• Composites Research
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• v.16 no.6
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• pp.56-61
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• 2003

In this Paper, a fiber Bragg grating(FBG) sensor system is described and FBGs are well-suited for long term and extremely severe experiments, where traditional strain gauges fail. In the system. a reflect wave-length measurement method which employs a tunable light source to find out the center wave-length of FBG sensor is used. We apply the FBG system to nuclear energy Power Plant for structural integrity test to measure the displacement of the structure under designed pressure and to check the elasticity of the structure by measuring the residual strain. The system works very well and it is expected that it can be used for a real-time strain, temperature and vibration detector of smart structure.

• Journal of Sensor Science and Technology
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• v.20 no.5
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• pp.322-328
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• 2011

There are many ways to detect the heart rate non-invasively such as ECG, PPG, strain gauge, and pressure sensor. In this paper, the pulse wave measurement system using bipolar biased head on mode of the Hall sensor is proposed for measuring the radial artery pulse. TMS320F2812 was used to implement the proposed system and a portable wireless network(zig-bee) was used to show the experimental result. It was confirmed from experiment that the performance of the implemented system was more stable and faster than PPG sensor or piezoelectric film pressure sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.350-351
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• 2006

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

• Electronics and Telecommunications Trends
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• v.35 no.4
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• pp.11-20
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• 2020

With the widespread use of high-performance electronics and mobile communications, electromagnetic interference (EMI) shielding has become crucial for protection against malfunctioning of electronic equipment and harmful effects to human health. In addition, smart sensor technologies will be rapidly developed in untact (non-contact) environments and personal healthcare fields. Herein, we introduce our recently developed technologies for flexible multifunctional EMI shielding, and highly sensitive wearable pressure-strain and humidity sensors realized using low-dimensional nanomaterials.

• Journal of Sensor Science and Technology
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• v.5 no.2
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• pp.1-8
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• 1996

In this paper, We have designed silicon pressure sensor with center-bossed diaphragm which improving sensitivity and linearity by reducing diaphragm deflection. Designed center-bossed pressure sensor showed maximum deflection of $0.125{\mu}m$, maximum stress of $2.24{\times}10^7 Pa$ and sensitivity of 27.67 mV/V.psii. As a result, diaphragm deflection was reduced to 1/160 that of diaphragm thickness and 1/35 that of square diaphragm. Also, sensitivity was increased 19 times compared to square diaphragm.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.59-63
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• 2002

This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

• Journal of Sensor Science and Technology
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• v.21 no.1
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• pp.75-81
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• 2012

Optimizing the tapping time of a blast furnace is important to a stable operation and life extension. To optimize the tapping time of the blast furnace, the location of Hearth Liquid Level should be recognized. There are several ways to measure the hearth liquid level in the blast furnace, such as Electromotive Force(EMF) measurement, pressure measurement by putting in nitrogen probe and manometry with strain gauge. In this paper, it will be discussed using strain gauge among the three methods. Conventional strain gauge must be revised periodically. Since, internal pressure, temperature of internal refractory material and wind pressure have effect on the strain gauge. However, static pressure value is required to compensate. To solve these problems, this paper suggests finding relationship between Hearth Liquid Level and strain gauge output, adding digital filter in strain gauge. Using the proposed method, it was possible to estimate the hearth liquid level and determine the appropriate tapping time. Usefulness of the proposed method through simulations and experimental results are confirmed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.3
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• pp.187-192
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• 2017

This paper presents an ongoing study to develop a novel pressure sensor by means of a Nano Carbon Piezoresistive Composite (NCPC). The sensor was fabricated using the 3D printing process. We designed a miniaturized cantilever-type sensor electrode to improve the pressure sensing performance and utilized a 3D printer to build a small-sized body. The sensor electrode was made of 2 wt％ MWCNT/epoxy piezoresistive nano-composite, and the sensor body was encapsulated with a pipe plug cap for easy installation to any pressure system. The piezoresistivity responses of the sensor were converted into stable voltage outputs by using a signal processing system, which is similar to a conventional foil strain gauge. We evaluated the pressure-sensing performances using a pressure calibrator in the lab environment. The 3D-printed cantilever electrode pressure sensor showed linear voltage outputs of up to 16,500 KPa, which is a 200％ improvement in the pressure sensing range when compared with the bulk-type electrode used in our previous work.

• Electrical & Electronic Materials
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• v.10 no.9
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• pp.938-944
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• 1997

Cu-Ni thin film strain gauges for diaphragm-type pressure sensors were developed. Thin films of Cu-Ni alloys of various compositions were deposited onto glass and stainless steel substrates by RF magnetron sputtering. The effects of composition substrate temperature Ar partial pressure and aging on the electrical properties of Cu-Ni film strain gauges in the thickness range 500~2000$\AA$ are discussed. The maximum resistivity(95.6 $\mu$$\Omega$cm) is obtained from 53wt%Cu-47wt%Ni films while the temperature coefficient of resistance(TCR) becomes minimum(25.6ppm/$^{\circ}C$). The gauge factor is about 1.9.

• Journal of Sensor Science and Technology
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• v.33 no.3
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• pp.173-178
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• 2024

Development of pressure sensors for harsh environments with high pressure, humidity, and temperature is essential for many applications in the aerospace, marine, and automobile industries. However, existing materials such as polymers, adhesives, and semiconductors are not suitable for these conditions and require materials that are less sensitive to the external environment. This study proposed a pressure sensor that could withstand harsh environments and had high durability and precision. The sensor comprised a piezoresistor pattern and an insulating film directly formed on a stainless-steel membrane. To achieve the highest sensitivity, a pattern design method was proposed that considered the stress distribution in a circular membrane using finite element analysis. The manufacturing process involved depositing and etching a dielectric insulating film and metal piezoresistive material, resulting in a device with high linearity and slight hysteresis in the range of a maximum of 40 atm. The simplicity and effectiveness of this sensor render it a promising candidate for various applications in extreme environments.