• 한국전기전자재료학회논문지
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• 제15권10호
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• pp.889-895
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• 2002

Wafer level packaging is gain mote momentum as a low cost, high performance solution for RF-MEMS devices. In this work, the flip-chip method was used for the wafer level packaging of RF-MEMS devices on the quartz substrate with low losses. For analyzing the EM (electromagnetic) characteristic of proposed packaging structure, we got the 3D structure simulation using FEM (finite element method). The electric field distribution of CPW and hole feed-through at 3 GHz were concentrated on the hole and the CPW. The reflection loss of the package was totally below 23 dB and the insertion loss that presents the signal transmission characteristic is above 0.06 dB. The 4-inch Pyrex glass was used as a package substrate and it was punched with air-blast with 250${\mu}{\textrm}{m}$ diameter holes. We made the vortical feed-throughs to reduce the electric path length and parasitic parameters. The vias were filled with plating gold. The package substrate was bonded with the silicon substrate with the B-stage epoxy. The loss of the overall package structure was tested with a network analyzer and was within 0.05 dB. This structure can be used for wafer level packaging of not only the RF-MEMS devices but also the MEMS devices.

• 대한화학회지
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• 제8권1호
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• pp.9-14
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• 1964

전해질용액의 점도가 농도의 양수임은 기지의 사실이나 전농도에 걸쳐 잘 맞는 관계식은 아직 발견되지 않았다. 표면장력 역시 이러한 관계가 있으나 완전한 식은 없으며 이들은 모두 용액내의 이온의 상태에 기인하므로 표면장력과 덤도간에도 일정한 관계가 있을 것으로 생각되는 바이다. 순수한 물질에 대한 관계식은 Silverman1)이 Batchinski식 과 MacLeod 식에서 ${\gamma}^{\frac{1}{4}}=\;A/{\eta}$ + B 식을 유도하여 실험오차 범위안에서 일치된다고 했으나 아직 $Jones^{(4)}$들이 측정한 몇가지 염을 제외하고는 거의 모든 염용액의 점도나 표면장력의 정밀한 값은 측정되지 않았음으로 우선 여기서는 몇가기 염용액의 점도를 측정하였고 또 점도계수와 농도관계를 고찰하였다.

• 한국광학회지
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• 제17권3호
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• pp.285-289
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• 2006

광섬유형 콜리메이터와 광 진행 경로의 수직 방향으로 삽입된 주기적으로 식각된 줄무늬(stripe) 평판에 의해 진행하는 빔의 일부에 광 경로차를 유도하는 마이크로 옵틱형 마하젠더 간섭형 필터를 제안하고 구현하였다. 제안된 마이크로 옵틱 필터는 주기적으로 식각된 줄무늬(stripe) 구조의 평판을 빔 경로에 삽입하여 측방향 정렬에 무관하게 특정 소멸비 값 이상의 특성을 구현할 수 있으며, 식각된 박막의 두께를 조정함으로써 원하는 대역폭 및 주기의 전달특성을 가지는 필터를 구현할 수 있다. 네거티브 포토레지스터인 SU-8을 기반으로 줄무늬(stripe) 구조의 주기적으로 식각된 평판을 제작하였으며 이를 이용하여 구현된 필터의 소멸비는 측방향 정렬에 무관하게 30 dB이상의 값을 가진다. 제작된 필터의 FSR(Free Spectral Range)은 장파장 대역에서 약 237 nm이고 그리고 삽입손실은 2 dB 미만의 값을 가진다. 통과대역에서의 PDL(Polarisation Dependent Loss)값은 0.15 dB 미만이다.

• 대한기계학회논문집
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• 제18권12호
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• pp.3276-3286
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• 1994

In most direct contact liquid-liquid heat exchangers, oil or hydrocarbon with a density less than water is normally used as dispersed working fluid. The main difficulty that arises with this arrangement lies in the control of the interface at the top of the column. When it is connected with a solar collector which uses water as its working fluid, the main difficulties arise from the fact that the water can be frozen during winter time. In order to solve these problems and to demonstrate the technical feasibility of a direct contact liquid-liquid heat exchanger, liquids heavier than water with low freezing temperature has been utilized as dispersed phase liquids in a small laboratory scale model made of pyrex glass. In the present investigation, dimethyl phthalate(C/sub 6/H/sub 4/)COOCH/sub 3/)/sub 2/) and diethyl phthalate (C/sub 6/H/sub 4/(CO/sub 2/C/sub 2/H/sub 5/)/sub 2/) are utilized as heavy dispersed phase working fluids. The results of the present investigation the technical in the utilization of heavier dispersed working liquid in the spray-column liquid-liquid heat exchanger for a solar system. The overall average temperature difference along the column is found to be almost half of the initial temperature difference between the dispersed and the continuous phase. Despite the fact that the two phthalates tested in the experiment differ significantly in some of their physical properties, the volumetric heat transfer coefficients in terms of dispersed fluid superficial velocities were found to be similar for both phthalates tested.

• 태양에너지
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• 제10권2호
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• pp.28-37
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• 1990

빙축열의 문제점인 물의 과냉각을 억제 또는 제거하기 위하여 고흡수성 고분자를 조핵제로 사용하는 방법이 고안되었다. 축열재인 물을 $25^{\circ}C$에서 $-12^{\circ}C$로 냉각시킨 결과 순수한 물의 경우 샘플중 25%의 샘플은 전혀 결빙되지 않았으며 나머지 얼음이 생성된 샘플의 경우도 평균 $9.8^{\circ}C$의 과냉각을 보인 반면, 조핵제가 첨가된 경우 35%가 전혀 과냉각을 보이지 않았으며 과냉각이 일어난 샘플의 평균과 냉각온도 역시 현저히 감소되었다. 0.5wt%의 고흡수성 고분자가 첨가된 축열재를 사용하여 캡슐타입으로 제작한 축열조에서 열전달 실험을 실시한 결과 과냉각은 전혀 관찰되지 않았으며 이로 인하여 순수물을 축열재로 사용하는 경우보다 축열속도가 증가하였다. 이상의 결과로부터 고흡수성 고분자가 빙축열 시스템의 조핵제로 사용될 수 있음을 확인하였다.

• Journal of Korean Society for Atmospheric Environment
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• 제17권E3호
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• pp.91-99
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• 2001

Plasma reactor was used to generate a high potential difference between two surfaces of concentric pyrex tubes by electrical current. The annular gap of the reactor was calculated by trial and error from the breakdown voltage equation and set at 0.45 cm. The overall objective of this research was to know the effects of the frequency, humidity, and residence time on the formation of nitrogen oxides in a plasma reactor. The primary voltage varied from 50 to 90 volts and the frequency was varied in increments of 10 Hz from 60 to 650 Hz at the primary voltage of 90. The increase in the secondary voltage was not linear but exponential at high frequencies. At a maximum concentration of about 745 ppm, the frequency and secondary voltage was 600 Hz and 4,200 volts, respectively. All tests for the effects of humidity on NO$_{x}$ production were performed at the optimal setting of 90 colts and 600 Hz frequency. Since the NO$_{x}$ production was not an one dimensional phenomenon, competing reactions were assumed to occur in the discharge chamber. The sharp peak concentration of 1,810 ppm was observed at 38% of relative humidity, The enhanced production was choked off, and the production rate rapidly dropped to 3 ppm at above 40% of relative humidity. It is assumed that the corona attacks the most vulnerable molecules in the reaction chamber before attacking other more lightly bonded molecules, possibly at humidities above 38% and the optimized 90 volt setting. Thus, there was not enough energy left after attacking all water molecules to decompose an appreciable amount of $N_2$. If nitrogen breakdown does not occur, then oxides of nitrogen are not likely to be produced.ced.

• 한국진공학회지
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• 제6권2호
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• pp.114-121
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• 1997

투명전도성 산화주석 박막이 펄스레이저증착에 의하여 파이렉스유리 기판상에 제조 되었다. 진공, $O_2$, 및 $Sn(CH_3)_4$분위기에서 Nd-YAG레이저 빛살이 다결정 $SnO_2$ 타겟을 융제 하여 실온에서 기판상에 박막을 증착시키고, 증착된 막을 230, 420, 및 $610^{\circ}C$에서 각각 2시 간 동안 공기중에서 열처리하였다. 박막의 특성이 UV-VIS-NIR 분광법과 X-선 회절법에 의하여 조사되고, 전기적 성질이 촉심식법으로 구해진 막의 두께와 함께 사점탐침법에 의하 여 측정되었다. $Sn(CH_3)_4$이 존재할 때 $SnO_2$상들이 실온에서조차 성장되는 것이 관찰되었다. 이는 레이저 융제 동안 발생된 마이크로플라즈마가 전구물질분자의 분해에 중요한 역할을 함을 시사한다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권9호
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• pp.449-454
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• 2002

A rectangular straight microchannel, integrated with the resistance temperature detectors(RTDs) for temperature sensing and a micro-heater for generating the Temperature gradient along the channel, was fabricated. Its dimension is 57${\mu}{\textrm}{m}$(H)$\times$200${\mu}{\textrm}{m}$(W)$\times$48,050${\mu}{\textrm}{m}$(L), and RTDs were placed at the inner-channel wall. Si wafer was used as a substrate. For the fabrication of RTDs, 5300$\AA$ thick Pt/Ti layer was sputtered on a Pyrex glass wafer. Finally, the glass wafer was bonded with Si wafer by anodic bonding, so that the RTDs are located inside the microchannel. Temperature coefficient of resistance(TCR) values of the fabricated Pt-RTDs were 2800~2950ppm$^{\circ}C$ and the variation of TCR value In the range of O~10$0^{\circ}C$ was less than 0.3％. Therefore, it was proved that the fabricated Pt-RTDs without annealing were excellent as temperature sensors. The temperature distribution in the microchannel was investigated as a function of mass flow rate and heating power. The temperature increase rate diminished with decreasing the applied power and increasing the mass flow rate. It was confirmed from the comparison with the simulation results that the temperature measured inside the microchannel is more accurate than measuring the temperature measured at the outer wall. The proposed temperature sensing method and microchannel are expected to be useful in microfluidics researches.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1996년도 춘계학술대회
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• pp.203-206
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• 1996

To understand the local fluid dynamics for different desists of Fontan operation, five models were made out of Pyrex glass to facilitate in-vitro study. Model I, II and III have same position of the center of the anastomosis of the IVC( inferior vena cava) with that of the SVC(superior vena cava), but Model IV and V have 10 mm offset between them. Also the anastomotic junction angles are different(Model I and $IV:90^{\circ}$, Model II and $V:70^{\circ}$, Model $III:45^{\circ}$). These models were then connected to a flow loop for flow visualization study. In Model I any dominant vortex was not seen in the central region of the juntion, but a large unstable vortex was created in the Model II and III. In Model IV and V a significant stagnation region was created in the middle of the offset region. It also showed that the flow direction from the IVC and SVC to the LPA(left pulmonary artery) and RPA(right pulmonary artery) highly depends on the offset of the junction rather than the anastomotic junction angle.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.148-149
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• 2007

We present the design and fabrication prcoess of a two-axis tilting micromirror device driven by the electrostatic vertical comb actuator. A high aspect-ratio comb actuator is fabricated by multiple DRIE process in order to achieve large scan angle. The proposed fabrication process enables a mirror to be fabricated on the wafer-scale. By bonding a double-side polished (DSP) wafer and a silicon-on-insulator (SOI) wafer together, all actuators on the wafer are completely hidden under the reflectors. Nickel lines are embedded on a Pyrex wafer for the electrical access to numerous electrodes of mirrors. An anodic bonding step is implemented to contact electrical lines with ail electrodes on the wafer at a time. The mechanical angle of a fabricated mirror has been measured to be 1.9 degree and 1.6 degree, respectively, in the two orthogonal axes under driving voltages of 100 V. Also, a $8{\times}8$ array of micromirrors with high fill-factor of 70 % is fabricated by the same fabrication process.