• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.121-128
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• 2005

The research on electromagnetic shielding has been advanced for military applications as well as for commercial products. Utilizing the reflective properties and absorptive properties of shielding material, the replied signal measured at the rear surface or at the signal source can be minimized. The shielding effect was obtained from materials having special absorptive properties and structural characteristics such as stacking sequence. Recently researchers studied the electromagnetic properties of nano size particles. In this research {glass fiber}/{epoxy}/{nano particle} composites(GFR-Nano composites) was fabricated using various nano particles, and their properties in electromagnetic shielding were compared. For the visual observation of the nano composite materials, SEM(Scanning Electron Microscope) and TEM(Transmission Electron Microscope) were used. For the measurement of electromagnetic shielding, HP8719ES S-parameter Vector Network Analyser System was used on the frequency range of 8 GHz${\~}$12GHz. Among the nano particles, carbon black and Multi-Walled Carbon Nano-Tube (MWCNT) revealed outstanding electromagnetic shielding. Although silver nano particles (flake and powder) were expected to have effective electromagnetic shielding due to their excellent electric conductivities, test results showed little shielding characteristics.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2009.05a
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• pp.615-618
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• 2009

2 axis Pan-tilt had been developed and utilize by vessel for the purpose of motion characteristic measurement. Besides, it also use to analysis structural design and fabrication. Test procedure had been created to produce most optimal design and to show the Nano Driving precision result performance.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.507-508
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• 2009

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.4
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• pp.3-7
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• 2006

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.130-136
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• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.186-194
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• 2005

This study was designed to investigate the mechanical properties of the coating layer on electronic galvanized sheet steel as a part of the ongoing research on the coated steel. Those properties were determined using nano-indentation, the finite element method, and artificial neural networks. First and foremost, the load-displacement curve (the loading-unloading curve) of coatings was derived from a nano-indentation test by CSM (continuous stiffness measurement) and was used to measure the elastic modulus and hardness of the coating layer. The properties derived were applied in FE simulations of a nano-indentation test, and the analytical results were compared with the experimental result. A numerical model for FE simulations was established for the coating layer and the substrate separately. Finally, to determine the mechanical properties of the coating, such as the stress-strain curve, functional equations of loading and unloading curves were introduced and computed using the neural networks method. The results show errors within $5\%$ in comparison with the load-displacement measured by a nano-indentation test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.492-497
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• 2005

In this study, we propose an advanced nanoindentaion test, Nano Pillar Compression Test (NPCT) to measure a stress-strain relation for micro scale polymer structures. Firstly, FEM analysis is performed to research behavior of micro polymer pillars in several specimen aspect ratios and different friction conditions between specimen and tip. Based on the FEM results, micro scale UV-curable polymer pillars are fabricated on a substrate by Nano Stereo Lithography (NSL). To measure their mechanical properties, uniaxial compression test is performed using nanoindentation apparatus with flat-ended diamond tip. In addition, the dependency of compression properties on loading condition and specimen size are discussed.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.283-288
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• 2004

The measurement of ultra low aspect ratio fluid film thickness is very crucial technique both for the verification of lubrication media characteristics and for the clearance design in many precision components such as MEMS, precision bearings and other slideways. Many technologies are applied to the measurement of ultra low aspect ratio fluid film thickness (i.e. elastohydrodynamic lubrication film thickness). In particular, in-situ optical interferometric method has many advantages in making the actual contact behaviors realized with the experimental apparatus. This measurement method also does the monitoring of the surface defects and fractures happening during the contact behavior, which are delicately influenced by the surface conditions such as load, velocity, lubricant media as well as surface roughness. Careful selection of incident lights greatly enhances the fringe resolutions up to $\~1.0$ nanometer scale with digital image processing technology. In this work, it is found that coaxial aligning trichromatic incident light filtering system developed by the author can provide much finer resolution of ultra low aspect ratio fluid film thickness than monochromatic or dichromatic incident lights, because it has much more spectrums of color components to be discriminated according the variations of film thickness. For the measured interferometric images of ultra low aspect ratio fluid film thickness it is shown how the film thickness is finely digitalized and measured in nanometer scale with digital image processing technology and space layer method. The developed measurement system can make it possible to visualize the contact deformations and possible fractures of contacting surface under the repeated loading condition.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.