Progress in Superconductivity
- Volume 6 Issue 2
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- Pages.118-123
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- 2005
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- 1229-4764(pISSN)
Optimization of annealing conditions in oxide-precursor-based MOD process for YBCO thin films
산화물 전구체를 이용한 YBCO 박막제조에서 열처리조건의 최적화
- Heo S. Y. (Korea Institute of Machinery and Materials) ;
- Kim Y. K. (Korea Institute of Machinery and Materials) ;
- Yoo J. M. (Korea Institute of Machinery and Materials) ;
- Ko J. W. (Korea Institute of Machinery and Materials) ;
- Hong G. W. (Korea Polytechnic University) ;
- Lee H. G. (Korea Polytechnic University) ;
- Yoo S. I. (Seoul National University)
- Published : 2005.04.01
Abstract
A low cost YBCO oxide powder was employed as a starting precursor for MOD process. YBCO oxide is advantageous over metal acetates or TFA salts which are popular starting precursors for conventional MOD-TFA process because that YBCO oxide precursor is cheap and easy to control molar ratio. YBCO thin films were prepared by this oxide-precursor-based MOD process and annealing condition was optimized. The YBCO thin film annealed at below