• Title/Summary/Keyword: Proximity effect

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Submicron Patterning in Electron Beam Lithography using Trilayer Resist (삼층감광막구조를 이용한 미세패턴의 전자빔 묘화)

  • 배용철;서태원;전국진
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.10
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    • pp.101-107
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    • 1994
  • The PMMA/Ge/AZ trilayer resist decreased proximity effect of backscattering electrons and corrected pattern distoration in order to from deep submicron patterns. In the experiment, the prosiemity effect is decreased by 11% and 30% for the case of 0.9$\mu$m and 1.7$\mu$m AZ, respectively, in trilayer resist compared to monolyer resist. also, the EID of 240$\AA$ Ge film is smaller than that of 500$\AA$ film by 365. 0.1$\mu$m line/space was formed in the 2000$\AA$ PMMA layer with the condition of dose 330${\mu}C/cm^{2}$ and of 150sec of develop time in MIBK : IPA (1:3) developer.

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ICP ETCHING OF TUNGSTEN FOR X-RAY MASKS

  • Jeong, C.;Song, K.;Park, C.;Jeon, Y.;Lee, D.;Ahn, J.
    • Journal of the Korean institute of surface engineering
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    • v.29 no.6
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    • pp.869-875
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    • 1996
  • In this article the effects of process parameters of inductively coupled plasma etching with $SF_6$ /$N_2$/Ar mixture gas and mask materials on the etched profile of W were investigated. While the etched profile was improved by $N_2$-addition, low working presure, and reduced $SF_6$ flow rate, the etching selectity (W against SAL resist) was decreased. Due to the difficulty of W etching with single layer resist, sputter deposited $Al_2O_3$ film was used as a hardmask. Reduction of required EB resist thickness through $Al_2O_3$ mask application could reduce proximity effect during e-beam patterning, but the etch anisotropy was degraded by decreased sidewall passiviation effect.

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Mathmetical Modeling of Welding Conditions for High Frequency Electric Resistance Welding Process (고주파 전기저항 용접법에서 적정 용접조건의 수학적 모델)

  • 강덕일;장영섭;오주섭;공원일;김용석
    • Proceedings of the KWS Conference
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    • 1996.05a
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    • pp.13-14
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    • 1996
  • High Frequency Electric Resistance Welding process has been widely used in manufacturing welded steel pipes because of its high welding speed and quality. This process utilizes the skin effect as well as the proximity effect of the high frequency current in heating the skelp edge. In this study, an analytical solution of the edge temperature was obtained based on several assumptions. The assumptions includes the expontial decay of weldingcurrent from the surface and neglect of the heat loss in the welding direction. This calculation shows a good agreement with the observations made from the high speed camera. Using tile analytical model, tile heat required as a function of the welding speed and the skelp thickness was determined. These results were compared with the experimental results obtained.

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Fabrication and Characteristics of Transformers for High Power Density SMPS (고밀도 SMPS 용 변압기의 제조와 특성)

  • Kim, Hyun-Sik;Kim, Jong-Ryung;Huh, Jung-Sub;Oh, Yong-Woo;Song, Jae-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.04a
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    • pp.7-10
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    • 2002
  • We designed the flyback planar transformer, which had 8W capacity, with 70V input voltage and 8.2V output voltage for the establishment of design method and the confirmation of application possibility. The numerical value of inductance measured under the switching frequency of 120 kHz was 1650 ${\mu}H$, which was the inductance efficiency of 85~87% against theoretical value. The A.C. resistance of primary and secondary coil was 4.2 ${\Omega}$ and 0.25 ${\Omega}$ respectively. On the other hand, the quality factor for each wound numbers showed quite a high value of 158 and 75 respectively. And the Coupling Factor was 0.96~0.97 under 120 kHz switching frequency. And the shape of the output wave of the planar transformer at 70V input voltage was a stable square wave.

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Optimal Design of Boost Inductor using Planar Magnetics Component (Planar Magnetic 소자를 사용한 부스트 인덕터의 최적 설계)

  • Shin, Yong-Hee;Jang, Hai-Jin;Kim, Chang-Sun;Lee, Chul-Kyung;Youn, Dae-Young
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1106-1107
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    • 2007
  • Planar magnetic based design technologies have been widely applied to power design for better cooling and ease of fabrication. The planar transformer and the planar inductor have a low profile characteristics compare to the conventional transformer which would be more cubical in volume. High frequency operation of magnetic components is a main key to achieve high power density of the power module. However, at a high frequency, the skin effect and the proximity effect have to be considered very significantly in magnetic design and also the parasitics in the converter cannot be ignored. This paper deals with the design and the experiment of planar integrated magnetic component. The optimal design for planar magnetics is summarized.

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Experimental Investigation of the Hydrodynamic Characteristics of a Ship due to Bank Effect

  • Vo, Anh Khoa;Mai, Thi Loan;Jeon, Myungjun;Yoon, Hyeon Kyu
    • Journal of Navigation and Port Research
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    • v.46 no.2
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    • pp.82-91
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    • 2022
  • When a ship moves in the proximity of the lateral bank, bank suction forces are generated due to bank effects. Thus, hydrodynamic forces can significantly impact the ship's maneuverability and navigation safety. In this study, model tests were performed to investigate the hydrodynamic forces exerted on a ship, especially suction forces caused by bank effects, using captive model and bank effect tests. A low-speed condition was selected in this study, because of the perilous situation as the ship moves close to the bank. The accuracy of the hydrodynamic forces exerted on the hull was verified, by comparing the results of the static drift test with the results obtained from other institutes at design speed. The straight simulation caused by bank effects was then implemented using estimated hydrodynamic coefficients.

Novel Interface-engineered Junction Technology for Digital Circuit Applications

  • Yoshida, J.;Katsuno, H.;Inoue, S.;Nagano, T.
    • Progress in Superconductivity
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    • v.3 no.1
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    • pp.1-4
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    • 2001
  • Interface-engineered junctions with $YbBa_2$$Cu_3$$O_{7}$ as the counter electrode were demonstrated. The junctions exhibited excellent Josephson characteristics with a Josephson critical current ($I_{c}$) ranging from 0.1 mA to 8 mA and a magnetic field modulation of the $I_{c}$ exceeding 80% at 4.2 K while maintaining complete c-axis orientation of the counter-electrode layer. The$ 1\sigma$ spreads in $I_{c}$ for junctions with an average $I_{c}$ of 1-2 mA were 5-8% for 16 junctions within a chip, and 9.3% for a 100-junction array. Our dI/dV measurements suggest that a theoretical approach taking into account both a highly transparent barrier and the proximity effect is required to fully understand the Junction characteristics.ristics.

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Aerodynamic characteristics of NACA 4412 airfoil section with flap in extreme ground effect

  • Ockfen, Alex E.;Matveev, Konstantin I.
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.1 no.1
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    • pp.1-12
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    • 2009
  • Wing-in-Ground vehicles and aerodynamically assisted boats take advantage of increased lift and reduced drag of wing sections in the ground proximity. At relatively low speeds or heavy payloads of these craft, a flap at the wing trailing-edge can be applied to boost the aerodynamic lift. The influence of a flap on the two-dimensional NACA 4412 airfoil in viscous ground-effect flow is numerically investigated in this study. The computational method consists of a steady-state, incompressible, finite volume method utilizing the Spalart-Allmaras turbulence model. Grid generation and solution of the Navier-Stokes equations are completed using computer program Fluent. The code is validated against published experimental and numerical results of unbounded flow with a flap, as well as ground-effect motion without a flap. Aerodynamic forces are calculated, and the effects of angle of attack, Reynolds number, ground height, and flap deflection are presented for a split and plain flap. Changes in the flow introduced with the flap addition are also discussed. Overall, the use of a flap on wings with small attack angles is found to be beneficial for small flap deflections up to 5% of the chord, where the contribution of lift augmentation exceeds the drag increase, yielding an augmented lift-to-drag ratio.

Analysis of Ship Handlers' Maneuvers with respect to Ship's Speed under Strong Cross Current in the Breakwater Channel of Busan Port (부산항 방파제 진입항로의 강한 횡조류 환경에서 선속에 따른 조종자의 선박조종의 결과 검토)

  • Lee, Dong-Sup;Jeong, Tae-Gweon
    • Journal of Navigation and Port Research
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    • v.32 no.8
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    • pp.577-582
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    • 2008
  • In order to ascertain the effect of ship's speeds, in maneuver under the condition of strong cross current in the breakwater channel of Busan port, this paper is to deal with the analyses of vessel proximity measures, vessel controllability measures, and ship handlers' subjective evaluation measures of simulated maneuvers, which were carried out by 76 ship handlers who conned Panamax bulk carrier of 60,000 DWT, The set and drift of current are southwesterly and 2 knots. The speeds of the model ship are 5 knots & 10 knots respectively. The followings are concluded. ${(1)}$ In the approaches of the breakwater of Busan port, ship handlers psychologically tend not to give the drift angle of more than $10^{\circ}$ bemuse ship's head points out of the entrance. ${(2)}$ Ship handlers' subjective evaluation, vessel proximity and controllability measures are relatively larger under the speed of 5 knots than under that of 10 knots. due to direct pressure of strong current. ${(3)}$ A single index of controllability measures was suggested, by removing their units.

Declustering Method for Moving Object Database (이동체 데이터베이스를 위한 디클러스터링 정책)

  • Seo YoungDuk;Hong EnSuk;Hong BongHee
    • The KIPS Transactions:PartD
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    • v.11D no.7 s.96
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    • pp.1399-1408
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    • 2004
  • Because there are so many spatio-temporal data in Moving Object Databases, a single disk system can not gain the fast response time and tota throughput. So it is needed to take a parallel processing system for the high effectiveness query process. In these existing parallel process-ing system. it does not consider characters of moving object data. Moving object data have to be thought about continuous report to the Moving Object Databases. So it is necessary think about the new Declustering System for the high performance system. In this paper, we propose the new Dechustering Policies of Moving objet data for high effectiveness query processing. At first, consider a spatial part of MBB(Minimum Bounding Box) then take a SD(SemiAllocation Disk) value. Second time, consider a SD value and time value which is node made at together as SDT-Proximity. And for more accuracy Declustering effect, consider a Load Balancing. Evaluation shows performance improvement of aver-age %15\%$ compare with Round-Robin method about $5\%\;and\;10\%$ query area. And performance improvement of average $6\%$ compare with Spatial Proximity method.