• 한국정밀공학회지
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• 제24권12호
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• pp.50-56
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• 2007

Femtosecond laser ablation of the Invar alloy and hole drilling for a shadow mask are studied. We used a regenerative amplified Ti-sapphire laser with a 1kHz repetition rate, 184fs pulse duration and 785nm wavelength. Femtosecond laser pulse was irradiated on the Invar alloy with air blowing at the condition of various laser peak power. An ablation characteristic of the Invar alloy was appeared non-linear at $125J/cm^2$ of energy fluence. For the application to a shadow mask, the hole drilling of the Invar alloy with the cross section of a trapezoidal shape was investigated. The ablated micro-holes were characterized using an atomic force microscopy(AFM). The optimal condition of hole pattern f3r a shadow mask was $4\;{\mu}m$ z-axis feed rate, 0.2mm/s circular velocity, $26.4{\mu}J$ laser peak power. With the optimal processing condition, the fine circular hole shape without burr and thermal damage was achieved. Using the femtoseocond laser system, it demonstrates excellent tool for the Invar alloy micro-hole drilling without heat effects and poor edge.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.271-277
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• 2004

As one of the concepts of the laser/electric hybrid propulsion system, a feasibility study on possibilities of electrostatic acceleration of a laser ablation plasma induced from a solid target was conducted. Energy distributions of accelerated ions were measured by a Faraday cup. A time-of-flight measurement was also conducted for ion velocity measurement. It was found that an average speed of ions from a pure laser ablation in this case was about 20 km/sec for pulse energy of 40 $\mu$J/pulse with pulse width of 250 psec. On the other hand, through an electrostatic field with a + I ,000 V electrode, the speed could be accelerated up to 40 km/sec. It was shown that the electrode with positive potential was more effective than that with negative potential for positive-ion acceleration in laser induced plasma, or pulsed plasma, in which ions were induced with the Coulomb explosion following electrons. In addition, the ion-acceleration or deceleration strongly depended on conditions of pairs of inner diameter and electrodes gap.

• 한국기계가공학회지
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• 제11권5호
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• pp.99-103
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• 2012

Presently, A glass is widely used in telecommunication system, optoelectronic devices and micro electro mechanical systems. Micro drilling of glass using the laser can save processing cost and improve the accuracy. This paper experiments micro drilling using KrF excimer laser on the pyrex glass of $500{\mu}m$ thickness. We have experiment to find out optimum laser machining conditions of micro drilling of glass and ablation depth and influence by processing parameter suc'h pulse repetition rate, energy density and number of pulses. Pulse repetition rate don't influence ablation depth at the micro drilling of pyrex glass. Energy density influence micro drilling of parallelism and maximum thickness that can be drilled. Ablation depth is most influenced by number of pulses.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.366-370
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• 1997

This paper descibes a micro groove machining process on the polyurethane biopolymer by KrF excimer laser. To investigate the etch charcteristics of polyurethane biopolymer quantitatively,laser system for ablation was installed with high precison moter and then polymer ablation experiment, in which paramteters were fluence,pulse repetition rate,numbers of pulses and assist gas, was carred out. In this experiment, we found out that the value of critical energy density for ablation is 30mJ/cmsup2/ and the etching rate is more dependent on the pulse number and fluence than any other pamameter. Finally, we machined micro grooves for fiexibility as width 300.mu.m depth 100.mu.m and port for micro-devices mounting as length 100.mu.m width 300.mu.m depth .mu.m on the outer wallof polyurethane biopolymer tube which is used as medical device.

• 한국레이저가공학회지
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• 제18권4호
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• pp.17-22
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• 2015

In this paper, ablation rate of $Al_2O_3$ ceramics by femtosecond laser fluence is derived with experimental method. The automatic three axis linear stage makes laser optics to move with high spatial resolution. With 10 times objective lens, minimal pattern width of $Al_2O_3$ is measured in the focal plane. Ablated surface area is shown as linear tendency increasing number of machining times with various laser power conditions. Machining times is most sensitive condition to control $Al_2O_3$ pattern width. Also, the linear increment of pattern width with laser power change is investigated. In high machining speed, the ablation volume rate is more linear with fluence because pulse overlap is minimized in this condition. Thermal effect to surrounding medium can be minimized and clean laser process without melting zone is possible in high machining speed. Ablation volume rate decelerates as increasing machining times and multiple machining times should be considered to achieve proper ablation width and depth.

• 한국기계가공학회지
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• 제12권6호
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• pp.23-29
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• 2013

In this paper, pure $I_{ph}$ and hybrid carbon nanotube reinforced $I_{ph}$ were sintered using the SPS(spark plasma sintering) method for high densification. A nanosecond laser (${\lambda}=1063nm$, ${\tau}P=10ns$) and a femtosecond laser (${\lambda}=1027nm$, ${\tau}P=380fs$) were installed on an optical system for the micromachining test. The ablation characteristics of the pure $I_{ph}$ and CNT/$I_{ph}$ composites, such as thermal effect and ablation depth, were investigated using FE-SEM and a confocal microscope device. Laser machining results for the two mating materials showed improved performances: CNT/$I_{ph}$ composites showed good surface morphology of hole drilling without a melting zone due to the composites' high thermal properties; also, the ablated depth of CNT/$I_{ph}$ was higher than that of pure $I_{ph}$.

• 한국레이저가공학회지
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• 제9권3호
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• pp.15-21
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• 2006

A Polypropylene (PP) film was ablated using a femtosecond laser with a center wavelength of 785 nm, a pulse width of 184 fs and a repetition rate of 1 kHz. Increments of both pulse energy and the shot number of pulses lead to co-occurrence of photochemical and thermal effect, demonstrated by the spatial expansion of rim on the surface of PP. The shapes of the laser-ablated PP films were imaged by a scanning electron microscope (SEM) and measured a 3D optical measurement system (NanoFocus). And, the oxygen transmission rate (ORT) of periodically laser-ablated PP film were characterized by oxygen permeability tester for modified atmosphere packaging (MAP) of fresh fruit and vegetable. Our results demonstrate that femtosecond pulsed laser is efficient tools for breathable packaging films in modifying the flow of air and gas into and out of a fresh produce container, where the micropatterns are specifically tailored in size, location and number which are easily controlled by laser pulse energy and pulse patterning system.

• Journal of Oral Medicine and Pain
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• 제30권3호
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• pp.375-381
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• 2005

기존의 치과용 핸드피스를 대체할 수 있는 효과적인 치아 삭제 방법인 Er:YAG 레이저를 이용하여 보다 효과적으로 치아를 삭제하기 위해 여러 가지 변수들, 즉 펄스에너지, 조사반복율 및 레이저 조사 동안의 물분사량에 대한 다양한 연구가 진행되어 왔다. 특히 이 중에서도 물분사량은 삭제 효율이 높이면서 치수를 보호할 수 있는 중요한 요소로 여겨지고 있다. 레이저 조사 동안 분사되는 물의 양이 적으면 치아에 균열이나 탄화를 유발하고 치수손상을 야기할 수 있는 위험이 있는 반면, 물의 양이 지나치게 많으면 삭제효율이 저하되고 레이저 시술동안 치과의사의 시야확보를 방해할 수 있으므로, 조사조건에 따른 가장 적절한 물 분사량을 결정하는 것이 아주 중요하다. 본 연구에서는 특정조사조건에서 치아법랑질 삭제에 가장 효과적인 물분사량을 결정하고, 그 물분사량을 적용하였을 때 치수내에서 발생하는 온도변화를 측정하여 안전성 여부를 함께 평가하고자 하였다. 발거된 건전치아를 표본으로 하여, 20 Hz의 조사반복율, 200 mJ 및 300 mJ의 펄스에너지의 조사조건에서 1.6, 3.0, 5.0, 7.0, 10.0 ml/min의 서로 다른 물분사량을 적용하여 치아삭제 효과를 평가하였다. 이때 레이저 조사시간은 3초로 고정하였다. 삭제효율은 조사 전후의 치아무게를 측정하여 그 차이로 결정하였으며 온도측정을 위해서는 별도의 치아를 준비하여 온도측정장치를 조사측과 반대측의 치수벽에 위치하여 레이저조사 동안의 온도변화를 추적하였다. 실험결과, 200 mJ과 300 mJ 모두에서 1.6 ml/min의 가장 적은 물분사량이 치아삭제효율이 가장 좋았다. 또한 이 조건에서의 온도변화를 측정한 경우에도 치수손상을 일으키지 않을 정도의 미미한 온도상승만을 보여주었다. ANOVA 분석의 결과 조사부위(조사측과 비조사 반대측)에 따른 유의한 차이가 나타났으나(p<0.05), 펄스에너지에 따라 각각 비교하였을 때는 유의한 차이를 보여주지 않았다. 그러므로 본 실험의 결과에 따르면, 1.6 ml/min의 비교적 적은 양의 물을 레이저 조사시에 함께 분사해 준다면 200$\sim$300 mJ의 펄스에너지, 20 Hz의 조사반복율, 3초의 레이저조사시간이라는 조건에서는 치수손상을 일으키지 않는 안전한 범위에서 가장 효과적으로 치아를 삭제할 수 있을 것으로 생각된다.

• 한국정밀공학회지
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• 제21권12호
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• pp.13-20
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• 2004

Manufacturing process for the microfluidic device can include such sequential steps as master fabrication, electroforming, and injection molding. The laser ablation using masks has been applied to the fabrication of channels in microfluidic devices. In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation of PET (polyethylene terephthalate) by the excimer laser radiation could be used successfully to make three dimensional master fur nickel mold insert. The mechanism fur ablative decomposition of PET with KrF excimer laser $({\lambda}: 248 nm, pulse duration: 5 ns)$ was explained by photochemical process, while ablation mechanism of PMMA (polymethyl methacrylate) is dominated by photothermal process, the .eaction between PC (polycarbonate) and KrF excimer laser beam generate too much su.face debris. Thus, PET was adopted in polymer master for nickel mold insert. Nickel electroforming using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• 한국광학회:학술대회논문집
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• 한국광학회 2002년도 하계학술발표회
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• pp.244-245
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• 2002

1 picosecond 보다 짧은 펄스길이를 갖는 초단파길이 레이저 펄스 (Ultrashort laser pulse, USLP)를 이용한 물질의 절제 (ablation)는 여타 nanosecond 영역의 레이저 절제와 많은 차이를 보인다(1). USLP는 순간 파워가 매우 높기 때문에 직접적으로 물질의 원자를 분리시켜 자유전자를 형성한다 이들 자유전자는 일반 선형흡수체 (linear absorbing chromophore)보다 흡수계수가 몇 십 배로 높아 대부분의 펄스 에너지가 표면 100-200 m 이내의 극히 작은 지역에 밀집되게 된다. (중략)