• Journal of Sensor Science and Technology
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• v.29 no.4
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• pp.255-260
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• 2020

In this study, we developed a method of improving the surface-enhanced Raman spectroscopy (SERS) response characteristics by depositing a nanoporous Ag metal thin film through cluster source sputtering after forming a pyramidal texture structure on the Si substrate surface. A reactive ion etching (RIE) system with a metal mesh inside the system was used to form a pyramidal texture structure on the Si surface without following a complicated photolithography process, unlike in case of the conventional RIE system. The size of the texture structure increased with the RIE process time. However, after a process time of 60 min, the size of the structure did not increase but tended to saturate. When the RF power increased from 200 to 250 W, the size of the pyramidal texture structure increased from 0.45 to 0.8 ㎛. The SERS response characteristics were measured by depositing approximately 1.5 ㎛ of nanoporous Ag metal thin film through cluster sputtering on the formed texture structure by varying the RIE process conditions. The Raman signal strength of the nanoporous Ag metal thin film deposited on the Si substrate with the texture structure was higher than that deposited on the general silicon substrate by up to 19%. The Raman response characteristics were influenced by the pyramid size and the number of pyramids per unit area but appeared to be influenced more by the number of pyramids per unit area. Therefore, further studies are required in this regard.

• Journal of Sensor Science and Technology
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• v.18 no.2
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• pp.110-115
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• 2009

Polystyrene (PS) microspheres were used to good advantage as a template material to prepare macroporous $TiO_2$ thin films. This is enabled to run the thermal decomposition of the PS without the collapsing of the 3-D macroporous framework during the calcination step. $TiO_2$ thin films were deposited onto the colloidal templated substrates at room temperature by RF sputtering, and then samples were thermally treated at $450^{\circ}C$ for 40.min in air to remove the organic colloidal template and induce crystallization of the $TiO_2$ film. The macroporous $TiO_2$ thin film exhibited a quasi-ordered partially hexagonal close-packed structure. Burst holes, estimated to be formed during PS thermal decomposition, are seen as the hemisphere walls. the inner as well as the outer surfaces of the hollow hemispheres formed by the method of thermal decomposition can be easily accessed by the diffusing gas species. As a consequence, the active surface area interacting with the gas species is expected to be enlarged about by a factor of fourth as large as compared to that of a planar films. Also the thickness at neighboring hemisphere could be controlled a few nm thickness. If the acceptor density becomes as large that depletion width reaches those thickness, the device is in the pinch off-situation and a strong resistance change should be observed.

• Journal of Sensor Science and Technology
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• v.8 no.2
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• pp.189-194
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• 1999

The heat treatment effects of the undoped ZnO and Al doped ZnO(AZO) transparent conductive films prepared by rf magnetron sputtering were investigated. The variations of the electrical and optical properties with heat treatment temperature and ambient were studied. The resistivity of the un doped ZnO films heat treated in air and $H_z$ plasma for 1 hour increased rapidly above $200^{\circ}C$ and $300^{\circ}C$, respectively. And that of the ZnO:Al films heat treated in air also increased rapidly above $300^{\circ}C$. On the other hand that of the ZnO:Al films heat treated in $H_z$ plasma was constant regardless of heat treatment temperature. The optical transmittance above 550nm is about 90% for all thin films regardless of impurity doping, the heat treatment temperature and ambient.

• Journal of Sensor Science and Technology
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• v.12 no.2
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• pp.88-94
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• 2003

Electromyogram (EMG) is the bioelectric signal induced by motor nerves. Analyzing EMG with the movement produced by muscle contraction, we can provide input commands to a computer as a man-machine interface as well as can evaluate the patient's motional abnormality. In this paper, we developed an integrated miniaturized device which acquires and transmits the surface EMG of an interested muscle. Developed system measures $60{\times}40{\times}25mm$, weighs 100g. Using an amplifier circuitry on the electrodes and the radio frequency transmission, the developed system dispenses with the use of cables among the electrodes, amplifier, and the post processing system (personal computer). The wiring used in conventional systems can be obstacle for natural motion and source of motion artifacts. In results, the developed system improves not only the signal-to-noise ration in dynamic EMG measurement, but also the user convenience. We propose a new human-computer interface as well as a dynamic EMG measurement system as a possible application of the developed system.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.491-499
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• 1997

We fabricated the ceramic PLT tablet which was composed of 5, 10 and 15 mol% lanthanum concentration and thin film PLT to develope pyroelectric materials, and investigated their characteristics. Using TG/DTA, we determined calcination and sintering temperature to sinter the PLT completely and to prevent volatilization of the Pb components. The calcination and sintering temperature were $850^{\circ}C$, $1150^{\circ}C$ respectively, and there was a lot of mass loss at higher sintering temperature. By measuring temperature-dielectric constant characteristics of ceramic tablet we investigated dielectric constant characteristics depends on La concentration. The Curie point of PLT with 5, 10 and 15 mol% lanthanum concentration were $330^{\circ}C$, $269^{\circ}C$ and $210^{\circ}C$ respectively. Using PLT ceramic tablet we observed IR detection characteristics, and then deposited PLT thin film by rf magnetron sputtering. We verified that PLT thin film fabricated with completely sintered PLT target had the same structure to target by investigating lattice constant and optical transparency.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.10 no.3
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• pp.131-137
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• 2010

UMSN (Ubiquitous Medical Sensor Network) is being used in u-Healthcare system of various medical facilities to identify objects and get information from sensors in real-time. RFID using radio frequency determines objects using Reader, which reads Tags attached to patients. However, there is a security vulnerability wherein Tag send its ID to illegal Reader because Tags always response to Readers request regarding of its Tag ID. In this paper, we propose Tag ID Classification Scheme to reduce Back-end Server traffic that caused by requests to authenticate between Readers and Tags that are attached to medical devices, patients, and sensors; To reduce security threats like eavesdropping and spoofing that sometimes occurred during authentication procedure. The proposed scheme specifies the patient category as a group based on patients Tag ID string. Only allowed Reader can perform authentication procedure with Back-end Server. As a result, we can reduce Back-end Server traffic and security threats.

• Information and Communications Magazine
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• v.25 no.4
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• pp.5-10
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• 2008

지능형 로봇은 자율적으로 이동할 수 있어야 한다는 것이 PC와 기본적으로 다른 점이다. 이동 로봇이 자율 주행할 때 꼭 필요한 기술이 위치 인식 기술과 장애물 감지 기술이다. 장애물 감지 기술은 이동 로봇이 다른 물체와 충돌하지 않도록 하기 위해 필요한 기술이지만 위치 인식 기술은 로봇이 현재 위치를 알고 목적지로 주행하기 위해 매우 중요한 기술이다. 지능형 로봇의 자율 주행 측면에서 위치 인식 기술은 필수적 핵심 기술이다. 위치 인식 센서는 로봇의 절대 위치 및 방향각 정보를 획득하여 실시간으로 관련 데이터를 지능형 로봇에 전달한다. 이로써 지능형 로봇의 이동 경로와 방향 제어가 가능해지고, 로봇을 보다 안정적으로 제어할 수 있다. 즉 로봇이 자기 위치를 인식한 후에야 안정적이고 지속적인 자율 주행이 가능해진다. (주)나인티시스템은 네트워크 기반 위치 파악용 indoor GPS 개념으로 로봇 위치 파악 센서 iGS를 개발하여 공급하고 있다. (주)나인티시스템이 개발한 iGS는 지능형 로봇의 거리, 위치, 방향을 파악하기 위해 초음파 송/수신부 및 RF 모듈로 Handware가 구성되어 있고 위치 추정 알고리즘, 장애물에 강건한 알고리즘 등이 Firmware를 구성하고 있다. 로봇 시장의 잠재적 성장 가능성을 고려할 때 로봇의 자율 운용에 필수적인 위치 파악 요소 기술을 선개발하여 상업화하는 것은 경제적으로도 큰 의미를 갖는다. 뿐만 아니라 위치 파악 요소 기술의 선도적 개발에 의해 미래 지능형 로봇시장을 주도할 수 있는 계기도 기대할 수 있다. Robot에 적정 가격대의 위치 인식 기술이 접목되면 Robot 산업의 활성화가 가능하다. 현재 청소용 Robot은 충돌 방지정도의 인식을 하고 있지만 위치 인식 기술이 접목되면 청소용 Robot이 더 많은 Service를 제공할 수 있다. 더 많은 Service의 실행으로 Robot 산업이 활성화되면 관련 요소기술 산업이 활성화된다. Robot 산업과 부품 산업이 활성화되면 Robot 관련 산업의 수익 Model이 다양해 진다. 위치 인식 기술은 Robot 산업뿐 아니라 산업 전반의 활성화에도 크게 기여할 것이다. 위치 인식 기술은 지능형 Robot의 자율 주행뿐 아니라 다양한 분야에 응용이 가능하다. 또한 위치 인식 기술을 국산화하면 기존 수입품을 대체할 뿐아니라 수출 시장의 진출에도 크게 기여할 수 있다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.18 no.5 s.120
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• pp.553-562
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• 2007

In this paper, we designed and implemented the system for telemetering ELF(Extremely Low Frequency) magnetic field intensity. The magnetic field measurement system used a 3-axis magnetic field sensor to measure the magnetic field with isotropy and the equalizer to compensate the frequency characteristic in band. By multiplexing three output signals of the magnetic field sensor in time domain, we got the uniform gain and frequency characteristic among three axes. This system was designed that the magnetic field measurement level range was $0.01{\sim}10.0\;uT$ and the measurement frequency band was $40{\sim}180\;Hz$. The control system would access to the magnetic field measurement system with RF and the maximum access distance was 1.0 km. We confirmed that the measurement level error of the fabricated system was within 5 %. The fabricated system was installed to a golf practice range where a high voltage power transmission line was crossed.

• Journal of Sensor Science and Technology
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• v.24 no.6
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• Journal of the Korean Institute of Intelligent Systems
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• v.20 no.4
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• pp.509-515
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• 2010

In this paper, the mechanism that can walk efficiently in wet land or sand area is proposed. A vision camera is attached to the mechanism, which makes a kind of biologically inspired robot for coast guard. This visionary information enables the biologically inspired robot to react in peripheral environment by a soft-computing algorithm. In addition, the biologically inspired robot can achieve the mission appointed by a programmer connecting with outside, based on RF and Blue-tooth communication module. Therefore, the purpose of this research is the implementation of the biologically inspired robot that can operate most adaptively in sand and wet surface based on Theo Jansen mechanism.