• 반도체디스플레이기술학회지
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• 제7권3호
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• pp.29-34
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• 2008

This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

• International journal of advanced smart convergence
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• 제10권1호
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• pp.151-158
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• 2021

The main cause of ulcer is pressure, which starts to develop when the critical body pressure (32mmHg) is exceeded, and when the critical time elapses, ulcer occurs. In this study, the keyboard mechanism of the medical bed with 4 bar links was adopted, and each key can be controlled vertically. A key has one servo drive and one sensor controller which hasseveral body pressure sensors. The sensor controllers and the servo drives are connected to the main controller by two CAN (Car Are Network) in series, respectively. By reading the maximum body pressure value of each keyboard sensor, and by calculating the error value based on the critical body pressure, the fuzzy controller moves each key so that the total error becomes zero. If the fuzzy controller fails, then it prevents ulcer by lifting and lowering the keys of the bed alternatively within a short time. Thus, the controller operates in two-stage. The validity and effectiveness of the proposed approach have been verified through experiments.

• 한국산업융합학회 논문집
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• 제20권3호
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• pp.233-243
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• 2017

This paper proposes a structure of direct-printed flexible tactile-sensor. These flexible tactile sensors are based on pressure-sensing materials that allow pressure to be measured according to resistance change that in turn results from changes in material size because of compressive force. The sensing material consists of a mixture of multi walled carbon nanotubes (MWCNTs) and TangoPlus, which gives it flexibility and elasticity. The tactile sensors used in this study were designed in the form of array structures composed of many lines so that single pressure points can be measured. To evaluate the performance of the flexible tactile sensor, we used specially designed signal-processing electronics and tactile sensors to experimentally verify the sensors' linearity. To test object grasp, tactile sensors were attached to the surface of the fingers of grippers with three degrees of freedom to measure the pressure changes that occur during object grasp. The results of these experiments indicate that the flexible tactile sensor-based robotic gripper can grasp objects and hold them in a stable manner.

• 제어로봇시스템학회논문지
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• 제15권3호
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• pp.273-279
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• 2009

In this paper, we address the problem of detecting incorrect sonar measurements. We use ideas from the inconsistency of information among sonar measurements together with the sound pressure of the wave from the sonar sensor to develop a new method, called the comparison of the sound pressure (CSP), to detect incorrect sonar readings. The inconsistency of information in cells can be a clue that indicates candidates for incorrect measurements, and the sound pressure of the wave from the sonar sensor determines incorrect readings among the candidates. From various experiments, the proposed method is confirmed that it is better than existing method at deciding the state of sonar measurements.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.561-566
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• 2000

A screw driver is essentially used in assembling machine parts and electronic products such as the printed circuit board with a housing. As the parts to be assembled becomes small and precise, the higher precision of the controling screw driver torque is required. However, because the operator controls the fastening torque by his experience, it must be inexact. Thus the screw driver which can exactly control the fastening torque by a bellows is designed and developed in the study. The bellows is expanded by the inner air pressure and contracted and by the spring operation. The bellows driver is composed of the entrance solenoid valve, the exit solenoid valve and the pressure sensor. The pressure sensor senses the bellows pressure. When the pressure sensor output reaches the setting value, it operates the exit solenoid valve not to deliver further torque by letting the air of the bellows out. Through a series of experiments, the performance is studied and verified.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1999년도 추계종합학술대회 논문집
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• pp.1067-1070
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• 1999

Anesthesia gas to pour to patients affects the flow and volume as the pressure difference of an oxygen and an anesthesia gas. An anesthesia gas, being injurious and polluting an environment, must control the pressure of an oxygen gas because of being used by closing up tight. But a pressure sensor to use for measuring an oxygen gas appears other pressure as the characteristic and the error difference of elements to use for implementing an system. A medical machine such as an anesthesia ventilator must be accurate because of using for the person's body. So we intend to implement an system for a sensor pressure measurement not to be change regardless of an environment. This papers is the target that a sensor pressrue measurement to be changed in environment is equal to actual sensor pressure measurement. So an implemented system is using analog filter and digital filter to reduce a noise. And we are using auto-zeroing and calibration to correct a sensor pressure which is changed in environment. Through such a process we increase the accuracy and the confidence of an anesthesia ventilator by controlling the flow of an anesthesia gas.

• 드라이브 ㆍ 컨트롤
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• 제9권4호
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• pp.32-41
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• 2012

Most diagnosis methods for servo valves requires installing spool displacement sensor or flow sensor as well as pressure sensor. The measurement of flow is hard to implement and many kinds of servovalves or proportional direction valves do not have a built-in spool displacement sensor. In this study, static performances of servovalve or proportional-direction-valve are studied theoretically and a diagnosis technique, which uses only load pressure and input current signal, is assessed. An experimental setup was made based upon a personal computer and the LabVIEW graphical language. A series of diagnosis tests were performed and the analysis results showed it possible to measure the pressure gain, hysteresis and null bias in a relatively simple methodology.

• 제어로봇시스템학회논문지
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• 제5권8호
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• pp.941-947
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• 1999

As pressure transducers are employed in many fields such as production facilities, test facilities vehicles and industrial machinery, there is an increasing need for high precision measurement of pressure without any calibration or maintenance. In this paper, we discuss the development of a smart thin film pressure transducer which is highly suitable for a precise measurement of pressure. The smart functions include automatic zero tracking, automatic span adjustment, temperature compenstion, continuous self-diagnostics for faults (open strain gages, abnormal data, incorrect A/D conversion, and overpressure), data memory and multi-drop communication with PC

• 센서학회지
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• 제31권3호
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• pp.145-150
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• 2022

The importance of flexible polymer-based pressure sensors is growing in fields like healthcare monitoring, tactile recognition, gesture recognition, human-machine interface, and robot skin. In particular, health monitoring and tactile devices require high sensor sensitivity. Researchers have worked on sensor material and structure to achieve high sensitivity. A simple and effective method has been to employ three-dimensional pressure sensors. Three-dimensional (3D) structures dramatically increase sensor sensitivity by achieving larger local deformations for the same pressure. In this paper, the performance, manufacturing method, material, and structure of high-sensitivity flexible pressure sensors based on 3D structures, are reviewed.

• 제어로봇시스템학회논문지
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• 제10권11호
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• pp.1022-1027
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• 2004

In this paper, an embedded foot pressure measurement system is proposed to measure foot pressure based on the embedded Linux system. To measure foot pressure data and to evaluate foot pressure distribution for the different insoles, FSR sensor, A/D converter, iPAQ PDA, and a time division measurement method are employed in the system. Utilizing this system, the foot pressure analysis has been performed for the different four shoes. The number of foot pressure/voltage conversion circuits are drastically decreased by the proposed time division measurement method from 406 to 14. The experimental results for the sandal, slipper, oxford shoes and sneakers demonstrate that the proposed system successfully performs the foot pressure measurement.