• 한국재료학회지
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• 제27권8호
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• pp.403-408
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• 2017

We investigated the effect of ZnO buffer layer on the formation of ZnO thin film by ultrasonic assisted spray pyrolysis deposition. ZnO buffer layer was formed by wet solution method, which was repeated several times. Structural and optical properties of the ZnO thin films deposited on the ZnO buffer layers with various cycles and at various temperatures were investigated by field-emission scanning electron microscopy, X-ray diffraction, and photoluminescence spectrum analysis. The structural investigations showed that three-dimensional island shaped ZnO was formed on the bare Si substrate without buffer layers, while two-dimensional ZnO thin film was deposited on the ZnO buffer layers. In addition, structural and optical investigations showed that the crystalline quality of ZnO thin film was improved by introducing the buffer layers. This improvement was attributed to the modulation of the surface energy of the Si surface by the ZnO buffer layer, which finally resulted in a modification of the growth mode from three to two-dimensional.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1727-1732
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• 2008

We present a facile, yet versatile carbon nanofabrication method using electron beam lithography and resist pyrolysis. Various resist nanopatterns were fabricated using a negative electron beam resist, SAL-601, and were then subjected to heat treatment in an inert atmosphere to obtain carbon nanopatterns. Suspended carbon nanostructures were fabricated by wet-etching of an underlying sacrificial oxide layer. Free-standing carbon nanostructures, which contain 122 nm-wide, 15 nm-thick, and 2 ${\mu}m$-long nanobridges, were fabricated by resist pyrolysis and nanomachining processes. Electron beam exposure dose effects on resist thickness and pattern widening were studied. The thickness of the carbon nanostructures was thinned down by etching with oxygen plasma. An electrical biosensor utilizing carbon nanostructures as a conducting channel was studied. Conductance modulations of the carbon device due to streptavidin-biotin binding and pH variations were observed.

• 반도체디스플레이기술학회지
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• 제21권3호
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• pp.22-25
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• 2022

Metal oxide semiconductor (MOS) based on spray-pyrolysis deposition technique has attracted large attention due to simple and low-cost processibility while preserving their intrinsic optical and electrical characteristics. However, their high process temperature limits practical applications. Here, we demonstrated the nc-ZnO/ZnO field-effect transistors (FETs) via spray-pyrolysis as incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. The nc-ZnO/ZnO FETs exhibit good quality of electrical properties. Our experiments reveal that nc-ZnO in active layer enhance electrical characteristics.

• 반도체디스플레이기술학회지
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• 제22권1호
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• pp.78-82
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• 2023

Metal oxide semiconductor (MOS) adapting spray-pyrolysis deposition technique has drawn large attention based on their high quality of intrinsic and electrical properties in addition to simple and low-cost processibility. To fully utilize the merits of MOS field-effect transistors (FETs) , transparency, it is important to understand the instability behaviors of FETs under illumination. Here, we studied the photo-induced properties of nc-ZnO/ZnO field-effect transistors (FETs) based on spray-pyrolysis under illumination which incorporating ZnO nanocrystalline nanoparticles into typical ZnO precursor. Our experiments reveal that nc-ZnO in active layer suppressed the light instabilities of FETs.

• 한국재료학회지
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• 제27권7호
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• pp.392-397
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• 2017

Fluorine-doped tin oxide (FTO) coated NiCrAl alloy foam is fabricated using ultrasonic spray pyrolysis deposition (USPD). To confirm the influence of the FTO layer on the NiCrAl alloy foam, we investigated the structural, chemical, and morphological properties and chemical resistance by using USPD to adjust the FTO coating time (12, 18, and 24 min). As a result, when an FTO layer was coated for 24 min on NiCrAl alloy foam, it was found to have an enhanced chemical resistance compared to those of the other samples. This improvement in the chemical resistance of using USPD NiAlCr alloy foam can be the result of the existence of an FTO layer, which can act as a protection layer between the NiAlCr alloy foam and the electrolyte and also the result of the increased thickness of the FTO layer, which enhances the diffusion length of the metal ion.

• Korean Chemical Engineering Research
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• 제44권6호
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• pp.614-622
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• 2006

질산망간수용액의 열분해에 의한 이산화망간 적용 $Ta/Ta_2O_5/MnO_2$ 커패시터의 특성 연구를 수행하였다. 질산망간수용액의 TG/DSC 분석을 통해 약 $230{\sim}250^{\circ}C$ 범위에서 단일상의 이산화망간이 생성되었다. 열분해 온도, 질산망간수용액의 농도, 열분해 회수를 이산화망간 고체 전해질 생성의 기초 변수로 선정하고 이에 따른 커패시터 특성을 평가하였다. 최적 조성을 기준으로 복사열분해 방식이 대류열분해 방식에 비하여 우수한 특성을 발휘하였다. 이는 복사열분해에 의해 상대적으로 구형의 작은 입자 상태의 이산화망간 입자들이 생성되고 이를 통해 미세 다공성 구조의 커패시터 소결체 내부에 균일하고 치밀한 이산화망간 고체전해질 층이 생성되는 것에서 기인하는 결과임을 확인하였다.

• 한국세라믹학회지
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• 제39권12호
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• pp.1153-1157
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• 2002

입도가 다른 두 가지 고순도 ${\alpha}-Al_2O_3$ 분말을 이용하여 slip casting법과 담금코팅(dip coating)법으로 다공질 알루미나 지지체와 중간층을 각각 제조하였으며, 그 위에 분리막인 산화티탄($Tio_2$)층을 Ti-naphthenate용액으로 screen printing한 후 열분해시켜 형성시킴으로써, 3층 구조의 비대칭성 세라믹 분리막을 제조하였다. 알루미나 지지체의 곡강도, 기공율 및 평균 기공크기는 각각 231 Kg/$cm^2$, 30.26%, 0.19 ${mu}m$였으며, 중간층은 두께가 약 30 ${mu}m$, 평균 기공크기가 0.063 ${mu}m$였다. 또한 최상층 $Tio_2$ 분리막은 그 두께가 약 0.5 ${mu}m$였으며 평균 약 20 nm 정도의 미세 기공들이 매우 균일하게 형성되어 있었다.

• KIEE International Transactions on Electrophysics and Applications
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• 제5C권5호
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• pp.217-220
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• 2005

We have fabricated a superconducting YBCO system according to the pyrolysis method and low pressure apparatus. In our experiment, the X-ray diffraction pattern of the non doped YBaCuO layer indicated that the superconductor contained only 90K phase crystal. The critical temperature and critical current density for a thick layer at $650^{\circ}C$ were Tc=90 K and $Jc=6{\times}10^{4}A/cm^2$ at 90K. In low pressure apparatus, the 90 K phase YBaCuO was grown at a lower temperature compared with the normal system. Tc and Jc at $650^{\circ}C$ were Tc = 90 K and $Jc=6{\times}10^{4}A/cm^2$ at 90K.

• 한국진공학회지
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• 제5권4호
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• pp.341-347
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• 1996

Spray pyrolysis 방법으로 넓은 면적의 $Cu_2S$/CdS 태양전지를 제작하였다. 제작과정에서 전극형성, CdS spray 온도조건, $Cu_2S$층의 접합 조건등 태양전지의 효율에 영향을 주는 요인을 조사하였다. CdS 박막의 조건은 주사 전자현미경, X-선 회절기, 온도변화에 따른 광흡수 및 관전도 특성등을 통해 결정하였다. 1$\textrm{cm}^2$의 면적의 전지에 air mass 2(AM2)인 75mW/$\textrm{cm}^2$로 빛을 조사했을 때 3.15%의 효율을 얻었다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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• pp.1499-1502
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• 2005

Dense $BaMgAl_{10}O_{17}:Eu^{2+}$ phosphor particles with a spherical shape have been synthesized through spray pyrolysis method using basic aluminum nitrate precursor as a spray solution. This $BaMgAl_{10}O_{17}:Eu^{2+}$ particles prepared by the spray pyrolysis have shown the stronger emission intensity compared to the commercially-available $BaMgAl_{10}O_{17}:Eu^{2+}$. However, thermal stability of the BAM:Eu b lue phosphor is very poor due to changing from $Eu^{2+}$ to $Eu^{3+}$ at the thermal process, so brightness of the phosphor decreases. To improve the thermal stability of the dense BAM:Eu phosphor, the spherical BAM:Eu particles were coated with pure $BaMgAl_{10}O_{17}$ layer using the hydrolysis reaction in a solution system. The synthesized powders were characterized by XRD, SEM and PL. On the other hand, the emission properties of the BAM:Eu phosphors coated with $BaMgAl_{10}O_{17}$ layer before and after thermal treatment at $500^{\circ}C$ for 30 min were estimated under VUV excitation. The brightness of the coated phosphor was higher than that of the uncoated phosphor. Also, the coating thickness of BAM layer in the BAM:Eu particles was optimized.