• Carbon letters
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• v.11 no.4
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• pp.336-342
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• 2010

Different oxidation treatments on CNTs using diluted 4.0 M $H_2SO_4$ solution at room temperature and or at $90^{\circ}C$ reflux conditions were investigated to elucidate the physical and chemical changes occurring on the treated CNTs, which might have significant effects on their performance as catalyst supports in PEM fuel cells. Raman spectroscopy, X-ray diffraction and transmission electron microscope analyses were made for the acid treated CNTs to determine the particle size and distribution of the CNT-supported Pt-Ru nanoparticles. These CNT-supported Pt-based nanoparticles were then employed as anode catalysts in PEMFC to investigate their catalytic activity and single-cell performance towards $H_2$ oxidation. Based on PEMFC performance results, refluxed Pt-Ru/CNT catalysts prepared using CNTs treated at $90^{\circ}C$ for 0.5 h as anode have shown better catalytic activity and PEMFC polarization performance than those of the commercially available Pt-Ru/C catalyst from ETEK and other Pt-Ru/CNT catalysts developed using raw CNT, thus demonstrating the importance of acid treatment in improving and optimizing the surface properties of catalyst support.

• 한국전기화학회:학술대회논문집
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• 2002.07a
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• pp.175-178
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• 2002

• 한국전기화학회:학술대회논문집
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• 2003.10a
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• pp.40-40
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• 2003

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.4
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• pp.599-604
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• 1998

We have investigated Pt and $RuO_2$ as a bottom electrode for ferroelectric capacitor applications. The bottom electrodes were prepared by using an RF magnetron sputtering method. Some of the investigated parameters were a substrate temperature, gas flow rate, RF power for the film growth, and post annealing effect. The substrate temperature strongly influenced the surface morphology and resistivity of the bottom electrodes as well as the film crystallographic structure. XRD results on Pt films showed a mixed phase of (111) and (200) peak for the substrate temperature ranged from RT to $200^{\circ}C$, and a preferred (111) orientation for $300^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of $300^{\circ}C$ and RF power 80W for the Pt bottom electrode growth. With the variation of an oxygen partial pressure from 0 to 50%, we learned that only Ru metal was grown with 0~5% of $O_2$ gas, mixed phase of Ru and $RuO_2$ for $O_ 2$ partial pressure between 10~40%, and a pure $RuO_2$ phase with $O_2$ partial pressure of 50%. This result indicates that a double layer of $RuO_2/Ru$ can be grown in a process with the modulation of gas flow rate. Double layer structure is expected to reduce the fatigue problem while keeping a low electrical resistivity. As post anneal temperature was increased from RT to $700^{\circ}C$, the resistivity of Pt and $RuO_2$ was decreased linearly. This paper presents the optimized process conditions of the bottom electrodes for memory device applications.

• Korean Journal of Materials Research
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• v.9 no.4
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• pp.368-372
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• 1999

The suggested electrode structure of MOCVD-Pt/sputtered-Ru/polysilicon has an excellent adhesion with increasing annealing temperatures and shows a stable electrode structure up to $600^{\circ}C$. However, the ruthenium used for barrier layer increased the roughness of platinum bottom electrodes because ruthenium diffused through the Pt bottom electrode and reacted with oxygen during the annealing above $700^{\circ}C$. The surface roughness increased the resistivity of Pt bottom electrodes. The resistivity of samples annealed at $600^{\circ}C$ was about $13\mu$Ω.cm. The electrode structure was possible to apply for ferroelectric thin film integration of semiconductor memory devices.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1986-1988
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• 1999

Ferroelectric lead zirconate titanate(PZT) thin films were prepared on various bottom electrodes by rf magnetron sputtering methode. The structural phase and surface morphology of the PZT thin films were largely affected by the bottom electrodes. P-E curves of PZT thin films deposited on Pt. $RuO_2$ and Ru/$RuO_2$ bottom electrode showed typical P-E hysteresis loop. The measure values of $P_r,\;E_c$ of the Ru/PZT/Ru/$RuO_2$ capacitor were $16.9{\mu}C/Cm^2$, 140kV/ cm, respectively. The Ru/PZT/Ru/$RuO_2$ capacitors were fatigue free uP to nearly $10^9$ switching cycle but Pt/PZT/Pt capacitor showed 34% degradation uP to $10^9$ switching cycle.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.801-803
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• 1998

We investigated Pt and $RuO_2$ as a bottom electrode and PZT thin film for ferroelectric applications. XRD examination shows that a mixed phase of (111) and (200) Pt peak for the temperature ranged from RT to $200^{\circ}C$, and a preferred (111) orientation for the substrate temperature of $300^{\circ}C$. From the XRD and AFM results, we recommend the substrate temperature of $300^{\circ}C$, 80 W for the Pt bottom electrode growth. From the study of an oxygen partial pressure from 0 to 50%, we learned that only Ru metal was grown with $0{\sim}5%$, a mixed phase of Ru and $RuO_2$ for $10{\sim}40%$, pure $RuO_2$ at 50%. Having optimized the bottom electrode growth conditions, we employed two step process in PZT film capacitor: PZT film growth at the low substrate temperature of $300^{\circ}C$ and then post RTA anneal treatments. PZT films were randomly oriented on $RuO_2$ and (110) preferentially oriented on Pt electrode. Leakage current density of PZT film demonstrated two to three orders higher for $RuO_2$ bottom electrode. From C-V results we observed a dielectric constant of PZT film higher than 1200. This paper presents the optimized process conditions of the bottom electrodes and properties of PZT thin films on these electrodes.

• 한국신재생에너지학회:학술대회논문집
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• 2007.06a
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• pp.188-190
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• 2007

The MEA with the catalyst layer containing PtRu black and 60 wt. %Pt/C as their anode and cathode catalysts. For find to effect of carbon support, the MEA with platinum black for cathode catalyst was fabricated. The performance of the MEA with the catalyst layer containing (PtRu black:60 wt.% Pt/C) as their anode and cathode catalyst has shown competitively higher value than the performance of the MEA with the catalyst layer containing (PtRu black:Pt black) as their anode and cathode catalyst.

• Korean Chemical Engineering Research
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• v.46 no.2
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• pp.286-290
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• 2008

Small amounts of CO in reformate fuel gas effectively block platinum catalysts by strong adsorption on the platinum surface at the operation temperature of $60{\sim}80^{\circ}C$ in PEMFC. To oxidate CO, Ru/C layer (CO filter) was placed between Pt/C layer and GDL (gas diffusion layer) in this study. Ru/C filter provided good CO-tolerant PEMFC anode, but decreased the performance of unit cell about 10% at 0.6 V due to mass transfer resistance from Ru/C filter thickness and increase of charge transfer resistance. Membrane degradation is one of the most important factors limiting the life-time of PEMFCs. Membrane durability would be dependent on the electrode catalyst type. It seemed that Ru catalyst layer would shorten the life time of PEMFC as enhanced the fluoride emission rate of membrane in acceleration test.

• Transactions of the Korean hydrogen and new energy society
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• v.19 no.1
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• pp.18-25
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• 2008

The membrane electrode assembly(MEA) was prepared by a nonequilibrium impregnation- reduction (I-R) method. Nafion 117 and covalently cross-linked sulfonated polyetherether with tungsto- phosphoric acid (CL-SPEEK/TPA30) prepared by our laboratory, were chosen as polymer electrolyte membrane(PEM). $Pt(NH_3)_4Cl_2$, $RuCl_3$ and reducing agent $(NaBH_4)$ were used as electrocatalytic materials. Electrochemical activity surface area(ESA) and specific surface area(SSA) of Pt cathodic electrode with Nafion 117 were $22.48m^2/g$ and $23.50m^2/g$ respectively under the condition of 0.8 M $NaBH_4$. But Pt electrode prepared by CL-SPEEK/TPA30 membrane exhibited higher ESA $23.46m^2/g$ than that of Nafion 117. In case of Pt-Ru anodic electrode, the higher concentration of Ru was, the lower potential of oxygen reduction and region of hydrogen desorption was, and Pt-Ru electrode using 10 mM $RuCl_3$ showed best properties of SSA $34.09m^2/g$ with Nafion 117. In water electrolysis performance, the cell voltage of Pt/PEM/Pt-Ru MEA with Nafion 117 showed cell property of 1.75 V at $1A/cm^2$ and $80{\circ}C$. On the same condition, the cell voltage with CL-SPEEK/TPA30 was the best of 1.73 V at $1A/cm^2$.