• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.161-168
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• 1998

Reactive ion etching process for InGaAs/InP using the CH4/H2 high density inductively coupled plasma was investigated. The experimental design method proposed by Taguchi was utilized to cover the whole parameter range while maintaining reasonable number of actual experiments. Results showed that the ICP power mainly affects surface roughness and verticality of the sidewall, bias power does etch rate and verticality, CH4 gas concentraion does the verticality and etch rate, and the distance between the induction coil and specimen mostly affects the surface roughness. It was also observed that the chamber pressure is the dominant parameter for the etch rate and verticality of the sidewall. The optimum condition was ICP power 700W, bias power 150 W, 15% $CH_4$, 7.5 mTorr, and 14 cm distance, resulting in about 3 $\mu\textrm{m}$/hr etch rate with smooth surfaces and vertical mesa sidewalls.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.4
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• pp.435-442
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• 2004

This paper presents a hermetic MEMS on-chip package bonded by a closed-loop AuSn solder-line. We design three different package specimens, including a substrate heated specimen without interconnection-line (SHX), a substrate heated specimen with interconnection-line (SHI) and a locally heated specimen with interconnection-line (LHI). Pressurized helium leak test has been carried out for hermetic seal evaluation in addition to the critical pressure test for bonding strength measurement. Substrate heating method (SHX, SHI) requires the bonding time of 40min. at 400min, while local heating method (LHI) requires 4 min. at the heating power of 6.76W. In the hermetic seal test. SHX, SHI and LHI show the leak rates of 5.4$\pm$6.7${\times}$$^{-10}$ mbar-l/s, 13.5$\pm$9.8${\times}$$^{-10}$ mbar-l/s and 18.5$\pm$9.9${\times}$$^{-10}$ mbar-l/s, respectively, for an identical package chamber volume of 6.89$\pm$0.2${\times}$$^{-10}$. In the critical pressure test, no fracture is found in the bonded specimens up to the applied pressure of 1$\pm$0.1MPa, resulting in the minimum bonding strength of 3.53$\pm$0.07MPa. We find that the present on-chip packaging using a closed AuSn solder-line shows strong potential for hermetic MEMS packaging with interconnection-line due to the hermetic seal performance and the shorter bonding time for mass production.

• Journal of the Semiconductor & Display Technology
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• v.8 no.2
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• pp.55-58
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• 2009

Density functional theory was used to investigate the adsorption and reaction of $HfCl_4$ with two hydroxyls on Si (001)-$2{\times}1$ surface in atomic layer deposition (ALD) process. We prepared a reasonable Si substrate which consisted of six inter-dimer dissociated $H_2O$ molecules and two intra-dimer dissociated $H_2O$ molecules. The $HfCl_4$must react with two hydroxyls to be a bulk-like structure. When $HfCl_4$ was adsorbed on a hydroxyl, there was energy benefit of -0.55 eV. Though there was energy loss for $HfCl_4$ to react with H of hydroxyl, thermal energy of ALD chamber would be enough to pass the energy barriers. There were five reaction pathways for $HfCl_4$ to react with two hydroxyls; inter-dimer, intra-dimer, cross-dimer, inter-row, and cross-row. Inter-row, inter-dimer and intra-dimer were relatively favorable among the five reaction pathways based on the energy difference. The electron densities between O and Hf in these three reactions were higher than the others and they had shorter Hf-O and O-O bond lengths than the other two reaction pathways.

• Environmental Engineering Research
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• v.23 no.4
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• pp.383-389
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• 2018

Microbial fuel cell (MFC) is an innovative environmental and energy system that converts organic wastewater into electrical energy. For practical implementation of MFC as a wastewater treatment process, a number of limitations need to be overcome. Improving cathodic performance is one of major challenges, and introduction of a current collector can be an easy and practical solution. In this study, three types of current collectors made of stainless steel (SS) were tested in a single-chamber cubic MFC. The three current collectors had different contact areas to the cathode (P $1.0cm^2$; PC $4.3cm^2$; PM $6.5cm^2$) and increasing the contacting area enhanced the power and current generations and coulombic and energy recoveries by mainly decreasing cathodic charge transfer impedance. Application of the SS mesh to the cathode (PM) improved maximum power density, optimum current density and maximum current density by 8.8%, 3.6% and 6.7%, respectively, comparing with P of no SS mesh. The SS mesh decreased cathodic polarization resistance by up to 16%, and cathodic charge transfer impedance by up to 39%, possibly because the SS mesh enhanced electron transport and oxygen reduction reaction. However, application of the SS mesh had little effect on ohmic impedance.

• Journal of Information Science Theory and Practice
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• v.7 no.2
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• pp.40-53
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• 2019

Although fake news has been present in human history at any time, nowadays, with social media, deceptive information has a stronger effect on society than before. This article answers two research questions, namely (1) Is the dissemination of fake news supported by machines through the automatic construction of filter bubbles, and (2) Are echo chambers of fake news manmade, and if yes, what are the information behavior patterns of those individuals reacting to fake news? We discuss the role of filter bubbles by analyzing social media's ranking and results' presentation algorithms. To understand the roles of individuals in the process of making and cultivating echo chambers, we empirically study the effects of fake news on the information behavior of the audience, while working with a case study, applying quantitative and qualitative content analysis of online comments and replies (on a blog and on Reddit). Indeed, we found hints on filter bubbles; however, they are fed by the users' information behavior and only amplify users' behavioral patterns. Reading fake news and eventually drafting a comment or a reply may be the result of users' selective exposure to information leading to a confirmation bias; i.e. users prefer news (including fake news) fitting their pre-existing opinions. However, it is not possible to explain all information behavior patterns following fake news with the theory of selective exposure, but with a variety of further individual cognitive structures, such as non-argumentative or off-topic behavior, denial, moral outrage, meta-comments, insults, satire, and creation of a new rumor.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.29 no.2
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• pp.167-175
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• 2019

Objectives: The purpose of this study was to evaluate airborne radon and thoron levels and estimate the effective doses of workers who made household goods and mattresses using monazite. Methods: Airborne radon and thoron concentrations were measured using continuous monitors (Rad7, Durridge Company Inc., USA). Radon and thoron concentrations in the air were converted to radon doses using the dose conversion factor recommended by the Nuclear Safety and Security Commission in Korea. External exposure to gamma rays was measured at the chest height of a worker from the source using real-time radiation instruments, a survey meter (RadiagemTM 2000, Canberra Industries, Inc., USA), and an ion chamber (OD-01 Hx, STEP Co., Germany). Results: When using monazite, the average concentration range of radon was $13.1-97.8Bq/m^3$ and thoron was $210.1-841.4Bq/m^3$. When monazite was not used, the average concentration range of radon was $2.6-10.8Bq/m^3$ and the maximum was $1.7-66.2Bq/m^3$. Since monazite has a higher content of thorium than uranium, the effects of thoron should be considered. The effective doses of radon and thoron as calculated by the dose conversion factor based on ICRP 115 were 0.26 mSv/yr and 0.76 mSv/yr, respectively, at their maximum values. The external radiation dose rate was $6.7{\mu}Sv/hr$ at chest height and the effective dose was 4.3 mSv/yr at the maximum. Conclusions: Regardless of the use of monazite, the total annual effective doses due to internal and external exposure were 0.03-4.42 mSv/yr. Exposures to levels higher than this value are indicated if dose conversion factors based on the recently published ICRP 137 are applied.

• Journal of Korean Society on Water Environment
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• v.27 no.4
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• pp.461-466
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• 2011

The feasibility of utilizing food waste leachate as an external carbon source was tested to enhance biological nutrient removal from an industrial wastewater with an average flow rate of $164,800m^3/d$ and a low carbon/nitrogen ratio of 2.8. A considerable improvement in the removal of nitrogen and phosphorus was observed when a certain amount of the leachate, ranging from 70 to $142m^3/d$, was supplemented to the biological industrial wastewater treatment process. The addition of the leachate led to an increase in the BOD/N ratio (4.5) and the removal efficiency of nutritents from 29.7% to 71.7% for nitrogen and from 34.8% to 65.6% for phosphorus. However, an excessive dose of the leachate that significantly exceeded $120m^3/d$ caused serious operational problems, like oil-layer formation in the grit chamber and scum layer in the primary clarifier. Thus, an supplement of food waste leachate at a dose acceptable to an existing facilities can be a practical and effective means to enhance the nutrient removal from industrial wastewater and to dispose of the food waste leachate.

• Korean Journal of Metals and Materials
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• v.47 no.12
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• pp.828-833
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• 2009

As a fundamental study in the development of a distillation process for ferromanganese alloy melts, the evaporation behavior of an electrolytic manganese melt under reduced pressure was investigated. The melt temperature, vacuum degree, surface area of the melt, and reaction time were considered as experimental variables. The amount of vaporized manganese increases linearly as the reaction time increases, and the evaporation of manganese was promoted by increasing the temperature and surface area of the melt. In the pressure range below the equilibrium vapor pressure of manganese, the amount of vaporized manganese per unit surface area of the melt increased sharply with a decrease of the pressure in the reaction chamber. An empirical equation for the evaporation rate of manganese was derived by regression analysis. The evaporation coefficient of manganese was determined to be approximately $3.84{\times}10^{-3}(g{\cdot}K^{1/2})/(Pa{\cdot}cm^2{\cdot}min)$ under the investigated conditions.

• Journal of ILASS-Korea
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• v.27 no.2
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• pp.84-93
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• 2022

To implement carbon-neutrality in transportation sectors until 2050, hydrogen is considered a promising fuel for internal combustion engines because hydrogen does not contain carbon itself. Although hydrogen does not emit CO₂ emission from its combustion process, the low energy density in a volume unit hinders the adoption of hydrogen. Therefore, the understanding of hydrogen jet behavior and measurement of equivalence ratio must be conducted to completely implement the high-pressure hydrogen direct injection. The main objective of this research is feasibility test of hydrogen local equivalence ratio measurement by laser-induced breakdown spectroscopy (LIBs). To visualize the macroscopic structure of hydrogen jet, high-speed schlieren imaging was conducted. Moreover, LIBs has been adopted to validate the feasibility of hydrogen local equivalence ratio measurement. The hydrogen injection pressure was varied from 4 MPa to 8 MPa and injected in a constant volume chamber where the ambient pressure was 0.5 MPa. The increased injection pressure extends the vertical penetration of hydrogen jet. Due to the higher momentum supply when the injection pressure is high, the hydrogen has easily diffused in all directions. As the laser trigger timing has delayed, the low hydrogen atomic emission was detected due to the longer mixture formation time. Based on equivalence ratio measurement results, LIBs could be applied as a methodology for hydrogen local equivalence ratio measurement.

• Journal of Ceramic Processing Research
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• v.13 no.spc2
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• pp.328-331
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• 2012

With the recent development of super-precision optical instruments, camera modules for devices, such as portable terminals and digital camera lenses, are increasingly being used. Since an optical lens is usually produced by high-temperature compression molding methods using tungsten carbide (WC) alloy molding cores, it is necessary to develop and study technology for super-precision processing of molding cores and coatings for the core surface. In this study, Rhenium-Iridium (Re-Ir) thin films were deposited onto a WC molding core using a sputtering system. The Re-Ir thin films were prepared by a multi-target sputtering technique, using iridium, rhenium, and chromium as the sources. Argon and nitrogen were introduced through an inlet into the chamber to be the plasma and reactive gases. The Re-Ir thin films were prepared with targets having a composition ratio of 30 : 70, and the Re-Ir thin films were formed with a 240 nm thickness. Re-Ir thin films on WC molding core were analyzed by scanning electron microscope (SEM), atomic force microscope (AFM), and Ra (the arithmetical average surface roughness). Also, adhesion strength and coefficient friction of Re-Ir thin films were examined. The Re-Ir coating technique has received intensive attention in the coating processes field because of promising features, such as hardness, high elasticity, abrasion resistance and mechanical stability that result from the process. Re-Ir coating technique has also been applied widely in industrial and biomedical applications. In this study, WC molding core was manufactured, using high-performance precision machining and the effects of the Re-Ir coating on the surface roughness.