Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Flexible Pressure Sensors Based on Three-dimensional Structure for High Sensitivity

  • Jung, Young (Department of Mechanical Engineering Korean Advanced Institute of Science and Technology (KAIST)) ;
  • Cho, Hanchul (Precision Mechanical Process and Control R&D Group Korea Institute of Industrial Technology (KITECH))
  • Received : 2022.04.29
  • Accepted : 2022.05.27
  • Published : 2022.05.31
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Abstract

The importance of flexible polymer-based pressure sensors is growing in fields like healthcare monitoring, tactile recognition, gesture recognition, human-machine interface, and robot skin. In particular, health monitoring and tactile devices require high sensor sensitivity. Researchers have worked on sensor material and structure to achieve high sensitivity. A simple and effective method has been to employ three-dimensional pressure sensors. Three-dimensional (3D) structures dramatically increase sensor sensitivity by achieving larger local deformations for the same pressure. In this paper, the performance, manufacturing method, material, and structure of high-sensitivity flexible pressure sensors based on 3D structures, are reviewed.

Keywords

Acknowledgement

This research was supported by the National Research Foundation of Korea (NRF) funded by the Ministry of Education (Nos. 2019R1C1C1010730, 2021R1I1A1A01051208).

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