• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.363-363
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• 2008

The development of dry etching process for sapphire wafer with plasma has been key issues for the opto-electric devices. The challenges are increasing control and obtaining low plasma induced-damage because an unwanted scattering of radiation is caused by the spatial disorder of pattern and variation of surface roughness. The plasma-induced damages during plasma etching process can be classified as impurity contamination of residual etch products or bonding disruption in lattice due to charged particle bombardment. Therefor, fine pattern technology with low damaged etching process and high etch rate are urgently needed. Until now, there are a lot of reports on the etching of sapphire wafer with using $Cl_2$/Ar, $BCl_3$/Ar, HBr/Ar and so on [1]. However, the etch behavior of sapphire wafer have investigated with variation of only one parameter while other parameters are fixed. In this study, we investigated the effect of pressure and other parameters on the etch rate and the selectivity. We selected $BCl_3$ as an etch ant because $BCl_3$ plasmas are widely used in etching process of oxide materials. In plasma, the $BCl_3$ molecule can be dissociated into B radical, $B^+$ ion, Cl radical and $Cl^+$ ion. However, the $BCl_3$ molecule can be dissociated into B radical or $B^+$ ion easier than Cl radical or $Cl^+$ ion. First, we evaluated the etch behaviors of sapphire wafer in $BCl_3$/additive gases (Ar, $N_2,Cl_2$) gases. The behavior of etch rate of sapphire substrate was monitored as a function of additive gas ratio to $BCl_3$ based plasma, total flow rate, r.f. power, d.c. bias under different pressures of 5 mTorr, 10 mTorr, 20 mTorr and 30 mTorr. The etch rates of sapphire wafer, $SiO_2$ and PR were measured with using alpha step surface profiler. In order to understand the changes of radicals, volume density of Cl, B radical and BCl molecule were investigated with optical emission spectroscopy (OES). The chemical states of $Al_2O_3$ thin films were studied with energy dispersive X-ray (EDX) and depth profile anlysis of auger electron spectroscopy (AES). The enhancement of sapphire substrate can be explained by the reactive ion etching mechanism with the competition of the formation of volatile $AlCl_3$, $Al_2Cl_6$ or $BOCl_3$ and the sputter effect by energetic ions.

• Proceedings of the Korean Society of Medical Physics Conference
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• 2002.09a
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• pp.400-403
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• 2002

The fundamental experiments for measuring soft x-ray characteristics from the vacuum capillary are described. These experiments were primarily performed in order to generate line spectra such as x-ray lasers. The generator consists of a high-voltage power supply, a polarity-inversion ignitron pulse generator, a turbo-molecular pump, and a radiation tube with a capillary. A high-voltage condenser of 200 nF in the pulse generator is charged up to 20 kV by the power supply, and the electric charges in the condenser are discharged to the capillary in the tube after closing the ignitron. During the discharge, weakly ionized plasma forms on the inner and outer sides of a capillary. In the present work, the pump evacuates air from the tube with a pressure of about 1 mPa, and a demountable capillary was developed in order to measure x-ray spectra according to changes in the capillary length. In this capillary, the anode (target) and cathode elements can be changed corresponding to the objectives. The capillary diameter is 2.0 mm, and the length is adjusted from 1 to 50 mm. When a capillary with aluminum anode and cathode electrodes was employed, both the cathode voltage and the discharge current almost displayed damped oscillations. The peak values of the voltage and current increased when the charging voltage was increased, and their maximum values were -10.8 kV and 4.7 kA, respectively. The x-ray durations observed by a 1.6 ${\mu}$m aluminum filter were less than 30 ${\mu}$s, and we detected the aluminum characteristic x-ray intensity using a 6.8 ${\mu}$m aluminum filter. In the spectrum measurement, two sets of aluminum and titanium electrodes were employed, and we observed multi-line spectra. The line photon energies seldom varied according to changes in the condenser charging voltage and to changes in the electrode element. In the case where the titanium electrode was employed, the line number decreased with corresponding decreases in the capillary length. Compared with incoherent visible light, these rays from the capillary were diffracted and diffused greatly after passing through two slits.

• Fire Science and Engineering
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• v.30 no.6
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• pp.48-56
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• 2016

A crude oil leakage from a large atmospheric storage tank occurred on 4 April 2014 at 14:50 in Ulsan City, while storing the crude oil in the tank. Emergency Rescue Control Group was deployed in the scene. The company, Fire Service Headquarters and associated agencies got together in Command Post (CP) for discussing an effective corresponding strategy. Many solution plans were drafted in the debate such as power down, stopping the facilities, checking the density of inflammable gas, suppressing oil evaporation, moving the leaked crude oil to a nearby tank and a processing plant and avoiding marine pollution. All the solutions were carried out in cooperation with several agencies and partners. The oil leakage accident was successfully settled up within the process of responding, The Fire Service Headquarters and the company thought that the most important thing was the suppression of oil evaporation and the elimination of ignition source. With Fire Service Headquarters and several agencies' every effort, an explosion and a fire didn't occurred in the scene. This study suggest the improvement of the operating system in Emergency Rescue Control Group in case of petroleum leakage, explosion and fire accidents of atmospheric storage tank, different from a ordinary disaster. Assuming that petroleum leakage in atmospheric storage tank develop the explosion and fire accidents, the spreading speed of the flame and the burning time was experimented and compared with each other. Furthermore, this study concentrates on the effective field response plan prepared for the afterward explosion and fire accidents from petroleum leak in a storage tank, with the database experimented and analyzed in accordance with the angle of radiation in the foam nozzle and the pressure of pumping in a fire engine.

• 한국해양학회지
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• v.29 no.4
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• pp.325-337
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• 1994

The distributions of heat and momentum fluxes on the surface over the oceans around the Korean Peninsula are obtained based on the surface-layer flux model of Kim and Kang (1994), and their seasonal variations are examined in the present study. the input data of the model is the oceanatmosphere data with a grid interval of 2$^{\circ}$ in longitude and latitude. The atmosphere data, which are the pressure, temperature, and specific humidity on the 1000 mb level for 3 year period of 1985∼1987, are obtained from the European center for Medium Range Forecast. The sea surface temperature (SST) is obtained from National Meteorological Center (NMC). The solar insolation and longwave radiation on the ocean surface are obtained, respectively, from the NASA satellite data and based on an emprical formula. It is shown from the net heat flux that the oceans near Korea lose heat to the atmosphere in January and October with the rates of 200∼ 400 Wm/SUP -2/ and 100 Wm/SUP -2/, respectively. But the oceans are heated by the atmosphere in April and July with about the same rate of 100 Wm/SUP -2/. The annualmean net heat flux is negative over the entire domain except the northern part of the Yellow Sea. The largest annual-mean cooling rate of about 120 Wm/SUP -2/ is appeared off the southwest of Japan. In the East Sea, the annual-mean cooling rate is 60∼90 Wm/SUP -2/ in the southern and northern parts and about 30 Wm/SUP -2/ in the middle part. The magnitude of wind stress in january is 3∼ 5 times bigger than those of the other months. As a result, the spatial pattern of annual-mean wind stress is similar to that of January. It is also shown that the annual-mean wind stress curl is negative. in the East China Sea and the South Sea,but it is positive in the northern part of the Yellow Sea.In the East sea,the stress curl is positive in the southeast and northern parts and negative in the northwestern part.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.3
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• pp.59-67
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• 2008

Due to the fast increase in cellular phone users, public interest on health effect of electromagnetic fields(EMFs) by cellular phonos is gradually increasing. Some EHS(electromagnetic hypersensitivity) patients complain of psycho-neurophysiological symptoms such as headaches, insomnia, memory loss resulting from RF radiation by CDMA cellular phones. However, EHS is difficult to diagnose and depends on the individual's subjective judgement. And we don't know clearly if the cause of EHS is uneasiness or real exposure. There have been various EHS volunteer studies on heart rate, blood pressure and subjective symptoms using GSM phones. But there are few studies on experimental case-control study investigating physiological parameters, subjective symptoms, and perception of EMFs. In this study, two volunteer groups of 17 self-declared EHS and 19 controls were exposed to both sham and real RF exposure by CDMA cellular phones for half an hour each. We investigated not only the physiological parameters such as heart rates, respiration rates and HRVs(hear rate variability), but also the perception of EMFs and subjective symptoms. As the results, EMF exposure did not have any effects on the subjective symptoms or physiological parameters for both groups. For the EMF perception, there was no evidence that EHS group perceived the EMFs correctly than the control group.

• Journal of Astronomy and Space Sciences
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• v.22 no.4
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• pp.463-472
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• 2005

In this paper, the dynamic model development for interplanetary navigation has been discussed. The Cowell method for special perturbation theories was employed to develop an interplanetary trajectory propagator including the perturbations due to geopotential, the Earth's dynamic polar motion, the gravity of the Sun, the Moon and the other planets in the solar system, the relativistic effect of the Sun, solar radiation pressure, and atmospheric drag. The equations of motion in dynamic model were numerically integrated using Adams-Cowell 11th order predictor-corrector method. To compare the influences of each perturbation, trajectory propagation was performed using initial transfer orbit elements of the Mars Express mission launched in 2003, because it can be the criterion to choose proper perturbation models for navigation upon required accuracy. To investigate the performance of dynamic model developed, it was tested whether the spacecraft can reach the Mars. The interplanetary navigation tool developed in this study demonstrated the spacecraft entering the Mars SOI(Sphere of Influence) and its velocity .elative to the Mars was less than the escape velocity of the Mars, hence, the spacecraft can arrive at the target planet. The obtained results were also verified by using the AGI Satellite Tool Kit. It is concluded that the developed program is suitable for supporting interplanetary spacecraft mission for a future Korean Mars mission.

• Journal of the Korean Society of Radiology
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• v.3 no.1
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• pp.17-21
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• 2009

The Recently, large area matrix-addressed image detectors are investigated for X-ray imaging with medical diagnostic and other applications. In this paper, a new flat panel gas detector for diagnostic X-ray imaging is proposed, and its characteristics are investigated. The research of flat panel gas detector is not exist at all. Because of difficulty to inject gas against to atmospheric pressure. So almost gas detector made by chamber shape. We made flat panel sample by display technique. (ex: PDP, Fed, etc.) The experimental measurements, the transparent electrodes, dielectric layer, and the MgO protection layer were formed in front glass. And, the X-ray phosphor layer and address electrodes are formed in the rare glass. The dark current, the x-ray sensitivity and linearity as a function of electric field were measured to investigate the electrical properties. From the results, the stabilized dark current density and the significant x-ray sensitivity were obtained. And the good linearity as a function of exposure dose was showed in wide diagnostic energy range. These results means that the passive matrix-addressed flat panel gas detector can be used for digital x-ray imaging.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.6
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• pp.583-590
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• 2013

Variable emittance radiators can be used in a thermal management system in space because their total emittance changes depending on the temperature of the system. When the temperature of the system decreased, the emittance also decreased so as to minimize the heat loss to the environment. In contrast, when the temperature of the system increased, the emittance also increased such that radiation cooling could occur. Thermochromic materials, whose emittance is a function of the temperature, are often used in variable emittance radiators because no additional parts are needed. In this study, we fabricated a variable-emittance coating by using a sol-gel method based on LSMO ($La_{1-x}Sr_xMnO_3$) and experimentally characterized the emittance change with respect to temperature. Furthermore, we also examined the stability of LSMO film in space environments by exposing it to extremely low pressure and temperature.

• Journal of Bio-Environment Control
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• v.15 no.2
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• pp.162-166
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• 2006

The objectives of this study were to determine the effect of cultivation time on the incidence of brown fruit stem (BFS) in glasshouse sweet pepper (cv. Special) and to investigate environmental causes of this disorder. The plants transplanted on 31 August (T1) showed more incidence of BFS than those on 24 November (T2) (6.1% vs.2.9%; P<0.01). The BFS symptom began to appear after completion of fruit enlargement, more often around fruit coloring period. Comparing the environmental factors between T1 and T2, with their data collected for 3 weeks around fruit coloring period, the factor that was most likely responsible for BFS incidence was found to be the night-time humidity deficit (HD) ($1.9g{\cdot}m^{-3}\;vs\;2.9g{\cdot}m^{-3}HD$). These results were reconfirmed as T1 was compared to the plants (T3) that were transplanted at a similar time of the following year to T1, but designed to reduce BSF by increasing air HD via heating at night. That is,T3 had much higher night-time HD than T1 ($5.9g{\cdot}m^{-3}\;vs\;1.9g{\cdot}m^{-3}HD$), and showed no incidence of BFS. These results indicated that, to prevent BFS incidence in the winter-harvesting sweet pepper plants, air humidity at night should be controlled low, especially for the fruit coloring period after fruit enlargement period is completed.

• Journal of the Society of Naval Architects of Korea
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• v.30 no.1
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• pp.65-72
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• 1993

A numerical method for nonlinear free-surface-wave problem is developed in this paper. The final goal of this study is to simulate the towing tank experiment of a ship model and to partially replace the experiment by the numerical model. The exact problem in the scope of potential flow theory is formulated by a variational principle based on the classical Hamilton's principle. A localized finite element method is used in the present numerical computations which made use of the following two notable steps. The first step is an efficient treatment of the numerical radiation condition by using the intermediate nonlinear-to-linear transition buffer subdomain between the fully nonlinear and linear subdomains. The second is the use of a modal analysis in the final stage of the solution procedures, which enables us to reduce the computation time drastically. With these improvements the present method can treat a much larger computational domain than that was possible previously. A pressure patch on the free surface was chosen as an example. From the present computed results we could investigate the effect of nonlinearity on the down-stream wave pattern more clearly than others, because much larger computational domain was treated. We found, specifically, the widening of the Kelvin angle and the increase of the wave numbers and the magnitude of wave profiles.