• 한국태양에너지학회 논문집
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• 제31권4호
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• pp.48-56
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• 2011

Black cobalt solar selective coatings were prepared by thermal oxidation of electroplated cobalt metal on copper and nickel substrates. The optical properties and structure of the black cobalt selective coating for solar energy utilizations were characterized by glow discharge spectrometry (GDS), ultraviolet-visible-near infrared (UV-VIS-NIR) spectrometer, atom force microscopy(AFM) and X-ray photoelectron spectroscopy(XPS). The optical properties of optimum black cobalt selective coating prepared on copper substrate were a solar absorptance of 0.82 and a thermal emittance of 0.01. From the GDS depth profile analysis of these coatings, the concentration of cobalt particles near the interface was higher than at the surface, but oxygen concentration at the surface was higher than at the interface. These results suggest that the selective absorption was dominated by this chemical composition variation in the coating. The surface of this film exhibited morphology with root-mean-square(rms) roughness of about 144.3nm. XPS measurements data showed that several phases of Co coexist($Co_3O_4$,CoO) in the film.

• 한국전기전자재료학회논문지
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• 제19권10호
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• pp.923-929
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• 2006

Single crystalline ZnO films were successfully grown on R-plane sapphire substrates by plasma-assisted molecular beam epitaxy. Epitaxial relationship between the ZnO film and the R-plane sapphire was determined to be $[-1101]Al_2O_3{\parallel}[0001]ZnO,\;[11-20]Al_2O_2{\parallel}[-1100]ZnO$ based on the in-situ reflection high-energy electron diffraction analysis and confirmed again by high-resolution X-ray diffraction measurements. Grown (11-20) ZnO films surface showed mound-like morphology along the <0001>ZnO direction and the RMS roughness was about 4 nm for $2{\mu}m{\times}2{\mu}m$ area.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.259-264
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• 1995

Recently, in order to achieve high flexibilty, monitoring and control strategies of a new type have been developed. This paper investigates the fesability of using scoustic emission signal analysis for the detection of built-up edge during machining. Results for maching SM45C steel show that the presence of a built-up edge can significantil affect the generation of acoustic emission in metal cutting. When the cutting speed comes to the conditions conducive to development of built-up edge, it is shown that the slope of curve-fitted AErms signal undergoes a change. The fesability of utilizing AErms in built-up edge sensing is sugested.

• 마이크로전자및패키징학회지
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• 제8권1호
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• pp.39-43
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• 2001

$SiC_{x}N$_{y}$ film is deposited by electron cyclotron resonance plasma chemical vapor deposition system using $SiH_4$(5% in Ar), $CH_4$ and $N_2$. Ternary phase $SiC_{x}N$_{y}$ thin film deposited at the microwave power of 600 W and substrate temperature of 700 contains considerable amount of strong C-N bonds. Change in $CH_4$flow rate can effectively control the residual film stress, and typical surface roughness of 34.6 (rms) was obtained. Extreme]y high hardness (3952 Hv) and optical transmittance (95% at 633 nm) was achieved, which is suitable for a LIGA mask membrane application.

• 한국재료학회지
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• 제8권1호
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• pp.71-79
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• 1998

RTCVD법으로 증착된 다결정 Si$_{1-x}$Ge$_{x}$박막에서 Ge조성 증가에 따른 결정립크기변화가 표면거칠기 및 cluster크기에 미치는 영향에 대해 알아본결과, Ge조성 증가에 따라 결정립크기가 증가했으며 증가된 결정립에 의해 Cluster 크기와 표면거칠기값(RMS)들이 증가함을 알 수 있었다. 또한 증착된 다결정 Si$_{1-x}$Ge$_{x}$박막을 RF power와 온도변화에 따라 Ar/H$_{2}$플라즈마를 이용한 수소화처리를 행하여, 수소화 효과와 표면거칠기값 그리고 비저항값 변화에 대해 조사하였다. 수소화처리 후 cluster크기와 표면거칠기값은 기판온도와 RF power 증가에따라 감소함을 알 수 있었으며 특히 기판온도 30$0^{\circ}C$에서는 비저항값이 상당히 증가하였다.

• Journal of Magnetics
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• 제2권4호
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• pp.143-146
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• 1997

The effects of deposition rate on exchange coupling field Hex and coercive field Hc in NiO spin-valves are discussed. The Hex and Hc increased with deposition rate of NiO film. The rms roughnesses of the NiO deposited at 6 ${\AA}$/min (NiO-Low) and 30${\AA}$/min (NiO-High) were almost similar, however, the short-range roughness increased with the deposition rate. The Hex, Hc and surface morphologies for the modulated NiO spin-valve films such as NiO-Low\NiO-High\NiO-Low and NiO-High\NiO-Low were investigated.

• Applied Science and Convergence Technology
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• 제23권3호
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• pp.145-150
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• 2014

MgO thin films were deposited by internal ICP-assisted reactive-magnetron sputtering with bipolar pulse bias on a substrate to suppress random arcs. Mg is reactively sputtered by a bipolar pulsed DC power of 100 kHz into ICP generated by a dielectrically shielded internal antenna. At a mass flow ratio of $Ar/O_2$ = 10 : 2 and an ICP/sputter power ratio of 1 : 1, optimal film properties were obtained (a powder-like crystal orientation distribution and a RMS surface roughness of approximately 0.42 nm). A bipolar pulse substrate bias at a proper frequency (~a few kHz) prevented random arc events. The crystalline preferred orientations varied between the (111), (200) and (220) orientations. By optimizing the plasma conditions, films having similar bulk crystallinity characteristics (JCPDS data) were successfully obtained.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.330-333
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• 2005

The fabrication of mold fur nano imprint lithography (NIL) is experimentally reported using the scanning probe lithography (SPL) technique, instead of the conventional I-beam lithography technique. The nanometer scale patterning structure is fabricated by the localized generation of oxide patterning on the silicon (100) wafer surface with a thin oxide layer, The fabrication method is based on the contact mode of scanning probe microscope (SPM) in air, The precision cleaning process is also performed to reach the low roughness value of $R_{rms}=0.084 nm$, which is important to increase the reproducibility of patterning. The height and width of the oxide dot are generated to be 15.667 nm and 209.5 nm, respectively, by applying 17 V during 350 ms.

• 대한원격탐사학회지
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• 제17권2호
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• pp.141-153
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• 2001

A semi-empirical polarimetric backscattering model for bare soil surfaces is presented. Based on measurements by using polarimetric scatterometers and the JPL AirSAR, as well as the theoretical models, the backscattering coefficints $\sigma$$^0_w$, $\sigma$$^0_{hh}$ and $\sigma$$^0_{vh}$, and the parameters of the copolarized phase-difference probability density function, namely the degree of correlation $\alpha$ and the copolarized-phase-difference $\zeta$, are modeled empirically in terms of the volumetric soil moisture content m$_v$ and the surface roughness parameters $k_s$ and $k_l$, where k=2$\pi$f/c, s is the rms height and l is the correlation length.

• 한국진공학회지
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• 제4권S2호
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• pp.24-29
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• 1995

The magnetic amd magneto-optical(MO)properties of Co-based multilayered(ML)films are known to vary sensitively according to the manufacturing methods and the film microstructures. Co/Pd and Co/Pt ML films with ultrathin layers of Co were prepared by alternating deposition in an ultrahigh-vacuum physical-vapor-deposition system. The individual layer thicknesses of the samples were estimated making use of the angular positions of x-ray diffraction peaks. The magnetic and MO properties were investigated, and correlated systematically to the structural parameters of the films. A Kerr spectrometer was self-manufactured to measure the MO properties such as Kerr rotation angle, ellipticity and reflectivity. The rms surface roughness was also measured using atomic force microscopy. Some of the samples showed good properties for MO medium, such as large perpendicular magnetic anisotropy and Kerr rotation, and perfect squareness of the magnetic hysteresis loop.