• Title/Summary/Keyword: Process Performance Measurement

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Fabrication of the FET-based SPM probe by CMOS standard process and its performance evaluation (CMOS 표준 공정을 통한 SPM 프로브의 제작 및 그 성능 평가)

  • Lee, Hoontaek;Kim, Junsoo;Shin, Kumjae;Moon, Wonkyu
    • Journal of Sensor Science and Technology
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    • v.30 no.4
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    • pp.236-242
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    • 2021
  • In this paper, we report the fabrication of the tip-on-gate of a field-effect-transistor (ToGoFET) probe using a standard complementary metal-oxide-semiconductor (CMOS) process and the performance evaluation of the fabricated probe. After the CMOS process, I-V characteristic measurement was performed on the reference MOSFET. We confirmed that the ToGoFET probe could be operated at a gate voltage of 0 V due to channel ion implantation. The transconductance at the operating point (Vg = 0 V, Vd = 2 V) was 360 ㎂/V. After the fabrication process was completed, calibration was performed using a pure metal sample. For sensitivity calibration, the relationship between the input voltage of the sample and the output current of the probe was determined and the result was consistent with the measurement result of the reference MOSFET. An oxide sample measurement was performed as an example of an application of the new ToGoFET probe. According to the measurement, the ToGoFET probe could spatially resolve a hundred nanometers with a height of a few nanometers in both the topographic image and the ToGoFET image.

A Study on the Measurement of ERP Implementation Performance by BSC Model : Focused on the Causal Relationships among Performance Indicators

  • Jung, Chul-Ho;Chung, Young-Soo
    • Journal of Information Technology Applications and Management
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    • v.20 no.3
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    • pp.143-167
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    • 2013
  • The main propose of this research is to examine the performances in ERP introduced enterprises by utilizing BSC model proposed by Kaplan and Norton [1992], to realize this goals, a theoretical review on ERP, BSC, and other related issues is performed in advance, accordingly, research model was generated. In conceptual model analysis, we focused on casual relationships among four performance measurement indicators after introduction of ERP proposed by Kaplan and Norton [2000]. To test the model, structural equation modeling is employed to analyze data collected from 164 enterprises which have introduced ERP for more than 1 year. Survey respondents were confined within the representatives of each enterprise's ERP. Hypotheses proposed in our research are tested by covariance structure model, results are listed as follow : First, learning and growth performance is significant factors for improving both internal process performance and customer performance; second, process performance has a positive impact on customer performance third, despite that customer performance is positively related to financial performance, no direct relationship is found between internal process performance and financial performance, an indirect relationship is built through intermediate medium of customer performance. Based upon these results, we discuss implications at the latter part of paper. Meanwhile, we also provide research limitations, and future research in the final section.

A Standard Method for Progress Measurement in a Petrochemical Plant EPC Project (석유화학 플랜트 EPC 사업의 진도율 산정표준의 제안)

  • Cho, Hong-Yeon;Yoo, Hoseon
    • Plant Journal
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    • v.7 no.4
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    • pp.77-87
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    • 2011
  • In proportion to continuing growth of overseas plant market and the trend of its mega scale of the project, the importance of management is significantly emphasized for the successful execution of the project. And it is recognized that progress control is the most important management item amongst the others in the management. Progress control is importance of progress measurement for performance measurement and process control of project, but it is hardly obtainable securing the objectivity in the progress measurement since the progress measurement are being applied differently in accordance with the project conditions and the experience level of the person in charge for the progress control. This study has conducted as following to propose a standard method for progress measurement in a petrochemical plant protect. Domestic and overseas plant projects are investigated variously with the applied method of progress measurement, and the deduced problem of progress measurement. And then standard method for progress measurement of engineering, procurement, construction and commissioning has been proposed according to comparison and analysis of practices in domestic & overseas plant project, procedures for progress control in the globally reputed petrochemical client, company rules and recommendation of the expert in progress control.

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A Method for Improving Resolution and Critical Dimension Measurement of an Organic Layer Using Deep Learning Superresolution

  • Kim, Sangyun;Pahk, Heui Jae
    • Current Optics and Photonics
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    • v.2 no.2
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    • pp.153-164
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    • 2018
  • In semiconductor manufacturing, critical dimensions indicate the features of patterns formed by the semiconductor process. The purpose of measuring critical dimensions is to confirm whether patterns are made as intended. The deposition process for an organic light emitting diode (OLED) forms a luminous organic layer on the thin-film transistor electrode. The position of this organic layer greatly affects the luminescent performance of an OLED. Thus, a system for measuring the position of the organic layer from outside of the vacuum chamber in real-time is desired for monitoring the deposition process. Typically, imaging from large stand-off distances results in low spatial resolution because of diffraction blur, and it is difficult to attain an adequate industrial-level measurement. The proposed method offers a new superresolution single-image using a conversion formula between two different optical systems obtained by a deep learning technique. This formula converts an image measured at long distance and with low-resolution optics into one image as if it were measured with high-resolution optics. The performance of this method is evaluated with various samples in terms of spatial resolution and measurement performance.

Process Model for development of EVMS in Nuclear Power Plant Project (원전건설 성과관리시스템(EVMS) 개발을 위한 프로세스 모델 연구)

  • Kim, Yun-Myung;Won, Seo-Kyung;Shin, Il-Sub
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2014.05a
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    • pp.58-59
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    • 2014
  • EVM(Earned Value Management) is a management methodology for integrating scope, schedule and resources, and for objectively measuring project performance and progress. EVMS(Earned Value Management System) has been used for the performance measurement of R&D and construction projects in developed countries such as United States, United Kingdom and Australia. The nuclear power plant (NPP) projects in Korea have not applied EVMS. However, EVMS has come into request for overall schedule and cost risk management and performance measurement in overseas project of the nuclear power plant as a contractor. In this paper, based on the global EVMS guidelines, EVMS per unit processes have been developed for NPP projects. Moreover, using Business Process Management (BPM), it proposes an integrated process model with tasks, roles, and procedures for EVMS for NPP construction projects.

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Economic Selection of the Optimal Process Mean Using Sequential Inspection to Reduce the Effect of Measurement Errors (측정오차를 고려한 최적 공정평균의 경제적 설정 - 축차검사의 활용)

  • Park, Hwan-Su;Chang, Young-Soon
    • Journal of Korean Society for Quality Management
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    • v.34 no.2
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    • pp.12-21
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    • 2006
  • This paper considers the problem of selecting the most profitable process mean for production processes where measurement errors exist in inspection systems. For such situations, a sequential inspection procedure is proposed to reduce measurement errors. The decision to accept, reject, or take an additional inspection of an item is made at every measurement point until the number of repeated measurements reaches its upper bound. An expected profit model is constructed and the optimal process mean, the cut-off values, and the upper bound of the number of repeated measurements are obtained when accepted(rejected) items are sold at regular(reduced) price. A numerical study is performed to investigate the performance of the proposed procedure.

Development of Extended Process Capability Index in Terms of Error Classification in the Production, Measurement and Calibration Processes (생산, 측정 및 교정 프로세스에서 오차 유형화에 의한 확장 공정능력지수의 개발)

  • Choi, Sung-Woon
    • Journal of the Korea Safety Management & Science
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    • v.11 no.2
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    • pp.117-126
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    • 2009
  • We develop methods for propagating and analyzing EPCI(Extended Process Capability Index) by using the error type that classifies into accuracy and precision. EPCI developed in this study can be applied to the three combined processes that consist of production, measurement and calibration. Little calibration work discusses while a great deal has been studied about SPC(Statistical Process Contol) and MSA(Measurement System Analysis). EPCI can be decomposed into three indexes such as PPCI(Production Process Capability Index), PPPI(Production Process Performance Index), MPCI(Measurement PCD, and CPCI(Calibration PCI). These indexs based on the type of error classification can be used with various statistical techniques and principles such as SPC control charts, ANOVA(Analysis of Variance), MSA Gage R&R, Additivity-of-Variance, and RSSM(Root Sum of Square Method). As the method proposed is simple, any engineer in charge of SPC. MSA and calibration can use efficientily in industries. Numerical examples are presentsed. We recommed that the indexes can be used in conjunction with evaluation criteria.

A Study on the Universal Outer Diameter Measurement Module using LVDT (LVDT를 이용한 범용 외경측정 모듈에 관한 연구)

  • Lee, Neung-Gu;Kwac, Lee-Ku;Kim, Hong-Gun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.16 no.3
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    • pp.100-106
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    • 2017
  • A universal outer diameter measurement module was developed using a linear variable differential transformer (LVDT). This outer diameter measurement module enables simultaneous measurement of outer diameter, displacement, and perpendicularity of bench-type high-precision products by combining analogue and digital measurement principles with mechanically precise and fine adjustment functions. The developed module showed a performance of 0.001mm in measurement resolution, 0.001mm in measurement accuracy, reference surface abrasion lower than Ra 0.1864, and measurement stability of 0.002mm. Therefore, we have acquired domestic measurement technology to improve productivity by securing technical competitiveness for universal diameter measurement technology, lower production costs through import substitution, and increased quality of products with more precise measurement technology. Furthermore, a substitution effect is expected for expensive import measurement system equipment used in production, research, and inspection sites in industries that produce precision processing products such as automobile and machine components.

Development of Automated Non-contact Thickness Measurement Machine using a Laser Sensor (레이저센서를 이용한 비접촉식 두께자동측정기 개발)

  • Cho, Kyung-Chul;Kim, Soo-Youn;Shin, Ki-Yeol
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.14 no.2
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    • pp.51-58
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    • 2015
  • In this study, we developed an automated non-contact thickness measurement machine that continuously and precisely measures the thickness and warp of a PCB product using a laser sensor. The system contains a measurement part to measure the thickness in real time automatically according to the set conditions with an alignment supply unit and unloading unit to separate OK and NG products. The measurement machine was utilized to evaluate the performance at each step to minimize measurement error. At the zero setting for the initial setup, the standard deviation of the 216 samples was determined to be $5.52{\mu}m$. A measurement error of 0.5mm and 1.0mm as a standard sample in the measurement accuracy assessment was found to be 2.48% and 2.28%, respectively. In the factory acceptance test, the standard deviation of 1.461mm PCB was measured as $28.99{\mu}m$, with a $C_{pk}$ of 1.2. The automatic thickness measurement machine developed in this study can contribute to productivity and quality improvement in the mass production process.

Learning City Performance Measurement and Performance Measure Weighting Decision based on DEA Method (DEA를 활용한 성과평가 지표의 가중치 결정모형 구축 : 평생학습도시 성과평가 지표 적용 사례를 중심으로)

  • Lim, Hwan;Sohn, Myung-Ho
    • Journal of Information Technology Services
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    • v.9 no.4
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    • pp.109-121
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    • 2010
  • Most organizations adopt their own performance measurement systems. Those organizations select performance measures to meet their goals. Organizations can give only limited description of what performance measures are. Kaplan and Norton suggest that the Balanced Scorecard (BSC) to complement the conventional performance measures. The BSC can provide management system with a comprehensive strategic vision and integrates non-financial measures with financial measures. The BSC is widely used for measuring corporate performance. This paper investigates how the BSC-based performance measures can be applied to Learning City. The Learning City's performance measures and strategy map on the basis of the BSC are suggested in this research. This paper adopt the AR(assurance region)-DEA model which could limit the range of weight on performance measures to prevent each viewpoint of BSC from having unlimited elasticity. The proposed model is based on CCR model including a property of unit invariance to use the data without normalization process.