• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.59-60
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• 2006

The slurry stability and removal rate during recycling of slurry in silicon wafer polishing was studied. Average abrasive size of slurry was not changed with recycling time, however, large particles appeared as recycling time increased. Large particles were related foreign substances from pad or abraded silicon flakes during polishing. The removal rate as well as pH of slurry was decreased as recycling time increased. It suggests that the consumption of OH ions during recycling is the main cause of decrease of removal rate. Therefore, it is important to control pH of slurry to obtain optimum removal rate during polishing.

• 한국세라믹학회지
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• 제44권2호
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• pp.98-102
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• 2007

The stability of slurry and removal rate during recycling of colloidal silica slurry was evaluated in silicon wafer polishing. The particle size distribution, pH, and zeta potential were measured to investigate the stability of colloidal silica. Large particles appeared as recycling time increased while average size of slurry did not change. Large particles were identified by EDS(energy dispersive spectrometer) as foreign substances from pad or abraded silicon flakes during polishing. As the recycling time increased, pH of slurry decreased and removal rate of silicon reduced but zeta potential decreased inversely. Hence, it could be mentioned that decrease of removal rate is related to consumption of $OH^-$ ions during recycling. Attention should be given to the control of pH of slurry during polishing.

• 아시안잔디학회지
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• 제10권2호
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• pp.159-166
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• 1996

To estimate removal rate of phosphorus in aquatic grassland ecosystems of Paldangho, this investigation was conducted along with the coast of a lake. The experimental results may be summarized on communities of Typha angustata, Miscanthus sacchriflorus Phragmites communis and Scirpus tabernaemontani as follows. The annual production of phosphorus for the litters in T. angustata, M saccharsflorus, P. cam-munis and S. taiernaemontani grasslands were 10.252 g /$m^2$, 3.833 g /$m^2$, , 2.656 g /$m^2$, and 5.210 g /$m^2$, respectively. The ratio of annual production of P accumulated on surface soils in a steady state provides estimates of the removal rate r, The estimated removal rates r of P were 0.58, 0.78, 0.68 and 0.59 in T. angustata, M. sacchariflorus, P. communis and S. tabernaemontani grasslands re- spectively. The removal and accumulation of 50, 95 and of 99% of its steady state level, the estimates for P of T. angustata were 1.195, 5.173 and 8.623 years, in M. sacchariflorus were 0.880, 3.842, and 6.403 years, and in P. cammunis were 1.014, 4.390, and 7.316 years respectively, In S. tabernaemontani grassland required period were 1.178,5.099 and 8.500. Key words:T. angustata, S. tabernaemantani, P. communis, S. tabernaemontani, Paldangho, Removal rate, Phosphorus.

• Fisheries and Aquatic Sciences
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• 제2권1호
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• pp.52-57
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• 1999

Air-drived rotating biological contactor (RBC) system, which is effective method in filtering performance, was tested for the nitrification capacity in a recirculating system. At ammonia concentrations between 0.029 and 0.528 mg/l, the effect of ammonia loading rate on ammonia removal rate at three different hydraulic loading rates could be defined by the following first­order regression models: Hydraulic loading rate of $14.8 m^3/m^3/day:\;y=39.2\times+3.4 (r^2=0.9137)$, Hydraulic loading rate of $26.5 m^3/m^3/day: y=53.3\times+4.0 (r^2=0.8686)$, Hydraulic loading rate of $37.3 m^3/m^3/day: y=58.4\times+4.2 (r^2=0.7755)$, where, $\times$ is ammonia loading rate (mg/l), y is ammonia removal rate $(g/m^3/day)$, The equations showed the optimal ammonia removal rate at the hydraulic loading rate of $26.5m^3/m^3/day$. Below the ammonia concentration of 2.72 mg/l, first-order regression models between ammonia loading rate and ammonia removal rate at three different rates of speed are defined as follows: Rotational speed of $0.75 rpm: y=28.5\times+4.7 (r^2=0.9143)$, Rotational speed of $1.0 rpm: y=33.6\times+8.4 (r^2=0.9534)$, Rotational speed of $2.0 rpm: y=28.9\times+3.6 (r^2=0.9488)$, where, x is ammonia loading rate (mg/l), y is ammonia removal rate $(g/m^3day)$. The equations show the ammonia removal rate at the rotational speed of 1.0 rpm is significantly higher than that at the rotational speed of either 0.75 rpm or 2.0 rpm (P<0.05).

• 한국환경보건학회지
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• 제22권3호
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• pp.49-55
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• 1996

Water parsley(Oenanthe javanica(Blume) DC) was raised with varying population density(S) in the laboratory aquarium unit to determine the growth equation. The population density was measure after 7 days. The resultant growth curve was well fit to the equation 1/S = A+B (1/S0) with a high correlation coefficient ($R^2$ = 0.999). The maximum specific absorption rate was $9.011 \times 10^{-5}$ kg $NO_x-N/kg$ water parsley$\cdot$day and $1.31 \times 10^{-5}$ kg $PO_4-P/kg$ water parsley$\cdot$day when the average population density was $2.62 kg/m^2$. The relationship between population density and nutrient absorption rate, the absorption rate of $NO_x-N$ was 5.04~5.24 mg/l$\cdot$day when the population density was $7.51~10.0 $mg/m^2\cdot day$ and the absorption rate of $PO_4-P$ was 0.56~0.78 mg/l$\cdot$day when the population density was 5.02~10.0 $kg/m^2\cdot day$. Taking into account the nutrient absorption rate and growth rate, the population density between $7.0 kg/m^2\cdot day$ and $8.0 kg/m^2 \cdot day$ was selected. The removal rate of nutrient was investigated after 7 days culture. Removal rate of $NO_x-N$ was 95.6~99.95% with initial concentration of 35 mg $NO_x-N/l$, and the removal rate of $PO_4-P$ was also high, indicating 80.24~98.9% with initial concentration of 5.95 mg $PO_x-P/l$.

• 상하수도학회지
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• 제21권5호
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• pp.641-647
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• 2007

This study aims to find out optimum condition for hydrogen production and organic removal when treating food and swine wastewater together. For this purpose, various batch tests were conducted by changing mixture ratio from 6:4 (food wastewater:swine wastewater) to 1:9 without pretreatment process. For hydrogen production through anaerobic fermentation, the mixture ratios of R-1 (6:4), R-2 (5:5) and R-6 (1:9) were out of pH range appropriate for hydrogen production and mixture ratios of R-3 (4:6), R-4 (3:7), and R-5(2:8) showed appropriate hydrogen production where their pH ranges were 5.1~5.5. Especially in case of R-3, it consistently maintained appropriate pH range for hydrogen production for 72hr and produced maximum hydrogen. The characteristics of hydrogen production and cumulative hydrogen production according to each mixture ratio showed that R-1, R-2 and R-6 did not produce any hydrogen, and maximum hydrogen productions of R-3, R-4 and R-5 were 593ml, 419ml and 90ml, respectively. Total cumulative hydrogen productions of R-3, R-4 and R-5 were 1690ml, 425ml and 96ml, respectively. Based on previous results, it was concluded that, the most appropriate mixture ratio of food wastewater and swine wastewate rwas 4:6 (R-3). The experiment for COD removal rate to evaluate organic removal efficiency revealed that R-3, R-4 and R-5 showed high removal efficiencies during the highest hydrogen production amount and the highest efficiency was 41% with R-3.

• 아시안잔디학회지
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• 제10권2호
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• pp.167-175
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• 1996

This study was carried out to investigate the removal rate of sulphur of the litters in the Phragmites communsis, Seirpus tabernaemontani, Miscanthus sacchariflorus and Typha angustata aquatic grassland ecosystem on the lake Paldangho. The annual litter productions of sulphur were 50.91 /$m^2$, in P. communis, 180.83 g /$m^2$, in S. tabernaemontani, 25.87 g /$m^2$, in M. sacchariflorus and 151.39 g /$m^2$, in T. angustata, respectively. The removal rates r, of sulphur in the litters were 0.86 in P. communis, 0.82 in S. tabernaemontani, 0.43 in M. sacchariflorus and 0.47 in T. angustata respectively, The times required to reach 50, 95 and 99 percent of the steady state levels and turnover values of sulphur on the grass-land floor were 0.81, 3.49 and 5.82 years in the P. communis, 0.85, 3.68 and 6.13 years in the S. tabernaemontani, 1.62, 7.00 and 11.67 years in the M. sacchariflorus and 1.49, 6.44 and 10.73 years in the T. angustata, It is considered that the high removal rates of sulphur in four grasslands of aquatic ecosystem contribute to the efficient removal of sulphur, a pollutant, at the lake Paldangho. Key words: Removal rate, Accmulation, Paldaugho, Sulphur, Phragmites communis, Miscanthus saechariflorus, Seirpus tabernaemontani, Typha angastata.

• Journal of Animal Science and Technology
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• 제45권4호
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• pp.641-648
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• 2003

본 연구에서는 돈사 폐수내의 인과 질소를 함께 결정화하여 회수하고 그 상등액을 전기분해 시키는 회분식 돈사 폐수공정에서의 오염물질 부하량과 수처리시간 변화에 따른 처리효율의 변화 및 각 오염물질 제거특성을 파악하였다. Struvite 형성을 위한 Mg원으로는 $MgCl_2$를 사용하였고 주입량은 폐수내 인 기준 1.3 Mole이었다. 총 4개의 운전(Run I, II, III, IV)에서 얻어진 평균 제거효율과 그 제거특성을 분석한 결과 인의 경우 부하량 변화에 따른 처리효율의 변화는 관찰되지 않았으며 제거의 주요 역할을 하는 반응조는 Struvite 반응조로서 적정 Mg원만 제공된다면 pH 조절제 첨가 없이 폭기만으로도 부하량에 관계없이 88% 이상의 제거가 MAP 형성을 통해 얻어지는 것으로 나타났다. 높은 암모니아성 질소 제거효율을 유지하기 위한 적정 부하량은 약 100g/$m^3$.d로서 동 부하량 이하에서는 부하량이 증가함에 따라 제거량도 증가하면서 90% 이상의 높은 효율과 일정한 제거특성을 보인 반면 그 이상에서는 불안정한 제거특성을 나타내면서 제거효율이 감소하였다. TOCs의 경우에는 부하량 변화에 따른 처리효율 변화는 관찰되지 않았으며, 그 제거효율은 수처리 시간에 의존적인 것으로 나타났다 ($r^2$ = 0.97). 색도 제거 효율은 전기분해조 용적기준 수처리시간 2일 이상에서 94%의 매우 높고 일정한 효율을 얻을 수 있었다.

• 공업화학
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• 제24권3호
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• pp.279-284
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• 2013

본 연구에서는 음식물류 폐기물 자원화 과정에서 생성되는 고농도 음폐수(food wastewater : FWW)를 대상으로 기존의 혐기성 공정의 대안책으로써 고온호기성 소화공정에 대한 성능을 검증하였고 공정 인자를 도출하였다. 이를 위해 수리학적 체류시간(Hydraulic retention time, HRT) 변화 및 유기물 부하량(Organic loading rate, OLR)에 따른 유기물 제거 효율과 안정성을 관찰하였다. 실험 결과 비교적 짧은 HRT를 가진 R1 (HRT : 5일)의 경우 OLR이 증가할 때, 급격한 pH감소가 일어나 심한 공정 저해를 받는 것으로 관찰되었다. 반면 R2 (HRT : 10일)의 경우에는 상대적으로 안정적인 공정 운전 및 효율적인 COD, 유기산 및 lipid 제거가 일어났다. 이는 상대적으로 긴 HRT로 인한 유기산 축적과 같은 공정저해 요인이 해결되어 상대적으로 높은 유기물 처리효율을 나타낸 것으로 생각된다. R1에서는 COD 부하량이 $18.6kgCOD/m^3d$에서 $28.4kgCOD/m^3d$으로 증가함에 따라 급격한 COD 제거율 감소를 보였다. 반면 R2에서는 각 OLR별로 3.61, 7.05, 9.43 그리고 $12.2kgCOD/m^3d$의 높은 COD 제거율을 보였다. 따라서 본 연구에서는 10일 이상의 HRT에서 고온 호기성 소화가 고농도 음폐수 처리에 탁월한 유기물 제거율을 나타냄을 알 수 있었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.24.1-24.1
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• 2011

CMP (Chemical Mechanical Planarization)는 고직접도의 다층구조의 소자를 형성하기 위한 표면연마 공정으로 사용되며, pattern 크기의 감소에 따른 공정 중요도는 증가하고 있다. 반도체 소자 제조 공정에서는 낮은 비용으로 초기재료를 만들 수 있고 우수한 성능의 전기 절연성질을 가지는 산화막을 만들 수 있는 단결정 실리콘 웨이퍼가 주 재료로 사용되고 있으며, 반도체 공정에서 실리콘 웨이퍼 표면의 거칠기는 후속공정에 매우 큰 영향을 미치므로 CMP 공정을 이용한 평탄화 공정이 필수적이다. 다결정 실리콘 박막은 현재 IC, RCAT (Recess Channel Array Transistor), 3차원 FinFET 제조 공정에서 사용되며 CMP공정을 이용한 표면 거칠기의 최소화에 대한 연구의 필요성이 요구되고 있다. 본 연구에서는 알칼리성 슬러리를 이용한 단결정 및 다결정 실리콘의 식각 및 연마거동에 대한 특성평가를 실시하였다. 화학적 기계적 연마공정에서 슬러리의 pH는 슬러리의 분산성, removal rate 등 결과에 큰 영향을 미치고 연마대상에 따라 pH의 최적조건이 달라지게 된다. 따라서 단결정 및 다결정 실리콘 연마공정의 최적 조건을 확립하기 위해 static etch rate, dynamic etch rate을 측정하였으며 연마공정상의 friction force 및 pad의 온도변화를 관찰한 후 removal rate을 계산하였다. 실험 결과, 단결정 실리콘은 다결정 실리콘보다 static/dynamic etch rate과 removal rate이 높은 것으로 나타났으며 슬러리의 pH에 따른 removal rate의 증가율은 다결정 실리콘이 더 높은 것으로 관찰되었다. 또한 다결정 실리콘 연마공정에서는 friction force 및 pad의 온도가 단결정 실리콘 연마공정에 비해 상대적으로 더 높은 것으로 나타났다. 결과적으로 단결정 실리콘의 연마 공정에서는 화학적 기계적인 거동이 복합적으로 작용하지만 다결정 실리콘의 경우 슬러리를 통한 화학적인 영향보다는 공정변수에 따른 기계적인 영향이 재료 연마율에 큰 영향을 미치는 것으로 확인되었으며, 이를 통한 최적화된 공정개발이 가능할 것으로 예상된다.