• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.3
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• pp.294-300
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• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• Journal of Powder Materials
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• v.25 no.2
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• pp.120-125
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• 2018

Boron nitride nanotubes (BNNTs) are receiving great attention because of their unusual material properties, such as high thermal conductivity, mechanical strength, and electrical resistance. However, high-throughput and high-efficiency synthesis of BNNTs has been hindered due to the high boiling point of boron (${\sim}4000^{\circ}C$) and weak interaction between boron and nitrogen. Although, hydrogen-catalyzed plasma synthesis has shown potential for scalable synthesis of BNNTs, the direct use of $H_2$ gas as a precursor material is not strongly recommended, as it is extremely flammable. In the present study, BNNTs have been synthesized using radio-frequency inductively coupled thermal plasma (RF-ITP) catalyzed by solid-state ammonium chloride ($NH_4Cl$), a safe catalyst materials for BNNT synthesis. Similar to BNNTs synthesized from h-BN (hexagonal boron nitride) + $H_2$, successful fabrication of BNNTs synthesized from $h-BN+NH_4Cl$ is confirmed by their sheet-like properties, FE-SEM images, and XRD analysis. In addition, improved dispersion properties in aqueous solution are found in BNNTs synthesized from $h-BN+NH_4Cl$.

• Korean Journal of Materials Research
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• v.12 no.8
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• pp.595-599
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• 2002

A homogeneous and stable, amorphous-type, anorthite (CaO $Al_2$$O_3$ $2SiO_2$)powder was synthesized by an organic-inorganic steric entrapment route. Polyvinyl alcohol ( PVA) was used as an organic carrier for the precursor ceramic gel. The PVA content, its degree of polymerization and type of silica sol had a significant influence on the calcination and crystallization behavior of the precursors. For densifiction and crystallization at low temperature, porous and soft, amorphous-type anorthite powder was planetary milled for 20h. The milled powder crystallized to stable anorthite phase and densified to a relative density of 94% below $1000^{\circ}C$. In the development of crystalline phases of the planetary milled powder, omisteinbergite phase was unusually observed at $900^{\circ}C$, and then anorthite was observed at $950^{\circ}C$. The sintered anorthite had a thermal expansion coefficient of $4.6$\times$10^{-6}$ /$^{\circ}C$ and a dielectric constant of 7.5 at 1 MHz. Finally, the anorthite synthesized by the new process is expected to be an useful material for low-firing ceramic substrate.

• Journal of Powder Materials
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• v.23 no.4
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• pp.307-310
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• 2016

$TiOF_2$, which has remarkable electrochemical and optical properties, is used in various applications such as Li-ion batteries, electrochemical displays, and photocatalysts. In addition, it is possible to utilize the template which is allowed to synthesize fluorine doped $TiO_2$ powders with hollow or faceted structures. However, common synthesis methods of $TiOF_2$ powders have some disadvantages such as the use of expensive and harmful precursors and batchtype processes with a limited production scale. In this study, we report a synthetic route for preparing $TiOF_2$ powders by using an inexpensive and harmless precursor and a continuous ultrasonic spray pyrolysis process under a controlled atmosphere to address the aforementioned problems. The synthesized powder has an average size of $1{\mu}m$, a spherical shape, a pure $TiOF_2$ phase, and exhibits a band-gap energy of 3.2 eV.

• Journal of the Korean Ceramic Society
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• v.33 no.9
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• pp.1003-1011
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• 1996

Hydroxyapatite powder was synthesized by a citrate method, . Char-like precursor composed of Ca8(HPO4)2(PO4)4.5H2O (OCP) and CaCo3 was found via viscous resin-like intermediate by heating the mixed aqueous solution of Ca(NO3)2.4H2O(NH4)2HPO4 and citric acid. Resulted powder was transformed into hydroxyapatite phase by firing over 120$0^{\circ}C$-135$0^{\circ}C$ for 4 hr using the powder calcined at 90$0^{\circ}C$ for 10 hr composed of mostly single hydroxyapatite phase. The sintered densities increased with firing temperature up to 130$0^{\circ}C$ but the highest relative density was about 94% of theoritical value. indicating the presence of closed pores. The maximum 96 MPa of flexural strength was obtained at 120$0^{\circ}C$ firing but the flexural strength showed lower values over the above sintering condition. Vitro test was performed by immersing of two jointed specimens in SBF for seven days and adhesion was observed between two specimens.

• Bulletin of the Korean Chemical Society
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• v.33 no.4
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• pp.1141-1146
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• 2012

Ce-doped $Y_3Al_5O_{12}$ (YAG:Ce) phosphor powder was prepared using a ${NO_3}^-$-malonic acid-$NH_4NO_3-NH_3{\cdot}H_2O$ system. The YAG:Ce precursor was ignited at $240^{\circ}C$ and the resulting powder contained YAG:Ce crystallites (42%) - active in the visible region at 460 nm - amorphous particles (53%) - inactive at visible wavelengths - and less than 3% oxide (3%) crystallite impurities. The impurities transformed to acitive YAG:Ce crystallites at above $800^{\circ}C$. At above $1000^{\circ}C$, the amorphous phase became YAG phase and isolated $Ce_2O$ crystallites emerged. The powder particles comprised < $4{\mu}m$ secondary aggregates of 20 nm primary particles. The thermal dusting of the secondary particles coincided with the aggregation of the secondary particles at above $900^{\circ}C$.

• Korean Journal of Materials Research
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• v.23 no.2
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• pp.104-111
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• 2013

In this study, GaN powders were synthesized from gallium oxide-hydroxide (GaOOH) through an ammonification process in an $NH_3$ flow with the variation of $B_2O_3$ additives within a temperature range of $300-1050^{\circ}C$. The additive effect of $B_2O_3$ on the hexagonal phase GaN powder synthesis route was examined by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and Fourier transformation infrared transmission (FTIR) spectroscopy. With increasing the mol% of $B_2O_3$ additive in the GaOOH precursor powder, the transition temperature and the activation energy for GaN powder formation increased while the GaN synthesis limit-time ($t_c$) shortened. The XPS results showed that Boron compounds of $B_2O_3$ and BN coexisted in the synthesized GaN powders. From the FTIR spectra, we were able to confirm that the GaN powder consisted of an amorphous or cubic phase $B_2O_3$ due to bond formation between B and O and the amorphous phase BN due to B-N bonds. The GaN powder synthesized from GaOOH and $B_2O_3$ mixed powder by an ammonification route through ${\beta}-Ga_2O_3$ intermediate state. During the ammonification process, boron compounds of $B_2O_3$ and BN coated ${\beta}-Ga_2O_3$ and GaN particles limited further nitridation processes.

• Progress in Superconductivity
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• v.6 no.2
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• pp.118-123
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• 2005

A low cost YBCO oxide powder was employed as a starting precursor for MOD process. YBCO oxide is advantageous over metal acetates or TFA salts which are popular starting precursors for conventional MOD-TFA process because that YBCO oxide precursor is cheap and easy to control molar ratio. YBCO thin films were prepared by this oxide-precursor-based MOD process and annealing condition was optimized. The YBCO thin film annealed at below $780^{\circ}C$ shows no transport $I_c$ and poor microstructure. Raman spectroscopic study of YBCO thin film indicates that YBCO thin film prepared at below $780^{\circ}C$ contains a number of imperfections such as non-superconducting $BaCuO_2$ phase, cation disorder, etc. However, the YBCO thin film treated at above $800^{\circ}C$ shows improvement in microstructure and current transport properties. This research was supported by a grant from Center for Applied Superconductivity Technology of the 21st Century Frontier R&D Program funded by the Ministry of Science and Technology, Republic of Korea.

• Journal of Microbiology and Biotechnology
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• v.14 no.1
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• pp.97-104
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• 2004

Water-sludge bacteria were screened to find a lipase enantioselectively hydrolyzing itraconazole precursor, which is well known as the starting material of antifungal drug agents. A bacterial strain was isolated and identified as Acinetobacter junii SY-01. After the strain was cultivated, the enzyme was purified 39.4-fold using ultrafiltration and gel filtration through a Sephadex G-100 chromatographic column and the activity yield was 34.9%. The molecular weight of the enzyme was about 40 kDa, as measured by SDS-PAGE, and the optimum pH was 7.0- 9.0 and stable at pH 6.0- 9.0. The optimum temperature was 45- $5^{\circ}C$, and 73% of the enzymes activity remained after incubation at 70% for 1 h. Enzyme activity was enhanced by gall powder, sodium deoxycholate, a cationic detergent Tween 80, and a non-ionic detergent Triton X-100, but was markedly inhibited by metal ions such as $Hg^{2＋},Cu^{2＋},Ni^{2＋}/,Ca^{2＋}$, and an anionic-surfactant sodium dodecylsulfate. The $K_{m}$ values for (R)- and (S)-enantiomers of the itraconazole precursor were 0.385 and 21.83 mM, respectively, and the $V_{max} values ($\mu$Mㆍmin^{-1}.)$ were 6.73 and 6.49, respectively. The acetyl group among the different acyl moieties of itraconazole precursor showed the highest enantioselectivity for the hydrolysis by the Acinetobacter junii SY-01 lipase, and the lipase from Acinetobacter junii SY-01 displayed better enantioselectivity than that of commercially available lipases and esterases.

• Journal of the Korean Ceramic Society
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• v.50 no.6
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• pp.402-409
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• 2013

The objective of this study was to develop a synthesis process for ${\beta}$-SiC powders to reduce the synthesis temperature and to control the particle size and to prevent particle agglomeration of the synthesized ${\beta}$-SiC powders. A phenol resin and TEOS were used as the starting materials for the carbon and Si sources, respectively. $SiO_2$-C hybrid precursors with various C/Si mole ratios were fabricated using a conventional sol-gel process. ${\beta}$-SiC powders were synthesized by a carbothermal reduction process using $SiO_2$-C hybrid precursors with various C/Si mole ratios (1.6 ~ 2.5) fabricated using a sol-gel process. In this study, the effects of excess carbon and the addition of Si powders to the $SiO_2$-C hybrid precursor on the synthesis temperature and particle size of ${\beta}$-SiC were examined. It was found that the addition of metallic Si powders to the $SiO_2$/C hybrid precursor with excess carbon reduced the synthesis temperature of the ${\beta}$-SiC powders to as low as $1300^{\circ}C$. The synthesis temperature for ${\beta}$-SiC appeared to be reduced with an increase of the C/Si mole ratio in the $SiO_2$-C hybrid precursor by a direct carburization reaction between Si and excess carbon.