Characteristic and Electrical Properties of $TiN_xO_y/TiN_x$ Multilayer Thin Film Resistors with a High Resistance
($TiN_xO_y/TiN_x$ 다층 박막을 이용한 고저항 박막 저항체의 특성평가)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2009.06a
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- pp.19-19
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- 2009