• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.5
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• pp.52-57
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• 2008

Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lenes and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. Backscattered electron provide an useful signal for composition and local specimen surface inclination. Secondary electron is used far the formation of surface imagination. The steady electron beam probe is very important for the imagination formation and the brightness. In this paper, we show the results of developed elements that create electron beam probe and the measured beam probe in various acceleration voltages by Faraday cup. These data are used to analysis and improve the performance of the system in the development.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.21 no.2
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• pp.303-315
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• 1997

The theoretical model for the transient probe method is the modified Jaeger model which is used perfect line source theory. The transient probe technique has been developed for the simultaneous determination of thermal conductivity, diffusivity and volumetric heat capacity of liquids. The Levenberg-Marquardt iteration method is adapted to obtain thermal property within nonlinear range. Experimental results of liquids were found to agree well with recommended thermal property data.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.81-88
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• 1998

Measurement and inspection of freeform surfaces are required in reverse design processes. In the case of surface measurement using a touch probe, probe radius compensation affects measuring accuracy. But current industrial practice depends upon an operator's experience to compensate for probe radius. In this paper, an on-the-machine measuring and inspection system for freeform surfaces is studied. Probe radius compensation methodology is investigated by modeling of B-spline surfaces based on digitized data. The accuracy and reliability of the developed system is verified through various kinds of numerical simulations and on-the-machine experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.911-914
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• 1995

Measurement and inspection of freeform surface are required in reverse design process. In the case of surface measurement using a touch probe, probe radius compensation affects measuring accuracy But current industrial practice depends upon an operator's experience to compensate for probe radius. In this paper, an on-the-machine measuring and inspection system for freeform surfface was developed. Probe radius compensation methodology was studied via modeling of B-spline surfaces based on digitized data. The accuracy and reliability of the measurement system was confirmed through various kinds of experiments.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.71-77
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• 1996

This paper describes the development of on the machine measuring(OMM) system which can directlry measure the three dimensional machined dimensilnal accuracy using scanning probe in milling machine. Two algolithms, continuous path(CP) measurement using UC program and CAD data assisted point to point(PTP) measurement, were developed regarding specification of scanning probe. The OMM system was contructed to verify the developed system suing the proposed algorithm, and actually measured three kinds of machined TV shadow mask molds. The developed system was evaluated it's repeatability and compared with the current measurement system of CMM(Coording Measuring Machine) in terms of relative accuracy and time reduction and productivity increase.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

• Applied Microscopy
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• v.46 no.3
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• pp.127-133
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• 2016

Atom probe tomography is a time-of-flight mass spectrometry-based microanalysis technique based on the field evaporation of surface atoms of a tip-shaped specimen under an extremely high surface electric field. It enables three-dimensional characterization for deeper understanding of chemical nature in conductive materials at nanometer/atomic level, because of its high depth and spatial resolutions and ppm-level sensitivity. Indeed, the technique has been widely used to investigate the elemental partitioning in the complex microstructures, the segregation of solute atoms to the boundaries, interfaces, and dislocations as well as following of the evolution of precipitation staring from the early stage of cluster formation to the final stage of the equilibrium precipitates. The current review article aims at giving a comment to first atom probe users regarding the limitation of the techniques, providing a brief perspective on how we correctly interprets atom probe data for targeted applications.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.3
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• pp.20-27
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• 2003

Compensation of probe radius is required for accurate measurement in metal working industry. Compensation involves correctly measuring data on the surface in the amount of radius of the touch probe with a Coordinate Measuring Machine (CMM). Mechanical parts with free-formed curves and surfaces are complex enough so that accurate measurement and compensation are indispensable. This paper presents necessary algorithms involved in the compensation of the probe radius for free-formed curves and surfaces. Application of pillar curve is the focus for the compensation.

• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.4
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.19 no.5
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• pp.70-81
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• 2020

Point-by-point data, which is abundantly collected by vehicles with embedded GPS (Global Positioning System), generate useful information. These data facilitate decisions by transportation jurisdictions, and private vendors can monitor and investigate micro-scale driver behavior, traffic flow, and roadway movements. The information is applied to develop app-based route guidance and business models. Of these, speed data play a vital role in developing key parameters and applying agent-based information and services. Nevertheless, link speed values require different levels of physical storage and fidelity, depending on both collecting and reporting intervals. Given these circumstances, this study aimed to establish an appropriate collection interval to efficiently utilize Space Mean Speed information by vehicles with embedded GPS. We conducted a comparison of Probe-vehicle data and Image-based vehicle data to understand PE(Percentage Error). According to the study results, the PE of the Probe-vehicle data showed a 95% confidence level within an 8-second interval, which was chosen as the appropriate collection interval for Probe-vehicle data. It is our hope that the developed guidelines facilitate C-ITS, and autonomous driving service providers will use more reliable Space Mean Speed data to develop better related C-ITS and autonomous driving services.