• 마이크로전자및패키징학회지
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• 제11권4호
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• pp.81-86
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• 2004

메가소닉파을 이용하여 KOH 용액에서의 실리콘 이방성 습식 식각의 특성들을 개선하기 위한 새로운 방법에 관한 연구를 하였다. P형 6인치 실리콘 웨이퍼를 메가소닉파를 이용한 상태와 이용하지 않은 상태에서 식각 실험을 각각 수행하여 식각 특성들을 비교하였다. 메가소닉파는 식각균일도, 표면 조도 등과 같은 습식 식각의 특성들을 개선시키는 것으로 나타났다. 메가소닉파를 이용했을 때 식각 균일도는 전체 웨이퍼 표면의 ${\pm}1\%$ 이하이며, 메가소닉파를 이용하지 않았을 때는 ${\pm}20\%$이상이다. 식각 공정에 사용한 초기의 실리콘웨이퍼의 제곱 평균 표면 조도($R_{rms}$)는 0.23 nm이다. 자기 진동과 초음파 진동을 이용한 식각에서의 평균 표면 조도는 각각 566 nm, 66 nm로 보고 되었지만, 메가소닉파를 이용하여 $37{\mu}m$ 깊이로 식각한 경우 평균 표면 조도가 1.7nm임을 실험을 통하여 검증하였다. 이러한 결과는 메가소닉파를 이용한 식각 방법이 식각 균일도, 표면 평균 조도 등과 같은 식각 특성들을 개선시키는데 효과적인 방법임을 알 수 있다.

• 대한원격탐사학회지
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• 제27권3호
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• pp.225-234
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• 2011

This study proposes an inversion algorithm to extract the surface parameters, such as surface roughness and soil moisture contents, using multi-frequency SAR data. The study areas include the tidal flats of Jebu Island and the reclaimed lands of Hwaong district on the western coasts of the Korean peninsula. SAR data of three frequencies were accordingly calibrated to provide precise backscattering coefficients through absolute radiometric calibration. The root mean square (RMS) height and the correlation length, which can describe the surface roughness, were extracted from the backscattering coefficients using the inversion of the Integral Equation Method (IEM). The IEM model was appropriately modified to accommodate the environmental conditions of tidal flats. Volumetric soil moisture was also simultaneously extracted from the dielectric constant using the empirical model, which define the relations between volumetric soil moistures and dielectric constants. The results obtained from the proposed algorithm were verified with the in-situ measurements, and we confirmed that multi-frequency SAR observations combined with the surface scattering model for tidal flats can be used to quantitatively retrieve the geophysical surface parameters in tidal flats.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.468-472
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• 2005

This paper is to investigate the influence of the endface quality on the loss characteristics of a plastic optical fiber connector for in-car network service. Using the parameters of the surface roughness and applied load, insertion loss of connector is measured. Due to scattering and change of refractive index, an optimal condition for low-loss coupling exists. We present the optimal condition as surface roughness $R_{rms}$ = 8 nm and contact load up to 50 N.

• 한국정밀공학회지
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• 제23권3호
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• pp.61-68
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• 2006

This paper is to investigate the influence of the endface quality on the loss characteristics of a plastic optical fiber(POF) connector and the stability of new designed sleeve for in-car network service. Using the parameters of the surface roughness and applied load, insertion loss of connector is measured. Endface condition for optimizing the connection is presented by the surface roughness satisfying loss criteria and the stress for minimizing the loss, $R_{rms}=8nm$ and 19 MPa, respectively. By vibration test and dynamic loss measurement, we show the stability of the new designed sleeve.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1393-1395
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• 2001

DLC films are deposited by using a modified FCVA system. Carbon amorphous network, surface roughness, internal compressive stress, resistivity, and Hall mobility are studied as a function of nitrogen flow rate (0 $\sim$ 10 sccm). As the nitrogen content is increased in the carbon network, the size of $sp^2$ clusters is increased, the internal compressive stress is decreased, and the resistivity is remarkably decreased. The RMS values of the surface roughness are measured to be in the range of 0.2$\sim$0.5nm. The Hall mobility of DLC film with 3 sccm of nitrogen added is 3.22 $cm^2/V{\cdot}$s.

• Applied Science and Convergence Technology
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• 제23권2호
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• pp.90-96
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• 2014

Flexible $ZrO_2$ films as dielectric materials for high-energy-density capacitors were deposited on polyethylene terephthalate (PET) substrates by RF magnetron sputtering. The growth behavior, microstructure and electrical properties of the flexible $ZrO_2$ films were dependent on the sputtering pressure and gas ratio. Although $ZrO_2$ films were deposited at room temperature, all films showed a tetragonal crystalline structure regardless of the sputtering variables. The surface of the film became a surface with large white particles upon an increase in the $O_2/Ar$ gas ratio. The RMS roughness and crystallite size of the $ZrO_2$ films increased with an increase in the sputtering pressure. The electrical properties of the $ZrO_2$ films were affected by the microstructure and roughness. The $ZrO_2$ films exhibited a dielectric constant of 21~38 at 1 kHz and a leakage current density of $10^{-6}{\sim}10^{-5}A/cm^2$ at 300 kV/cm.

• Journal of Magnetics
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• 제7권3호
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• pp.72-79
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• 2002

Local M-H loops have been measured on the free layer of a tunneling magnetoresistance (TMR) junction using the magneto-optical Kerr effect (MOKE) system, with an optical beam size of about 2 $\mu$m diameter. Tunnel junctions were deposited using the DC magnetron sputtering method in a chamber with a base pressure of 3$\times$10$^{-9}$ Torr. The relatively irregular variations of coercive force H$_c$(∼17.5 Oe) and unidirectional anisotropy field H$_{ua}$(∼7.5 Oe) in the as-deposited sample are revealed. After $200{^{\circ}C}$ annealing, He decreases to 15 Oe but H$_{ua}$ increases to 20 Oe with smooth local variations. Two-dimensional plots of H$_c$ and H$_{ua}$ show the symmetric saddle shapes with their axes aligned with the pinned layer, irrespective of the annealing field angle. This is thought to be caused by geometric effects during deposition, together with a minor annealing effect. In addition, the variation of root mean square (RMS) surface roughness reveals it to be symmetric with respect to the center of the pinned-layer axis, with the roughness of 2.5 $\AA$ near the edge and 5.8 $\AA$ at the junction center. Comparison of surface roughness with the variation of H$_{ua}$ suggests that the H$_{ua}$ variation of the free layer is well described by dipole interactions related to surface roughness. As a whole, the reversal magnetization is not uniform over the entire junction area and the macroscopic properties are governed by the average sum of local distributions.

• Journal of Welding and Joining
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• 제19권3호
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• pp.298-304
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• 2001

Turbine blade is subject to force of three types ; the torsional force by torsional mount, the centrifugal force by the rotation of rotor and the cyclic bending force by steam pressure. The cyclic bending force was a main factor on fatigue strength. SEM fractography in root of turbine blade showed micro-clack width was not dependent on stress intensity factor range. Especially, fatigue did not exist on SEM photograph in root of turbine blade. To clear out the fracture mechanism of turbine blade, nanofractography was needed on 3-dimensional crack initiation and crack growth with high magnification. Fatigue striation partially existed on AFM photograph in root of turbine blade. Therefore, to find a fracture mechanism of the torsion-mounted blade in nuclear power plant, the relation between stress intensity factor range and surface roughness measured by AFM was estimated, and then the load amplitude ΔP applied to turbine blade was predicted exactly by root mean square roughness.

• 열처리공학회지
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• 제23권1호
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• pp.29-33
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• 2010

Titanium nitride (TiN) films were deposited on the polycarbonate substrate by using radio frequency (RF) magnetron sputtering without intentional substrate heating. After deposition, the films were bombarded with intense electron beam for 20 minutes. The intense electron irradiation impacts on the crystalline, hardness and surface roughness of the TiN films. The films irradiated with an electron beam of 300 eV show the small grains on the surface, while as deposited TiN films did not showany grains on the surface. Also the surface harness evaluated with micro indenter was increased up to 18 Gpa at electron energy of 900 eV after electron beam irradiation. In addition, surface root mean square (RMS) roughness of the films irradiated with intense electron beam affected strongly. The films irradiated by electron beam with 900 eV have the lowest roughness of 1.2 nm in this study.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.366-366
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• 2008

Amorphous carbon (a-C) is an interesting materials and its characteristics can be varied by tuning it $sp^3$ fractions. The $sp^3$ fraction in a-C films depends on the kinetic energy of the deposited carbon ions. In this work, a-C films was synthesized on Si(100) and glass substrates at room temperature by closed-field unbalanced magnetron (CFUBM) sputtering with the increase of graphite target power density. The structural and physical properties of films were investigated by using Raman spectroscopy, X-ray photoelectron spectrometer (XPS), nano- indentation, atomic force microscope (AFM) and contact-angle measurement. We obtained the good tribological properties, such as high hardness up to 26 GPa., friction coefficient lower than 0.1 and the smooth surface (rms roughness: 0.12 nm). The increase of the physical properties with the increase of target power density are related to the increase of nano-clusters in the carbon network. Also, these results might be due to the increase of the subplantation and resputtering by the increase of ions density in the plasma.