• Analytical Science and Technology
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• v.8 no.1
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• pp.69-77
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• 1995

The instrumentation and operating characteristics of a gas-jet assisted radio frequency glow discharge atomic absorption spectrometry(RF-GDAAS) are studied. The roles of discharge power, pressure as well as gas flow rate on the sample loss rate and absorbance are described in this paper. Results show that the optimum discharge conditions depend on pressure and discharge power as well as on the gas flow rate. The gas flow rate plays as an important parameter in RF-GDAAS. Absorbance increases as the gas flow rate increase up to 600ml/min., and the optimum absorbance is obtained at the pressure of 3 mbar. The absorbance increases when the discharge power increases as expected, however, the instability of the system due to the heat might be the trade off factor. The linear calibration curves of Ni and Cr in stainless steel(BAS 461-468) and brass (KSS 1121-1126) are obtained with RF-GDAAS.

• Proceedings of the IEEK Conference
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• 2008.06a
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• pp.24-25
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• 2008

An Electrostatic discharge (ESD) protection has been a very important reliability issue in microelectronics, especially for RF (Radio Frequency) integrated circuits (ICs). This paper reviews design and analysis of on-chip ESD (electrostatic discharge) protection circuits for RF applications. Key issues in RF ESD protection, design methods, and RF ESD protection solutions are discussed.

• Korean Journal of Materials Research
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• v.16 no.9
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• pp.543-549
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• 2006

Polyimides (PI) are treated with $He/O_2$ and $He/O_2/NF_3$ atmospheric pressure rf dielectric barrier discharge in order to investigate the roles of $NF_3$ that is one of the PI etching gases. Surface changes are analyzed by x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and contact angle measurement. The surface roughness of PI and the ratio of C=O, which is hydrophilic functional group, is more increased by $He/O_2/NF_3$ discharge than by $He/O_2$ discharge. The C=O species on the PI surface is increased up to 30 percent with rf power. The surface roughness of PI is increased from 0.4 to 11 nm with rf power. The water drop contact angles on PI, however, are reduced from $65^{\circ}\;to\;9^{\circ}$ by plasma treatment independently of $NF_3$.

• Analytical Science and Technology
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• v.7 no.2
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• pp.155-164
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• 1994

A conventional Grimm-type glow discharge source was constructed and applied to radio-frequency(13.56MHz) discharge for metal and ceramic analysis. We investigated the emission spectrum for aluminium and aluminium oxide and the influence of discharge operating paramaters including argon pressure, rf-power and DC-bias voltages at the sample-side electrode. Scanning Electron Microscope(SEM) also was used to investigate the effect of rf-sputtering on the microstructure formation of the aluminium oxide. Linear analytical calibration curves were constructed for Manganese and zinc element in samples of low alloy steel(BAS 401-405) and brass(NIST 1108-1117).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.477-480
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• 2004

Ga doped zinc oxide films (ZnO:Ga) were deposited on glass substrate by RF magnetron sputtering from a ZnO target mixed with $Ga_O_3$. The effects of RF discharge power on the electrical, optical and structural properties were investigated experimentally. The structural and electrical properties of the film are highly affected by the variation of RF discharge power. The lowest electrical resistivity of $4.9{\times}10^{-4}\;\Omega-cm$ were obtained with the film deposited from 3 wt% of $Ga_2O_3$ doped target and at 200 W in RF discharge power. The transmittance of the 900 nm thin film was 91.7% in the visible waves. The effect of annealing on the as-deposited film was also studied to improve the electrical resistivity of the ZnO:Ga film.

• Proceedings of the KIEE Conference
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• 2008.10a
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• pp.97-98
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• 2008

In 6.6kV Rotary Machine Stator Windings, Corona Discharge, Discharge at Conductor Surface, Slot Discharge and Endwinding Discharge is happended by electronic degradation. Also, if Partial Discharge cause in inner-part of Rotary Machine Stator Windings, it will be happended voltage and current pulse. In case of discharge spark, RF electromagnetic wave, which transmits at discharge position, can happen. To detect this kind of RF electromagnetic wave efficiently, we have designed Planar Antenna Sensor with the CST MWS simulation program. Also we have confined the application possibility, which can analyzes the partial discharge in Rotary Machine Stator Windings. In the Future, sample of planar antenna sensor will be able to compare with the data of simulation by CST MWS program.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.222-223
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• 2007

In 6.6kV Rotary Machine Stator Windings, Corona Discharge, Discharge at Conductor Surface, Slot Discharge and Endwinding Discharge is happended by electronic degradation. Also, if Partial Discharge cause in inner-part of Rotary Machine Stator Windings, it will be happended voltage and current pulse. In case of discharge spark, RF electromagnetic wave, which tranmits at discharge position, can happen. To detect this kind of RF electromagnetic wave efficiently, we have designed Planar Antenna Sensor with the CST MWS simulation program. Also we have confined the application possibility, which can analize the partial discharge in Rotary Machine Stator Windings. In the Future, sample of planar antenna sensor will be able to compare with the data of simulation by CST MWS program.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.241.1-241.1
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• 2014

The large-area high-power radio-frequency (RF) driven ion sources based on the negative hydrogen (deuterium) ion beam extraction are the major components of neutral beam injection (NBI) systems in future large-scale fusion devices such as an ITER and DEMO. Positive hydrogen (deuterium) RF ion sources were the major components of the second NBI system on ASDEX-U tokamak. A test large-area high-power RF ion source (LAHP-RaFIS) has been developed for steady-state operation at the Korea Atomic Energy Research Institute (KAERI) to extract the positive ions, which can be used for the NBI heating and current drive systems in the present fusion devices, and to extract the negative ions for negative ion-based plasma heating and for future fusion devices such as a Fusion Neutron Source and Korea-DEMO. The test RF ion source consists of a driver region, including a helical antenna and a discharge chamber, and an expansion region. RF power can be transferred at up to 10 kW with a fixed frequency of 2 MHz through an optimized RF matching system. An actively water-cooled Faraday shield is located inside the driver region of the ion source for the stable and steady-state operations of RF discharge. The characteristics and uniformities of the plasma parameter in the RF ion source were measured at the lowest area of the expansion bucket using two RF-compensated electrostatic probes along the direction of the short- and long-dimensions of the expansion region. The plasma parameters in the expansion region were characterized by the variation of loaded RF power (voltage) and filling gas pressure.

• Proceedings of the IEEK Conference
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• 2004.08c
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• pp.776-779
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• 2004

A RF front-end module is designed for GIS(Gas Insulated Substation) which is employed for effective and efficient very high voltage transmission. Major advantage of the unit is improved PO detection sensitivity through minimizing the effect of surrounding interference signals, which is achieved by controlling the gain and the selection of the frequency band, for the precise detection of any UHF PO (Partial Discharge) disturbance occurred in the GIS due to some unwanted problems. For the development of the module, various switches for providing selected signal paths, wideband LNA, 3 BPF for selecting detection frequency band, and video detector are designed, fabricated and measured on 1 mm FR4 substrate with various RF components. The detection sensitivity of the unit was <-60 dBm that is sufficient to detect UHF PO signals as low as 1 pC. It is believed that the value is enough to detect the signal occurred in GIS.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.3
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• pp.133-136
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• 2004

Low-Pressure inductively coupled RF discharge sources have important industrial applications mainly because they can provide a high-density electrodeless plasma source with low ion energy and low power loss. In an inductive discharge, the RF power is coupled to the plasma by an electromagnetic interaction with the current flowing in a coil. In this paper, the experiments have been focussed on the electric characteristic and carried out using a single Langmuir probe. The internal electric characteristics of inductively coupled Ar RF discharge at 13.56(MHz) have been measured over a wide range of power at gas pressure ranging from 1∼70(mTorr).