• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.28-28
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• 2011

우리나라의 주력산업인 반도체 및 디스플레이의 경우 그 생산 설비의 1/3이상이 진공 장비이며 진공 공정을 통해 만들어진다. 이들 산업 분야에서는 우리나라가 세계 최고의 생산 기술을 가지고 있으므로 자체적인 기술 개발 확보가 중요하다. 최근에는 기존에 개발되어 있는 장비의 성능을 뛰어넘어야 하는 공정 기술력이 요구되면서, 진공 공정 기술 개발이 매우 중요한 이슈가 되었다. 반도체나 디스플레이 산업 등 기존 주력산업의 전후방 산업의 경쟁력 강화 측면에서뿐 아니라 태양전지, LED 등 진공기술을 이용한 신성장 동력 산업의 생산 시스템 경쟁력 확보 측면에서도 진공 공정 기술 개발 중요성은 매우 크다. 지금까지 양산에 적용되는 증착, 식각, 확산 등 진공 공정 운영은, 사전 시험을 통해 얻은 최적 공정의 입력 파라미터들을 정해 놓고 그대로 공정을 진행한 뒤, 생산되어 나오는 제품의 상태를 사후 측정하여 공정 이상 여부를 점검하고 미세 조정하는 형태로 진행되고 있다. 실질적으로 현재 진행 중인 진공 공정에 대한 직접적인 정보가 없으므로 공정 중 발생되는 문제들에 대한 대처는 그 공정이 끝난 후에 이루어지는 상황이다. 공정 미세화 및 대구경화에 따라 기존의 wafer to wafer 제어 개념 보다 발전된 개념으로 센서 기반 실시간 공정 진단 제어 기술의 필요성이 대두되었으며 이를 위한 오류 인식 및 예지기술 (Fault Detection & Classification, FDC) 그리고 이 정보를 이용한 첨단 제어 기술(Advanced Process Control, APC)을 개발하는 노력들이 시작되었다. 한국표준과학연구원에서는 수요기업인 대기업과 장비업체, 센서 개발 중소기업 및 학교 연구소와 공동으로 진공 공정 실시간 측정 진단 제어와 관련된 연구를 하고 있다. 진공 공정 환경측정 기술, 플라즈마 상태 측정 기술, 진공 공정 중 발생하는 오염입자 측정 원천 기술 개발과 이를 구현하기 위한 센서 개발, 화학 증착 소스 및 진공 공정 부품용 소재에 대한 평가 플랫폼 구축, 배기 시스템 진단기술 개발 등 현재 진행되고 있는 기술 개발 내용과 동향을 소개한다. 진공 공정 실시간 측정 기술이 확보되면 차세대 반도체 제작에 필요한 정밀 공정 제어가 가능해지고, 공정 이상에 바로 대응 혹은 예방 할 수 있으며, 여유분으로 필요 이상으로 투입되던 자원(대기시간, 투입 재료, 대체용 장비)을 절감하는 등 생산성을 향상을 기대할 수 있다. 또한 진공 환경에서 이루어지는 박막 증착, 식각 공정 과정에 대한 이해가 높아지고, 공정을 개발하고 최적화하는데 유용한 정보를 제공할 수 있으므로, 기존 장비와 차별화된 경쟁력을 가진 고품위 진공 장비 및 부품 개발에 기여할 수 있을 것으로 기대하고 있다.

• The KIPS Transactions:PartD
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• v.17D no.2
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• pp.157-166
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• 2010

More recently, RFID (Radio Frequency Identification) systems have begun to find greater use in various industrial fields. The use of RFID system in these application domains has been promoted by efforts to develop the RFID tags which are low in cost, small in size, and high in performance. The RFID applications enable the real-time capture and update of RFID tag information, while simultaneously allowing business process change through real-time alerting and alarms. These be developed to monitor person or objects with RFID tags in a place and to provide visibility and traceability of the seamless flows of RFID tags. In this time, the RFID readers should be placed in diverse locations, the RFID flows between these readers can be tested based on various scenarios. However, due to the high cost of RFID readers, it may be difficult to prepare the similar environment equipped with RFID read/write devices. In this paper, we propose a simulator to allow RFID application testing without installing physical devices. It can model the RFID deployment environment, place various RFID readers and sensors on this model, and move the RFID tags through the business processes. This simulator can improve the software development productivity by accurately testing RFID middleware and applications. In addition, when data security cannot be ensured by any fault, it can decide where the problem is occurred between RFID hardware and middleware.

• Journal of the Korean Geophysical Society
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• v.9 no.3
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• pp.189-197
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• 2006

The Korea Plateau is a continental fragment rifted and partially segmented from the Korean Peninsulaat the initial stage of the opening of the East Sea (Japan Sea). We interpreted marine seismic profiles from the South Korea Plateau in conjunction with swath bathymetric to investigate processes of con-tjnental rifting and separation of the southwestern Japan Arc. The SouU-i Korea Plateau preserves funda-mental elements of rift architecture comprising a seaward succession of a rift basin and an uplifted rift flank passing into the slope, typical of a passive continental margin. Two distinguished rift basins (Onnuri and Bandal Basins) in the South Korea Plateau are bounded by major synthetic and smaller antithetic faults, creating wide and symmetric profiles. The large-offset border fault zones of these basins have convex dip slopes and demonstrate a zig-zag arrangement along strike. Rifting was primarily controlled by normal faulting resulting from extension orthogonal to the inferred line of breakup along the base ofthe slope rather U-ian strike-slip deformation. Two extension direcdons for rifdng are recog-nized; U-ie Onnuri Basin was rifted in U-ie EW direction; U-ie Bandal Basin in U-ie EW and NW-SE directions, suggesting two rift stages. We interpret that the E-W direction represents initial rifting at the inner margin; while the Japan Basin widened, rifting propagated repeatedly from the Japan Basin to the southeast toward the Korean margin but could not penetrate the strong continental lithosphere of the Korean Shield and changed direction to the south, resulting in E-W extension to create the rift basins at the Korean margin. The Hupo Basin to the south of the Korea Plateau is estimated to have formed in this process. The NW-SE direction probably represents the direction of rifting orthogonal to the inferred line of breakup along the base of the slope of the South Korea Plateau; after breakup the southwestern Japan Arc separated in the SE direction, indicating a response to tensional tectonics associated with the subduction of the Pacific Plate in the NE direction. We suggest that structural evolution of the eastern Korean margin can be explained by the processes occurring at the passive continental margin.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.31 no.2
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• pp.62-72
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• 2019

Due to the difficulties in forecasting the intensity and the source location of tsunami the countermeasures prepared based on the deterministic approach fail to work properly. Thus, there is an increasing demand of the tsunami hazard analyses that consider the uncertainties of tsunami behavior in probabilistic approach. In this paper a fundamental study is conducted to perform the probabilistic tsunami hazard analysis (PTHA) for the tsunamis that caused the disaster to the east coast of Korea. A logic tree approach is employed to consider the uncertainties of the initial free surface displacement and the tsunami height distribution along the coast. The branches of the logic tree are constructed by reflecting characteristics of tsunamis that have attacked the east coast of Korea. The computational time is nonlinearly increasing if the number of branches increases in the process of extracting the fractile curves. Thus, an improved method valid even for the case of a huge number of branches is proposed to save the computational time. The performance of the discrete weight distribution method proposed first in this study is compared with those of the conventional sorting method and the Monte Carlo method. The present method is comparable to the conventional methods in its accuracy, and is efficient in the sense of computational time when compared with the conventional sorting method. The Monte Carlo method, however, is more efficient than the other two methods if the number of branches and the number of fault segments increase significantly.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.25 no.2
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• pp.193-201
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• 2021

The welding has a high proportion of the production and drying of ships or offshore plants. Non-destructive testing is carried out to verify the quality of welds in Korea, radiography test (RT) is mainly used. Currently, most shipyards adopt analog-type techniques to print the films through the shoot of welding parts. Therefore, the time required from radiography test to pass or fail judgment is long and complex, and is being manually carried out by qualified inspectors. To improve this problem, this paper covers a platform for scanning and digitalizing RT films occurring in shipyards with high resolution, accumulating them in management servers, and applying artificial intelligence (AI) technology to detect welding defects. To do this, we describe the process of designing and developing RT film scanning equipment, welding inspection information integrated management platform, fault reading algorithms, visualization software, and testing and verification of each developed element in conjunction.

• Journal of the Korea Institute of Building Construction
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• v.21 no.6
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• pp.701-712
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• 2021

As the domestic housing supply problem has been resolved, the apartment construction market has shifted to a consumer-oriented market that wants high quality, and in particular, expectations in the area of finishing quality have increased. Looking at the status of complaints regarding apartment housing defects supplied by Korea Land and Housing Corporation, tile-related complaints are the type occurring the most frequently. While the Ministry of Land, Infrastructure and Transport(MOLIT) is making an ongoing effort to reduce complaints related to defects, through approaches such as drafting amendments to 「Investigation of defects in apartment houses, calculation of repair costs, and standards for determining defects」, the provision of preventive measures has been insufficient. In addition, by reviewing studies, there has been insufficient research to construct a classification system after deriving the characteristics of each type using the qualitative knowledge of experts, various quantitative indicators, and suggesting measures for reduction according to the causes of each type. Therefore, this study will reflect qualitative indicators to use the AHP analysis that makes it easy to identify the relationship between defects by surveying construction experts. Then, by visualizing the weight of 'Possibility of recurrence after repair,' 'Degree of difficulty in repairing defects' and 'Fault frequency' using a radial graph, we will analyze the characteristics of each type of tile construction defect and establish measures for reduction according to the cause. This will improve the quality of the living environment and contribute to the establishment of a system for smooth defect management and reduction of defects in apartment tile construction.

• Economic and Environmental Geology
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• v.55 no.5
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• pp.541-550
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• 2022

A pre-existing landform is created by weathering and erosion along the bedrock fault and the weak zone. A neotectonic landform is formed by neotectonic movements such as earthquakes, volcanoes, and Quaternary faults. It is difficult to clearly distinguish the landform in the actual field because the influence of the tectonic activity in the Korean Peninsula is relatively small, and the magnitude of surface processes (e.g., erosion and weathering) is intense. Thus, to better understand the impact of tectonic activity and distinguish between pre-existing landforms and neotectonic landforms, it is necessary to understand the development process of pre-existing landforms depending on the bedrock characteristics. This study used a two-dimensional numerical landscape evolution model (LEM) to study the spatio-temporal development of landscape according to the different erodibility under the same factors of climate and the uplift rate. We used hill-slope indices (i.e., relief, mean elevation, and slope) and channels (i.e., longitudinal profile, normalized channel steepness index, and stream order) to distinguish the difference according to different bedrocks. As a result of the analysis, the terrain with high erosion potential shows low mean elevation, gentle slope, low stream order, and channel steepness index. However, the value of the landscape with low erosion potential differs from that with high erodibility. In addition, a knickpoint came out at the boundary of the bedrock. When researching the actual topography, the location around the border of difference in bedrock has only been considered a pre-existing factor. This study suggested that differences in bedrock and various topographic indices should be comprehensively considered to classify pre-existing and active tectonic topography.

• Journal of the Korean Geotechnical Society
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• v.25 no.2
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• pp.55-66
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• 2009

At the mudstone slope located on the roadside of the Seokri area in Donghae-myeon, Pohang, Gyeongsangbuk-do, this study was performed to analyze the effects of rainfall on the stability of slope through seepage analysis according to the precipitation type of the mudstone slope, referring to the actual case of slope failure. For this, precise geological survey, geophysical exploration and drilling survey for the slope where the failure occurred were performed and followed by analysis of detailed soil layer. For the section where failure surface located, the durability reduction of rocks was measured through slaking/swelling tests and the permeability was measured through in-situ permeability tests for each soil layer. In addition, the change of strength parameter and process of instability were analyzed by back analysis, using Talren 97 and Slope/W programs, in the slope. By applying different precipitation conditions to the geographical conditions of the slope that had actual failure records, the slope stability was analyzed by seepage analysis according to duration of rainfall and rise of groundwater level resulting from the flow of rainfall caused by development of geological structures and the slope surface condition.

• Journal of Korean Society of Transportation
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• v.18 no.1
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• pp.75-85
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• 2000

In existing models in optimization, the crisp data improve has been used in the objective or constraints to derive the optimal solution, Besides, the subjective environments are eliminated because the complex and uncertain circumstances were regarded as Probable ambiguity, In other words those optimal solutions in the existing models could be the complete satisfactory solutions to the objective functions in the Process of application for industrial engineering methods to minimize risks of decision-making. As a result of those, decision-makers in location Problems couldn't face appropriately with the variation of demand as well as other variables and couldn't Provide the chance of wide selection because of the insufficient information. So under the circumstance. it has been to develop the model for the location and size decision problems of logistics facility in the use of the fuzzy theory in the intention of making the most reasonable decision in the Point of subjective view under ambiguous circumstances, in the foundation of the existing decision-making problems which must satisfy the constraints to optimize the objective function in strictly given conditions in this study. Introducing the Process used in this study after the establishment of a general mixed integer Programming(MIP) model based upon the result of existing studies to decide the location and size simultaneously, a fuzzy mixed integer Programming(FMIP) model has been developed in the use of fuzzy theory. And the general linear Programming software, LINDO 6.01 has been used to simulate, to evaluate the developed model with the examples and to judge of the appropriateness and adaptability of the model(FMIP) in the real world.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.3 s.345
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• pp.21-32
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• 2006

A new SRAM circuit with row-by-row activation and low-swing write schemes is proposed to reduce switching power of active cells as well as leakage one of sleep cells in this paper. By driving source line of sleep cells by $V_{SSH}$ which is higher than $V_{SS}$, the leakage current can be reduced to 1/100 due to the cooperation of the reverse body-bias. Drain Induced Barrier Lowering (DIBL), and negative $V_{GS}$ effects. Moreover, the bit line leakage which may introduce a fault during the read operation can be eliminated in this new SRAM. Swing voltage on highly capacitive bit lines is reduced to $V_{DD}-to-V_{SSH}$ from the conventional $V_{DD}-to-V_{SS}$ during the write operation, greatly saving the bit line switching power. Combining the row-by-row activation scheme with the low-swing write does not require the additional area penalty. By the SPICE simulation with the Berkeley Predictive Technology Modes, 93% of leakage power and 43% of switching one are estimated to be saved in future leakage-dominant 70-un process. A test chip has been fabricated using $0.35-{\mu}m$ CMOS process to verify the effectiveness and feasibility of the new SRAM, where the switching power is measured to be 30% less than the conventional SRAM when the I/O bit width is only 8. The stored data is confirmed to be retained without loss until the retention voltage is reduced to 1.1V which is mainly due to the metal shield. The switching power will be expected to be more significant with increasing the I/O bit width.