• Title/Summary/Keyword: Process Chamber

검색결과 994건 처리시간 0.029초

직접분사식 디젤기관의 연소실내 공기유동강화가 연소과정에 미치는 영향 (The Effect of Combustion Process by Intensifying the Air Flow in Combustion Chamber of D.I. Diesel Engine)

  • 방중철
    • 한국자동차공학회논문집
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    • 제15권5호
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    • pp.153-159
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    • 2007
  • The performance of a direct-injection type diesel engine often depends on the strength of air flow in the cylinder, shape of combustion chamber, the number of nozzle holes, etc. This is of course because the process of combustion in the cylinder was affected by the mixture formation process. In the present paper, high speed photography was employed to investigate the effectiveness of holes penetrated from the bottom of cavity wall to piston crown for some more useful utilization of air. The holes would function to improve mixing of fuel and air by the increase of air flow in the cylinder. The results obtained are summarized as follows, (1) Activated first of the combustion by shorten of ignition timing and rapid flame propagation (2) Raised the combustion peak pressure, more close to TDC the formation timing of peak pressure.

직류 열플라즈마를 이용한 질화알루미늄 초미세분말의 합성 (Synthesis of Ultrafine Powders for Aluminum Nitride by DC Thermal Plasma)

  • 안현;허민;홍상희
    • 한국표면공학회지
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    • 제29권1호
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    • pp.45-59
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    • 1996
  • Ultrafine powders(UFPs) of aluminum nitride(AlN) have been synthesized by chemical reactions in the nitrogen atmosphere and the gaseous aluminum evaporated from Al powders in thermal plasmas produced by a DC plasma torch. A synthesis system consisting of a plasma torch, a finely-controllable powder feeder, a reaction chamber, and a quenching-collection chamber have been designed and manufactured, and a filter for gathering AlN UFPs produced by the quenching process subsequent to the synthesis is set up. The synthesis process is interpreted by numerical analyses of the plasma-particle interaction and the chemical equilibrium state, respectively, and a fully-saturated fractional factorial test is used to find the optimum process conditions. The degrees and ultrafineness of synthesis are evaluated by means of SEM, TEM, XRD, and ESCA analyses. AlN UFPs synthesized in the optimum process conditions have polygonal shapes of the size of 5-100 nm, and their purities differ depending on collecting positions and filter types, and the maximum purity obtained is 72 wt% at the filter.

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복합 건축자재의 물질전달계수를 이용한 실내 오염물질 농도 예측방법 (A prediction of indoor pollutant concentration using method mass transfer coefficient in multi-layered building materials)

  • 김창남;이윤규;이승복;김태연
    • KIEAE Journal
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    • 제7권5호
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    • pp.53-58
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    • 2007
  • In order to predict the indoor air pollutant, the VOCs emission rate is used through small chamber in the design process. However, the small chamber method has limitations as the convective mass transfer coefficient, the most important factor when predicting VOCs contamination of indoor air, is different between the small chamber result and the measured data in the actual building. Furthermore, the existing studies which analyzed mass transfer coefficient in the small chamber were directed on the small chambers developed at the time and FLEC(Field and Laboratory Emission Cell), thus, are different from the current small chamber which has been changed with improvements. The purpose of this study is to determine the emission rate of pollutant in multi-layered building materials, and predict the indoor pollutant concentration through the CFD(Computational of Fluid Dynamics) and CRIAQ2 based on the mass transfer coefficient on singled-layered building material by using the current small chamber widely used in Korea. Futhermore, this study used the new convective mass transfer coefficient(hm') which indicates the existing convective mass transfer coefficient(hm) including VOC partition coefficient(k). Also, formaldehyde was selected as target pollutant.

Interface Control to get Higher Efficiency in a-Si:H Solar Cell

  • Han, Seung-Hee;Kim, En-Kyeom;Park, Won-Woong;Moon, Sun-Woo;Kim, Kyung-Hun;Kim, Sung-Min
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.193-193
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    • 2012
  • In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. Single-chamber PECVD system for a-Si:H solar cell manufacturing has the advantage of lower initial investment and maintenance cost for the equipment. However, in single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of single-chamber PECVD system. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. In order to remove the deposited B inside of the plasma chamber during p-layer deposition, a high RF power was applied right after p-layer deposition with SiH4 gas off, which is then followed by i-layer, n-layer, and Ag top-electrode deposition without vacuum break. In addition to the p-i interface control, various interface control techniques such as FTO-glass pre-annealing in O2 environment to further reduce sheet resistance of FTO-glass, thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, and hydrogen plasma treatment prior to n-layer deposition, etc. were developed. The best initial solar cell efficiency using single-chamber PECVD system of 10.5% for test cell area of 0.2 $cm^2$ could be achieved by adopting various interface control methods.

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반도체용 핫플레이트 챔버 내 자연대류가 핫플레이트 표면 온도 균일도에 미치는 영향 (Effects of Natural Convection Cells on Temperature Uniformity in Hot Plate Chamber for Wafer Baking Process)

  • 박준수;권현구;조형희
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2512-2517
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    • 2007
  • Effect of natural convention for hot plate surface temperature uniformity was studied by experiments that were adjusted height of chamber and temperature difference. The hot plate chamber is composed of the hot plate and the upper heater and adiabatic vertical wall. The hot plate diameter is 220mm and maintains temperature at $150^{\circ}C$. Flow pattern compares with surface temperature and confirms that natural convection affects on temperature uniformity of hot plate surface. In case, temperature non-uniformity of hot plate surface is due to heater pattern, lots of weak and small flow cells more improve temperature uniformity than stronger flow cells or non-developing flow cell. Improve temperature uniformity $1.2^{\circ}C$ when developing weak and small flow cells.

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가솔린 연료의 기화율 변화에 따른 연소 특성에 관한 기초 연구 (A study on the combustion characteristics according to evaporation rate of gasoline)

  • 이기형;이창식;신광수;조행묵
    • 한국분무공학회지
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    • 제1권3호
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    • pp.29-36
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    • 1996
  • The present study systematically investigates the effect of evaporation rate on the combustion characteristics and the flame stabilization in a gasoline engine. A constant volume combustion chamber was used to elucidate a basic combustion characteristics and the premixer was installed to control temperature and equivalence ratio. And the maximum pressure, combustion duration and flame propagation according to the evaporation rate were measured to determine the optimal temperature range for evaparating a gasoline fuel. These experimental results indicate that the combustion characteristics such as combustion chamber pressure and combustion duration were deteriorated by decreasing surrounding temperature of fuel injected. It was also found that the overall gasification process for gasoline fuel was strongly influenced by a combustion chamber temperature rather than a premixer temperature.

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ANALYSIS OF DIRECT INJECTION SI STRATIFIED COMBUSTION IN HYDROGEN LEAN MIXTURE - COMBUSTION PROMOTION AND COOLING LOSS BY HYDROGEN -

  • Shudo, Toshio;Tsuga, Koichiro
    • International Journal of Automotive Technology
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    • 제2권3호
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    • pp.85-91
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    • 2001
  • Characteristics of methane direct-injection spark-ignition stratified combustion in lean hydrogen mixture were analyzed both in a single cylinder engine and in a constant volume combustion chamber. Combustion pressure and Instantaneous combustion chamber wall temperature during the combustion process were measured with a thin-film thermocouple and used in analyses of combustion and cooling loss. Results in this research show that the premixed hydrogen increases cooling loss to combustion chamber wall while achieving combustion promotion, and the combustion system is effective especially in lean mixture conditions. Analysis of flame propagation was also done with Schlieren photography in the constant volume combustion chamber.

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PECVD Chamber Cleaning End Point Detection (EPD) Using Optical Emission Spectroscopy Data

  • Lee, Ho Jae;Seo, Dongsun;Hong, Sang Jeen;May, Gary S.
    • Transactions on Electrical and Electronic Materials
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    • 제14권5호
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    • pp.254-257
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    • 2013
  • In-situ optical emission spectroscopy (OES) is employed for PECVD chamber monitoring. OES is used as an addon sensor to monitoring and cleaning end point detection (EPD). On monitoring plasma chemistry using OES, the process gas and by-product gas are simultaneously monitored. Principal component analysis (PCA) enhances the capability of end point detection using OES data. Through chamber cleaning monitoring using OES, cleaning time is reduced by 53%, in general. Therefore, the gas usage of fluorine is also reduced, so satisfying Green Fab challenge in semiconductor manufacturing.

배선용차단기의 소호구조에 의한 한류 특성 연구 (Investigation of Arc Breaking Characteristic for Arc Chamber in Molded Case Circuit Breakerg)

  • 김용기;송중천;유만종
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2001년도 하계학술대회 논문집 B
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    • pp.708-710
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    • 2001
  • In this paper, back commutation phenomena for iron chute chamber in AC low testing. For this experimental we used high speed camera and carried out with same prospective currents up to 10kA RMS. Hybrid arc quenching chambers which are composed with iron plate and insulating materials tested for reducing back commutation phenomena in interrupting process. It is shows that hybrid chambers which are various narrow slot path width reduces back commutation. As a result, a new type arc quenching chamber is to force the arc rapidly into a narrow insulating slot with iron plate. By this means the arc is lengthened and squeezed between insulating walls. Using this model, the behavior of the arc squeezed in the hybrid chamber and characteristics of arc voltage are also investigated.

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Multi-pole Inductively Coupled Plasma(MICP)를 이용한 Via Contact 및 Deep Contact Etch 특성 연구 (Via Contact and Deep Contact Hole Etch Process Using MICP Etching System)

  • 설여송;김종천
    • 반도체디스플레이기술학회지
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    • 제2권3호
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    • pp.7-11
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    • 2003
  • In this research, the etching characteristics of via contact and deep contact hole have been studied using multi-pole inductively coupled plasma(MICP) etching system. We investigated Plasma density of MICP source using the Langmuir probe and etching characteristics with RF frequency, wall temperature, chamber gap, and gas chemistry containing Carbon and Fluorine. As the etching time increases, formation of the polymer increases. To improve the polymer formation, we controlled the temperature of the reacting chamber, and we found that temperature of the chamber was very effective to decrease the polymer thickness. The deep contact etch profile and high selectivity(oxide to photoresist) have been achieved with the optimum mixed gas ratio containing C and F and the temperature control of the etching chamber.

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