• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.6-11
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• 2024

This paper presents the design and experimental analysis of a cryogenic refrigeration system for -100 ℃, primarily intended for semiconductor etching process. The refrigeration system utilizes non-flammable mixed refrigerant Joule-Thomson refrigeration cycle, incorporating a precooling stage to enhance overall performance. The selected refrigerants for the system include R1234yf for the precooling stage, and Ar, R14, R23 and R218 for the main cooling stage of the Joule-Thomson refrigeration cycle. Design results according to the system constraints and experimental results are discussed, including lowest evaporation temperature, compressor isentropic efficiency and overall pressure tendencies. The achieved refrigerant fraction from optimal design is Ar: R14: R23: R218 = 0.15: 0.4: 0.15: 0.3, indicating COP of 0.1118 at the isentropic compressor efficiency of 50%. The experimental result shows the developed system reaches steady state in approximately 3 hours.

• International journal of advanced smart convergence
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• 제4권1호
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• pp.162-178
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• 2015

Petroleum based fossil fuels used to power most processes today are non-renewable fuels. This means that once used, they cannot be reproduced for a very long time. The maximum combustion of fossil fuels occurs in automobiles i.e. the vehicles we drive every day. Thus, there is a requirement to shift from these non-renenewable sources of energy to sources that are renewable and environment friendly. This is causing the need to shift towards more environmentally-sustainable transport fuels, preferably derived from biomass, such as biodiesel blends. These blends can be made from oils that are available in abundance or as waste e.g. waste cooking oil, animal fat, oil from seeds, oil from algae etc. Waste Cooking Oil(WCO) is a waste product and so, converting it into a transportation fuel is considered highly environmentally sustainable. Keeping this in mind, a life cycle assessment (LCA) was performed to evaluate the environmental implications of replacing diesel fuel with WCO biodiesel blends in a regular Diesel engine. This study uses Life Cycle Assessment (LCA) to determine the environmental outcomes of biodiesel from WCO in terms of global warming potential, life cycle energy efficiency (LCEE) and fossil energy ratio (FER) using the life cycle inventory and the openLCA software, version 1.3.4: 2007 - 2013 GreenDelta. This study resulted in the conclusion that the biodiesel production process from WCO in particular is more environmentally sustainable as compared to the preparation of diesel from raw oil, also taking into account the combustion products that are released into the atmosphere as exhaust emissions.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator. removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistancy. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfact Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• 한국항해항만학회지
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• 제36권1호
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• pp.69-74
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• 2012

오늘날 글로벌 수 출입 공급망 내에서 항만 하역작업의 효율성은 아주 중요하다. 해상운송에서는 컨테이너화와 더불어 늘어나는 화물량을 극복하기 위해서 초대형선의 운항이 일반화 되고 있다. 따라서 컨테이너 터미널의 관리자들은 안벽작업의 효율성을 극대화하기 위하여 더블 사이클과 듀얼 사이클 방법을 시도하고 있다. 또한, 야드 트랙터의 할당의 효율성을 높이기 위해서 야드 트랙터 풀링 방법이 제시되었다. 본 논문에서는 기존의 풀링 방법들과 듀얼 사이클을 고려한 풀링 방법의 비교를 통해서 듀얼 사이클의 효율성을 분석하였다. YT 할당 모형은 시뮬레이션 분석 소프트웨어인 Arena를 이용하여 수립되었다. 실험결과 듀얼 사이클이 많은 것이 항상 크레인 생산성을 높이는 것은 아닌 것으로 분석되었다.

• Journal of Electrochemical Science and Technology
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• 제13권2호
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• pp.279-291
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• 2022

In this report the thermochemical conversion of Sm₂O₃ to SmCl₃ using AlCl₃ in LiCl-KCl melt at 773 K is discussed. The final product was a mixture of SmCl₃, Al₂O₃, unreacted Sm₂O₃ and AlCl₃ in the chloride melt. The electrochemical attributes of the mixture was analyzed with cyclic voltammetry (CV) and square wave voltammetry (SWV). The crystallographic phases of the mixture were studied with X-ray diffraction (XRD) technique. The major chemical conversion was optimized by varying the effective parameters, such as concentrations of AlCl₃, duration of reaction and the amount of LiCl-KCl salt. The extent of conversion and qualitative assessment of efficiency of the present protocol were evaluated with fluorescence spectroscopy, UV-Vis spectrophotometry and inductively coupled plasma atomic emission spectroscopy (ICP-AES) studies of the mixture. Thus, a critical assessment of the thermochemical conversion efficiency was accomplished by analysing the amount of SmCl₃ in LiCl-KCl melt. In the process, a conversion efficiency of 95% was achieved by doubling the stoichiometric requirement of AlCl₃ in 50 g of LiCl-KCl salt. The conversion reaction was found to be very fast as the reaction reached equilibrium in 15 min.

• 한국기계가공학회지
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• 제17권5호
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• pp.52-57
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• 2018

Most current ships have adopted on-board diesel generators to produce electricity, but the overall efficiency of equipment is down to about 50% due to thermal losses from operations such as exhaust gas, jacket water cooler, scavenge air cooler, etc. Recently, fuel cells have been highlighted as a promising technology to reduce the effect on the environment and have a higher efficiency. Therefore, this paper suggested a solid oxide fuel cell (SOFC)-gas turbine (GT) using waste heat from a SOFC and SOFC-GT-steam turbine (ST) with Rankine cycle. To compare both configurations, the fuel flow rate, current density, cell voltage, electrical power, and overall efficiency were evaluated at different operating loads. The overall efficiency of both SOFC hybrid systems was higher than the conventional system.

• 상하수도학회지
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• 제18권5호
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• pp.649-655
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• 2004

The behavior of biological particles in DAF (dissolved air flotation) process was analyzed by employing PBT (Population balance theory). After decline growth phase of activated sludge, the value of the initial collision-attachment efficiency was increased over than 0.35 corresponding relatively high value in the whole life cycle of microorganism. For practical application of DAF as a solid separation process. It is desirable that microbial particles should be operated to perform high solid removal efficiency in biological wastewater treatment.

• 한국분무공학회지
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• 제20권3호
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• pp.141-148
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• 2015

In order to research engine characteristics of spark-ignited engine with intake valve closing timing change for Miller cycle, two cam for LIVC(Late Intake Valve Closing) were designed and fabricated an prototype valvetrain. And intake valve closing timing were adjusted to build low compressing and high expansion cycle for HEV. In experimental study, it were investigated with different engine speed, spark timing and air-fuel ratio to compare base cam and LIVC cam type. It was found that the volumetry efficiency and effective work of compression process were decreased in case of LIVC cam. When compared with the existing results, the maximum pressure in the cylinder was reduced about 12~13 bar and the volumetric efficiency was reduced about 16%.

• 한국수소및신에너지학회논문집
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• 제22권5호
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• pp.699-705
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• 2011

A combined heat and power cogeneration system driven by low-temperature sources is investigated by the first and second laws of thermodynamics. The system consists of Organic Rankine Cycle (ORC) and an additional process heater as a series circuit. Seven working fluids of R152a, propane, isobutane, butane, R11, R123, isopentane and n-pentane are considered in this work. Maximum mass flow rate of a working fluid relative to that of the source fluid is considered to extract maximum power from the source. Results indicate that the second-law efficiency can be significantly increased due to the combined heat and power generation. Furthermore, higher source temperature and lower turbine inlet pressure lead to lower second-law efficiency of ORC system but higher that of combined system. Results also show that the optimum working fluid varies with the source temperature.