• 한국전기전자재료학회논문지
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• 제16권9호
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• pp.790-794
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• 2003

This paper describes the fabrication and characteristics of ceramic thin film type pressure sensors based on Ta-N strain gauges for high temperature applications. Ta-N thin-film strain gauges are deposited onto a thermally oxidized Si diaphragm by RF sputtering in an argon-nitrogen atmos[here($N_2$ gas ratio: 8%, annealing condition: 90$0^{\circ}C$, 1 hr.), patterned on a wheatstone bridge configuration, and used as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is 1.097 ～ 1.21 mV/Vㆍkgf/$\textrm{cm}^2$ in the temperature range of 25 ～ 200 $^{\circ}C$ and the maximum non-linearity resistance), non-linearity than existing Si piezoresistive pressure sensors. The fabricated ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that os operable under high-temperature.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.888-891
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• 2003

This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere($N_2$ gas ratio: 8 %, annealing condition: $900^{\circ}C$, 1 hr.), Patterned on a wheatstone bridge configuration, and use as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is $1.097{\sim}1.21mV/V.kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS. The fabricated pressure sensor presents a lower TCR, non-linearity than existing Si piezoresistive pressure sensors. The fabricated micro ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that is operable under high-temperature environments.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.25-28
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• 2005

The optical fiber is known for the proper sensor which can accomplish the structural health monitoring, Fiber Bragg Grating sensors are being studied more than any other fiber optic sensors due to good multiplexing capabilities. But because the signal stability of FBG sensors can be influenced by the strain gradient, it needs to analyze signal of FBG sensors. Particularly acoording to strain gradient induced by structural geometry or cracks, the spectrum peak of the FBG sensor signal can be split easily. In this paper, the spectrum analysis of the FBG sensor signal was performed and the region of embedment of FBG sensors was determined in $H_2$ pressure vessel by numerical method.

• 한국식품과학회지
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• 제22권6호
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• pp.686-689
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• 1990

김치의 발효상태를 monitoring할 수 있는 압력측정 sensor와 감시장치를 설계, 제작하였다. 본 시스템은 밀폐형 발효관(31.5 ml)과 strain gauge 타입의 압력 sensor, 741 Op. Amp.와 ADC0809를 사용하여 제작한 신호가공 장치로 구성하였으며 퍼스널 컴퓨터와 접속하여 사용하였다. 배추김치는 플라스틱 용기에 담가 $25^{\circ}C$와 $30^{\circ}C$에서 발효시켰으며 발효상태는 김치를 넣은 발효관으로 monitoring하였다. 압력곡선 형태의 김치발효 곡선을 얻을 수 있었으며 이는 2단 압력증가 양식을 갖는 김치숙성 곡선을 보여주었다.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.33-36
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• 2005

In this research, for the smart health monitoring of the hydrogen storage high pressure composite vessel, the feasibility study of an embedded fiber Bragg grating(FBG) sensor is carried out. To verify strain measurement in various temperature environment which is needed for the hydrogen pressure vessel, tensile test of a composite specimen with both an embedded FBG sensor and a strain gauge is made in low temperature. Before we try a real-size hydrogen storage pressure vessel, a small & cheap composite pressure vessel having the same structure is fabricated with embedded FBG sensors and tested. In the case of an aluminum liner inside the vessel, survivability of FBG sensors at the interface is lower than the other areas.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.731-734
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• 2002

This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain gauges for harsh environment applications. The Ta-N thin-film strain gauges are sputter deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097{\sim}1.21mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 소성∙가공
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• 제20권1호
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• pp.73-78
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• 2011

The flashing reduces the part quality and the productivity of the molding process. We developed a contact pressure sensor to detect the flashing immediately. The performance of the sensor was analyzed in a simple 2D simulation. The sensor was applied to an automotive bumper mold with cavity pressure sensors. It showed sensitive output signal for the mold response by the cavity pressure change. It was confirmed that the flashing at the gate area occurred in the filling stage by the pressure increase due to growth of the melt flow length. The sensor output was correlated with the cavity pressure sensor output.

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2002년도 춘계학술대회논문집
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• pp.13-22
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• 2002

This paper presents characteristics of CrOx thin-film Strain gauge pressure sensors, which were deposited on SUS630 diaphragm by DC reactive magnetron sputtering in an argon-Oxide atmosphere(Ar-(10%)$O_2$). The optimized condition of CrOx thin-film strain gauges were thicknessrange of 2500$\AA$ and annealing condition ($350^{\circ}C$, 3 hr) in Ar-10 %$O_2$deposition atmosphere. Under optimum conditions, the CrOx thin-films for strain gauge is obtained a high resistivity, $\rho$=156.7$\mu$$\Omega$cm, a low temperature coefficiect of resistance, TCR=-86 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal, 15. The output sensitivity of pressure sensor obtained is 2.46㎷/V and the maximum non-linearity is 0.3%FS and hysteresis is less than 0.2%FS. The output characteristics of pressure transmitter obtained is 4~20㎃ and total accuracy is less than $\pm$0.5%FS. In those conclusions, CrOx thin film pressure sensors is quite satisfactory for many applications in industrial electronics.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.409-410
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• 2002

In order to measure the oil-film pressure in sliding surface of machinery, we have developed a piezo-resistive type thin-film pressure sensor. To reduce the measurement error due to temperature and strain, the constituent of the pressure sensitive alloy was optimized and a new sensor shape was devised. In this study, we present the measurement results of the oil-film pressure distribution in engine connecting rod big-end bearing and piston pin- bosses with 3 different pin-boss shapes using the newly developed thin-film pressure sensor.

• 센서학회지
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• 제10권6호
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• pp.304-309
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• 2001

콘크리트 구조물의 내부 변형률을 측정할 수 있는 광섬유 간섭계 센서가 개발되어졌다. 광섬유 간섭계 센서는 11 mm 길이의 광섬유 Fabry-Perot 간섭계를 2 mm 지름의 스텐레스 강관 내부에 접착제로 고정하여 만들었다. 제작된 변형률 센서들은 $100{\times}100{\times}500\;mm^3$ 크기의 콘크리트 구조물 내부에 삽입되어 외부에서 구조물에 압력을 인가했을 때 구조물 내부의 변형률을 측정하였다. 센서들의 출력은 변형률 변화에 따라 선형적으로 변화하였다. 이를 바탕으로 실제 교량에 적용하여 변형률 센서의 광출력 특성을 살펴본 결과 우수한 변형 감지 특성을 보였으며, 실제 구조물에서 원거리측정에 이용도 가능하였다.