• Applied Chemistry for Engineering
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• v.23 no.6
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• pp.561-566
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• 2012

PtRuW/C catalysts were prepared with the different molar ratios of Pt : Ru : W and their compositions were analyzed by energy dispersive X-ray (EDX). The uniform distribution of particles was observed using transmission electron microscopy (TEM). An average crystalline size of 3.5~5.5 nm was calculated based on x-ray diffraction (XRD) data. The electrochemical properties such as electrochemically active surface areas, current densities, specific activities and poisoning rates, were analyzed via CO stripping, linear sweep voltammetry and chronoamperometry. From the analysis, we observed that ternary alloy catalysts, except $PtRu_2W_2/C$, have higher current densities, specific activities and stabilities than those of commercial binary catalysts. Among all in-house catalysts, Pt5Ru4W/C showed the highest specific activity of $121.05mA{\cdot}m^{-2}$ and the lowest poisoning rate of $0.01%{\cdot}s^{-1}$.

• Transactions of the Korean hydrogen and new energy society
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• v.19 no.5
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• pp.423-429
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• 2008

This work was carried out to improve the performance of anodic electrocatalysts in direct ethanol fuel cell(DEFC). PtRu and $Pt_5Ru_4M$(M= Ni, Sn, Mo and W) electrocatalysts were prepared by using a $NaBH_4$ reduction method. Alloy crystal structure and particle size of electrocatalysts were characterized by X-ray diffraction(XRD) and transmission electron microscopy(TEM). The XRD analysis of the electrocatalysts revealed that the face-centered cubic(fcc) peaks shifted to slightly higher diffraction angles when third metals were added. Average size of the uniform particles was observed to be approximately $3{\sim}3.5\;nm$ from the TEM image. The electrochemical measurements were carried out in the solution 1M $H_2SO_4$ and 1M $C_2H_5OH$ at room temperature. Cyclic-voltammogram results showed that $Pt_5Ru_4W$ electrocatalyst exhibited much higher current density for ethanol oxidation of $2.73\;mA/cm^2$ than PtRu electrocatalyst of $0.73\;mA/cm^2$.

• Journal of Energy Engineering
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• v.7 no.1
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• pp.35-43
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• 1998

Electrodes using for the anode electrode of direct methanol fuel cell with Pt/C and Pt/Ru/C catalyst were prepared and characterized by SEM, TEM, thermal analysis and electrochemical analysis. The half cell tests were carried out with 1 M $H_2SO_4$ electrolyte and 1 M $CH_3OH$ in order to evaluate the electrode performance. The employed electrochemical methods were cyclic vol-tammetry and potentiodynamic polarization experiments. It was found that 20 w% polytetrafluoroethylene (PTFE) content in catalyst showed the best performance due to the best platinum utilization on PTFE-containing catalyst layer. It was found that Pt/Ru/C binary catalyst inhibited the poisoning of anode electrode showing improved performance compared to the Pt/C catalyst by the adsorption of oxygen containing species on the electrode surface at same time. The apparent activation energy for methanol oxidation on the Pt/Ru/C and Pt/C catalyst layer was 11.60 kJ/mol and 26.85 kJ/mol, respectively.

• 한국전기화학회:학술대회논문집
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• 2002.07a
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• pp.211-218
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• 2002

In this study, Pt/Pd (1.1), PtPd (2:1) and PtPd (3:1) binary catalysts and Pt/Ru/Pd (5:4:1) ternary catalyst were designed. The catalysts were synthesized by impregnation method using $NaBH_4$ as a reducing agent. A good catalyst for methanol oxidation requires low on-set potential, stable durability and low activation energy. In order to investigate the catalytic activity for the methanol oxidation, electrochemical measurements such as cyclic voltammetry and chronoamperometry were peformed in sulfuric acid with/without methanol solution. In order to calculate the activation energy of the reaction, electrochemical measurements were also tested at different temperatures. For investigation of the structural analysis such as particle size and alloying, X-ray diffraction and transmission electron microscopy analysis were used. In order to identify the role of the Pd and to determine the composition of the surface of the Pt/Pd nanoparticles, X-ray photoelectron spectroscopy (XPS) analysis was investigated. The XPS spectra of Pd showed that Pd appears only as a metallic state in the binary catalysts. The chemical states of Pt in PtPd catalysts are both metallic and oxidative. Polarization curves and power density data were obtained by testing the DMFC unit cell performance of PtPd and PtRuPd catalysts. These data showed that Pt/Pd (2:1) and Pt/Ru/Pd (5:4:1) have better performance than Pt and Pt/Ru, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.80-80
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• 1998

RU02 박막은 전이금속으로서 rutile 구조이며, 넓은 온도 영역에서 금속성의 를 나타내고, 700도 이상의 높은 온도에서 열적 안정성을 갖는 물질이다 이러한 특성 때문 에 RU02 박막은 실리콘 디바이스에서 배선 게이트 전극 확산 장벽 등에 응용가능성이 높 은 물질로 각광을 받고 있다- 특히 다결정 RU02 박막은 DRAM (dynamic random access m memory) 내의 강유전성 축전기의 전극으로서 유망한 물질이다. 지금까지 이러한 응용분야에 사용된 전극물질은 pt 금속이었다 그러나 이러한 금속전극은 SI 산소 그리고 강유전체의 구성물질 등과의 상호확산, pt 표면의 hillock의 존재로 생기는 전기적 단락, 기판과의 나쁜 점작성, 어려운 에칭 프로세스 등의 단점을 가지고 있다 더욱 더 심각한 문제는 P Pt'ferroelectric/Pt 구조에서 나타나는 aging과 fatigue인데, 이는 108 사이쿨 이후에 스위칭 가 능한 잔류 pOlarization 으$\mid$ 감소를 유발하게 된다- 최근 Berstein은 Pt 대신에 RU02를 사용함으로써 강유전체 축전기에서의 fatigue 현상을 크게 감소시켰다고 보고 한 바 있다 Burst川도 RU02 가 실리콘 표면과 유전체 물질 사이에 전기전도 어떠한 상호 확산도 일어나지 않음을 보였다. 그러나 이러한 연구 결과에도 증착조건과 RU02 박악의 특성에 관한 상호 관계가 충분히 더욱 더 중은 강유전성 박막올 만들기 위해서는 이러한 박막 전극에 않고 있다 연구되지 대한 상세한 연구가 반드시 필요하다고 본다. RU02 박막은 실리콘 기판 위에 고주파 마그네트론 스퍼터링 방법으로 증착하였다. 사용 한 타켓은 2 인치의 직경을 가지는 CERAC 사에서 제작한 Ruol다 초기 진공은 1O~6 Torr 이하였고, 고주파 전력은 20 - 80W 까지 변화시켰다 반응성 스퍼터링율 하기 위해 아르곤과 산소롤 주입하였고, 산소/(산소+아르곤)의 비를 변화시켰다 기판의 온도와 증착압력은 각각 상온에 서 500도까지 , 5mTorr에 서 100mTorr 까지 변 화시 켰 다 RU02 박막의 결정성을 조사하기 위해 XRD 표면 형상과 단면을 조사하기 위해 SEM을 사용하였다‘ 박악의 비저항을 조사하기 위해 4-단자법 van der Pauw 방법을 사용하였다. RU02 박막은 증착압력이 높을수록 비저항은 높아지고, 두께는 감소하였다. 특히 1 100mTorr에서는 작업가스와 스퍼터된 입자사이의 심각한 산란 때문에 아예 증착이 이루어 지지 않았다‘ RF 전력이 증가할수록 비저항이 낮아졌다. 이는 두께에 의존하는 결과이며 전형적인 금속박막에서 나타나는 현상과 유사함을 알 수 있었다- 기판온도와 작업가스의 산소 분압이 높을수록 비저항이 감소하였다‘ 이러한 사실은 성장한 박악의 결정구조와 밀접한 관련이 있음을 보여준다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.4
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• pp.599-604
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• 1998

We have investigated Pt and $RuO_2$ as a bottom electrode for ferroelectric capacitor applications. The bottom electrodes were prepared by using an RF magnetron sputtering method. Some of the investigated parameters were a substrate temperature, gas flow rate, RF power for the film growth, and post annealing effect. The substrate temperature strongly influenced the surface morphology and resistivity of the bottom electrodes as well as the film crystallographic structure. XRD results on Pt films showed a mixed phase of (111) and (200) peak for the substrate temperature ranged from RT to $200^{\circ}C$, and a preferred (111) orientation for $300^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of $300^{\circ}C$ and RF power 80W for the Pt bottom electrode growth. With the variation of an oxygen partial pressure from 0 to 50%, we learned that only Ru metal was grown with 0~5% of $O_2$ gas, mixed phase of Ru and $RuO_2$ for $O_ 2$ partial pressure between 10~40%, and a pure $RuO_2$ phase with $O_2$ partial pressure of 50%. This result indicates that a double layer of $RuO_2/Ru$ can be grown in a process with the modulation of gas flow rate. Double layer structure is expected to reduce the fatigue problem while keeping a low electrical resistivity. As post anneal temperature was increased from RT to $700^{\circ}C$, the resistivity of Pt and $RuO_2$ was decreased linearly. This paper presents the optimized process conditions of the bottom electrodes for memory device applications.

• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.191-194
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• 2009

PtRu based and PtSn based ternary catalysts were prepared by a conventional impregnation method using NaBH4 as reducing agent. The alloy formation, crystalline size and chemical composition of the in-house catalysts were determined by XRD, TEM and EDX, respectively. The chemical compositions of in-house catalysts were quite similar to the nominal value and good alloy formations were also observed. Further, crystalline sizes of ternary catalysts were comparatively smaller than binary catalysts and were approximately 3.5 ~ 5.5 nm. The electrochemical measurements were carried out in the solution 1 M $H_2SO_4$ with 1 M $C_2H_5OH$ at room temperature. LSV results obtained that ternary catalysts were higher current densities and specific activities. Especially, in case of tungsten addition system, Pt5Sn4W/C have the highest specific activities values and was approximately 21.2 and 3.1 times higher than that of PtRu/C and PtSn/C electrocatalyst.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.801-803
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• 1998

We investigated Pt and $RuO_2$ as a bottom electrode and PZT thin film for ferroelectric applications. XRD examination shows that a mixed phase of (111) and (200) Pt peak for the temperature ranged from RT to $200^{\circ}C$, and a preferred (111) orientation for the substrate temperature of $300^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of $300^{\circ}C$, 80 W for the Pt bottom electrode growth. From the study of an oxygen partial pressure from 0 to 50%, we learned that only Ru metal was grown with $0{\sim}5%$, a mixed phase of Ru and $RuO_2$ for $10{\sim}40%$, pure $RuO_2$ at 50%. Having optimized the bottom electrode growth conditions, we employed two step process in PZT film capacitor: PZT film growth at the low substrate temperature of $300^{\circ}C$ and then post RTA anneal treatments. PZT films were randomly oriented on $RuO_2$ and (110) preferentially oriented on Pt electrode. Leakage current density of PZT film demonstrated two to three orders higher for $RuO_2$ bottom electrode. From C-V results we observed a dielectric constant of PZT film higher than 1200. This paper presents the optimized process conditions of the bottom electrodes and properties of PZT thin films on these electrodes.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1998.06a
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• pp.57-60
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• 1998

Lean zirconate titanate (PZT) is an attractive material for the memory device applications. We have investigated Pt and{{{{ { RuO}_{2 } }}}} as a botton electrode for a device application of PZT thin film. The bottom electrodes were prepared by using an RF magnetron sputtering method. The substrate temperature influenced the resistivity of Pt and {{{{ { RuO}_{2 } }}}} a s well as the film crystal structure. XRD examination shows that a preferred(111) orientations for the substrate temperature of 30$0^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of 30$0^{\circ}C$ for the bottom electrode growth. We investigated and anneal temperature effect because Perovskite PZT structure is recommended for the memory device applications and the structural transformation is occurred only after and elevated heat treatment. As post anneal temperature was increased from RT to $700^{\circ}C$, the resistivity of Rt and {{{{ { RuO}_{2 } }}}} w as decreased. Surface morphology was observed by AFM as a function of post anneal temperature.

• Bulletin of the Korean Chemical Society
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• v.31 no.2
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• pp.331-334
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• 2010

In the present study, carbon supports mixed with purified multi-walled carbon nanotubes (MWNTs) and carbon blacks (CBs) were used to improve the cell performance of direct methanol fuel cells (DMFCs). Additionally, the effect of $O_2$ plasma treatment on CBs/MWNTs supports was investigated for different plasma RF powers of 100, 200, and 300 W. The surface and structural properties of the CBs/MWNTs supports were characterized by FT-IR, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and inductive coupled plasma-mass spectrometer (ICP-MS). The electrocatalytic activity of PtRu/CBs/MWNTs catalysts was investigated by cyclic voltammetry measurement. In the experimental results, the oxygen functional groups of the supports were increased with increasing plasma RF power, while the average Pt particle size was decreased owing to the improvement of dispersibility of the catalysts. The electrochemical activity of the catalysts for methanol oxidation was gradually improved by the larger available active surface area, itself due to the introduction of oxygen functional groups. Consequently, it was found that $O_2$ plasma treatments could influence the surface properties of the carbon supports, resulting in enhanced electrocatalytic activity of the catalysts for DMFCs.