Device Using Atomic Layer Deposition

  • Jung, Eun Ae;Han, Jeong Hwan;Park, Bo Keun;Jeon, Dong Ju;Kim, Chang Gyoun;Chung, Taek-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.363-363
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    • 2014
  • Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

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Numerical Investigation of the Density and Inlet Velocity Effects on Fiber Orientation Inside Fresh SFRSCC (SFRSCC의 섬유 방향성에 미치는 입구 속도와 점성의 영향성에 대한 수치해석)

  • Azad, Ali;Lee, Jong-Jae;Lee, Jong-Han;Lee, Gun-Jun;An, Yun-Kyu
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.22 no.3
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    • pp.16-20
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    • 2018
  • Steel Fiber reinforced self-compacting concrete (SFRSCC) has been widely used in a number of structures, such as ordinary civil infrastructures, sky scrapers, nuclear power plants, hospitals, dams, channels and etc. Thanks to its short and discrete reinforcing fibers, its performance, including tensile strength, ductility, toughness and flexural strength gets much better in comparison with ordinary self-compacting concrete (SCC) without any reinforcing fibers. Despite all these aforementioned advantages of SFRSCC, its performance highly depends on fiber's orientation. In case of short discrete fibers, the orientation of fibers is completely random and cannot be controlled during pumping process. If fibers distribution inside hardened state concrete are randomly distributed, it leads to less resistance potential of concrete element, especially in terms of flexural and tensile strength. The maximum expected strength may not be achieved. Therefore, fiber alignment has been considered as one of the important factors in SFRSCC. To address this issue, this study investigates the effects of concrete matrix's density and inlet velocity on fiber alignment during the pumping process using a finite element method.

Design of Bias Circuit for Measuring the Multi-channel ISFET (다채널 ISFET 측정용 단일 바이어스 회로의 설계)

  • Cho, Byung-Woog;Kim, Young-Jin;Kim, Chang-Soo;Choi, Pyung;Sohn, Byung-Ki
    • Journal of Sensor Science and Technology
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    • v.7 no.1
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    • pp.31-38
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    • 1998
  • Multi-channel sensors can be used to increase the reliability and remove the random iloise in ion-sensitive field effect transistors(ISFETs). Multi-channel sensors is also an essential step toward potential fabrication of sensors for several ionic species in one device. However, when the multi-channel sensors are separately biased, the biasing problems become difficult, that is to say, the bias circuit is needed as many sensors. In this work, a circuit for biasing the four pH-ISFETs in null-balance method, where bias voltages are switched, was proposed. The proposed concept is need only one bias circuit for the four sensors. Therefore it has advantages of smaller size and lower power consumption than the case that all sensors are separately biased at a time. The proposed circuit was tested with discrete devices and its performance was investigated. In the recent trend, sensor systems are implemented as portable systems. So the verified measurement circuit was integrated by using the CMOS circuit. Fortunately, ISFET fabrication process can be compatible with CMOS process. Full circuit has a mask area of $660{\mu}m{\times}500{\mu}m$. In the future, this step will be used for developing the smart sensor system with ISFET.

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Novel Graphene Volatile Memory Using Hysteresis Controlled by Gate Bias

  • Lee, Dae-Yeong;Zang, Gang;Ra, Chang-Ho;Shen, Tian-Zi;Lee, Seung-Hwan;Lim, Yeong-Dae;Li, Hua-Min;Yoo, Won-Jong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.120-120
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    • 2011
  • Graphene is a carbon based material and it has great potential of being utilized in various fields such as electronics, optics, and mechanics. In order to develop graphene-based logic systems, graphene field-effect transistor (GFET) has been extensively explored. GFET requires supporting devices, such as volatile memory, to function in an embedded logic system. As far as we understand, graphene has not been studied for volatile memory application, although several graphene non-volatile memories (GNVMs) have been reported. However, we think that these GNVM are unable to serve the logic system properly due to the very slow program/read speed. In this study, a GVM based on the GFET structure and using an engineered graphene channel is proposed. By manipulating the deposition condition, charge traps are introduced to graphene channel, which store charges temporarily, so as to enable volatile data storage for GFET. The proposed GVM shows satisfying performance in fast program/erase (P/E) and read speed. Moreover, this GVM has good compatibility with GFET in device fabrication process. This GVM can be designed to be dynamic random access memory (DRAM) in serving the logic systems application. We demonstrated GVM with the structure of FET. By manipulating the graphene synthesis process, we could engineer the charge trap density of graphene layer. In the range that our measurement system can support, we achieved a high performance of GVM in refresh (>10 ${\mu}s$) and retention time (~100 s). Because of high speed, when compared with other graphene based memory devices, GVM proposed in this study can be a strong contender for future electrical system applications.

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Quicksort Using Range Pivot (범위 피벗 퀵정렬)

  • Lee, Sang-Un
    • Journal of the Korea Society of Computer and Information
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    • v.17 no.4
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    • pp.139-145
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    • 2012
  • Generally, Quicksort selects the pivot from leftmost, rightmost, middle, or random location in the array. This paper suggests Quicksort using middle range pivot $P_0$ and continually divides into 2. This method searches the minimum value $L$ and maximum value $H$ in the length n of list $A$. Then compute the initial pivot key $P_0=(H+L)/2$ and swaps $a[i]{\geq}P_0$,$a[j]<P_0$ until $i$=$j$ or $i$>$j$. After the swap, the length of list $A_0$ separates in two lists $a[1]{\leq}A_1{\leq}a[j]$ and $a[i]{\leq}A_2{\leq}a[n]$ and the pivot values are selected by $P_1=P_0/2$, $P_2=P_0+P_1$. This process repeated until the length of partial list is two. At the length of list is two and $a$[1]>$a$[2], swaps as $a[1]{\leftrightarrow}a[2]$. This method is simpler pivot key process than Quicksort and improved the worst-case computational complexity $O(n^2)$ to $O(n{\log}n)$.

Image Encryption and Decryption System using Frequency Phase Encoding and Phase Wrapping Method (주파수 위상 부호화와 위상 랩핑 방법을 이용한 영상 암호화 및 복호화 시스템)

  • Seo, Dong-Hoan;Shin, Chang-Mok;Cho, Kyu-Bo
    • Korean Journal of Optics and Photonics
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    • v.17 no.6
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    • pp.507-513
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    • 2006
  • In this paper, we propose an improved image encryption and fault-tolerance decryption method using phase wrapping and phase encoding in the frequency domain. To generate an encrypted image, an encrypting key which denotes the product of a phase-encoded virtual image, not an original image, and a random phase image is zero-padded and Fourier transformed and its real-valued data is phase-encoded. The decryption process is simply performed by performing the inverse Fourier transform for multiplication of the encrypted key with the decrypting key, made of the proposed phase wrapping method, in the output plane with a spatial filter. This process has the advantages of solving optical alignment and pixel-to-pixel mapping problems. The proposed method using the virtual image, which does not contain any information from the original image, prevents the possibility of counterfeiting from unauthorized people and also can be used as a current spatial light modulator technology by phase encoding of the real-valued data. Computer simulations show the validity of the encryption scheme and the robustness to noise of the encrypted key or the decryption key in the proposed technique.

Studies on the catalytic charcoaling (촉매적(觸媒的) 제탄(製炭)에 관(關)한 시험(試驗))

  • Park, Tae Sik;Park, Meung Gue
    • Journal of Korean Society of Forest Science
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    • v.3 no.1
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    • pp.18-22
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    • 1963
  • 1. Objects The experiments of catalytic aharcoaling were carried out for the fallowing purposes. (1) To determine the economically desirable amount of catalytic materials to be used when a catalytic charcoaling is practiced. (2) To observe the rate of carbonization of non-treated charcoal wood when the catalytic charcoaling is proceeded in the same charcoal pit. 2. Meterials (1) Small sample chips made of oak (Q. accutissima Carr.), measured by 0.5cm in width and thickness, respectively, and 1cm in length, were used as charcoal wood in each experiment. (2) Ammonium chloride was used as a catalytic material and electric kiln as a charcoaling apparatus. 3. Experiment (1) The sample chips were put into a electric oven for three hours at the temperature $60^{\circ}{\sim}70^{\circ}C$ in order to reduce some water contents. (2) Oven dried sample chips were then soaked for an hour in solution of ammonium chloride. Three kinds of solution were prepared, that is, 2.5%, 5%, and 10%, solution in which the amount of ammonium chloride used was weighed at the rate of 0.5%, 1.0%, and 2.0% to the total weight of the sample chips, resppectivelly. (3) Soaked sample chips were put in the air for 12 hours to reduce some water contents, and then were put into electric oven for 2 hours at the temperature $105^{\circ}{\sim}110^{\circ}C$. (4) Dried sample chips were kept in a desiccator with control sample chips which were treated excarly the same process as the treated sample chips except only not using the ammonium chloride in the process of soking. (5) Sample chips kept in the desiccator were used at random in each charcoaling experiment. (6) Charcoaling in the electric kiln were carried out by using small crucibles with complete cover to reduce the amount of ash. At each charcoaling experiment four crucibles filled with sample ships, weighed about 20gr, were put into electric kiln. The charcoaling was continued for an hour at the temperature $400^{\circ}{\sim}450^{\circ}C$. (7) In order to investigate the influence given by the gases produced during the catalytic charcoaling to the rate of carbonization of non-treated sample chips, the following experiment was done. (a) A crueible was divided into two parts by inserting a fine iron net at the middle of the crucible, and then non-treated sample chips, weighed about 10gr, were put in the upper part of the crucible and treated sample chips, weighed also about 10gr, were put in the under part. (b) The crucibles filled with two kinds of sample chips were put into a electric kiln for an hour at the temperature $400^{\circ}{\sim}450^{\circ}C$. 4. Results. Results for two replications (with four crucibles in one replication) for each experiment designed are as follows : (1) The rats of carbonization of the non treated sample chips, and that of the treated sample chips with ammonium chloride at the rate of 1.5%, 1.0%, and 2.0% to the total weight of the sample chips used were averaged at 19.85%, 22.63%, 24.14%, and 26.60%, respectively. (2) The rats of carbonization of the non-treated sample chips were averaged at (a) 20.04% (0.5% treatment), (b) 20.28% (1.0% treatment), and (c) 20.61% (2.0% treatment) when the treated sample chips were carbonized in the same crucible.

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Predictors of Intention to Undergo Mammography among Underutilizers (유방암 검진 미수검자의 검진의도 관련 요인)

  • Kye, Su-Yeon;Park, Kee-Ho;Choi, Kui-Son;Bae, Mi-Jin;Moon, In-Ok;Yun, Young-Ok;Lim, Min-Kyung
    • Korean Journal of Health Education and Promotion
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    • v.26 no.2
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    • pp.75-86
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    • 2009
  • Objectives: To identify the factors associated with the intention to undergo mammography among Korean women without a prior screening experience. Methods: Among 1,039 women of the general population, we selected 145 women (mean age: 54.2 years, age range : 40-78 years) without any prior experience with mammography. They were recruited for the 'Cancer Information Needs Assessment Survey' by using the method of random multi-stage cluster sampling. Data on the socio-demographic characteristics, intention to undergo mammography based on the Precaution Adoption Process Model, level of self belief and self efficacy for breast cancer screening, motivation for decision to undergo breast cancer screening were obtained by conducting a household survey. Results: Of the study subjects, 49.7% were classified as "unengaged" and "decided not to act" regarding breast cancer screening. Women with the intention to undergo mammography were more likely to be younger (OR 0.11, 95%CI 0.04-0.36), to have been recommended to undergo screening by others (OR 3.27, 95%CI 1.36-7.87), to have a high level of perceived sensitivity (OR 3.15, 95%CI 1.27-7.82), and to have a high level of self efficacy (OR 1.09, 95%CI 0.97-1.23). Exposure to campaigns and information regarding breast cancer screening, whether cancer patients are or not in around, perceived severity, perceived benefit, and perceived cost were factors that were not significantly associated with the intention to undergo mammography. Conclusion: It is necessary to develop tailored intervention strategies for women who have never undergone breast cancer screening on the basis of their demographic characteristics and factors that positively influence the intention to undergo mammography.

Single Path Phase-only Security System using Phase-encoded XOR Operations in Fourier Plane (푸리에 영역에서의 위상 변조 Exclusive-OR 연산을 이용한 단일 경로 위상 암호화 시스템)

  • Shin, Chang-Mok;Cho, Kyu-Bo;Kim, Soo-Joong;Noh, Duck-Soo
    • Korean Journal of Optics and Photonics
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    • v.16 no.4
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    • pp.326-333
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    • 2005
  • Phase-only encryption scheme using exclusive-OR rules in Fourier plane and a single path decryption system are presented. A zero-padded original image, multiplied by a random phase image, is Fourier transformed and its real-valued data is encrypted with key data by using XOR rules. A decryption is simply performed based on 2-1 setup with spatial filter by Fourier transform for multiplying phase-only encrypted data by phase-only key data, which are obtained by phase-encoding process, and spatial filtering for zero-order elimination in inverse-Fourier plane. Since the encryption process is peformed in Fourier plane, proposed encryption scheme is more tolerant to loss of key information by scratching or cutting than previous XOR encryption method in space domain. Compare with previous phase-visualization systems, due to the simple architecture without a reference wave, our system is basically robust to mechanical vibrations and fluctuations. Numerical simulations have confirmed the proposed technique as high-level encryption and simple decryption architecture.

Optimal Release Problems based on a Stochastic Differential Equation Model Under the Distributed Software Development Environments (분산 소프트웨어 개발환경에 대한 확률 미분 방정식 모델을 이용한 최적 배포 문제)

  • Lee Jae-Ki;Nam Sang-Sik
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.31 no.7A
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    • pp.649-658
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    • 2006
  • Recently, Software Development was applied to new-approach methods as a various form : client-server system and web-programing, object-orient concept, distributed development with a network environments. On the other hand, it be concerned about the distributed development technology and increasing of object-oriented methodology. These technology is spread out the software quality and improve of software production, reduction of the software develop working. Futures, we considered about the distributed software development technique with a many workstation. In this paper, we discussed optimal release problem based on a stochastic differential equation model for the distributed Software development environments. In the past, the software reliability applied to quality a rough guess with a software development process and approach by the estimation of reliability for a test progress. But, in this paper, we decided to optimal release times two method: first, SRGM with an error counting model in fault detection phase by NHPP. Second, fault detection is change of continuous random variable by SDE(stochastic differential equation). Here, we decide to optimal release time as a minimum cost form the detected failure data and debugging fault data during the system test phase and operational phase. Especially, we discussed to limitation of reliability considering of total software cost probability distribution.