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Autofocus system for off-line focusing error compensation in micro laser fabrication process (레이저 미세가공용 자동초점장치를 이용한 오프라인 초점 오차 보상에 관한 연구)

  • Kim, Sang-In;Kim, Ho-Sang
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.6
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    • pp.50-58
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    • 2009
  • Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

Effect of the Molding Conditions on Formability in Progressive Glass Molding Press (순차이송방식 GMP 공정에서 공정변수가 유리렌즈 성형성에 미치는 영향)

  • Jung, T.S.;Park, K.S.;Kim, D.S.
    • Transactions of Materials Processing
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    • v.18 no.8
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    • pp.633-639
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    • 2009
  • Remarkable progress had been made in both technology and production of optical elements including aspheric lens. In the past, precision optical glass lenses were produced through multiple processes such as grinding and polishing, but mass production of aspheric lenses requiring high accuracy and having complex profile was rather difficult. Against such a background, the high-precision optical GMP process was developed with an eye on mass production of precision optical glass pasts by molding press. This GMP process can produce with precision and good repeatability special form lenses such as for cameras, video cameras, aspheric lenses for optical items. In this study, Design Of Experiment(Taguchi method) was adopted to find a tendency of molding conditions that influence formability. Three main factors for molding conditions were selected based on pressure at pressing stage and temperature, pressure at cooling stage. Also, the DOE was carried out and the interference patterns were measured to evaluate the formability of GMP process. From the results, it was found that the cooling pressure is the most sensitive parameter for progressive GMP process.

Triple Material Surrounding Gate (TMSG) Nanoscale Tunnel FET-Analytical Modeling and Simulation

  • Vanitha, P.;Balamurugan, N.B.;Priya, G. Lakshmi
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.15 no.6
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    • pp.585-593
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    • 2015
  • In the nanoscale regime, many multigate devices are explored to reduce their size further and to enhance their performance. In this paper, design of a novel device called, Triple Material Surrounding Gate Tunnel Field effect transistor (TMSGTFET) has been developed and proposed. The advantages of surrounding gate and tunnel FET are combined to form a new structure. The gate material surrounding the device is replaced by three gate materials of different work functions in order to curb the short channel effects. A 2-D analytical modeling of the surface potential, lateral electric field, vertical electric field and drain current of the device is done, and the results are discussed. A step up potential profile is obtained which screens the drain potential, thus reducing the drain control over the channel. This results in appreciable diminishing of short channel effects and hot carrier effects. The proposed model also shows improved ON current. The excellent device characteristics predicted by the model are validated using TCAD simulation, thus ensuring the accuracy of our model.

A Study on the Comparision of One-Dimensional Scattering Extraction Algorithms for Radar Target Identification (레이더 표적 구분을 위한 1차원 산란점 추출 기법 알고리즘들의 성능에 관한 비교 연구)

  • Jung, Ho-Ryung;Seo, Dong-Kyu;Kim, Kyung-Tae;Kim, Hyo-Tae
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2003.11a
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    • pp.193-197
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    • 2003
  • Radar target identification can be achieved by using various radar signatures, such as one-dimensional(1-D) range profile, 2-D radar images, and 1-D or 2-D scattering centers on a target. In this letter, five 1-D scattering center extraction methods are discussed - TLS(Total Least Square)-Prony, Fast Root-MUSIC (Multiple Signal Classification), Matrix-Pencil, GEESE(GEneralized Eigenvalues utilizing Signal-subspace Eigenvalues), TLS-ESPRIT(Total Least Squares - Estimation of Signal Parameters via Rotational Invariance Technique), These methods are compared in the context of estimation accuracy as well as a computational efficiency using a noisy data. Finally these methods are applied to the target classification experiment with the measured data in the POSTECH compact range facility.

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Radiative Transfer Simulation of Microwave Brightness Temperature from Rain Rate

  • Yoo, Jung-Moon
    • Journal of the Korean earth science society
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    • v.23 no.1
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    • pp.59-71
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    • 2002
  • Theoretical models of radiative transfer are developed to simulate the 85 GHz brightness temperature (T85) observed by the Tropical Rainfall Measuring Mission (TRMM) Microwave Imager (TMI) radiometer as a function of rain rate. These simulations are performed separately over regions of the convective and stratiform rain. TRMM Precipitation Radar (PR) observations are utilized to construct vertical profiles of hydrometeors in the regions. For a given rain rate, the extinction in 85 GHz due to hydrometeors above the freezing level is found to be relatively weak in the convective regions compared to that in the stratiform. The hydrometeor profile above the freezing level responsible for the weak extinction in convective regions is inferred from theoretical considerations to contain two layers: 1) a mixed (or mixed-phase) layer of 2 km thickness with mixed-phase particles, liquid drops and graupel above the freezing level, and 2) a layer of graupel extending from the top of the mixed layer to the cloud top. Strong extinction in the stratiform regions is inferred to result from slowly-falling, low-density ice aggregates (snow) above the freezing level. These theoretical results are consistent with the T85 measured by TMI, and with the rain rate deduced from PR for the convective and stratiform rain regions. On the basis of this study, the accuracy of the rain rate sensed by TMI is inferred to depend critically on the specification of the convective or stratiform nature of the rain.

Numerical analysis of steady and transient processes in a directional solidification system

  • Lin, Ting-Kang;Lin, Chung-Hao;Chen, Ching-Yao
    • Coupled systems mechanics
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    • v.5 no.4
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    • pp.341-353
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    • 2016
  • Manufactures of multi-crystalline silicon ingots by means of the directional solidification system (DSS) is important to the solar photovoltaic (PV) cell industry. The quality of the ingots, including the grain size and morphology, is highly related to the shape of the crystal-melt interface during the crystal growth process. We performed numerical simulations to analyze the thermo-fluid field and the shape of the crystal-melt interface both for steady conditions and transient processes. The steady simulations are first validated and then applied to improve the hot zone design in the furnace. The numerical results reveal that, an additional guiding plate weakens the strength of vortex and improves the desired profile of the crystal-melt interface. Based on the steady solutions at an early stage, detailed transient processes of crystal growth can be simulated. Accuracy of the results is supported by comparing the evolutions of crystal heights with the experimental measurements. The excellent agreements demonstrate the applicability of the present numerical methods in simulating a practical and complex system of directional solidification system.

Optimal Parameter Tuning to Compensate for Radius Errors (반경오차 보정을 위한 최적파라미터 튜닝)

  • 김민석
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2000.04a
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    • pp.629-634
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    • 2000
  • Generally, the accuracy of motion control systems is strongly influenced by both the mechanical characteristics and servo characteristics of feed drive systems. In the fed drive systems of machine tools that consist of mechanical parts and electrical parts, a torsional vibration is often generated because of its elastic elements in torque transmission. Especially, a torsional vibration caused by the elasticity of mechanical elements might deteriorate the quick movement of system and lead to shorten the life time of the mechanical transmission elements. So it is necessary to analyze the electromechanical system mathematically to optimize the dynamic characteristics of the feed drive system. In this paper, based on the simplifies feed drive system model, radius errors due to position gain mismatch and servo response characteristic have been developed and an optimal criterion for tuning the gain of speed controller is discussed. The proportional and integral parameter gain of the feed drive controller are optimal design variables for the gain tuning of PI speed controller. Through the optimization problem formulation, both proportional and integral parameter are optimally tuned so as to compensate the radius errors by using the genetic algorithm. As a result, higher performance on circular profile tests has been achieved than the one with standard parameters.

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Experimental and Numerical Analysis of Heat Transfer Phenomena in a Sensor Tube of a Mass Flow Controller (질량 유량계 센서관에서의 열전달 현상에 대한 수치적 해석 및 실험적 연구)

  • Jang, Seok-Pil;Kim, Sung-Jin;Choi, Do-Hyung
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.154-161
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    • 2000
  • As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

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A Study of Recommendation System Using Association Rule and Weighted Preference (연관규칙과 가중 선호도를 이용한 추천시스템 연구)

  • Moon, Song Chul;Cho, Young-Sung
    • Journal of Information Technology Services
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    • v.13 no.3
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    • pp.309-321
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    • 2014
  • Recently, due to the advent of ubiquitous computing and the spread of intelligent portable device such as smart phone, iPad and PDA has been amplified, a variety of services and the amount of information has also increased fastly. It is becoming a part of our common life style that the demands for enjoying the wireless internet are increasing anytime or anyplace without any restriction of time and place. And also, the demands for e-commerce and many different items on e-commerce and interesting of associated items are increasing. Existing collaborative filtering (CF), explicit method, can not only reflect exact attributes of item, but also still has the problem of sparsity and scalability, though it has been practically used to improve these defects. In this paper, using a implicit method without onerous question and answer to the users, not used user's profile for rating to reduce customers' searching effort to find out the items with high purchasability, it is necessary for us to analyse the segmentation of customer and item based on customer data and purchase history data, which is able to reflect the attributes of the item in order to improve the accuracy of recommendation. We propose the method of recommendation system using association rule and weighted preference so as to consider many different items on e-commerce and to refect the profit/weight/importance of attributed of a item. To verify improved performance of proposing system, we make experiments with dataset collected in a cosmetic internet shopping mall.

Theoretical Estimation of Machined Surface Profile by Tool Alignment Errors in Ball-End Milling (볼 엔드밀링에서의 공구 정렬 오차에 의한 가공면의 이론적인 평가)

  • Shin Y.J.;Park K.T.;Lee J.H.;Kang B.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.627-628
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    • 2006
  • High speed milling process is emerging as an important fabrication process benefits include the ability to fabricate micro and meso-scale parts out of a greater range of materials and with more varied geometry. It also enables the creation of micro and meso-scale molds for injection molding. Factors affecting surface roughness have not been studied in depth for this process. A series of experiments has been conducted in order to begin to characterize the factors affecting surface roughness and determine the range of attainable surface roughness values for the high speed milling process. It has previously been shown that run-out creates a greater problem for the dimensional accuracy of pans created by high speed milling process. And run-out also has a more significant effect on the surface quality of milled parts. The surface roughness traces reveal large peak to valley variations. This run-out is generated by spindle dynamics and tool geometry. In order to investigate the relationship between tool alignment errors and surface roughness the scallop generating mechanism in the ball-end milling with tool alignement errors has been studied and simulated. The results indicate that tool alignment errors have no significant effects ell the dimension of scallops in for flat planes.

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