Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
권호 표지
DOI QR코드

DOI QR Code

Structural and Electrical Properties of ZrO2 Films Coated onto PET for High-Energy-Density Capacitors

  • Park, Sangshik (School of Nano Materials Engineering, Kyungpook National University)
  • Received : 2014.03.17
  • Accepted : 2014.03.26
  • Published : 2014.03.30
Download PDF
⟨ Previous Next ⟩

Abstract

Flexible $ZrO_2$ films as dielectric materials for high-energy-density capacitors were deposited on polyethylene terephthalate (PET) substrates by RF magnetron sputtering. The growth behavior, microstructure and electrical properties of the flexible $ZrO_2$ films were dependent on the sputtering pressure and gas ratio. Although $ZrO_2$ films were deposited at room temperature, all films showed a tetragonal crystalline structure regardless of the sputtering variables. The surface of the film became a surface with large white particles upon an increase in the $O_2/Ar$ gas ratio. The RMS roughness and crystallite size of the $ZrO_2$ films increased with an increase in the sputtering pressure. The electrical properties of the $ZrO_2$ films were affected by the microstructure and roughness. The $ZrO_2$ films exhibited a dielectric constant of 21~38 at 1 kHz and a leakage current density of $10^{-6}{\sim}10^{-5}A/cm^2$ at 300 kV/cm.

Keywords

References

  1. W. J. Sarjeant, J. Zirnheld, and F. W. MacDougall, IEEE Trans. Plasma Sci. 26, 1368 (1998). https://doi.org/10.1109/27.736020
  2. M. T. Domonkos, S. Heidger, D. Brown, J. V. Parker, C. W. Gregg, K. Slenes, W. Hackenberger, S. Kwon, E. Loree, and T. Tran, IEEE Trans. Plasma Sci. 38, 2686 (2010). https://doi.org/10.1109/TPS.2010.2049124
  3. J. L. Nash, Polymer Eng. Sci. 28, 862 (1988). https://doi.org/10.1002/pen.760281307
  4. P. Karanja and R. Nath, IEEE Trans. Electr. Insul. 28, 294 (1993). https://doi.org/10.1109/14.212254
  5. G. Love, J. Am. Ceram. Soc. 73, 339 (1990).
  6. G. Brennecka, J. Ihlefeld, J-P. Maria, B. Tuttle, and P. Clem, J. Am. Ceram. Soc. 93, 3935 (2010). https://doi.org/10.1111/j.1551-2916.2010.04211.x
  7. P. Vitanov, A. Harizanova, T. Ivanova, Ch. Trapalis, and N. Todorova, Mat. Sci. Eng. B 165, 178 (2009). https://doi.org/10.1016/j.mseb.2009.09.002
  8. N. Q. Minh, J. Am. Ceram. Soc. 76, 563 (1993). https://doi.org/10.1111/j.1151-2916.1993.tb03645.x
  9. M. Sayer and K. Sreenivas, Science 247, 1056 (1990). https://doi.org/10.1126/science.247.4946.1056
  10. A. P. Huang and Paul K. Chu, Mat. Sci. Eng. B 121, 244 (2005). https://doi.org/10.1016/j.mseb.2005.04.002
  11. K. Galicka-Fau, C. Legros, M. Andrieux, M. Brunet, J. Szade, and G. Garry, Appl. Surf. Sci. 255, 8986 (2009). https://doi.org/10.1016/j.apsusc.2009.06.067
  12. W. T. Tang, Z. F. Ying, Z. G. Hu, W. W. Li, J. Sun, N. Xu, and J. D. Wu, Thin Solid Films 518, 5442 (2010). https://doi.org/10.1016/j.tsf.2010.04.012
  13. S. Y. Bae, H. S. Choi, S. Y. Choi, and Y. J. Oh, Ceram. Int. 26, 213 (2000). https://doi.org/10.1016/S0272-8842(99)00043-7
  14. S. Ben Amor, B. Rogier, G. Baud, M. Jacquet, and M. Nardin, Mat. Sci. Eng. B 57, 28 (1998). https://doi.org/10.1016/S0921-5107(98)00205-0
  15. L. I. Maissel and R. Glang, Handbook of Thin Film Technology (McGraw-Hill Inc. New York, USA, 1970), p. 22.
  16. T. Minami, S. Ida, and T. Miyata, Thin Solid Films 416, 93 (2002).
  17. V. Assuncao, E. Fortunato, A. Marques, H. Aguas, I. Ferreira, M. E. V. Costa, and R. Martins, Thin Solid Films 427, 401 (2003). https://doi.org/10.1016/S0040-6090(02)01184-7
  18. P. Zeman and S. Takabayashi, Surf. Coat. Technol. 153, 93 (2002). https://doi.org/10.1016/S0257-8972(01)01553-5
  19. R. F. Bunshah, Handbook of Deposition Technologies for Films and Coatings (2nd ed. Noyes Publication, USA, 1994), p. 270.
  20. S. K. Park, J. I. Han, W. K. Kim, and M. G. Kwak, Thin Solid Films 397, 49 (2001). https://doi.org/10.1016/S0040-6090(01)01489-4
  21. C. Y. Ma, F. Lapostolle, P. Briois, and Q. Y. Zhang, Appl. Surf. Sci. 253, 8718 (2007). https://doi.org/10.1016/j.apsusc.2007.04.054
  22. P. Y. Kuei, J. D. Chou, C. T. Huang, H. H. Ko, and S. C. Su, J. Cryst. Growth 314, 81 (2011). https://doi.org/10.1016/j.jcrysgro.2010.10.162
  23. Y. B. Chen and C. L. Huang, Surf. Coat. Technol. 201, 643 (2006).