• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.59-60
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• 2006

The slurry stability and removal rate during recycling of slurry in silicon wafer polishing was studied. Average abrasive size of slurry was not changed with recycling time, however, large particles appeared as recycling time increased. Large particles were related foreign substances from pad or abraded silicon flakes during polishing. The removal rate as well as pH of slurry was decreased as recycling time increased. It suggests that the consumption of OH ions during recycling is the main cause of decrease of removal rate. Therefore, it is important to control pH of slurry to obtain optimum removal rate during polishing.

• Journal of the Korean Ceramic Society
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• v.44 no.2 s.297
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• pp.98-102
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• 2007

The stability of slurry and removal rate during recycling of colloidal silica slurry was evaluated in silicon wafer polishing. The particle size distribution, pH, and zeta potential were measured to investigate the stability of colloidal silica. Large particles appeared as recycling time increased while average size of slurry did not change. Large particles were identified by EDS(energy dispersive spectrometer) as foreign substances from pad or abraded silicon flakes during polishing. As the recycling time increased, pH of slurry decreased and removal rate of silicon reduced but zeta potential decreased inversely. Hence, it could be mentioned that decrease of removal rate is related to consumption of $OH^-$ ions during recycling. Attention should be given to the control of pH of slurry during polishing.

• Asian Journal of Turfgrass Science
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• v.10 no.2
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• pp.159-166
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• 1996

To estimate removal rate of phosphorus in aquatic grassland ecosystems of Paldangho, this investigation was conducted along with the coast of a lake. The experimental results may be summarized on communities of Typha angustata, Miscanthus sacchriflorus Phragmites communis and Scirpus tabernaemontani as follows. The annual production of phosphorus for the litters in T. angustata, M saccharsflorus, P. cam-munis and S. taiernaemontani grasslands were 10.252 g /$m^2$, 3.833 g /$m^2$, , 2.656 g /$m^2$, and 5.210 g /$m^2$, respectively. The ratio of annual production of P accumulated on surface soils in a steady state provides estimates of the removal rate r, The estimated removal rates r of P were 0.58, 0.78, 0.68 and 0.59 in T. angustata, M. sacchariflorus, P. communis and S. tabernaemontani grasslands re- spectively. The removal and accumulation of 50, 95 and of 99% of its steady state level, the estimates for P of T. angustata were 1.195, 5.173 and 8.623 years, in M. sacchariflorus were 0.880, 3.842, and 6.403 years, and in P. cammunis were 1.014, 4.390, and 7.316 years respectively, In S. tabernaemontani grassland required period were 1.178,5.099 and 8.500. Key words:T. angustata, S. tabernaemantani, P. communis, S. tabernaemontani, Paldangho, Removal rate, Phosphorus.

• Fisheries and Aquatic Sciences
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• v.2 no.1
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• pp.52-57
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• 1999

Air-drived rotating biological contactor (RBC) system, which is effective method in filtering performance, was tested for the nitrification capacity in a recirculating system. At ammonia concentrations between 0.029 and 0.528 mg/l, the effect of ammonia loading rate on ammonia removal rate at three different hydraulic loading rates could be defined by the following first­order regression models: Hydraulic loading rate of $14.8 m^3/m^3/day:\;y=39.2\times+3.4 (r^2=0.9137)$, Hydraulic loading rate of $26.5 m^3/m^3/day: y=53.3\times+4.0 (r^2=0.8686)$, Hydraulic loading rate of $37.3 m^3/m^3/day: y=58.4\times+4.2 (r^2=0.7755)$, where, $\times$ is ammonia loading rate (mg/l), y is ammonia removal rate $(g/m^3/day)$, The equations showed the optimal ammonia removal rate at the hydraulic loading rate of $26.5m^3/m^3/day$. Below the ammonia concentration of 2.72 mg/l, first-order regression models between ammonia loading rate and ammonia removal rate at three different rates of speed are defined as follows: Rotational speed of $0.75 rpm: y=28.5\times+4.7 (r^2=0.9143)$, Rotational speed of $1.0 rpm: y=33.6\times+8.4 (r^2=0.9534)$, Rotational speed of $2.0 rpm: y=28.9\times+3.6 (r^2=0.9488)$, where, x is ammonia loading rate (mg/l), y is ammonia removal rate $(g/m^3day)$. The equations show the ammonia removal rate at the rotational speed of 1.0 rpm is significantly higher than that at the rotational speed of either 0.75 rpm or 2.0 rpm (P<0.05).

• Journal of Environmental Health Sciences
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• v.22 no.3
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• pp.49-55
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• 1996

Water parsley(Oenanthe javanica(Blume) DC) was raised with varying population density(S) in the laboratory aquarium unit to determine the growth equation. The population density was measure after 7 days. The resultant growth curve was well fit to the equation 1/S = A+B (1/S0) with a high correlation coefficient ($R^2$ = 0.999). The maximum specific absorption rate was $9.011 \times 10^{-5}$ kg $NO_x-N/kg$ water parsley$\cdot$day and $1.31 \times 10^{-5}$ kg $PO_4-P/kg$ water parsley$\cdot$day when the average population density was $2.62 kg/m^2$. The relationship between population density and nutrient absorption rate, the absorption rate of $NO_x-N$ was 5.04~5.24 mg/l$\cdot$day when the population density was $7.51~10.0 $mg/m^2\cdot day$ and the absorption rate of $PO_4-P$ was 0.56~0.78 mg/l$\cdot$day when the population density was 5.02~10.0 $kg/m^2\cdot day$. Taking into account the nutrient absorption rate and growth rate, the population density between $7.0 kg/m^2\cdot day$ and $8.0 kg/m^2 \cdot day$ was selected. The removal rate of nutrient was investigated after 7 days culture. Removal rate of $NO_x-N$ was 95.6~99.95% with initial concentration of 35 mg $NO_x-N/l$, and the removal rate of $PO_4-P$ was also high, indicating 80.24~98.9% with initial concentration of 5.95 mg $PO_x-P/l$.

• Journal of Korean Society of Water and Wastewater
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• v.21 no.5
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• pp.641-647
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• 2007

This study aims to find out optimum condition for hydrogen production and organic removal when treating food and swine wastewater together. For this purpose, various batch tests were conducted by changing mixture ratio from 6:4 (food wastewater:swine wastewater) to 1:9 without pretreatment process. For hydrogen production through anaerobic fermentation, the mixture ratios of R-1 (6:4), R-2 (5:5) and R-6 (1:9) were out of pH range appropriate for hydrogen production and mixture ratios of R-3 (4:6), R-4 (3:7), and R-5(2:8) showed appropriate hydrogen production where their pH ranges were 5.1~5.5. Especially in case of R-3, it consistently maintained appropriate pH range for hydrogen production for 72hr and produced maximum hydrogen. The characteristics of hydrogen production and cumulative hydrogen production according to each mixture ratio showed that R-1, R-2 and R-6 did not produce any hydrogen, and maximum hydrogen productions of R-3, R-4 and R-5 were 593ml, 419ml and 90ml, respectively. Total cumulative hydrogen productions of R-3, R-4 and R-5 were 1690ml, 425ml and 96ml, respectively. Based on previous results, it was concluded that, the most appropriate mixture ratio of food wastewater and swine wastewate rwas 4:6 (R-3). The experiment for COD removal rate to evaluate organic removal efficiency revealed that R-3, R-4 and R-5 showed high removal efficiencies during the highest hydrogen production amount and the highest efficiency was 41% with R-3.

• Asian Journal of Turfgrass Science
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• v.10 no.2
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• pp.167-175
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• 1996

This study was carried out to investigate the removal rate of sulphur of the litters in the Phragmites communsis, Seirpus tabernaemontani, Miscanthus sacchariflorus and Typha angustata aquatic grassland ecosystem on the lake Paldangho. The annual litter productions of sulphur were 50.91 /$m^2$, in P. communis, 180.83 g /$m^2$, in S. tabernaemontani, 25.87 g /$m^2$, in M. sacchariflorus and 151.39 g /$m^2$, in T. angustata, respectively. The removal rates r, of sulphur in the litters were 0.86 in P. communis, 0.82 in S. tabernaemontani, 0.43 in M. sacchariflorus and 0.47 in T. angustata respectively, The times required to reach 50, 95 and 99 percent of the steady state levels and turnover values of sulphur on the grass-land floor were 0.81, 3.49 and 5.82 years in the P. communis, 0.85, 3.68 and 6.13 years in the S. tabernaemontani, 1.62, 7.00 and 11.67 years in the M. sacchariflorus and 1.49, 6.44 and 10.73 years in the T. angustata, It is considered that the high removal rates of sulphur in four grasslands of aquatic ecosystem contribute to the efficient removal of sulphur, a pollutant, at the lake Paldangho. Key words: Removal rate, Accmulation, Paldaugho, Sulphur, Phragmites communis, Miscanthus saechariflorus, Seirpus tabernaemontani, Typha angastata.

• Journal of Animal Science and Technology
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• v.45 no.4
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• pp.641-648
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• 2003

In a batch mode treatment process, which electrolyzes the wastewater after derivation of N-P crystal formation and recovery, the characteristics of pollutant removal induced with the changes of loading rate and hydraulic retention time were studied. $MgCl_2$ was used as Mg source for the formation of struvite and the molar ratio of $MgCl_2$ to $PO_4^{3-}$ in influent was 1.3. When analyzing the average treatment efficiencies and removal characteristics obtained from four separate operations (Run I, II, III, IV), removal efficiencies of PO43- was not function of its loading rate. Under a condition of sufficient aeration and Mg source provided, over 88% of $PO_4^{3-}$ was eliminated by the formation of MAP without any pH adjustment, in spite of loading rate variation. An optimum-loading rate of NH4-N to achieve high removal efficiency was approximately $100g/m^3/d$. Below that loading rate, the removal of NH4-N was proportional to the loading rate into the system, and hence stable and high removal efficiency, over 90%, was achieved. However, when the loading rate increased over that rate, removal efficiency began to drop and fluctuate. Removal efficiency of TOCs was dependant upon the hydraulic retention time ($r^2$=0.97), not upon the loading rate. Stable and high color removal (94%) was obtained with 2 days of HRT in electrolysis reactor.

• Applied Chemistry for Engineering
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• v.24 no.3
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• pp.279-284
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• 2013

In this study, the feasibility of a single-stage thermophilic aerobic process for the treatment of high-strength food wastewater produced from the recycling process of food wastes was examined to substitute anaerobic digestion process. Also, the removal and stability of thermophilic aerobic process were assessed according to the changes of hydraulic retention times (HRTs) and organic loading rates (OLRs). When the OLR increased from 9.2 to $37.2kgCOD/m^3d$, a pH value in R1 (HRT : 5 d) significantly decreased to 5.0, due to the organic acid accumulation. On the other hand, the pH value in R2 (HRT : 10 d) was stable and R2 showed the high removal of COD, organic acid and lipid, even though the OLR increased from 4.6 to $18.6kgCOD/m^3d$. In R1, the COD loading rates for COD removal was suddenly dropped, as the COD loading rate increased from 18.6 to $28.4kgCOD/m^3d$. In contrast, R2 showed that the COD loading rates for COD removal increased with regard to increment in the loading rates of 3.61, 7.05, 9.43 and $12.2kgCOD/m^3d$, indicative of the high COD removal efficiency. Therefore, the results demonstrated that over 10-d HRT, the high concentration of raw food wastewater was efficiently treated in the single-stage thermophilic aerobic process.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.24.1-24.1
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• 2011

CMP (Chemical Mechanical Planarization)는 고직접도의 다층구조의 소자를 형성하기 위한 표면연마 공정으로 사용되며, pattern 크기의 감소에 따른 공정 중요도는 증가하고 있다. 반도체 소자 제조 공정에서는 낮은 비용으로 초기재료를 만들 수 있고 우수한 성능의 전기 절연성질을 가지는 산화막을 만들 수 있는 단결정 실리콘 웨이퍼가 주 재료로 사용되고 있으며, 반도체 공정에서 실리콘 웨이퍼 표면의 거칠기는 후속공정에 매우 큰 영향을 미치므로 CMP 공정을 이용한 평탄화 공정이 필수적이다. 다결정 실리콘 박막은 현재 IC, RCAT (Recess Channel Array Transistor), 3차원 FinFET 제조 공정에서 사용되며 CMP공정을 이용한 표면 거칠기의 최소화에 대한 연구의 필요성이 요구되고 있다. 본 연구에서는 알칼리성 슬러리를 이용한 단결정 및 다결정 실리콘의 식각 및 연마거동에 대한 특성평가를 실시하였다. 화학적 기계적 연마공정에서 슬러리의 pH는 슬러리의 분산성, removal rate 등 결과에 큰 영향을 미치고 연마대상에 따라 pH의 최적조건이 달라지게 된다. 따라서 단결정 및 다결정 실리콘 연마공정의 최적 조건을 확립하기 위해 static etch rate, dynamic etch rate을 측정하였으며 연마공정상의 friction force 및 pad의 온도변화를 관찰한 후 removal rate을 계산하였다. 실험 결과, 단결정 실리콘은 다결정 실리콘보다 static/dynamic etch rate과 removal rate이 높은 것으로 나타났으며 슬러리의 pH에 따른 removal rate의 증가율은 다결정 실리콘이 더 높은 것으로 관찰되었다. 또한 다결정 실리콘 연마공정에서는 friction force 및 pad의 온도가 단결정 실리콘 연마공정에 비해 상대적으로 더 높은 것으로 나타났다. 결과적으로 단결정 실리콘의 연마 공정에서는 화학적 기계적인 거동이 복합적으로 작용하지만 다결정 실리콘의 경우 슬러리를 통한 화학적인 영향보다는 공정변수에 따른 기계적인 영향이 재료 연마율에 큰 영향을 미치는 것으로 확인되었으며, 이를 통한 최적화된 공정개발이 가능할 것으로 예상된다.