• Journal of Sensor Science and Technology
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• v.22 no.3
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• pp.227-232
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• 2013

In this research, fiber-optic pressure sensors were fabricated with rugate-structured porous silicon (RPS) diaphragms coated with PMMA (Polymethyl-Methacrylate). The reflectance spectrum of the PMMA/RPS diaphragm was almost the same as that of uncoated RPS diaphragm. However the mechanical strength of the PMMA/RPS diaphragm increased more than that of the uncoated diaphragm. As a result, the fiber-optic sensor fabricated with PMMA/RPS diaphragm could successfully detect more high pressure difference without diaphragm damage than the highest detectable pressure difference of the sensor with normal RPS diaphragm. The response data of the fiber-optic sensor recorded as a function of pressure difference were fitted by theoretical curves. During this process, elastic moduli of the used PMMA/RPS diaphragms were obtained numerically. The dynamic response properties of the fiber-optic sensor were also investigated under continuous variation of the pressure difference conditions.

• Journal of Sensor Science and Technology
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• v.26 no.2
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• pp.141-147
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• 2017

A pressure sensor in pulse measurement system is a core component for precisely measuring the pulse waveform of radial artery. A pulse sensor signal that measures the pulse wave in contact with the skin is affected by the temperature difference between the ambient temperature and skin surface. In this study, we found experimentally that the signal changes of the pressure sensors and a temperature sensor were caused by the temperature of the wrist surface while the pressure sensor was contacted on the skin surface for measuring pulse wave. To observe the signal change of the pulse sensor caused by temperature increase on sensor surface, Peltier device that can be kept at a set temperature was used. As the temperature of Peltier device was kept at $35^{\circ}C$ (the maximum wrist temperature), the device was put on the pulse sensor surface. The temperature and pressure signals were obtained simultaneously from a temperature sensor and six pressure sensors embedded in the pulse sensor. As a result of signal analysis, the sensor pressure was decreased during temperature increase of pulse sensor surface. In addition, the signal difference ratio of pressure and temperature sensors with respect to thickness of cover layer in pulse sensor was increased exponentially. Therefore, the signal of pressure sensor was modified by the compensation equation derived by the temperature sensor signal. We suggested that the thickness of cover layer in pulse sensor should be designed considering the skin surface temperature.

• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.1067-1070
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• 1999

Anesthesia gas to pour to patients affects the flow and volume as the pressure difference of an oxygen and an anesthesia gas. An anesthesia gas, being injurious and polluting an environment, must control the pressure of an oxygen gas because of being used by closing up tight. But a pressure sensor to use for measuring an oxygen gas appears other pressure as the characteristic and the error difference of elements to use for implementing an system. A medical machine such as an anesthesia ventilator must be accurate because of using for the person's body. So we intend to implement an system for a sensor pressure measurement not to be change regardless of an environment. This papers is the target that a sensor pressrue measurement to be changed in environment is equal to actual sensor pressure measurement. So an implemented system is using analog filter and digital filter to reduce a noise. And we are using auto-zeroing and calibration to correct a sensor pressure which is changed in environment. Through such a process we increase the accuracy and the confidence of an anesthesia ventilator by controlling the flow of an anesthesia gas.

• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.1-5
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• 2008

In this paper, we fabricated pressure difference type gas flow sensor using only dry etching technology by ICP-RIE(inductive coupled plasma reactive ion etching). The sensor's structure consists of a common shear stress type piezoresistive pressure sensor with an orifice fabricated in the middle of the sensor diaphragm. Generally, structure like diaphragm is fabricated by wet etching technology using TMAH, but we fabricated diaphragm by only dry etching using ICP-RIE. To equalize the thickness of diaphragm we applied insulator($SiO_2$) layer of SOI(Si/$SiO_2$/Si-sub) wafer as delay layer of dry etching. Size of fabricated diaphragm is $1000{\times}1000{\times}7\;{\mu}m^3$ and overall chip $3000{\times}3000{\times}7\;{\mu}m^3$. We measured the variation of output voltage toward the change of gas pressure to analyze characteristics of the fabricated sensor. Sensitivity of fabricated sensor was relatively high as about 1.5mV/V kPa at 1kPa full-scale. Nonlinearity was below 0.5%F.S. Over-pressure range of the fabricated sensor is 100kPa or more.

• Journal of Sensor Science and Technology
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• v.26 no.3
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• pp.186-191
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• 2017

In this study, we investigated the simultaneous detection properties of organic vapor, pressure difference, and magnetic field using a single rugate-structured free-standing porous silicon (RFPS) thin film. Both the wavelength and the intensity of the rugate peaks were changed in the reflectivity spectrum measured at the thin film surface while the organic vapor was exposed to the RFPS thin film. However, when the pressure difference and the magnetic field were exposed to the film, only the rugate peak intensity was changed. Therefore, it is possible to distinguish whether or not the organic vapor is detected by simultaneously changing the rugate peak wavelength and intensity. In addition, a method of distinguishing between the pressure difference and the magnetic field detection signal has been derived by rapidly modulating the direction of the magnetic field. This study shows that it is possible to simultaneously detect and distinguish various objects using a single RFPS thin film, and it is found that porous silicon can be utilized as a sensor sufficiently.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.3
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• pp.573-577
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• 2009

Piezoresistive pressure sensor have become the successfully-commercialized MEMS product and the related technologies have been well developed over the past decades. Regarding the design methodology, however, the coupled-physics FEM analyses of the transducer itself and the signal-processing circuitry design based on the conventional EDA are separated and both of the analyses were sequentially processed for the full design of the pressure sensor. For the fast and effective R&D, new design methodology is proposed in this paper where the FEM results are linked to the EDA environment and therefore most of the design works can be done in the EDA environments, which means the time-consuming FEM analyses can be minimized. In order to verify the proposed approach, a typical piezoresistive pressure sensor having the silicon diaphragm and piezoresistors was modeled and analyzed based on the proposed methodology. The verification results showed that the simulated results were matched well with the measured data within the 7% difference while the simulation time was reduced less than 5% compared to the conventional methodology. Through the proposed approach, various types of the piezoresistive pressure sensors can be developed in more effective way.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1055-1060
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• 2009

Noise is one of the major environmental problems in human life. But hot water distributers with the flow rate control valve bring about often noise according to the heating control condition in residential buildings. The sound power level increased as the flow rate and pressure difference increased. And thus, experimental analyses for the flow rate control and the pressure difference control were carried out in this study to reduce the noise emitted from the flow rate control valve. As the results, the flow rate control method using a SMA(Shape Memory Alloy)-valve and the flow rate control system using a pressure difference sensor can be expected to control noise in the region of below 50 dB of sound power level.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.5
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• pp.63-68
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• 1998

The absolute pressure sensor using SDB wafer has been fabricated. the structure of the sensor consists of two wheatstone bridges and a diaphragm. One of the two wheatstone bridges is located on the edge of diaphragm, and the other is located on the center of diaphragm. The diaphragm cavity is sealted in vacuum (~10$^{5}$ Torr) to reduce the effect of temperature due to the vapor in the cavity on the sensitivity of pressure sensor. This is the minor method of temperature compensation method. In this experiment the main compensation method is to use the difference of the two bridge offset voltages. The drift of offset voltage with temperature is reduced by using this method so that temperature charcteristics is improved. In this method the temperature effect in the range of 22~100.deg. C was compensated over 80%.

• Journal of Fisheries and Marine Sciences Education
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• v.28 no.4
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• pp.893-902
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• 2016

The purpose of this study is to investigate the effect of wearing a weightlifting belt, which is an auxiliary equipment used during squat, by measuring and analyzing biomechanical difference in lower limb and proposing safer and to suggest a more effective exercise method for general population. Selected 8 male participants in their 20s who have not performed regular resistance exercise for at least a year, but have experience of performing squat. The comprehensive method of study is as follows: subjects were notified of the purpose of the study and were told to practice warm-up and the squat motion for the experiment for 20 minutes. When the participant believed they were ready to begin, the experiment was started. At controlled points, foot pressure distribution sensor has been installed. Then left and right feet have been placed on the pressure distribution sensor, from which data for successful squat position that does not satisfy the criteria for failure have been collected and computed with Kwon3D XP program and TPScan program. For data processing of this study, SPSS 21.0 was used to calculated mean (M) and standard deviation (SD) of the analyzed values, and paired t-test has been conducted to investigate the difference before and after wearing the weightlifting belt, with p-value of ${\alpha}<.05$. As for time consumed depending on usage of weightlifting belt in squat, statistically significant difference has been found in P2, which is recovery movement. Lower limb angle depending on usage of weightlifting belt in squat has shown statistically significant difference in E1 foot joint(p<. 001). There has been statistically significant difference in E2 knee joint. Foot pressure percentage depending on usage of weightlifting belt in squat were found to be statistically significant (p<. 01) in both regions of anterior and posterior foot.

• Journal of Sasang Constitutional Medicine
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• v.18 no.1
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• pp.118-131
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• 2006

1. Objective Pulse diagnosis is generally applied to Traditional Oriental Medicine but not to Sasang Constitution diagnosis. Recently new pulse analyzer using array piezoresistive sensor and multi-channel robot arm developed. It reflects Oriental Medical Doctors' diagnostic processes, and its reproducibility test was done at Korea Institute of Oriental Medicine. We performed this study to set parameters diagnosing Sasang Constitution. 2. Methods One hundred thirty three subjects participated in this study. They are healty and approved this study. Before being tested with pulse analyzer, they had interview with Sasang Constitution Specialist to diagnose their Sasang Constitution. We established some useful parameters from parameters of pulse analyzer according to the Original Texts of Oriental Medicine and clinical experiences to analyze with clinical data of this study. 3. Results (I) There is a significant difference in pre-dicrotic notch time among all parameters of pulse analyzer in Sasang Constitution groups(P=0.047). (2) There is a significant difference in maximum pulse pressure in 33 to 48 year Sasang Constitution groups(P=0.010). (3) There is a significant difference in frequency width in 17 to 32 year Sasang Constitution groups(P=0.002). (4) There is a significant difference in CFS value in groups which OMD diagnoses; Floating & Sinking pulse(P=0.020). (5) There is a significant difference in pulse rate in groups which OMD diagnoses; Rapid & Slow pulse(P=0.000). (6) There is a significant difference in maximum pulse pressure in groups which OMD diagnoses; Deficient & Solid pulse(P=0.000). 4. Conclusions Analyzing parameters in each Sasang Constitution group, we found it shows significant difference in maximum pulse pressure and corresponding tendency in coefficient of floating & sinking pulse with theories of Sasang Consti-tutional Medicine. As we accumulate more clinical data, we will establish algorithm to diagnose Sasang Constitution using a pulse analyzer.