• Title/Summary/Keyword: Pt$TiO_{2}$

Search Result 984, Processing Time 0.16 seconds

The Structural Properties of the PZT/BST Heterolayered Thin Films with $Ar/O_2$ Ratio ($Ar/O_2$ 비에 따른 PZT/BST 이종층 박막의 구조적 특성)

  • Lee, Yoe-Bok;Nam, Sung-Pill;Lee, Sang-Chul;Kim, Ji-Heon;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2004.07b
    • /
    • pp.607-610
    • /
    • 2004
  • The Pb $(Zr_{0.52}Ti_{0.48})O_3/(Ba_{0.6}Sr_{0.4}TiO_3$ [PZT(52/48)/BST(60/40)] heterolayered thin films were fabricated on the Pt/Ti/$SiO_2$/Si by RF sputtering method. The structural properties of the PZT(52/48)/BST(60/40) heterolayered thin films were investigated with Ar/$O_2$ ratio condition. All the PZT(52/48)/BST(60/40) heterolayered thin films had shown the PZT(111), (200) and BST(200) Peaks of the tetragonal structure. Increasing the Ar/$O_2$ ratio, the average roughness was increased. The thickness ratio of the to the PZT and BST thin film was 1:2. In the case of the PZT(52/48)/BST(60/40) heterolayered thin films with Ar/$O_2$ ratio of 80/20, the average roughness was 3.4 [nm].

  • PDF

Preparation of PMN-PT-BT Powder by Modified Mixed Oxide Method and Effect of Ag on Dielectric Properties (Modified Mixed Oxide 방법에 의한 PMN-PT-BT 분말 합성 및 그의 물성에 미치는 Ag의 영향)

  • Lim, Kyoung-Ran;Jeong, Soon-Yong;Kim, Chang-Sam
    • Journal of the Korean Ceramic Society
    • /
    • v.39 no.2
    • /
    • pp.159-163
    • /
    • 2002
  • A single phase perovskite relaxor ferroelectric PMN-PT-BT was prepared by a single calcination and the modified mixed oxide process. It was accomplished by ball-milling PbO, $Nb_2O_5,\;Ti(OC_3H_7)_4,\;BaCO_3,\;and\;Mg(NO_3)_2$ instead of MgO, removing the solvent, and then followed by calcination at 900$^{\circ}C$ for 2h. The specimen sintered at 1100$^{\circ}C$/2h showed the sintered density of 7.83 g/$cm^3$, room temperature dielectric constant of 22000, and dielectric loss of 2.5%. Addition of 1.0 mole% (0.3 wt%) of Ag as $AgNO_3$ and followed by calcination at 550$^{\circ}C$/2h lowered the sintering temperature to 900$^{\circ}C$. It still showed the sintered density of 7.88 g/$cm^3$, room temperature dielectric constant of 20000 and dielectric loss of 2.4%.

Preparation of $Pb_{1-x}La_x(Zr_{1/2}Ti_{1/2})_{1-{x/4}}O_3$ thin films by a sol-gel method using a polypropanediol (Polypropanediol을 이용한 sol-gel법에 의한$Pb_{1-x}La_x(Zr_{1/2}Ti_{1/2})_{1-{x/4}}O_3$박막의 제조)

  • 김태희;박경봉;김찬규
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.12 no.4
    • /
    • pp.178-183
    • /
    • 2002
  • The PLZT (x/50/50, x = 1, 2, 5, 7) thin films have been prepared by a sol-gel method using polypropanediol as a solvent, and their dielectric properties have been investigated. The prepared sol was coated 10 times on $Pt/Ti/SiO2_2$/Si wafer. After post-annealing at 560~$600^{\circ}C$ for 10 min, the 600 nm-thick PLZT (x/50/50) thin films were formed with pure perovskite phase. Grain size of the PLZT (x/50/50) thin films was increased with increasing the amount of La. For all the compositions, dielectric properties such as dielectric constant and remnant polarization were enhanced with increasing annealing temperatures. As the amount of La was increased, the remnant polarization, coercive field and dielectric constant of the PLZT (x/50/50) thin films fired at $600^{\circ}C$ were decreased.

Dielectric Properties of Pt/SBN/Pt Capacitor Thin film (Pt/SBN/Pt 캐패시터 박막의 유전특성)

  • Kim, Jin-Sa;Oh, Yong-Cheul;Shin, Cheol-Gi;Bae, Duck-Kweon
    • Proceedings of the KIEE Conference
    • /
    • 2009.07a
    • /
    • pp.1250_1251
    • /
    • 2009
  • The SBN thin films are deposited on Pt-coated electrode(Pt/Ti/$SiO_2$/Si) using RF sputtering method at various deposition conditions. The capacitance of SBN thin films were increased with the increase of Ar/$O_2$ ratio and RF power, respectively. Also, The capacitance of SBN thin films were increased with the increase of deposition temperature.

  • PDF

Stbilization of Perovskite Phase and Enhanced DPT Characteristics of $Pb(Zn, Mg)_{1/3}Nb_{2/3}O_3-PbTiO_3$ Ceramics by the Additionof Excess Constituent Oxides ($Pb(Zn, Mg)_{1/3}Nb_{2/3}O_3-PbTiO_3$계에서 구성 산화물 첨가에 따른 Perovskite상 안정화 및 DPT성 증대 효과)

  • 이규만;장현명;유병두
    • Journal of the Korean Ceramic Society
    • /
    • v.30 no.11
    • /
    • pp.925-932
    • /
    • 1993
  • The perovskite phase in PZN-PMN-PT (Pb(Zn, Mg)1/3Nb2/3O3-PbTiO3) pseudoternary ceramics was stabilized by the addition of excess constituent divalent oxides (PbO, MgO and ZnO). The excess addition of 5mol% MgO or 7.5mol% PbO fully stabilized the perovskite phase. The enhanced diffuse phase transition (DPT) and the decrease in the electrical resistivity observed in the presence of excess ZnO or MgO were interpreted in terms of the additional formation of negatively charged, short-range ordered 1:1 domains with a concomitant generation of charge carriers, holes.

  • PDF

Photochemical hydrogen production from coupled semiconductor systems : CdS-WO3/RuO2, CdS-TiO2 (혼합반도체 시스템에서의 광화학적 수소제조 : CdS-WO3/RuO2, CdS-TiO2)

  • Suh, J.K.;Heo, G.S.
    • Transactions of the Korean hydrogen and new energy society
    • /
    • v.4 no.2
    • /
    • pp.5-15
    • /
    • 1993
  • Hydrogen production in visible light with the following semiconductor systems, $CdS-WO_3$, $CdS-TiO_2$, have been investigated in the presence of redox catalyst (Pt, $RuO_2$). MeOH, EtOH, isopropanol, sulfide/sulfite mixture, lactic acid were used as sacrifical reagents. The optimal condition for $H_2$ evolution was found to be in qgueous lactic acid media for $CdS-WO_3/RuO_2$. The photochemical efficiency for this system was 1.05 % and the $H_2$ evolution rate was 26.5ml/min. at $6.07{\times}10^{-5}$ einstein/sec photon rate

  • PDF

Top Electrodes Properties of SCT Thin Films (SCT 박막의 상부전극 특성)

  • 조춘남;김진사;전장배;유영각;김충혁
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 1999.11a
    • /
    • pp.240-243
    • /
    • 1999
  • (Sr$\sub$0.85/Ca$\sub$0.15/)TiO$_3$thin films were deposited on Pt-coated TiO$_2$/SiO$_2$/Si wafer by the rf sputtering method. Experiments were conducted to investigate the electrical properties of SCT thin films with various top electrode. C-F and C-V measurements show that SCT thin films annnealed at 600$^{\circ}C$ have a larger capacitance than SCT thin films deposited at 400$^{\circ}C$ , and there is nearly no difference between top electrodes. I-V measurement show that Pt top electrode have a good leakage current density of < 10nA/$\textrm{cm}^2$,. making them suitable for DRAM application.

  • PDF

The Syntheses, Characterizations, and Photocatalytic Activities of Silver, Platinum, and Gold Doped TiO2 Nanoparticles

  • Loganathan, Kumaresan;Bommusamy, Palanisamy;Muthaiahpillai, Palanichamy;Velayutham, Murugesan
    • Environmental Engineering Research
    • /
    • v.16 no.2
    • /
    • pp.81-90
    • /
    • 2011
  • Different weight percentages of Ag, Pt, and Au doped nano $TiO_2$ were synthesized using the acetic acid hydrolyzed sol-gel method. The crystallite phase, surface morphology combined with elemental composition and light absorption properties of the doped nano $TiO_2$ were comprehensively examined using X-ray diffraction (XRD), $N_2$ sorption analysis, transmission electron microscopic (TEM), energy dispersive X-ray, and DRS UV-vis analysis. The doping of noble metals stabilized the anatase phase, without conversion to rutile phase. The formation of gold nano particles in Au doped nano $TiO_2$ was confirmed from the XRD patterns for gold. The specific surface area was found to be in the range 50 to 85 $m^2$/g. TEM images confirmed the formation a hexagonal plate like morphology of nano $TiO_2$. The photocatalytic activity of doped nano $TiO_2$ was evaluated using 4-chlorophenol as the model pollutant. Au doped (0.5 wt %) nano $TiO_2$ was found to exhibit higher photocatalytic activity than the other noble metal doped nano $TiO_2$, pure nano $TiO_2$ and commercial $TiO_2$ (Degussa P-25). This enhanced photocatalytic activity was due to the cathodic influence of gold in suppressing the electron-hole recombination during the reaction.

Polarization Properties of SBT Thin Film by RF Sputtering (RF 스퍼터링법에 의한 SBT박막의 분극특성)

  • 김태원;조춘남;김진사;유영각;김충혁;박용필;이준웅
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2000.07a
    • /
    • pp.893-896
    • /
    • 2000
  • The SrBi$_2$Ta$_2$O$\sub$9/(SBT) thin films are deposited on Pt-coated electrode(Pt/TiO$_2$/SiO$_2$/Si) using RF sputtering method. The SBT thin films deposited on substrate at 400-500[$^{\circ}C$]. SBT thin film deposited on Pt-coated electrodes have the cubic perovskite structure and polycrystalline state. With increasing annealing temperature from 600[$^{\circ}C$] to 850[$^{\circ}C$], flourite Phase was crystalized to 650[$^{\circ}C$] and Bi-layered perovskite phase was crystalized above 700[$^{\circ}C$]. The maximum remanent polarization is 11.73 ${\mu}$C/cm$^2$at 500[$^{\circ}C$] of substrate temperature and 750[$^{\circ}C$] annealing temperature for 30min.

  • PDF

Preparation and Characterization of $Bi_{4-x}Sm_xTi_3O_{12}(0<\leqx\geq2)$ Thin Films Using Sol-Gel Processing (졸겔공정을 이용한 $Bi_{4-x}Sm_xTi_3O_{12}(0<\leqx\geq2)$ 박막제조 및 특성평가)

  • 이창민;고태경
    • Journal of the Korean Ceramic Society
    • /
    • v.34 no.8
    • /
    • pp.897-907
    • /
    • 1997
  • Thin films of Bi4-xSmxTi3O12(0$\leq$x$\leq$2) were prepared on Pt/Ti/SiO2/Si(100) at $700^{\circ}C$ using spin-coating with sols derived from Bi-Sm-Ti complex alkoxides. From X-ray diffraction analysis, it was observed that Sm-substituted phases resembled ferroelectric Bi4Ti3O12 in structure. Variations of their lattice parameters depending on the amount of Sm-substitution showed that an anomalous structural distortion might exist at x=1. The grain sizes of the thin films decreased from 0.115 ${\mu}{\textrm}{m}$ to 0.078${\mu}{\textrm}{m}$ with increasing the amount of Sm-substitution. The dielectric constants and the remanent polarizations of the thin films decreased with increasing the amount of the Sm-substitution, which were related to decrease of the stereo-active Bi3+ ion contributing to polarization. However, these values were exceptionally high at x=1, compared to those of the other substituted phases. Such an anomaly suggests that the phase of x=1 has 1:1 chemical ordering between Sm and Bi in structure. The thin films of all compositions except x=2 showed ferroelectricity. The thin film of x=2 was paraelectric, whose grains were too fine to exhibit ferroelectricity.

  • PDF